低过剩噪声级联倍增雪崩探测器设计（英文）

基于弛豫空间倍增理论数值模型和修正的弛豫空间倍增理论模型,分析了不同倍增级数和不同载流子初始能量时级联倍增雪崩探测器的过剩噪声.研究了不同碰撞离化倍增层厚度、不同电子预加热层厚度、不同电场控制层掺杂浓度对过剩噪声因子的影响.同时,比较了DSMT模型、Van Vilet模型和McIntyre模型得到的结果.通过调整碰撞离化倍增层厚度、电子预加热层厚度和电场控制层掺杂浓度,DSMT数值模拟获得了一个相对优化的结构,其过剩噪声与Van Vliet模型k_s=0. 057时相当.     

多级倍增超晶格InGaAs雪崩光电二级管的增益-噪声特性

重点研究了多级倍增超晶格InGaAs雪崩光电二级管(APD)的增益和过剩噪声,建立了新的载流子增益-过剩噪声模型。在常规弛豫空间理论基础上分析了其工作原理,考虑了预加热电场和能带阶跃带来的初始能量效应、电子进入高场倍增区时异质结边界附近的弛豫空间长度修正以及声子散射对碰撞离化系数的影响,提出了用于指导该类APD的增益-过剩噪声计算的修正弛豫空间理论。结果表明:在相同条件下,相比于常规的单层倍增SAGCM结构,多级倍增超晶格InGaAs APD同时具有更高增益和更低噪声,且修正的弛豫空间理论可被推广到更多级倍增的超晶格InGaAs APD结构,在保证低噪声前提下,通过增加倍增级数可提高增益。     

SAGCM-APD增益影响因子分析与优化

应用二维漂移扩散模型研究具有分立吸收层、渐变层、电荷层和倍增层结构(SAGCM)的InGaAsP-InP雪崩光电探测器(APD),仿真分析了不同电荷层、倍增层厚度和掺杂浓度对电场分布、电流响应及击穿电压的影响,特别是参数变量对增益计算模型的影响,载流子传输过程的时间依赖关系和倍增层中所处位置的影响,仿真结果表明:较高掺杂浓度和较薄电荷层结构可以改变器件内部的电场分布,进而提高增益值.当入射光波长为1.55μm,光功率为500 W/m2时,光电流响应量级在10-2A;阈值电压降低到10V以下,击穿电压为42.6V时,器件倍增增益值大于100.     

In0.53Ga0.47As/In0.52Al0.48As雪崩光电二极管的数值模拟研究

建立了SACM型In0.53Ga0.47As/In0.52Al0.48As雪崩光电二极管(APD)的分析模型,通过数值研究和理论分析设计出高性能的In0.53Ga0.47As/In0.52Al0.48As APD。器件设计中,一方面添加了In0.52Al0.48As势垒层来阻挡接触层的少数载流子的扩散,进而减小暗电流的产生;另一方面,雪崩倍增区采用双层掺杂结构设计,优化了器件倍增区的电场梯度分布。最后,利用ATLAS软件较系统地研究并分析了雪崩倍增层、电荷层以及吸收层的掺杂水平和厚度对器件电场分布、击穿电压、IV特性和直流增益的影响。优化后APD的单位增益可以达到0.9 A/W,在工作电压(0.9 Vb)下增益为23.4,工作暗电流也仅是纳安级别(@0.9 Vb)。由于In0.52Al0.48As材料的电子与空穴的碰撞离化率比InP材料的差异更大,因此器件的噪声因子也较低。     

LDD结构参数对多晶硅薄膜晶体管热载流子退化的影响

基于Tsuprem4和Medici模拟软件,研究了LDD结构对多晶硅薄膜晶体管热载流子退化的影响.计算结果表明当栅氧层厚度tox=0.07 μm时,碰撞离化产生率和热电子注入电流峰值将达到最大,扩展区掺杂浓度增加,使沟道中横向电场和碰撞离化产生率的峰值分布区域向着栅电极的方向移动,即在应力作用下,热载流子退化的区域向着栅电极的方向漂移.     

钝化层及P型基底结构优化对电子轰击型有源传感器电荷收集效率影响的研究

为获得高增益的电子轰击型有源传感器(EBAPS)，对EBAPS成像器件中电子倍增层的电荷收集效率的影响因素进行了研究。基于载流子输运理论，采用蒙特卡罗方法研究了钝化层种类、厚度、入射电子能量、P型基底厚度和掺杂浓度对二次电子分布及收集的影响。结果表明：为提高入射电子的入射深度进而提高电荷收集效率，宜采用密度小的SiO₂作为钝化层；为了减少钝化层对倍增电子的复合进而提高电荷收集效率，宜降低钝化层厚度和提高入射电子能量；为了降低倍增电子扩散过程中载流子的复合进而提高电荷收集效率，宜降低P型基底的厚度和掺杂浓度。     

4H-SiC p-n结基于精确碰撞电离模型的雪崩倍增因子研究

雪崩倍增效应是4H-SiC雪崩光电二极管、功率半导体器件等器件的关键机理。作为其中最重要的物理参数，雪崩倍增因子(M)的精确解析表达式目前未见报道。文章提出4H-SiC p-n结M的精确计算方法及其解析表达式。基于更准确的碰撞电离模型，通过MATLAB对4H-SiC单边突变结(p⁺-n)电子和空穴的碰撞电离积分(I)进行精确的数值计算，给出击穿电压(BV)随掺杂浓度的经验表达式，进一步提出电离积分随外加电压及掺杂浓度的拟合表达式。此外，对外加电压接近BV的情形进行细致的相对误差分析，表明电子电离积分受电场影响显著。对于雪崩光电二极管及功率器件较宽的BV范围，所提出的拟合表达式在外加反向偏压大于0.65BV时具有较高的精确度(相对误差小于5%)。     

电离效应对EBCMOS中电子倍增层增益的影响研究

采用蒙特卡罗模拟方法研究了电子轰击互补金属氧化物半导体(EBCMOS)成像器件中高能电子轰击半导体时产生的电离效应对电荷收集效率和电子倍增层增益的影响。分析了入射电子能量、p型衬底层掺杂浓度、电子倍增层和钝化层厚度对电荷收集效率和增益的影响。结果表明,增加入射电子能量(小于4 keV)、减小电子倍增层和钝化层厚度、降低掺杂浓度等是提高电荷收集效率和电子倍增层增益的有利途径,可为获得高增益的EBCMOS器件提供理论支撑。     

基于异质结倍增层的InAlAsSb SACM雪崩光电二极管的优化

使用低工作电压的雪崩光电二极管(APD)有利于提高集成电路的稳定性和降低功耗.文章建立了一个分离吸收、电荷、倍增(SACM)型的雪崩光电二极管的模型,为了在低偏压下获得高增益同时不降低工作电压范围,这个模型采用了具有高低禁带宽度的异质结倍增层.同时,文章研究了异质结倍增层的厚度和掺杂浓度对暗电流和增益的影响.通过对掺杂浓度的优化,击穿电压和穿通电压可以同时下降.     

pMOS器件NBTI效应随着器件参数变化规律的一种模型

器件的负偏压温度不稳定性(Negative bias temperature instability,NBTI)退化依赖于栅氧化层中电场的大小和强反型时沟道空穴浓度,沟道掺杂浓度的不同显然会引起栅氧化层电场的变化。栅氧化层的厚度不仅影响栅氧化层电场,而且会影响沟道空穴浓度,因而,改变沟道掺杂浓度和栅氧化层厚度会引起NBTI退化的不同。首先利用pMOSFETS器件的能带图和NBTI的退化模型,推导出了器件NBTI随器件参数变化的公式,并修订了NBTI的数值模拟方法,然后分别利用理论计算和数值模拟的方法对不同器件参数、相同阈值电压的器件进行定量地计算和仿真,继而总结出一种分析器件NBTI退化的应用模型,可对集成电路和器件的可靠性设计提供指导。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.     

Diode-end-pumped Nd:YVO4/LBO lasers with 4.2W continuous-wave output at 457 nm

A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working.     

A rigorous proof of MIMO channel capacity’s increase with antenna number

It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output（MIMO） communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.     

Call for Papers

正Wireless Body-area Networks The last decade has witnessed the convergence of three giant worlds:electronics,computer science and telecommunications.The next decade should follow this convergence in most of our activities with the generalization of sensor networks.In particular with the progress in medicine,people live longer and the aging of population will push the development of wireless personal networks