Vakuumbeschichtung – Heutiger Stand und zukünftige Trends

Thin films have changed the world. Many products of our modern life, like powerful PC's, the Compact Disc, or energy-saving architectural glazings would not exist without vacuum coating technology. During the past 20 years PVD and PECVD processes for deposition of thin films have spread into a huge variety of different applications. Besides microelectronics, the major fields for the near future are flat panel displays, data storage, optics/glass and surface protection. The article outlines today's market situation and tries to characterize present status and future trends in vacuum coating technology on the basis of some selected examples.     

65 Years of Turbopumps

Vacuum technology is not necessarily one of the sciences mentioned in connection with groundbreaking inventions. Nevertheless, it is a basic prerequisite for many developments and products that are taken for granted today. The influence of vacuum technology on our lives today can be traced back to the invention of the turbopump 65 years ago. Until then, the diffusion pump was considered the most widely used high and ultra-high vacuum pump, but with the help of Dr. Willi Becker's invention, it became possible to create hydrocarbon-free vacuum. It was only through a ‚clean' vacuum that many analyses and manufacturing processes became possible.     

Herstellung funktionaler organischer Dünnschichten durch Vakuumverdampfung

Depositing of functional organic thin films by vacuum evaporation Material evaporation under high or ultra‐high vacuum conditions has been a well known method of thin film coating since nearly a hundred years. Since discovery of semiconducting organics in the 1970s and 1980s, this technology has been increasingly applied to deposit organic molecular compounds. At the moment especially materials for organic LEDs (OLEDs) and for thin‐film solar cells are in the focus of interest. While organics evaporation makes use of advantages of high‐vacuum coating (purity, compatible processing, masking etc.) there are also dedicated demands on process control coming up. The article describes basic requirements, capabilities of present temperature‐controlled evaporation sources, material‐related features, as well as typical applications.     

Wolfgang Gaede ‐ Wegbereiter der Vakuumtechnik

The inventions of Wolfgang Gaede were the beginning of the extensive industrial application of vacuum technology: the 1905 invented high vacuum mercury pump simplified the production of electric bulbs. From this time Gaede joined the company E. Leybold's Nachfolger research & development activities for 40years. Three of his inventions, the diffusion pump, the (turbo‐) molecular pump and the principle of “gas ballast” are worldwide in use even today. The most important stations of Gaede's biography are reported.     

Geschichte der Vakuumtechnik. History of Vacuum Technology

The history of vacuum technology is more than 2000 years old. Over the past 400 years scientists, engineers and inventors such as Torricelli, Pascal, von Guericke and Gaede have been engaged in vacuum technology. Vacuum has become an essential instrument in science and technology and many processes could not exist without it. Furthermore vacuum technology has been developed as an individual industrially applied technology. The article describes the development of vacuum technology from ancient philosophical speculations about the mercurial glass pipe to the modern diffusion pump.     

Carl Hoffmann (1844 – 1910), der Erfinder der Drehschieberpumpe

Among the numerous constructions and designs of mechanical (vacuum) pumps around the turn of the 19th/20th century Hoffmanns invention of the sliding vane rotary vacuum pump may be considered as the real breakthrough in this field. His pump, manufactured since 1905 excels by the introduction of the – by now standard – back pressure valve which has been retained as an essential component in all later constructions of similar pumps, in particular of Gaede's so called “box” pump. The articel describes Hoffmann's professional life in context with the state of vacuum technology at his time.     

Kondensatoren ‐ Ideale Vakuumpumpen ‐ Real berechnet

The accurate design of condensers in the vacuum technology with the help of 'real' flash calculation is possible due to the easy access to calculation programs and databases. The article shows with a simple example, how important the knowledge of the real condensation‐behaviour can be, when designing a modern, effluent reduced vacuum system. In addition, design failures on vacuum condensers can cause trouble in the performance of vacuum pumps.     

真空绝热板导热系数与板内真空度关系研究

以理论模型计算和实验样品测试相对比的方法,研究了两种不同芯材真空绝热板导热系数与板内真空度之间的关系,利用逆真空法对真空绝热板板内压力进行了测试.探讨了真空绝热板制作工艺参数,保持板内真空度及延长使用寿命的方法.     

Guerickes Versuch mit den Großen Magdeburger Halbkugeln und den Pferden

Guericke's experiment with the Great Magdeburg Hemispheres and the horses - Comments to the history and to the experiment The Magdeburg hemispheres were invented by German natural scientist and mayor of Magdeburg, Otto von Guericke, to demonstrate the existence of vacuum and the power of atmospheric pressure. The experiment with the great Magdeburg hemispheres and the horses is one of the best-known vacuum experiments in the world. In the year 1657 was the first presentation in Magdeburg, three years after the Reichstag in Regensburg 1654. In the present paper it is shown again the historical proof, based on the exchange of letters between Guericke und Schott, published in his book “Technica Curiosa”, 1664. This of course meant that the first presentation of the famous vacuum experiment with the 16 horses in Regensburg was in the year 2004, demonstrated by the Otto-von-Guericke-Gesellschaft Magdeburg. The contribution gives some basics and practical experiences of about 160 experiments.     

Entwicklungstendenzen von Vakuumpumpen für die Grob‐ und Feinvakuumtechnik. Developing trends of vacuum pumps for the roughly and fine vacuum technology

Presently coarse vacuum and fine vacuum is generated in engineering arrangements mainly with rotating displacement compressor pumps and some special current machines as well as by means of combinations of these pumps. Besides, took place in last decades a noteworthy change of the used styles of vacuum pumps and her parameters which is not concluded up to the today's day. She will also continue in future with the advancement of vacuum pumps and with the new development of machines and investment‐engineering requirements. In the following contribution some promising developing trends are outlined, outgoing by the today's developing state of the mostly used vacuum pumps, for the closer future. This is sensible because in last decades important ranges of application as for example the food industry or the microelectronic one and the pharmaceutical industry came.     

Vacuum Arc Discharge on Integrally Cold Cathode

Initial researches of the existence of a cathode spot on the working surface were conducted in vacuum arc plasma sources of the coaxial design. The moving of the cathode spots on the limited sizes working surface does not give full picture of the development of the arc discharge. This article describes the vacuum arc plasma source of extended design generating the directed belt plasma stream and operating in pulse mode. The researches carried out give additional information about development of the cathode spots of the vacuum arc discharge. It is found that the speed of the cathode spots' motion depends on the cathode temperature.     

钢包真空脱气处理工艺及设备

随着炼钢技术的飞速发展,真空脱气处理技术成为减少钢中气体和非金属杂质的有效措施,其关键在于如何获得真空.本文以某厂利用蒸汽喷射泵的钢水炉外真空处理为例,介绍了真空系统的设备组成,阐述了真空泵的抽气理论,利用边试验边改进的方法来优化蒸汽喷射泵的抽气性能.最后,给出了钢水的真空脱气处理工艺及其效果.     

A Controversial Molecule: The Early History of Triatomic Hydrogen

The hypothesis of a triatomic hydrogen molecule H₃ originated in the early 1910s in connection with J. J. Thomson's experiments on positive rays. Apparently justified by Bohr's atomic theory, the hypothesis was investigated by many chemists and physicists, some of whom believed to have confirmed the existence of neutral H₃ in the form of ‘active hydrogen’. However, experimental results were contradictory and for this reason the H₃ molecule remained controversial. By the early 1930s theory as well as accumulated experimental evidence spoke against its existence. The paper discusses the fate of the H₃ molecule and the H₃⁺ ion from 1911 to about 1935, when the H₃ hypothesis was effectively abandoned. It also connects this history with the more recent developments that started with the discovery of the H₃ spectrum in 1979 and led to much work on the astronomical significance of the H₃⁺ ion.     

Energieeffizienz in der Vakuumtechnik

Energy efficiency in vacuum technology Vacuum is used to produce a huge variety of products of our everyday life. To provide the vacuum environment, a lot of energy is usually used and therefore the vacuum pumps should run as efficient as possible. Actually, many various improvements can be made to gain energy savings on vacuum pumps. With those considered in this paper it's possible to save 928 GWh/a of energy in the EU and thereof 629 GWh/a or 64 % are economically realizable. Only specific improvements concerning the vacuum system are taken into account, basic technology options, like motors, controls, etc., are excluded. To show and discuss the results a conserved energy supply curve is used.     

The roles of technology in al-Quran exegesis in Indonesia

This article views that technology plays an integral role in the social impacts of religious information, instead of being a threat to the religion itself. That is, technology is present in religious life, and is increasingly giving social impacts. Technology offers a new nuance in today's modern life in almost every aspect of human life. Sometimes, technology serves as a primary tool that assists us in our daily lives, and in some other time, it only serves as a supporting tool. As an important part of people's lives, al-Qur'an exegesis in its development is in separable from technology. This article provides evidences on religion's presence in the society, illustrated through the important roles of technology in al-Quran exegesis. Technology supports the presence of religion in millennial periods and not vice versa. This role of technology still serves only as a supporting system or secondary role. This can be seen in the Tafsir Ilmi Kementrian Agama (Tafsir Ilmi compiled by the Indonesian Ministry of Religious Affairs). Furthermore, this argument is a valid proof of the novelty of technology's roles in the development of religious materials in millennial era.     

Flüssigkeitsring-Vakuumpumpen

Liquid ring vacuum pumps – Oldtimers of vacuum technology and yet highly up-to-date Liquid ring vacuum pumps were developed over a hundred years ago. In the meantime, vacuum technology has evolved considerably and offers optimum economic and technical solutions for a wide variety of applications. However, liquid ring vacuum technology still has its reason for existence and is the most suitable principle for vacuum generation in some applications. Thanks to its functionality it is perfectly suited for the extraction of humid gases or vapours. Due to the use of process-compatible operating fluid and the possibility of different construction materials, it can be perfectly matched to different operating fluids and process conditions. In addition, it is available in many sizes on the market and can therefore extract very small and very high quantities of gas and vapour.     

Industrie 4.0

Industry 4.0 – Challenges for constructions of vacuum systems Vacuum systems are finding their way into branches and belonging modern process chains which were hardly in contact with UHV technology in the past. Besides an automatic operation and a flawless processing of parts, vacuum systems and their peripheral devices have to feature options for data output and analysis for subsequent processing in e.g. MES to come up with Industry 4.0 requirements. Subcomponents in vacuum technology partly comply with these requirements in a insufficient way because of their unchanged demands over the last decades. This makes integration into an automatic system more difficult. Despite of that, Industry 4.0 compliant vacuum systems are already producible when there's access to high-level experiences in vacuum and automation technology. This is shown by the examples of residual gas analysis and cleanliness measurement systems and the vacuum bake out oven. A cooperation of vacuum system manufacturers and manufacturers of components is necessary in the future to be able to produce automated vacuum systems in a more efficient way.     

Die Membranpumpe - Entwicklung und technischer Stand

The modern diaphragm pump has become a proven device for generating coarse and fine vacuum. The article describes disigns and functions of various construction types as well as state-of-the art development and manufacturing. Physical and technical demands have resulted in diaphragm pumps with typical ultimate pressures of 70 to 0,1 mbar and a pumping speed of several m³/h. As an almost chemically resistant pump, the diaphragm pump is used in the chemical laboratory. Combining a diaphragm pump with an oil-free, not against atmosphere compressing pump, a contamination-free pump assembly for (ultra-)high vacuum is obtained which is well suited for coating technology, vacuum metallurgy and semiconductor industry due to its oilfree operation.     

Is innovation design- or technology-driven? Citation as a measure of innovation pollination

The present study suggests a cross-citation measure comprised of design and utility patents and proposes a model of innovation pollination. The case of Dyson Ltd. provides empirical evidence of how a design-led, a technology-led, or a cross-pollinating innovation can function in the product innovation. Our findings reveal that the evolution of innovation pollination has distinguishing features according to the product category and the function of the company's prior innovation experience. Dyson's renowned bladeless fans and its bagless vacuum cleaners have been strongly driven by design and technology innovation, such cross-pollination is infrequent. We further discuss the implications technology, design, and innovation management strategy.