Half-thickness inversion layer high-frequency ultrasonic transducers using LiNbO3 single crystal.

Half-thickness inversion layer high-frequency ultrasonic transducers were fabricated using lithium niobate (LiNbO3) single crystal plate. The transducers developed for this study used a 36 degrees rotated Y-cut LiNbO3 thin plate with an active element thickness of 115 microm. The designed center frequency was in the range of 30 to 60 MHz. Half-thickness inversion layer was formed after the sample was annealed at a high temperature, and it is shown that the inversion layer thickness can be controlled by the temperature. Silver powder/epoxy composite and parylene were used as acoustic matching layers. A lossy silver epoxy was used as the backing material. Using an analytical method, the electrical impedance for different inversion layer ratios was determined. The measured resonant frequency was consistent with the modeled data. Even-order higher frequency broadband ultrasonic transducers with a center frequency at 60 MHz was obtained using half-thickness inversion layer of LiNbO3 single crystal.     

Half-thickness inversion layer high-frequency ultrasonic transducers using LiNbO/sub 3/ single crystal

Half-thickness inversion layer high-frequency ultrasonic transducers were fabricated using lithium niobate (LiNbO₃) single crystal plate. The transducers developed for this study used a 36deg rotated Y-cut LiNbO₃ thin plate with an active element thickness of 115 mum. The designed center frequency was in the range of 30 to 60 MHz. Half-thickness inversion layer was formed after the sample was annealed at a high temperature, and it is shown that the inversion layer thickness can be controlled by the temperature. Silver powder/epoxy composite and parylene were used as acoustic matching layers. A lossy silver epoxy was used as the backing material. Using an analytical method, the electrical impedance for different inversion layer ratios was determined. The measured resonant frequency was consistent with the modeled data. Even-order higher frequency broadband ultrasonic transducers with a center frequency at 60 MHz were obtained using half-thickness inversion layer of LiNbO₃ single crystal     

Design and fabrication of PZN-7%PT single crystal high frequency angled needle ultrasound transducers

A high-frequency angled needle ultrasound transducer with an aperture size of 0.4 x 0.56 mm2 was fabricated using a lead zinc niobate-lead titanate (PZN- 7%PT) single crystal as the active piezoelectric material. The single crystal was bonded to a conductive silver particle matching layer and a conductive epoxy backing material through direct contact curing. A parylene outer matching layer was formed by vapor deposition. Angled needle probe configuration was achieved by dicing at 45 degrees to the single crystal poling direction to satisfy a clinical request for blood flow measurement in the posterior portion of the eye. The electrical impedance magnitude and phase of the transducer were 42 Omega and -63 degrees , respectively. The measured center frequency and the fractional bandwidth at -6 dB were 43 MHz and 45%, respectively. The two-way insertion loss was approximately 17 dB. Wire phantom imaging using fabricated PZN-7%PT single crystal transducers was obtained and spatial resolutions were assessed.     

Single crystal PMN-PT/epoxy 1-3 composite for energy-harvesting application

One key parameter in using electroactive materials to harvest electric energy from mechanical sources is the energy conversion efficiency. Recently, it was shown that, in the relaxor ferroelectric PMN-PT single crystals, a very high longitudinal electromechanical coupling factor (>90%) can be obtained. This paper investigates energy harvesting using 1-3 composites of PMN-PT single crystals in a soft epoxy matrix. It is shown that 1-3 composites enable the single crystals operating in the longitudinal mode to achieve high efficiency for energy harvesting, and the soft-polymer, matrix-supported single-crystal rods maintain high mechanical integrity under different external loads. For comparison, 1-3 composites with piezoceramic PZT also are investigated in energy-harvesting applications, and the results show that the high coupling factor of single crystal PMN-PT 1-3 composites leads to much higher electric energy output for similar mechanical energy input. The harvested energy density of 1-3 composite with single crystal (22.1 mW/cm3 under a stress of 40.4 MPa) is about twice of that harvested with PZT ceramic 1-3 composite (12 mW/cm3 under a stress of 39 MPa). At a higher stress level, the harvested-energy density of 1-3 PMN-PT single crystal composite can reach 96 mW/cm3.     

A multisource energy harvesting utilizing highly efficient ferroelectric PMN-PT single crystal

This paper demonstrates a multi-source energy harvester that is able to utilize simultaneously both piezoelectric and pyroelectric effects in lead magnesium niobate-lead titanate (PMN-PT) single crystal. The paper presents a study of PMN-PT single crystal with a (67:33) composition grown in our laboratory via a vertical gradient freeze method without any flux. The performance of the piezoelectric and pyroelectric energy harvester using unimorph device structure was evaluated via modeling and experiment. The theoretical study was implemented based on a distributed parameter electromechanical model and the modelling procedure was approximated using finite element analysis to predict the electromechanical behavior of the harvester. The maximum power density at a resonance frequency of 50 Hz and optimum resistance of 2 MΩ was 16.7 nW/(g² cm³) under a 1 g acceleration of vibration. The measured values of electrical output parameters were in good agreement with theoretical and modelling results using MATLAB and COMSOL Multiphysics, respectively. By using the pyroelectric effect along with the piezoelectric effect, the output voltage of the energy harvester was found to be enhanced at the optimum resistance and specific frequency values. It was noticed that the output voltage was increased monotonically with temperature-difference (ΔT) and reaches up to 180 % of its original value under temperature difference of 1.7 °C at a frequency value of 49 Hz.     

Development of a real-time, high-frequency ultrasound digital beamformer for high-frequency linear array transducers

A real-time digital beamformer for high-frequency (>20 MHz) linear ultrasonic arrays has been developed. The system can handle up to 64-element linear array transducers and excite 16 channels and receive simultaneously at 100 MHz sampling frequency with 8-bit precision. Radio frequency (RF) signals are digitized, delayed, and summed through a real-time digital beamformer, which is implemented using a field programmable gate array (FPGA). Using fractional delay filters, fine delays as small as 2 ns can be implemented. A frame rate of 30 frames per second is achieved. Wire phantom (20 microm tungsten) images were obtained and -6 dB axial and lateral widths were measured. The results showed that, using a 30 MHz, 48-element array with a pitch of 100 microm produced a -6 dB width of 68 microm in the axial and 370 microm in the lateral direction at 6.4 mm range. Images from an excised rabbit eye sample also were acquired, and fine anatomical structures, such as the cornea and lens, were resolved.     

PMN-PT单晶淬火处理对介电性能的影响

通过淬火处理可以使弛豫型PMN-PT单晶中一些应力集中的区域产生应力场致相变,在Td处产生宏畴,从而在温谱上Td处的介电峰强化.研究表明,经淬火处理单晶谐振极化所对应的低温介电行为受到压制,主介电峰变窄,峰值变高并稍向高温方向移动;频率弥散减弱,弛豫性变小.     

Materials and transducers for ultrasonic flowmeters

The construction and operation of a lead zirconate-titanate (TsTS-19) piezoelectric transducer as a component of the model UZR-V ultrasonic flowmeter with an Akustron counter is analyzed. Techniques are proposed for enhancing the operating efficiency of ultrasonic flowmeters. The study has resulted in the development of the UZD-1 and UZD-3 transducers, which utilize the new materials and have parameters superior to those of a standard transducer using TsTS-19 ceramic. The new transducers are recommended for systems designed to monitor cold and hot water flow in conduits from 30 mm to 1000 mm in diameter.Translated from Izmeritel'naya Tekhnika, No. 7, pp. 57–58, July, 1993.     

Self-focused ZnO transducers for ultrasonic biomicroscopy

A simple fabrication technique was developed to produce high frequency (100 MHz) self-focused single element transducers with sputtered zinc oxide (ZnO) crystal films. This technique requires the sputtering of a ZnO film directly onto a curved backing substrate. Transducers were fabricated by sputtering an 18 μm thick ZnO layer on 2 mm diameter aluminum rods with ends shaped and polished to produce a 2 mm focus or f-number equal to one. The aluminum rod served a dual purpose as the backing layer and positive electrode for the resultant transducers. A 4 μm Parylene matching layer was deposited on the transducers after housing and interconnect. This matching layer was used to protect the substrate and condition the transfer of acoustic energy between the ZnO film and the load medium. The pulse-echo response for a representative transducer was centered at 101 MHz with a -6 dB bandwidth of 49%. The measured two way insertion loss was 44 dB. A tungsten wire phantom and an adult zebrafish eye were imaged to show the capability of these transducers.     

New transducers for high-resolution ultrasonic testing

High resolution NDT requires ultrasonic transducers which can produce very short pulses with well-defined constant shape throughout the field. The theory, construction and applications of such transducers are discussed.     

Novel, wide bandwidth, micromachined ultrasonic transducers

Surface micromachined, capacitive ultrasonic transducers have been fabricated using a low thermal budget, CMOS-compatible process. This process allows inherent control of parameters such as membrane size and thickness, cavity size and the intrinsic stress in the membrane to be achieved. Devices fabricated using this process exhibit interesting properties for transduction in air at frequencies in excess of 1 MHz when driven from a standard ultrasonic voltage source. Experiments have been performed with devices containing silicon nitride membranes of variable thicknesses over a 2 μm thick air cavity and with device dimensions of up to 5 mm square. This is much larger than has been reported for a device with a single membrane. Calibration measurements using 1/8 inch microphones in air, and miniature PVDF hyrdophones in water, have been performed. The dependence on d.c. bias voltage is examined, involving static membrane deflection measurements and received peak voltages. Pulse-echo and pitch-catch mode operation have been achieved. Interferometric measurements of membrane displacement have been performed in air to illustrate the membrane deflection characteristics. Operation in liquids is also discussed     

Disposable PVDF ultrasonic transducers for nondestructive testingapplications

Disposable ultrasonic contact transducers have been constructed with inexpensive PVDF films for nondestructive testing (NDT) applications. This paper reports the temperature-dependent ultrasonic performance of commercial polyvinylidene fluoride (PVDF) films and PVDF sensors. PVDF film was evaluated for its material properties of interest for ultrasonic transducer performance including the relative dielectric constant ε_r, dielectric loss tangent tan δ_e , electromechanical coupling constant k_t, mechanical quality factor Q_m, and acoustic impedance Z. Disposable PVDF transducers were then coupled to both low and high acoustic impedance test panels and their ultrasonic insertion loss/sensitivity and frequency bandwidth measured as a function of temperature in both the pulse-echo and pitch-catch modes. The results yielded center frequencies in the 3.5-16 MHz range, with -6-dB fractional bandwidths for some of the transducers exceeding 100%. The temperature dependence of the transducers' performance is reported for the -40 to 80°C range and shows an approximate linear decrease in center frequency and increase in fractional bandwidth with increasing temperature. These measured results are compared with predictions from computer simulations based on Mason's model. These tests showed that the same disposable transducers can be used for both ultrasonic and acoustic emission sensing NDT applications. This paper summarizes the quantitative ultrasonic and vibration sensing performance for all of the disposable PVDF film transducers which were tested     

Broadband EMFi-based transducers for ultrasonic air applications

In this work, we explore the possibilities of electromechanical film (EMFi) as a new material for developing broadband transducers for ultrasonic air applications. The advantages of the EMFi film are its wide usable frequency range and easiness to use, making it highly suitable for self made, customizable ultrasonic sensors. This paper presents theoretical and experimental information focused on the needs of the sensor's end user, namely, frequency response, actual dynamic mass and Young's modulus, bandwidth, sensitivity, electromechanical dynamical model, acoustic response, and directivity. It is found empirically that the behavior of the film as an almost ideal piston-like acoustic source permits accurate prediction of the characteristics of transducers built on a developable surface. The results obtained represent the first step to more complex geometries, and, ultimately, to completely customizable field ultrasonic transducers.     

Lithium niobate transducers for MRI-guided ultrasonic microsurgery

Focused ultrasound surgery (FUS) is usually based on frequencies below 5 MHz-typically around 1 MHz. Although this allows good penetration into tissue, it limits the minimum lesion dimensions that can be achieved. In this study, we investigate devices to allow FUS at much higher frequencies, in principle, reducing the minimum lesion dimensions. Furthermore, FUS can produce deep-sub-millimeter demarcation between viable and necrosed tissue; high-frequency devices may allow this to be exploited in superficial applications which may include dermatology, ophthalmology, treatment of the vascular system, and treatment of early dysplasia in epithelial tissue. In this paper, we explain the methodology we have used to build high-frequency high-intensity transducers using Y-36°-cut lithium niobate. This material was chosen because its low losses give it the potential to allow very-high-frequency operation at harmonics of the fundamental operating frequency. A range of single-element transducers with center frequencies between 6.6 and 20.0 MHz were built and the transducers' efficiency and acoustic power output were measured. A focused 6.6-MHz transducer was built with multiple elements operating together and tested using an ultrasound phantom and MRI scans. It was shown to increase phantom temperature by 32°C in a localized area of 2.5 x 3.4 mm in the plane of the MRI scan. Ex vivo tests on poultry tissue were also performed and shown to create lesions of similar dimensions. This study, therefore, demonstrates that it is feasible to produce high-frequency transducers capable of high-resolution FUS using lithium niobate.     

Micromachined ultrasonic capacitance transducers for immersion applications

Investigations into the characteristics of water-coupled ultrasonic capacitance transducers have been undertaken for a range of transducer configurations. The radiated fields have been scanned in water using a miniature hydrophone detector, and the results compared to theory based on a plane piston approach. Micromachined backplates in conjunction with thin Mylar and mica membranes have been investigated, together with aperture modifications such as an annulus and Fresnel zone plate. The measured results agree well with theory, thus demonstrating that wideband predictable performance (>8 MHz) is obtainable with such transducers. Additionally, pulse-echo C-scans of a Plexiglas plate containing an artificial defect have been undertaken with the capacitance transducer, in order to demonstrate that the capacitance transducer has sufficient sensitivity to allow routine nondestructive testing within immersion applications.     

用于超声清洗复合振动换能器的研究

本文研究了一种由纵向振动夹心式压电超声换能器与弯曲圆盘组成的用于液体中超声处理的复合振动辐射器。推出了恢复合振动系统的共振频率设计方程，分析了各个振动模式的机电转换特性及其声波辐射特性，测量了振动系统的共振频率及其有效机电耦合系数。从实验及理论结果可以看出，振动系统的频率测试值与设计值基本符合。在一定的共振频率上，该振动系统具有最大的有效机电耦合系数，是一种很有前途的功率超声辐射器。