用于MEMS变形镜的双电极压电厚膜致动器

提出了一种用于MEMS变形镜的双电极驱动的压电陶瓷（PZT）厚膜致动器．采用有限元方法分析致动器变形时的应力分布情况,优化了内外圈电极尺寸,制作了61单元六边形分布的致动器阵列．测试结果表明,致动器在100V工作电压下的;中程约为6．6μm,谐振频率为58kHz,位移迟滞为8％～9％,通过采用单边电压一位移曲线的策略有效降低了位移迟滞,并进一步提出了分时驱动的电路方案．     

具有大驱动位移的复合结构型PZT压电陶瓷

采用PZT作为基体材料,通过化学还原的方法制备了具有大位移驱动能力的复合结构型压电陶瓷。研究了其预制应力的分布,探索了还原制备工艺,测试了驱动性能。结果表明,复合结构的优化设计方案是,还原层厚度比率为0.3;与普通压电陶瓷驱动器相比,复合结构型PZT压电陶瓷具有较低的谐振频率,驱动位移量提高3倍多;还原层相结构中存在二次氧化的基体相,表明其还原工艺仍需改进。      

高控位精度横向模压电微位移器的研究

介绍了d31横向伸缩模式压电徽位移驱动器的制作过程,应用高稳定的填满钨青铜型压电陶瓷作为该器件制备的基料,利用P-F干涉仪原理测量了电场-位移特性曲线,由此计算了压电常数d31并进行了讨论。该器件具有电控应变(位移)线性度高、滞后量小以及结构简单、制作工艺方便等特点,它在精密光学等技术领域有一定应用价值。     

聚偏氟乙烯压电薄膜的实验研究

一、聚偏氟乙烯薄膜性能特点 聚偏氟乙烯(以下称为PVDF)薄膜为一种新型压电材料,在水声、超声、电声等领域中可与现有的PZT压电陶瓷取长补短,是压电材料领域新添的一员。 自从五十年代PZT压电陶瓷问世以来,三十多年中它始终在换能器材料中占主导地位,尽管PZT作为压电材料有着无可比拟的优点,但也存在着由陶瓷固有性能所带来的缺点和在换能器设计上的不便之处,如陶瓷的高密度和易碎性使大于10cm的水听器太厚、太重,而薄的器件     

以溶胶-凝胶法PZT薄膜为驱动的微泵研制

采用溶胶-凝胶法(sol-gel)制备技术制作了Pb(Zr,Ti)O3(PZT)压电薄膜,并以PZT薄膜为驱动制作了微泵.采用了V型微阀的微泵主要利用PZT的压电效应.针对微泵的关键结构--复合驱动膜,探索了一种Si/SiO2/Ti/Au/PZT/Cr/Au多层驱动膜结构制备方法,解决了在硅基底上制备PZT薄膜的问题,同时探讨并解决了硅各向异性刻蚀微泵的微驱动腔、单向阀的工艺问题,并通过SEM照片对V型阀和多层驱动膜进行了表征.研究结果表明,采用MEMS技术成功地完成了微驱动器的研制,得到的驱动腔硅杯平坦均匀.在V型阀微泵整体设计中需要的硅片数目少,降低了器件的复杂性,可以满足功耗低、小型化和批量生产的要求.     

溶胶-凝胶法制作PZT微驱动器的研究

采用溶胶-凝胶法(Sol-gel)制备了PZT压电薄膜,利用PZT的压电效应制作以PZT薄膜为驱动的V型阀微驱动器.针对微驱动器的关键结构驱动膜,探索了Si/SiO2/Ti/Au/PZT/Cr/Au多层驱动膜结构制备方法,解决了在硅基底上制备PZT薄膜的问题,同时详细探讨了硅各向异性刻蚀微驱动器的关键部件驱动腔、单向阀的工艺,解决了集成制作的V型阀微驱动器的关键工艺问题,并通过SEM照片对V型阀和多层驱动膜进行了表征.研究结果表明,采用MEMS与IC技术结合的方法成功地完成了微驱动器的研制,得到的驱动腔硅杯平坦均匀.在V型阀微驱动器整体设计中需要的硅片数目少,降低了器件的复杂性,可以满足低功耗、小型化和批量生产的要求.     

基于PZT薄膜面内极化工作的低应力压电微传声器

本文设计、制作并测试了一种基于压电PZT薄膜面内极化工作的压电微传声器.利用压电薄膜的纵向压电常数,并通过压电微传声器面内电极的设计提高电极间距,以提高压电微传声器的灵敏度.由于基于PZT薄膜的多层结构常具有很大的残余应力,通过5种不同振动膜材料与PZT薄膜的应力匹配实验,研究了降低振动膜应力的方法.结果表明,对于相同尺寸的膜片,PZT/ZrO2/LTO/Si3N4具有最小的变形,其中心处的变形(200 nm)仅为膜片PZT/ZrO2/Si3N4/SiO2中心处变形(17μm)的1%.采用体硅微加工工艺制作了具有方形振动膜(2 mm×2 mm)的压电微传声器结构,采用LTO/Si3N4多层结构作为振动膜结构,方形膜片中心的圆形结构为PZT薄膜,环形叉指结构为Au/Cr电极.压电微传声器在0.15 kHz~6 kHz频率范围内的灵敏度约为0.1 mV/Pa.     

MEMS变形镜用PZT厚膜致动器阵列的制备及性能表征

提出了一种基于锆钛酸铅(PZT)压电厚膜致动器阵列驱动的MEMS微变形镜,建立了该微变形镜的结构模型,分析了其结构中各层厚度对其性能的影响.PZT压电厚膜是通过基于PZT压电陶瓷体材料的湿法刻蚀技术制备的,刻蚀液为1BHF2HCl4NH4 Cl4H2O.以数字锁相方法测试了压电厚膜的介电性能,在100 kHz以下时,其介电常数和介质损耗分别优于2400和3%.利用悬臂梁方法测试了压电厚膜的也.横向压电系数,约为-250 pm/V.制备了4×4阵列的压电致动器阵列.采用激光多普勒测试压电致动器的电压位移曲线,在100 V的电压驱动下致动器的变形量大约为2.2/μm;测试了致动器的频率响应,其谐振频率高于100 kHz;致动器刚度大,带负载能力强.     

烧结温度对PMS-PZT系陶瓷显微结构和压电性能的研究

研究了不同烧结温度对Pb(Mn1／3Sb2／3)O3-PbZrO3-PbTiO3(PMS—PZT)系压电陶瓷显微结构和压电性能的影响．实验结果表明：在1240℃、2h条件下烧结，能获得最优的综合性能：Cr=1530、d33=374、Kp=0．6、tanδ=0．41％、Qm=1250，可以满足压电变压器和超声马达等大功率场合下的使用要求．与此同时，当烧结温度为1100-1150℃时，材料仍然具有良好的压电性能：Cr=1370、d33=348、Kp=0．57、tanδ=0．62％、Qm=1620(1150℃)，因此可以作为中低温烧结的多层器件用厚膜材料．高温显微镜、SEM、TEM和EDS等研究表明，PMS—PZT系陶瓷具有很宽的烧结温度区域，特别是中低温烧结时仍能成瓷并具有高的压电性能，主要是因为PbO和Sb2O5在较低烧结温度下(1100℃)能够形成过渡液相促进陶瓷烧结，随着烧结温度的升高，它们能够重新进入晶格形成单一钙钛矿结构．     

PZT铁电薄、厚膜及其制备技术研究进展

铁电薄、厚膜材料具有良好的铁电、压电、热释电、电光及非线性光学特性,在微电子学、光电子学、集成光学和微电子机械系统等领域有许多重要的应用.近年来,随着铁电薄、厚膜制备技术的发展,PZT厚膜材料及厚膜器件成为科学工作者研究的热点.介绍了PZT铁电薄、厚膜材料与器件的研究进展以及PZT铁电薄、厚膜制备技术及几种典型的PZT铁电薄、厚膜材料制备技术的特点,并指出了目前存在的一些问题和未来的发展方向.     

新型双向加载MEMS微执行器动力学分析

传统横向单向加载MEMS静电微执行器存在位移过小或驱动电压过大等问题.本文提出一种纵横双向加载的新型硅基静电执行器模型.基于拉格朗日-麦克斯韦方程建立了微执行器动力方程,分析了边缘漏电场对静电力的影响,基于龙格-库塔算法将所有轴向载荷等效为轴向集中载荷,并分别仿真得到了变形与驱动电压、调节电压和轴向挤压量之间的关系,结果表明当驱动电压仅为16 V时,位移高达10.861μm,远大于目前传统横向加载单向变形微执行器的位移量.通过微型制造工艺加工了微执行器,利用高频信号采集了横向极板间的电压变化量,验证了仿真结果.     

超磁致伸缩单晶微位移致动器特性研究

采用高性能Tb0 .3 Dy0 .7Fe2 单晶材料 ,通过优化微位移致动器的机械、磁路参数 ,研制出了具有非水冷结构的新型微位移致动器。致动器的最大线性工作区间为 0 .5～ 3 5 .5 μm ,工作电压为 2～ 2 4V ,饱和驱动量可达 3 9.5 μm     

Theoretical calculations and performance results of a PZT thin film actuator

High piezoelectric coupling coefficients of PZT-based material systems can be employed for actuator functions in micro-electro-mechanical systems (MEMS) offering displacements and forces which outperform standard solutions. This paper presents simulation, fabrication, and development results of a stress-compensated, PZT-coated cantilever concept in which a silicon bulk micromachining process is used in combination with a chemical solution deposition (CSD) technique. Due to an analytical approach and a finite element method (FEM) simulation for a tip displacement of 10 /spl mu/m, the actuator was designed with a cantilever length of 300 /spl mu/m to 1000 /spl mu/m. Special attention was given to the Zr/Ti ratio of the PZT thin films to obtain a high piezoelectric coefficient. For first characterizations X-ray diffraction (XRD), scanning electron microscopy (SEM), hysteresis-, current-voltage I(V)and capacitance-voltage C(V)-measurements were carried out.     

一次逆、二次正压电效应在自感知执行器上的应用

提出利用一次逆、二次正压电效应为同一压电体内的双向效应原理,进行传感器与执行器集成一体化——自感知执行器的研究.即利用一次逆压电效应输出一个微位移,作为执行器使用;利用二次正压电效应的输出电荷自感知执行器的输出位移,作为传感器使用.在准静态（电压0～50V）和低频（电压100V,频率10Hz）条件下,分别进行了一次逆压电效应输出位移、二次正压电效应输出电压的实验,并将得到的数据进行归一化处理.实验结果表明,通过测量二次正压电效应产生的电荷能够较好地自感知一次逆压电效应产生的位移.     

High-displacement piezoelectric actuator utilizing a meander-line geometry I. Experimental characterization

The compact linear-motion piezoelectric actuator developed has relatively large displacement capabilities. It is composed of a number of parallel bars of lead zirconium titanate (PZT) connected together in a meander-line configuration so that they are mechanically in series and electrically in parallel. The polarity of the adjacent bars is arranged so that if a given bar expands under the applied voltage, the adjacent bars contract. An electromechanical model of the actuator predicted and measurements verified that stiffeners added to the basic meander line geometry significantly increased the force output without affecting the displacement versus applied voltage relationship.     

尺蠖型压电直线驱动器的运动稳定性分析

为了深入研究尺蠖型压电驱动器的性能,分析了尺蠖型压电直线驱动器的工作原理,研究了直线动子对驱动器性能的影响．通过实验方法分析了钳位机构调整前后对钳住稳定性的影响．采用驱动器输出单步位移的步距失稳系数和驱动电压与输出位移拟合曲线斜率和截距偏差率的方法评价尺蠖型压电直线驱动器的运动稳定性．经实验测试发现驱动器的步距失稳系数与驱动电压关系密切,当驱动电压较高时,驱动器具有较好的步距稳定性．驱动器的驱动电压与输出位移拟合曲线斜率和截距偏差率分别为1．8％和9．07％,说明所开发的驱动器具有很好的运动稳定性．     

Deflection characteristics of a trapezoidal multilayer in-plane bending piezoelectric actuator

A novel multilayer split-morph actuator has been designed and fabricated using the thick film screen-printing technology. Deflection characteristics of the split-morph actuator have been investigated by theoretical analysis and experimental measurement. The results indicate that the tip displacement is inversely proportional to the thickness of each piezoelectric layer, but is independent of the number of layers and the total thickness of the actuator. The displacement/voltage sensitivity of the trapezoidal actuator is larger than that of the rectangular design, assuming both have the same width of clamped end and the same thickness of the piezoelectric layers. The maximum displacement/voltage sensitivity of 0.157 micron/V was obtained with a split-morph actuator with 30-micron thick layers. The proposed actuator is a promising candidate for the secondary fine-tuning actuator of a dual stage head-positioning servo system in high density hard disk drives.     

A planar unimorph-based actuator with large vertical displacement capability. I. Experiment

A piezoelectric actuator utilizing a planar arrangement of unimorph elements that produces displacements perpendicular to the plane of the actuator is described. The elements are connected in series mechanically so that the vertical displacement of each element adds to the vertical displacements of the other elements. Two prototype actuators were built and tested. One was stick-built from individual bars of PZT and aluminum, which were epoxied together and connected to each other with short aluminum connector bars. The other was fabricated monolithically from a single plate of PZT by bead-blasting the PZT plate through a steel shadowmask to mill out the desired actuator shape. Copper bars epoxied to the milled-out PZT bars then formed the unimorph elements. The unloaded output displacement of each actuator versus applied voltage was measured as well as the displacement versus applied force with no applied voltage. These measurements were in agreement with the predictions of an electromechanical model of the actuator that has been developed. The model predicted and measurements verified that stiffeners can be added to the basic geometry that will significantly increase the force output without affecting the displacement versus applied voltage characteristic.     

RAINBOW压电驱动器的制备及性能

ＲＡＩＮＢＯＷ压电驱动器是一种具有超大位移量和一定负载能力的新型压电驱动器。了在于铌锌锆钛酸铅压电陶瓷的ＲＡＩＮＢＯＷ器件,对其制备工艺进行了研究和探索,确定了合理的工艺参数和制备方法,成功地制备了拱形经 ＲＡＩＮＢＯＷ器件;研究了该器件的压电、位移、谐振以及铁电性能,根据实验认为制备得到手Ｒ ＡＩＮＢＯＷ器件,具有良好的位移性能,未极化的ＲＡＩＮＢＯＷ器件对于正负电场的响应（极化、位移） 存在不     

Microvalves based on ionic polymer-metal composites for microfluidic application

Simple and highly efficient microvalve systems based on an ionic polymer-metal composite (IPMC) diaphragm actuator have been developed. The microvalve system that was fabricated in this work operates when open and close voltage is applied, due to the phenomena of lithium ion flux and the subsequent electro-osmotic drag of water to the cathode. IPMC was prepared by compositing with platinum nanoparticles on both sides of Nafion thin film. SEM images of the IPMC showed the high density and uniform size distribution of the Pt nanoparticles in the interpenetrating layer to ensure the proper performance of an IPMC actuator. The displacement of the IPMC for the microvalve was measured with a laser displacement meter. The application of open and close voltage made the operation of the valve faster. The fluorescence images of the flow in the fabricated IPMC-based microvalve system showed the successful operation of flow control in the microfluidic channel. The IPMC-based microvalve system shows a potential of IPMC for application as an actuator in microfluidic systems.