Transparent amorphous In-Ga-Zn-O thin film as function of various gas flows for TFT applications

The electrical and optical properties of amorphous indium gallium zinc oxide (a-IGZO) films, which can be used as a channel layer, deposited by radio frequency (rf) magnetron sputtering system at room temperature (RT), were investigated as function of various gas flows. The optical transmittance of films deposited under Ar, O₂ / Ar + O₂ and O₂ / Ar-4% H₂ + O₂ atmospheres in the visible wavelength was consistently above 90% at a wavelength of 550 nm at all gas flows, although the film deposited under Ar-4% H₂ atmosphere exhibited a transmittance of below 50%. The carrier concentration and mobility of the a-IGZO films fabricated under Ar and Ar-4% H₂ were observed slight decrease as a function of the flow, respectively. The thin film transistors (TFTs) with an a-IGZO channel deposited under Ar and Ar-4% H₂ atmosphere exhibited the following good characteristics: V_th of 0.34 V, µ_FE of 3.6 cm² V^− 1 s^− 1, on/off ratio of 10⁶, and S value of 0.04 V decade^− 1.     

Conductive Ga doped ZnO/Cu/Ga doped ZnO thin films prepared by magnetron sputtering at room temperature for flexible electronics

Ga doped ZnO(GZO)/Cu/GZO multilayers were deposited by magnetron sputtering on polycarbonate substrates at room temperature. We investigated the structural, electrical, and optical properties of multilayers at various thicknesses of Cu and GZO layers. The lowest resistivity value of 3.3 × 10^− 5 Ω cm with a carrier concentration of 2.9 × 10²² cm^− 3 was obtained at the optimum Cu (10 nm) and GZO (10 nm) layer thickness. The highest value of figure of merit φ_TC is 2.68 × 10^− 3 Ω^− 1 for the GZO (10 nm)/Cu(10 nm)/GZO(10 nm) multilayer. The highest average near infrared reflectivity in the wavelength range 1000-2500 nm is as high as 70% for the GZO(10 nm)/Cu(10 nm)/GZO(10 nm) multilayer.     

Natively textured surface aluminum-doped zinc oxide transparent conductive layers for thin film solar cells via pulsed direct-current reactive magnetron sputtering

Natively textured surface aluminum-doped zinc oxide (ZnO:Al) layers for thin film solar cells were directly deposited without any surface treatments via pulsed direct-current reactive magnetron sputtering on glass substrates. Such an in-situ texturing method for sputtered ZnO:Al thin films has the advantages of efficiently reducing production costs and dramatically saving time in photovoltaic industrial processing. High purity metallic Zn-Al (purity: 99.999%, Al 2.0 wt.%) target and oxygen (purity: 99.999%) were used as source materials. During the reactive sputtering process, the oxygen gas flow rate was controlled using plasma emission monitoring. The performance of the textured surface ZnO:Al transparent conductive oxides (TCOs) thin films can be modified by changing the number of deposition rounds (i.e. thin-film thicknesses). The initially milky ZnO:Al TCO thin films deposited at a substrate temperature of ~ 553 K exhibit rough crater-like surface morphology with high transparencies (T ~ 80-85% in visible range) and excellent electrical properties (ρ ~ 3.4 × 10^− 4 Ω cm). Finally, the textured-surface ZnO:Al TCO thin films were preliminarily applied in pin-type silicon thin film solar cells.     

Effect of hot-filament annealing in a hydrogen atmosphere on the electrical and structural properties of Nb-doped TiO2 sputtered thin films

In this work Nb-doped TiO2 thin films were deposited by d.c.-pulsed reactive magnetron sputtering at 500 °C from a composite target with weight fractions of 96% Ti and 4% Nb, using oxygen as reactive gas. In order to enhance the conductive properties, the as-deposited samples were treated in vacuum with atomic hydrogen at a substrate temperature of 500 °C. The atomic hydrogen flow was generated by a hot filament, inside a high-vacuum chemical vapour deposition reactor, at a temperature of 1750 °C. In order to optimise the hydrogen hot-wire treatments, the H₂ pressure was varied between 1.3 and 67 Pa, the treatment time was monitored between 1 and 5 min and the hot-filament current was changed between 12 and 17 A. Dark conductivity was measured as a function of temperature and its value at room temperature was extrapolated and used to assess the effect of the hydrogen annealing on the charge transport properties. A two-order of magnitude increase in dark conductivity was typically observed for optimised hydrogen treatments (10 Pa), when varying the hydrogen pressure, resulting in a minimum resistivity of ~ 3 × 10^− 3 Ω cm at room temperature. The maximum amount of atomic H incorporation in oxygen vacancies was determined to be ~ 5.7 at.%. Carrier mobility and resistivity were also investigated using Hall effect measurements. Correlations between structural and electrical properties and the hydrogen treatment conditions are discussed. The purpose of these films is to provide a transparent and conductive front contact layer for a-Si based photovoltaics, with a refractive index that better matches that of single and tandem solar cell structures. This can be achieved by an appropriate incorporation of a very small amount of cationic doping (Nb^5 +) into the titanium dioxide lattice.     

Reactive magnetron sputtering from a composite target for large area BaPbO3 thin film electrode

Radio frequency reactive magnetron sputtering from a composite target made of PbO pellets uniformly positioned on a metallic Ba disc has been utilized for BaPbO₃ electrode deposition on 150 mm Si wafers. The reactive sputtering process has been analyzed in relation to sputtering parameters for composite targets with different percentage of PbO coverage. The process optimization method for in situ crystallized BaPbO₃ thin film fabrication has been emphasized. The growth of BaPbO₃ films has been discussed from the viewpoint of the BaO-PbO phase diagram and thermodynamics of Ba_n + 1Pb_nO_3n + 1 (n = 1, 2, ∞) phase formation. The microstructure analysis of the deposited films has been performed with atomic force microscopy and wide-angle X-ray diffraction (XRD) techniques. The grazing angle XRD measurements reveal the formation of a Ba₂PbO₄ phase in the film fabricated at 450 °C. The Ba₂PbO₄ phase content decreases with decreasing substrate temperature. The BaPbO₃ film deposited at a substrate temperature of 430 °C on naturally oxidized (001) Si wafers shows an electrical resistivity of 1.13 mΩ·cm. The BaPbO₃ films deposited on SiO₂ (native oxide)/Si wafer do not exhibit a preferred orientation whereas use of (111) Pt/SiO₂/Si substrate results in highly (111)-oriented films.     

Electrochemical performances of NiO/Ni2N nanocomposite thin film as anode material for lithium ion batteries

Despite the high specific capacities, the practical application of transition metal oxides as the lithium ion battery (LIB) anode is hindered by their low cycling stability, severe polarization, low initial coulombic efficiency, etc. Here, we report the synthesis of the NiO/Ni₂N nanocomposite thin film by reactive magnetron sputtering with a Ni metal target in an atmosphere of 1 vol.% O₂ and 99 vol.% N₂. The existence of homogeneously dispersed nano Ni₂N phase not only improves charge transfer kinetics, but also contributes to the one-off formation of a stable solid electrolyte interphase (SEI). In comparison with the NiO electrode, the NiO/Ni₂N electrode exhibits significantly enhanced cycling stability with retention rate of 98.8% (85.6% for the NiO electrode) after 50 cycles, initial coulombic efficiency of 76.6% (65.0% for the NiO electrode) and rate capability with 515.3 mA·h·g⁻¹ (340.1 mA·h·g⁻¹ for the NiO electrode) at 1.6 A·g⁻¹.