真空卷绕镀膜技术及设备的现状与发展

综述了真空卷绕镀膜技术的现状和发展、真空卷绕镀膜技术的应用领域、现有真空卷绕镀膜设备的应用分类及结构分类、真空卷绕镀膜设备典型的结构组成及设备设计的一些关键要素.     

真空卷绕镀膜技术研究进展

本文从系统结构、参数控制和镀膜方式等综述了真空卷绕镀膜技术研究进展。按结构可分为单室、双室和多室真空卷绕系统,后两者可解决开卷放气问题并分别控制卷绕和镀膜室各自真空度。卷绕张力控制分锥度、间接和直接控制模型,锥度控制模型可解决薄膜褶皱和径向力分布不均的问题;间接张力控制无需传感器,可用内置张力控制模块的矢量变频器代替;直接张力控制通过张力传感器精确测量张力值,但需惯性矩和角速度等多种参数。真空卷绕镀膜主要有真空蒸发、磁控溅射等方式,可用于制备新型高折射率薄膜、石墨烯等纳米材料和柔性太阳能电池等半导体器件。针对真空卷绕镀膜技术研究现状及向产业化过渡存在的问题,最后作了简要分析与展望。     

海绵卷绕真空磁控溅射镀膜过程中的传动控制

根据磁控溅射中海绵的传动特性，建立了传动控制的数学模型，采用带有矢量的变频调速器实现了海绵卷绕真空镀膜过程中的张力控制，满足了磁控溅射中海绵卷绕的传动要求。     

磁控溅射中的海绵卷绕设备研究

在大量试验的基础上，总结了磁控溅射中海绵的传动特性，设计了微张力海绵卷绕系统，建立了传动控制的数学模型，经大量试验和使用证明，该设计满足了磁控溅射中海绵卷绕的要求。     

《真空镀膜技术》和《真空镀膜设备》出版发行

<正>由东北大学张以忱主编的真空工程技术丛书:《真空镀膜技术》和《真空镀膜设备》两书由冶金工业出版社出版发行。《真空镀膜技术》主要内容:薄膜基础理论、真空蒸发镀膜、真空溅射镀膜、真空离子镀膜、真空卷绕镀膜技术、真空化学气相沉积(CVD)、离子注入与离子辅助沉积技术、ITO导电玻璃镀膜工艺、薄膜厚度测量与监控、薄膜与表面分析检测技术。书中还系统地介绍了反应溅射镀膜、非平衡磁控溅射和中频交流溅射镀膜技术。     

《真空镀膜技术》和《真空镀膜设备》出版发行

由东北大学张以忱主编的真空工程技术丛书:《真空镀膜技术》和《真空镀膜设备》两书由冶金工业出版社出版发行。《真空镀膜技术》主要内容:薄膜基础理论、真空蒸发镀膜、真空溅射镀膜、真空离子镀膜、真空卷绕镀膜技术、真空化学气相沉积(CVD)、离子注入与离子辅助沉积技术、ITO导电玻璃镀膜工艺、薄膜厚度测量与监控、薄膜与表面分析检测技术。书中还系统地介绍了反应溅射镀膜、非平衡磁控溅射和中频交流溅射镀膜技术。     

《真空镀膜技术》和《真空镀膜设备》出版发行

正由东北大学张以忱主编的真空工程技术丛书:《真空镀膜技术》和《真空镀膜设备》两书由冶金工业出版社出版发行。《真空镀膜技术》主要内容:薄膜基础理论、真空蒸发镀膜、真空溅射镀膜、真空离子镀膜、真空卷绕镀膜技术、真空化学气相沉积(CVD)、离子注入与离子辅助沉积技术、ITO导电玻璃镀膜工艺、薄膜厚度测量与监控、薄膜与表面分析检测技术。书中还系统地介绍了反应溅射镀膜、非平衡磁控溅射和中频交流溅射镀膜技术。     

《真空镀膜技术》和《真空镀膜设备》出版发行

<正>由东北大学张以忱主编的真空工程技术丛书:《真空镀膜技术》和《真空镀膜设备》两书由冶金工业出版社出版发行。《真空镀膜技术》主要内容:薄膜基础理论、真空蒸发镀膜、真空溅射镀膜、真空离子镀膜、真空卷绕镀膜技术、真空化学气相沉积(CVD)、离子注入与离子辅助沉积技术、ITO导电玻璃镀膜工艺、薄膜厚度测量与监控、薄膜与表面分析检测技术。书中还系统地介绍了反应溅射镀膜、非平衡磁控溅射和中频交流溅射镀膜技术。     

《真空镀膜技术》和《真空镀膜设备》出版发行

由东北大学张以忱主编的真空工程技术丛书:《真空镀膜技术》和《真空镀膜设备》两书由冶金工业出版社出版发行。《真空镀膜技术》主要内容:薄膜基础理论、真空蒸发镀膜、真空溅射镀膜、真空离子镀膜、真空卷绕镀膜技术、真空化学气相沉积(CVD)、离子注入与离子辅助沉积技术、ITO导电玻璃镀膜工艺、薄膜厚度测量与监控、薄膜与表面分析检测技术。书中还系统地介绍了反应溅射镀膜、非平衡磁控溅射和中频交流溅射镀膜技术。     

《真空镀膜技术》和《真空镀膜设备》出版发行

由东北大学张以忱主编的真空工程技术丛书:《真空镀膜技术》和《真空镀膜设备》两书由冶金工业出版社出版发行。《真空镀膜技术》主要内容:薄膜基础理论、真空蒸发镀膜、真空溅射镀膜、真空离子镀膜、真空卷绕镀膜技术、真空化学气相沉积(CVD)、离子注入与离子辅助沉积技术、ITO导电玻璃镀膜工艺、薄膜厚度测量与监控、薄膜与表面分析检测技术。书中还系统地介绍了反应溅射镀膜、非平衡磁控溅射和中频交流溅射镀膜技术。《真空镀膜设备》详细介绍了真空镀膜设备的设计方法与镀膜机各机构元件的设计计算、设计参数的选择,其中还重点系统地介绍了磁控溅射靶的设计计算和膜厚均匀性设计。     

对接综合试验台温度环境模拟分系统研制与试验验证

研制了一种新型对接机构综合试验台环境模拟分系统,为空间对接机构提供高低温的试验环境,以便了解对接机构在不同的冷却状态、冷却速率条件下的性能及其对对接过程的影响。系统利用液氮喷射散流装置与可控硅控制的电加热器组合运行,为模拟试验提供高低温环境。同时利用高精度快速反应的气动调节装置和旁通分流方法维持试验空间的压力稳定,以消除附加压力对对接试验过程的影响。通过基于PLC的Fuzzy-PID多级控制和数据实时采集系统对环境模拟分系统的各关键控制点和监视点进行实时扫描。试验验证表明,建立的对接机构综合试验台环境模拟分系统能够满足试验过程对温度均匀度和压力稳定的要求,能为地面模拟对接过程提供合适的模拟环境。     

真空冶金设备抽气装置专家系统及应用实例

介绍了专家系统的特点和应用,分析了大型真空冶金抽气装置的特性、故障多发原因以及排查中的困难,指出采用专家系统的可行性和实际意义,明确了在真空冶金抽气装置中建立专家系统的具体内容.以宝钢RH-KTB炉外精炼真空系统为例,给出了设备运行监测方案,建立了专家系统知识库,编制的软件可对设备的运行状态进行即时评价和故障预报,当真空系统出现故障时,采用逆向推理机制,从目标出发,寻找故障可能原因,并给出推理解释.专家系统对监测参数阈值的机器学习,提高了专家系统实际应用中的推理效率和准确性.专家系统软件经离线测试和现场在线应用达到预期的目标,可以推广应用.     

A reverse engineering algorithm for mining a causal system model from system data

Although having structural system models which determine system behaviours is critical to plan, control and manage many complex systems (e.g. manufacturing and production systems), we often do not have pre-defined structural system models. We need to perform reverse engineering which is to collect and mine observable system data in order to discover structural system models. This paper presents a reverse engineering algorithm that can be used to discover a causal system model which is one kind of structural system model and represents causal relations of system factors. In a causal relation, the presence of one system factor causes the presence of another system factor. The paper also shows the computational complexity of the algorithm. The paper presents the application and performance of the reverse engineering algorithms to data in two application fields.     

面向协调的区域"经济-环境"系统管理模型

从管理的动态性特征出发,用复合子f、协调机制c、评价标准g来描述面向协调的管理的概念模型.在此基础上,按照系统分析、系统评价、系统调控三个步骤建立了面向协调的区域"环境-经济"系统管理模型.提出了基于系统功能和效益(率)的系统发展状态评价指标体系,应用灰色关联分析法遴选出与该复合系统在发展过程中联系最紧密的系统要素.最后对西安市的经济-环境进行了实证分析.     

Development of a circulating system for a jet refrigeration cycle

This paper proposed a workless-generator-feeding (WGF) system for a jet refrigeration cycle, using R141b. This feeding system does not require any mechanical power. The liquid refrigerant from the condenser was fed to the vapour-generator by means of the generator pressure and gravitational force. The system was tested and compared with a conventional system using a mechanical pump. It was found that this system was workable. The heat input to the generator was slightly higher than that for a system using a mechanical pump. The jet refrigeration cycle employing this new feeding system provided a slightly lower coefficient of performance (COP) compared to a system using a mechanical pump. However, this new system did not require any mechanical energy. Therefore, the jet refrigeration system employing this WGF system is truly a heat-power refrigeration cycle.     

中小跨径梁桥地震易损性研究

为对桥梁系统地震易损性进行准确评估,结合Copula函数技术,提出基于串-并联组合体系的桥梁系统易损性分析方法。桥墩是桥梁抗震中的控制构件且较难修复,采用串联体系将多个桥墩进行组合,对于修复难度较低的桥台及支座构件,采用并联体系进行模拟。在此基础上,将桥墩、桥台及支座三类构件体系进行串联,构成桥梁系统的串-并联组合体系。以三跨连续箱梁桥为例,阐明了基于串-并联体系的桥梁系统易损性分析方法,并将分析结果与基于串联体系的桥梁系统易损性进行对比。结果表明:对于中小跨径的连续梁桥,基于单一串联体系会明显高估桥梁系统的易损性,相对于串-并联体系,在轻微、中等、严重及完全四种破坏状态下,其中位值偏差在纵桥向分别为22.2%、20.7%、20.5%及24.6%;在横桥向分别为30.0%、16.1%、9.8%及11.3%,基于串-并联组合体系建立桥梁系统地震易损性更切实合理。     

基于远程控制的VXI开发管理系统

以开发某大型VXI测试系统为背景,在不增加硬件投入,又能加快开发进度的前提下,提出基于远程控制来实现VXI开发管理系统,文中介绍了两种远程控制实现方法：基于VNC协议和基于Citrix终端服务架构,系统中,开发人员在本地以“透明”方式控制VXI主机,实现分布式调试,根据优先级合理调度开发人员的调试工作,从而有效地提高了VXI系统的利用率,加快了测试系统的开发进度。     

基于神经网络优化的交流自抗扰伺服系统控制

目的 为了解决传统交流永磁同步电机伺服自抗扰控制系统中外界扰动、非线性特性和本身自抗扰控制中参数较多且整定难的问题.方法 利用小波神经网络对自抗扰控制中的扩张状态观测器的误差校正系数进行在线整定,设计出基于小波神经网络优化的自抗扰控制器及相关的控制系统,以实现对整体控制系统的性能优化,并通过在Matlab/SIMULINK仿真实验与传统PID伺服控制系统和未进行优化的交流自抗扰伺服系统进行对比验证.结果 仿真结果表明,基于小波神经网络优化的交流永磁同步电机伺服自抗扰控制系统对目标位置动态响应快、稳态误差小、抗干扰能力强,稳态时转矩脉动小.结论 与常规未优化自抗扰伺服系统和传统PID伺服系统相比,基于小波神经网络优化后的自抗扰伺服系统,能有效地提高伺服系统控制性能和鲁棒性.     

Analysis of quality-caused re-entrance electrical test system in semiconductor manufacturing by Markov method

The electrical test system is one of the key components in semiconductor assembly and test factories. The products arrive at the system in lots and the processing times in the system are related to lot size. In the system, defective lots are identified by the tester machine and then analysed by engineers. The defective lots are subsequently reworked in the tester, forming a re-entrance system. This paper analyses system performance with respect to quality rate and system design parameters to provide suggestions for system improvement. A queue network model based on a semiconductor electrical test procedure is constructed, and system performance is obtained by the Markov method. The performance forecast, quality sensitivity analysis, and system improvement for a case study carried out in a factory are described in detail. The results show that the proposed method is valuable for system performance evaluation and improvement.     

Improved Hybrid Precoding Technique with Low-Resolution for MIMO-OFDM System

This paper proposes an improved hybrid beamforming system based on multiple-input multiple-output orthogonal frequency division multiplexing (MIMO-OFDM) system. The proposed beamforming system improves energy efficiency compared to the conventional hybrid beamforming system. Both sub-connected and full-connected structure are considered to apply the proposed algorithm. In the conventional hybrid beamforming, the usage of radio frequency (RF) chains and phase shifter (PS) gives high power and hardware complexity. In this paper, the phase over sampling (POS) with switches (SW) is used in hybrid beamforming system to improve the energy efficiency. The POS-SW structure samples the value of analog beamformer to make lower resolution than conventional system. The number of output data in POS is decided by the resolution of POS system. The limited number of POS decides the resolution of antenna array and the values of POSs are designed from maximum and minimum phase angle antenna array. Energy efficiency without the phase shifter is high although channel capacity is nearly similar with conventional system. Also, the amplifier with POS-SW system is proposed to improve the BER performance. According to the data bits, the output signals of POS are decided. The system with 2, 3 and 4 bits is simulated to prove the proposed algorithm. In order to overcome the loss of low-resolution system, the amplifier with POS-SW system using channel information is proposed. The average sum-rate of 4 bits system shows the similar performance with the conventional hybrid beamforming system. This structure can play an important role by increasing the energy efficiency of the wireless communication system that many antennas are used. It is shown that the BER, average sum rate and energy efficiency of the proposed scheme are more improved than the conventional hybrid beamforming system.