薄二氧化硅MOS电容电离辐射陷阱电荷研究

采用高频C-V曲线方法,研究了50nm及15nm MOS电容电离辐射空穴陷阱及界面态的建立过程.二种样品电离辐射空穴陷阱电荷密度在1×103Gy(Si)剂量下近乎相同,而在大于3×103Gy(Si)剂量下,50nm MOS电容的电荷密度约为15nm MOS电容的2倍.利用电离辐射后的隧道退火效应,计算出二种样品电离辐射陷阱电荷在Si-SiO2界面附近分布的距离均约为4nm.     

不同剂量率LC54HC04RH电路的电离辐射效应

对 L C54HC0 4 RH电路在不同辐射剂量率进行了电离辐射实验。分析了该电路的阈值电压随辐射剂量率的变化关系。实验结果表明 :在辐射剂量率处于 3× 10 -4 Gy(Si) / s到 1.98×10 -1Gy(Si) / s范围内 ,辐射感生界面陷阱电荷随辐射剂量率的减少而增加。辐射感生界面陷阱电荷是导致该电路在空间辐射环境下失效的主要原因。     

用真空紫外辐照研究Si-SiO_2界面的氧化层陷阱和界面态

以氦灯真空紫外光源研究了辐照下 n(100)硅衬底MOS样品的氧化层陷阱和Si-SiO_2界面态.发现在湿氧和干氧氧化层中都存在密度为10~(12)/cm~2数量级的空穴陷阱,部分氧化层中有密度为10~(11)/cm~2的受主型电子陷阱.湿氧样品在正偏置和零偏置辐照后出现具有确定能级(E_c-E_s(?)0.40eV)的界面态密度宽峰.辐照引进的界面态和空穴被陷阱俘获有关,在1×10~(10)～5 × 10~(11)cm~(-2)·eV~(-1)范围,禁带中央界面态密度正比于被俘获空穴的密度.辐照产生的界面态不能由电子注入加以消除.本文由空穴俘获-弱键破裂模型讨论了实验结果.     

注氟MOSFET电离辐射响应特性

对氢氧合成栅氧化后注F的MOSFET进行了γ射线辐照试验,分析了不同注F剂量的MOSFET电离辐射响应特性。结果表明,在1×10~(15)～1×10~(16)F/cm~2F注量范围内,注F能够明显抑制辐射感生氧化物电荷和界面态的增长,且F注量越高,抑制能力越强,F的注入能减少工艺过程所带来的氧化物电荷和界面态。用Si一F结键替代其它在辐射过程中易成为电荷陷阱的应力键模型对实验结果进行了讨论。可以预测,F在Si/SiO_2界面附近和SiO_2中的行为直接与MOS结构的辐射响应相对应,而F的行为依赖于注F工艺条件。     

MOS结构辐照陷阱消长研究的快速I—V技术

建立了一套用于MOS结构辐照陷阱消长规律研究的快速I－V在线测试系统，用此系统可进行自动加偏和Ids－Vgs亚阈曲线测试，从而可快速定性定量地获得辐照和退火环境中氧化物电荷和Si／SiO_2界面态随辐照剂量、时间、偏置等的依赖关系。快速I－V测试系统最高可以达到1次／秒的Ids－Vgs测量速度。用此系统研究了PMOSFET5×10~3Gy（Si）总剂量辐照后100℃恒温退火下，辐照陷阱的消长规律和机制。     

HCl氧化物MOS结构质子辐照诱导的界面陷阱效应

用微分电容法研究质子辐照HCl氧化物铝栅MOS结构诱导的界面陷阱,栅氧化层在1 160℃很干燥的、含0～10％HCl的气氛中热生长而成,质子辐照能量为120～300keV,注入总剂量范围为8×10~(13)～1×10~(16)p/cm~2。结果表明,辐照诱导的界面陷阱能级密度随质子能量、剂量增加而增加。然而,氧化层中掺入6％HCl时,辐照诱导的界面陷阱明显减少。这样,已能有效地改变MOS器件的抗辐照性能。实验结果可用H~+二级过程解释。     

N型6H-SiCMOS电容的电学特性

在可商业获得的 N型 6 H- Si C晶片上 ,通过化学气相淀积 ,进行同质外延生长 ,在此结构材料上 ,制备 MOS电容 .详细测量并分析了 6 H- Si C MOS电容的电学特性 ,其有效电荷密度为 4.3× 10 1 0 cm- 2 ;Si C与 Si O2 之间的势垒高度估算为 2 .6 7e V;Si C热生长 Si O2 的本征击穿场强 (用累计失效率 5 0 %时的场强来计算 )为 12 .4MV/ cm ,已达到了制作器件的要求 .     

电场偏置对MOS器件电离辐射效应的影响

研究了外加电场对MOS器件电离辐射效应的影响.采用10 keV X射线对MOS器件在正/反电场偏置条件下进行总剂量辐射,分析了MOS器件辐射前后阈值电压的漂移量.实验结果表明,正偏情况下MOS器件的阈值电压漂移量远大于反偏情况下MOS器件的阈值电压漂移量.基于一维连续性方程,在考虑电子-空穴对的复合/逃逸率、电子及空穴的捕获横截面与外加电场关系的基础上,模拟了辐射诱生栅氧化层内陷阱电荷与辐射总剂量之间的关系,分析了陷阱电荷对MOS器件阈值电压的影响,仿真结果与实验数据吻合良好.     

MOS晶体管中辐照引起的陷阱正电荷的强压退火

电离辐射在 MOS结构的 Si O2 层中建立正陷阱电荷 ,这些正陷阱电荷在正强栅偏压( + 2 0 V)下迅速减少 ,这是由于正栅压引起硅衬底中的电子向 Si O2 层隧道注入 ,从而与陷阱正电荷复合 .正栅压退火不仅对 N沟 MOS结构非常有效 ,对 P沟 MOS结构也有一定的影响 .给出了辐照后的 NMOS和 PMOS晶体管在强正栅压下退火的实验结果 ,阐明了正栅压下的“隧道退火”机理 .     

MOS栅氧的界面特性和辐照特性研究

通过交流电导法,对经过不同时间N₂O快速热处理(RTP)的MOS电容进行界面特性和辐照特性研究。通过电导电压曲线,分析N₂O RTP对Si-SiO₂界面陷阱电荷和氧化物陷阱电荷造成的影响。结论表明,MOS电容的Si-SiO₂界面陷阱密度随N₂O快速热处理时间先增加再降低;零偏压总剂量辐照使氧化层陷阱电荷显著增加,而Si-SiO₂界面陷阱电荷轻微减少。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.     

Diode-end-pumped Nd:YVO4/LBO lasers with 4.2W continuous-wave output at 457 nm

A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working.     

A rigorous proof of MIMO channel capacity’s increase with antenna number

It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output（MIMO） communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.     

Call for Papers

正Wireless Body-area Networks The last decade has witnessed the convergence of three giant worlds:electronics,computer science and telecommunications.The next decade should follow this convergence in most of our activities with the generalization of sensor networks.In particular with the progress in medicine,people live longer and the aging of population will push the development of wireless personal networks