不同气氛保护下退火制备的CuO/SiO2复合薄膜微观结构分析

采用射频磁控共溅射法在Si(111)衬底上沉积Cu/SiO2复合薄膜.然后在N2和NH3保护下高温退火,再于空气中自然冷却氧化,制备出CuO结构,并对其微观结构进行分析.N2保护下退火温度为1100℃时样品中主晶相为立方晶系的CuO(200)晶面,薄膜样品表面出现纳米线状结构,表面组分主要包括Cu,O元素,冷却氧化形成CuO/SiO2复合薄膜.NH3气氛保护下退火,随着退火温度的升高,CuO由单斜晶相逐渐转变为立方晶相,CuO薄膜结晶质量提高.样品于900℃和1100℃退火后,形成有序散落的微米级颗粒,前者由粒状团簇组成,颗粒表面比较粗糙;后者由片融状小颗粒融合而成,颗粒表面比较光滑.     

不同气氛保护下退火制备的CuO/SiO2复合薄膜微观结构分析

采用射频磁控共溅射法在Si (111)衬底上沉积Cu/SiO2 复合薄膜,然后在N2和NH3保护下高温退火,再于空气中自然冷却氧化,制备出CuO结构,并对其微观结构进行分析. N2保护下退火温度为1100℃时样品中主晶相为立方晶系的CuO (200）晶面,薄膜样品表面出现纳米线状结构,表面组分主要包括Cu,O元素,冷却氧化形成CuO/SiO2复合薄膜. NH3气氛保护下退火,随着退火温度的升高,CuO由单斜晶相逐渐转变为立方晶相,CuO薄膜结晶质量提高. 样品于900℃和1100℃退火后,形成有序散落的微米级颗粒,前者由粒状团簇组成,颗粒表面比较粗糙;后者由片融状小颗粒融合而成,颗粒表面比较光滑.     

分层溅射法制备晶向可控的Mg2Si薄膜

采用分层溅射法在石英衬底上制备了结晶良好的Mg2Si多晶薄膜.当Si膜的溅射时间均为25min、Mg膜的溅射时间为18～22 min、退火温度为375℃时,随着膜厚增加,Mg2Si薄膜的织构由(311)向(220)转变;退火温度为400℃时,薄膜的最强衍射峰均为Mg2Si(220).所有样品均在256 cm1附近出现了...     

磁控溅射法制备BST铁电薄膜的实验研究

采用射频磁控溅射法在Si和Pt/TiOx/SiO2/Si衬底上沉积了(Ba0.65Sr0.35)TiO3铁电薄膜,研究了BST铁电薄膜微观结构和介电性能。实验结果表明:衬底温度在550℃,工作气压为2.0 Pa的溅射条件下沉积的BST薄膜,经750℃退火处理30 min后,形成了完整的钙钛矿相;与Si衬底相比,在Pt衬底上制备的BST薄膜晶粒更均匀、表面平整无裂纹。在室温、频率为100 kHz条件下薄膜的介电常数ε=353.8,介电损耗tanδ=0.012 8。介电温谱结果表明制备的(Ba0.65Sr0.35)TiO3铁电薄膜居里温度在5.0℃左右。     

Si(111)上生长LiNbO_3薄膜的研究

利用射频磁控溅射的方法,在Si(111)衬底上制备了LiNbO3薄膜。采用X射线衍射(XRD)和扫描电子显微镜(SEM)研究了衬底温度、退火温度和溅射气体压强对LiNbO3薄膜结晶和表面形貌的影响,并用椭圆偏振仪测量了薄膜的厚度和折射率。结果表明:衬底温度为450℃时制备的薄膜,退火前后都没有LiNbO3相生成;衬底温度为500～600℃时,LiNbO3薄膜出现(012)、(104)和(116)面衍射峰,经600℃退火后3个衍射峰的强度加强;衬底温度为600℃时,经600～900℃退火得到的LiNbO3薄膜,除出现(012)、(104)和(116)面衍射峰外,还出现(006)面衍射峰;溅射气体压强从0.8 Pa增大到2.4 Pa时,经800℃退火后得到的LiNbO3薄膜表面晶粒团簇变小,而0.8 Pa制备的薄膜经800℃退火后LiNbO3相的结晶程度较其它压强下完善;900℃退火后得到的LiNbO3薄膜折射率为2.25,与LiNbO3晶体相当。     

PLD法制备ZnO薄膜的退火特性和蓝光机制研究

通过脉冲激光沉积(PLD)方法,在O2中和100～500℃衬底温度下,用粉末靶在Si(111)衬底上制备了ZnO薄膜,在300℃温度下生长的薄膜在400～800℃温度和N2氛围中进行了退火处理,用X射线衍射(XRD)谱、原子力显微镜(AFM)和光致发光(PL)谱表征薄膜的结构和光学特性。XRD谱显示,在生长温度300℃时获得较好的复晶薄膜,在退火温度700℃时获得最好的六方结构的结晶薄膜;AFM显示,在此退火条件下,薄膜表面平整、晶粒均匀;PL谱结果显示,在700℃退火时有最好的光学特性。     

磁控溅射的TaN薄膜的扩散阻挡性能

用反应磁控溅射方法在SiO2/Si(100)衬底和Cu薄膜间溅射一层TaN阻挡层,测试不同N气分压及热处理温度下Cu/TaN/SiO2/Si薄膜的显微结构和电阻特性.同时利用微细加工技术加工了镂空的Cu互连叉指测试结构,研究了TaN薄膜在镂空的铜互连结构中的扩散阻挡性能.结果发现,在退火温度不超过400 ℃时,薄膜电阻率均低于80μΩ·cm,而当溅射N分压超过10%,退火温度超过400℃时,薄膜电阻率很快上升.低N气分压下(≤10%)溅射时,即使退火温度达到600 ℃,薄膜电阻基本不变.     

Ni纳米线的化学还原法可控制备北大核心

利用化学还原法制备了Ni纳米线,通过扫描电子显微镜（SEM）研究了制备参数（磁场强度、Ni 2＋离子浓度和反应温度）对Ni纳米线合成以及结构的影响。实验结果表明：磁场强度是影响Ni纳米线直径均匀性的关键因素。无外加磁场时所制得的产物为Ni纳米颗粒;当磁场强度达到0.25 T时,纳米线的长度较长,直径较均匀。Ni 2＋离子浓度决定着纳米线直径的大小。Ni 2＋浓度越低,直径越小。反应温度影响成核以及纳米线的表面形貌。当温度低于50℃时,溶液中没有纳米线生成,说明溶液没有反应;当反应温度在60~80℃范围内时,纳米线的表面均有明显的刺状结构;当温度高于85℃时,纳米线表面的刺状结构数目明显减少,形成了光滑的表面。     

a-SiO_x∶H/a-SiO_y∶H多层薄膜微结构的退火行为

采用 PECVD技术在 P型硅衬底上制备了 a- Si Ox∶ H/a- Si Oy∶ H多层薄膜 ,利用 AES和 TEM技术研究了这种薄膜微结构的退火行为 .结果表明 :a- Si Ox∶ H/a- Si Oy∶ H多层薄膜经退火处理形成 nc- Si/Si O2 多层量子点复合膜 ,膜层具有清晰完整的结构界面 .纳米硅嵌埋颗粒呈多晶结构 ,颗粒大小随退火温度升高而增大 .在一定的实验条件下 ,样品在 650℃下退火可形成尺寸大小合适的纳米硅颗粒 .初步分析了这种多层复合膜形成的机理     

石墨衬底多晶硅籽晶层制备及性质

采用磁控溅射技术在石墨衬底上制备多晶硅籽晶层,系统研究了不同衬底温度、不同快速热退火(RTA)温度和时间对籽晶层结构性质的影响。通过X射线衍射(XRD)仪测试分析,发现溅射过程中衬底温度对于结晶质量有着至关重要的影响,即衬底温度为700℃是形成Si(220)晶面择优取向的临界温度,当衬底温度高于700℃时,Si(220)晶面衍射峰峰高随衬底温度的增加显著增大。在RTA过程中,提高退火温度和延长退火时间均能够提高薄膜多晶硅籽晶层Si(220)晶面的择优取向。     

Dendrite‐Assisted Growth of Silicon Nanowires in Electroless Metal Deposition

This article concerns the detailed investigations on the silver dendrite‐assisted growth of single‐crystalline silicon nanowires, and their possible self‐assembling nanoelectrochemistry growth mechanism. The growth of silicon nanowires was carried out through an electroless metal deposition process in a conventional autoclave containing aqueous HF and AgNO₃ solution near room temperature. In order to explore the mechanism and prove the centrality of silver dendrites in the growth of silicon nanowires, other etching solution systems with different metal species were also investigated in this work. The morphology of etched silicon substrates strongly depends upon the composition of the etching solution, especially the metal species. Our experimental results prove that the simultaneous formation of silver dendrites is a guarantee of the preservation of free‐standing nanoscale electrolytic cells on the silicon substrate, and also assists in the final formation of silicon nanowire arrays on the substrate surface.     

Growth and characterization of ZnO nanowires grown on the Si(1 1 1) and Si(1 0 0) substrates: Optical properties and biaxial stress of nanowires

In this paper the effects of silicon substrates with different orientations on the morphological and optical properties as well as biaxial stress of ZnO nanowires were investigated. The ZnO nanowires were grown on Si(1 0 0) and Si(1 1 1) substrates by the vapor–solid (VS) method using a physical vapor deposition reactor. In addition ZnO nanowires were grown on Si(1 1 1) substrate by the vapor–liquid–solid (VLS) method using an Au film as catalyst, which were deposited on Si(1 1 1) substrate using a sputtering method, with the same conditions. Room temperature photoluminescence (PL) spectrum showed a stronger ultraviolet (UV) peak at 381 nm for the nanowires that were grown on Si(1 1 1) by the VS method than those that were grown on Si(1 0 0) with the same green emission (deep-level emission (DLE)) intensities at about 520 nm peak. On the other hand, the PL result of the ZnO nanowires, which were grown by the VLS method, showed the same intensities for the both UV and DLE peaks. Furthermore, the effects of silicon substrate orientation and Au catalyst on biaxial stress of the nanowires were studied by Raman spectrometer. It was discussed that Au catalyst was one of the important factors that could affect the biaxial stress value of the ZnO nanowires that were grown on Si substrates.     

Orientation‐Controlled Selective‐Area Epitaxy of III–V Nanowires on (001) Silicon for Silicon Photonics

Monolithic integration of III–V nanowires on silicon platforms has been regarded as a promising building block for many on‐chip optoelectronic, nanophotonic, and electronic applications. Although great advances have been made from fundamental material engineering to realizing functional devices, one of the remaining challenges for on‐chip applications is that the growth direction of nanowires on Si(001) substrates is difficult to control. Here, catalyst‐free selective‐area epitaxy of nanowires on (001)‐oriented silicon‐on‐insulator (SOI) substrates with the nanowires aligned to desired directions is proposed and demonstrated. This is enabled by exposing {111} planes on (001) substrates using wet chemical etching, followed by growing nanowires on the exposed planes. The formation of nanowire array‐based bottom‐up photonic crystal cavities on SOI(001) and their coupling to silicon waveguides and grating couplers, which support the feasibility for on‐chip photonic applications are demonstrated. The proposed method of integrating position‐ and orientation‐controllable nanowires on Si(001) provides a new degree of freedom in combining functional and ultracompact III–V devices with mature silicon platforms.     

Direct electrodeposition of highly ordered magnetic nickel nanowires on silicon wafer

Highly ordered nickel nanowire (50 and 12 nm in diameter) arrays were successfully deposited into the nanoporous alumina template film on a gold-coated silicon wafer. The electrodeposited nickel nanowires have a preferred (220) fibre texture, that is the [110] direction parallel to the wire axis. With electropolishing, nanoporous alumina template with ordered and uniform pores was prepared by anodisation. By complete removal of the barrier layer and careful control of electrodeposition procedures, nearly 100% pore filling of uniform nanowires can be directly deposited onto the Au-coated silicon substrate, therefore no pattern transfer is necessary and incorporation of these nanowires into silicon-based devices is readily possible     

Luminescent Colloidal Dispersion of Silicon Quantum Dots from Microwave Plasma Synthesis: Exploring the Photoluminescence Behavior Across the Visible Spectrum

Aiming for a more practical route to highly stable visible photoluminescence (PL) from silicon, a novel approach to produce luminescent silicon nanoparticles (Si‐NPs) is developed. Single crystalline Si‐NPs are synthesized by pyrolysis of silane (SiH₄) in a microwave plasma reactor at very high production rates (0.1–10 g h^?1). The emission wavelength of the Si‐NPs is controlled by etching them in a mixture of hydrofluoric acid and nitric acid. Emission across the entire visible spectrum is obtained by varying the etching time. It is observed that the air oxidation of the etched Si‐NPs profoundly affects their optical properties, and causes their emission to blue‐shift and diminish in intensity with time. Modification of the silicon surface by UV‐induced hydrosilylation also causes a shift in the spectrum. The nature of the shift (red/blue) is dependent on the emission wavelength of the etched Si‐NPs. In addition, the amount of shift depends on the type of organic ligand on the silicon surface and the UV exposure time. The surface modification of Si‐NPs with different alkenes results in highly stable PL and allows their dispersion in a variety of organic solvents. This method of producing macroscopic quantities of Si‐NPs with very high PL stability opens new avenues to applications of silicon quantum dots in optoelectronic and biological fields, and paves the way towards their commercialization.     

Electric‐Driven Rotation of Silicon Nanowires and Silicon Nanowire Motors

In this work, the first highly controllable assembly and rotation of silicon nanowires and nanomotors in suspension are reported. Si and Si composite nanowires are fabricated with precisely controlled dimensions via colloidal assisted catalytic etching. The nanowires can be rotated with deterministic speed and chirality. The rotation speed and orientation not only depend on the applied AC electric frequency, but also on the electronic type, geometry, surface coating, as well as the electric conductance of suspension mediums. Theoretical analysis is used to understand the rotation of Si nanowires, and also the electric resistivity of Si nanowires is determined from their mechanical rotation. The Si nanowires are precisely assembled into nanomotors that can be rotated with controlled speeds and orientations at prescribed locations. This work provides a new paradigm for designing and actuating various Si‐based nanoelectromechanical system (NEMS) devices, which are relevant to man‐made nanomotors, nanorobots, and nanoengines.     

Integration of SiC-1D nanostructures into nano-field effect transistors

We report on the integration and the electrical transport properties of silicon carbide-based one-dimensional nanostructures into field effect transistors. Different kinds of SiC-based 1D nanostructures have been used: 3C– and 4H–SiC nanowires obtained by a plasma etching process, Si–SiC core–shell nanowires and SiC nanotubes both obtained by a carburization route of silicon nanowires.     

Si(100)衬底对ZnO纳米线阵列生长方向的控制作用

采用热分解ZnO粉末法,以Au为催化剂,在Si(100)衬底上外延生长了ZnO纳米线阵列。用扫描电子显微镜(SEM)分析表明:ZnO纳米线的直径在100nm左右,长度约3μm,与衬底表面的夹角约为70.5°,纳米线具有四个特定的倾斜方向A,B,C,D。X射线衍射(XRD)图谱上只有ZnO(0002)衍射峰,说明ZnO纳米线沿C轴择优生长。结合Si与ZnO的晶格结构特征,理论研究得出ZnO纳米线与Si基片的晶格匹配关系为:[0001]_(ZnO)∥[114]_(Si),[0001]_(ZnO)∥[■■4]_(Si),[0001]_(ZnO)∥[1■4]_(Si),[0001]_(ZnO)∥[■14]_(Si),失配度为1.54%。得出了Si(100)衬底对ZnO纳米线生长方向具有控制作用的结论。     

非晶SiO2纳米线的合成及其显微结构和光学性质的研究

本研究以硅片为衬底,热蒸发一氧化硅粉末在较低温度下合成了大量直径均匀的非晶SiO2纳米线.这些纳米线直径分布在15 nm～40 nm之间,长度几十微米.选区电子衍射(SAED)、能谱(EDS)、电子能量损失谱(EELS)分析结果表明这些纳米线为非晶SiO2纳米线.光致发光(PL)谱测试结果显示纳米线在波长550 nm处存在一个较强的PL峰.本文进一步指出了蒸发源SiO粉末的颗粒度和蒸发温度对纳米线生长有强烈的影响.     

ZnSe–Si Bi‐coaxial Nanowire Heterostructures

We report on the fabrication, structural characterization, and luminescence properties of ZnSe/Si bi‐coaxial nanowire heterostructures. Uniform ZnSe/Si bi‐coaxial nanowire heterostructures are grown on silicon substrates by the simple one‐step thermal evaporation of ZnSe powder in the presence of hydrogen. Both ZnSe and silicon are single‐crystalline in the bi‐coaxial nanowire heterostructures, and there is a sharp interface along the nanowire axial direction. Furthermore, secondary nanostructures of either ZnSe nanobrushes or a SiO_x sheath are also grown on the primary bi‐coaxial nanowires, depending on the ratio of the source materials. The experimental evidence strongly suggests that bi‐coaxial nanowires are formed via a co‐growth mechanism, that is, ZnSe terminates specific surfaces of silicon and leads to anisotropic, one‐dimensional silicon growth, which simultaneously serves as preferential nucleation sites for ZnSe, resulting in the bi‐coaxial nanowire heterostructures. In addition, the optical properties of ZnSe/Si nanowires are investigated using low‐temperature photoluminescence spectroscopy.