微硅陀螺性能影响因素及其对策研究

论述了微硅陀螺的发展概况,总结了微硅陀螺的几类典型结构,分析了微硅振动陀螺总体性能的影响因素.从制作工艺、材料特性、系统模型的确立及接口设计上详细分析了性能约束因子.针对这些约束因素,本文提出了提高振动微硅陀螺性能的对策及发展方向.     

微硅陀螺性能影响因素及其对策研究

论述了微硅陀螺的发展概况 ,总结了微硅陀螺的几类典型结构 ,分析了微硅振动陀螺总体性能的影响因素。从制作工艺、材料特性、系统模型的确立及接口设计上详细分析了性能约束因子。针对这些约束因素 ,本文提出了提高振动微硅陀螺性能的对策及发展方向     

硅微机械陀螺接口检测技术的研究

研究了微陀螺的电容变化率为１０＾７－１０＾－８时的微弱输出信号的检测技术,这是微机械器件研制中具有普遍性的技术难点。在研究检测微小电容变化量的积分电路的基础上,进一步采用了可抑制低频噪声和漂移的相关双采样技术,以及抑制由开关电荷注入引起的误差的技术。     

一种具有隔振框架的解耦硅微陀螺

提出了一种利用隔振框架解耦的硅微陀螺,其驱动模态和检测模态不仅有各自独立的支撑结构,还有各自独立的惯性质量块,隔振框架隔离了驱动结构和检测结构,减小了模态之间的交叉耦合;利用TMAH湿法腐蚀结合深反应离子刻蚀工艺,在n型〈100〉低阻硅片上制作出了微陀螺样片,并为其研制了配套的测控电路;测试结果表明,驱动模态频率为2.981kHz,品质因子为800,检测模态频率为2.813kHz,品质因子为34,刻度因子为38mV/(°/s),线性度优于0.8%,微陀螺在0.5h内的零偏稳定度为0.28°/s.     

一种具有隔振框架的解耦硅微陀螺

提出了一种利用隔振框架解耦的硅微陀螺,其驱动模态和检测模态不仅有各自独立的支撑结构,还有各自独屯的惯性质量块,隔振框架隔离了驱动结构和检测结构,减小了模态之间的交叉耦合;利用TMAH湿法腐蚀结合深反应离子刻蚀工艺,在n型<100>低阻硅片上制作出了微陀螺样片,并为其研制了配套的测控电路;测试结果表明,驱动模态频率为2.981kHz,品质因子为800,检测模态频率为2.813kHz,品质因子为34,刻度因子为38mV/(°/s),线性度优于0.8%,微陀螺在0.5h内的零偏稳定度为0.28°/s.     

二维硅微机械陀螺的研究

报道了一种依靠载体的旋转作为驱动,能敏感载体偏航角速度与自转角速度的二维硅微机械陀螺的原理、硅摆制作、敏感元件封装和检测。分别用仿真器和速率转台对其二维特性进行测试,结果证实该硅微机械陀螺能够敏感旋转载体的偏航和旋转体自身的角速度,比例系数随旋转角速度增加而增加。陀螺性能测试说明这种陀螺达到中等精度的使用要求。     

硅微机械陀螺信号偏置电路设计

针对工程设计及硅微机械陀螺的技术要求,在原有的陀螺输出信号的基础上零位偏置,由双极性陀螺信号变为单极性陀螺信号,并把应用环境中的+12V单电源供电设计成正负双电源供电。根据传递函数,设计了电路,对电路进行了Pspice仿真,仿真结果显示电路设计正确,最后设计了PCB,经测试符合技术要求。     

无驱动结构硅微机械陀螺的信号处理

微机械陀螺因其微型化、低成本等优点,广泛用于微系统的姿态稳定与控制系统.研究了无驱动结构硅微机械陀螺的信号处理技术.通过硬件电路和软件算法及补偿技术,将旋转载体的滚动、俯仰和偏航的三维姿态角速度信号同时提取并输出.该陀螺可用于旋转载体的姿态测量和控制技术领域.     

基于神经网络滤波的微硅陀螺输出补偿研究

采用神经网络滤波器对微硅陀螺输出信号进行非线性校正。改进了Levenberg—Marquardt算法,使之用于动态回归神经网络的训练。实验比较了有反馈和无反馈两种滤波器的校正效果,并采用相关分析法对模型的有效性进行了检验。通过实验验证表明,该模型是有效的,无输出反馈滤波收敛快,效果较好,经过校正的微硅陀螺的输出误差大为降低。     

叉指式微硅加速度计的参数化设计

详细阐述了微硅加速度计的原理 ,根据材料力学以及结构动力学原理 ,分析了叉指式驱动 /检测结构的动力学模型 ,推导了等效质量、等效阻尼、等效刚度等关键参数模型 ,分析了灵敏度、横向干扰等和结构参数的关系 ,为微硅加速度计的优化设计与改进提供了理论指导 ,实现了最优化设计和仿真     

叉指式微硅加速度计的参数化设计

详细阐述了微硅加速度计的原理，根据材料力学以及结构动力学原理，分析了叉指式驱动／检测结构的动力学模型，推导了等效质量、等效阻尼、等效刚度等关键参数模型，分析了灵敏度、横向干扰等和结构参数的关系，为微硅加速度计的优化设计与改进提供了理论指导，实现了最优化设计和仿真。     

An overview of fiber-optic gyroscopes

The principles of operation of fiber-optic gyroscopes are reviewed. Performance-limiting phenomena are discussed along with methods to reduce their effect on the rotation-rate signal. Current technology and performance of state-of-the-art systems are presented. Finally, a direction of future research and possible applications are indicated.     

光纤陀螺研究综述

从光纤陀螺诞生以来，它就以其显著的优点、灵活的结构和诱人的前景引起了世界上诸多国家的大学和科研机构的普遍重视。为此综述了光纤陀螺的基本原理和它的特点以及分类，并着重介绍了光纤陀螺的国内外发展状况。     

Frequency division multiplexing of fiber-optic gyroscopes

The principle of operation of a 2-D frequency-division-multiplexed fiber-optic gyroscope (FDM-FOG) system is presented under the assumption that the two gyro signals do not interfere with each other. The theory is expanded to include the residual cross-interference effect, which may be minimized by proper choice of modulation depths or frequencies. A 2-D FDM-FOG system is realized with a noise equivalent rotation rate of 0.23°/h (0.25 Hz NEB)     

环境对大型激光陀螺仪的影响研究综述

基于萨格纳克效应的大型激光陀螺仪被认为是精确监测地球自转的合适传感器,可用于潜在的地面科学研究和重大工程应用,如世界时UT1精密测量,地球固体潮观测、旋转地震波探测、广义相对论预言引力磁效应等领域。激光陀螺的灵敏度随环形腔尺寸增大而提高,其运行的长期稳定性受环境变化的影响。本文从激光陀螺仪工作原理出发,梳理了温度、倾斜、气压和风等环境变化对大型激光陀螺仪灵敏度和稳定度的影响,分析说明监测环境因素变化对其输出的萨格纳克频差修正和处置方法,为提高大型激光陀螺仪应用性能提供相关指导。     

几种微光学陀螺的研究进展

除了以硅为基的微光学陀螺外,国内外提出了研究新型微光学陀螺的多种方案,文中介绍了利用耦合共振慢光波导的微光学陀螺,以ZBLAN氟锆酸盐波导为基的微光学陀螺,重点介绍了基于光子晶体波导的微光学陀螺,并且指出了微光学陀螺的发展趋势。     

Reliability of vacuum packaged MEMS gyroscopes

The greatest challenge for the successful commercialization of MEMS (micro-electro-mechanical system) technology is proving its reliability. Of concern in particular are the reliability and long-term stability of wafer level vacuum packaged MEMS gyroscope sensors subjected to cyclic mechanical stresses at high frequencies. In this study, we carried out several reliability tests and investigated the failure mechanisms of the anodically bonded vacuum gyroscope sensors designed for commercial electronic products. Particularly we studied mechanical reliability issues such as fatigue, shock, and vibration. It was found that successful vacuum packaging could be achieved through the optimization of the bonding process by reducing leakage and the deposition of titanium coating for reducing out-gassing inside the cavity. The effects of the pre-baking process are also described in this study. The current design of the gyroscope structure is found to be safe from fatigue failure for the 1000 h of operation test. The MEMS gyroscope sensor survives the drop and vibration qualification tests for electronic products without any damage, indicating the robustness of the sensor. The reliability test results presented in this study demonstrate that the MEMS gyroscope sensor is very close to commercialization.     

Influence of Mn doping on the microstructure and optical property of ZnO

Undoped and Mn-doped ZnO samples with different percentage of Mn content (1, 2 and 3 mol%) were synthesized by a simple solvo-thermal method. We have studied the structural, chemical and optical properties of the samples by using X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive X-ray (EDX) analysis, Fourier transform infrared (FTIR) spectroscopy and UV–VIS spectroscopy. The XRD spectra show that all the samples are hexagonal wurtzite structures. The lattice parameters calculated for the Mn-doped ZnO from the XRD pattern were found to be slightly larger than those of the undoped ZnO, which indicates substitution of Mn in ZnO lattice. SEM photograph shows that the grain size of undoped ZnO is bigger than the Mn-doped ZnOs, indicating hindrance of grain growth upon Mn doping. As the Mn doping increases the optical band gap decreases for the range of Mn doping reported here.