基于MBE生长的一种Be掺杂InGaAs基区的新结构InGaP/InGaAs/GaAs DHBT

报道了一种以InGaAs为基区的新结构InGaP/InGaAs/GaAs双异质结晶体管,获得了直流性能良好的器件.其共射直流增益β达到100,残余电压Voffset约为0.4V,膝点电压Vknee约为1V,击穿电压BVceo超过10V,器件的基极和集电极电流理想因子分别为nb=1.16,nc=1.11,可应用于低功耗、高功率领域.     

InGaAs/Si雪崩光电二极管

采用Si/InP低温晶片键合技术,设计并制作了InGaAs/Si雪崩光电二极管.器件利用InGaAs做吸收层,Si做增益层,光敏面大小50μm×70μm;测试结果表明器件有正常的光响应特性,击穿电压为41 V,暗电流为99 nA,此时光电流比暗电流高3个数量级.     

InGaAs台面探测器的AIN钝化研究

首次介绍了采用AlN介质薄膜为钝化层的InGaAs台面型探测器(λ=2.4 μm).探测器采用分子束外延(MBE)方法生长的原位掺杂的PIN In0.78Ga0.22As/In0.78Ga0.22As/InxGa1-xAs/InP 外延材料.由于台面型器件的裸露面积较大,特另q是台面的成形工艺所带来的侧面损伤,加大了光生载流子的表面复合,使器件的暗电流、噪声等性能急剧下降.采用新的AlN钝化工艺,制备了8元正照射台面InGaAs探测器,室温下(T=300 K)电压为-0.5 V时.探测器的暗电流(ID)约为9×10-8 A,优值因子(R0A)大于30 Ωcm2,通过与其他钝化工艺所制备的器件的性能进行分析对比得出:AlN能有效地改善器件的表面状态,减小表面复合,从而降低了暗电流,提高了探测器的性能.     

MBE生长的InP DHBT的性能

报道了一种自对准InP/InGaAs 双异质结双极晶体管的器件性能.成功制作了U型发射极尺寸为2μm×12μm的器件,其峰值共射直流增益超过300,残余电压约为0.16V,膝点电压仅为0.6V,而击穿电压约为6V.器件的截至频率达到80GHz,最大震荡频率为40GHz.这些特性使此类器件更适合于低压、低功耗及高频方面的应用.     

InP/InGaAs/InP双异质结双极晶体管技术研究

介绍了InP/InGaAs/InP双异质结双极晶体管(DHBT)材料生长、器件结构与设计、制作工艺和性能测试以及在振荡器中的应用等方面的研究.采用发射极-基极自对准工艺制作了InP/InGaAs/InP DHBT器件,发射极尺寸为1.5μm×10μm的器件小电流直流增益β约25,集电极-发射极击穿电压BVCEO≥10V,截止频率,ft和最高振荡频率,fmax分别为50和55GHz;     

InP/InGaAs/InP双异质结双极晶体管技术研究

介绍了InP/InGaAs/InP双异质结双极晶体管(DHBT)材料生长、器件结构与设计、制作工艺和性能测试以及在振荡器中的应用等方面的研究.采用发射极-基极自对准工艺制作了InP/InGaAs/InP DHBT器件,发射极尺寸为1.5μm×10μm的器件小电流直流增益β约25,集电极-发射极击穿电压BVCEO≥10V,截止频率,ft和最高振荡频率,fmax分别为50和55GHz;     

InGaAsP/InGaAs双结太阳电池研究

本文采用MOCVD设备生长了与InP晶格匹配的InGaAs(P)光伏器件。分析了InGaAsP/InGaAs (1.07/0.74 eV)双结太阳电池的QE与I-V特性。在AM1.5D光谱下,InGaAsP/InGaAs双结太阳电池的开路电压,短路电流,填充因子及转换效率分别为0.977 V, 10.2 mA/cm,80.8%,8.94%。对于InGaAsP/InGaAs双结太阳电池,在聚光条件下,其最大转换效率在280个聚光倍数下达到了13%。这一结果预示了GaInP/GaAs/InGaAsP/InGaAs四结太阳电池的潜在应用前景。     

MBE生长的InP DHBT的性能

报道了一种自对准InP/InGaAs 双异质结双极晶体管的器件性能.成功制作了U型发射极尺寸为2μm×12μm的器件,其峰值共射直流增益超过300,残余电压约为0.16V,膝点电压仅为0.6V,而击穿电压约为6V.器件的截至频率达到80GHz,最大震荡频率为40GHz.这些特性使此类器件更适合于低压、低功耗及高频方面的应用.     

10Gbit/s InGaAs/InP雪崩光电二极管

基于InGaAs/InP吸收区、渐变区、电荷区和倍增区分离雪崩光电二极管(SAGCMAPD)器件结构,利用数值计算方法,模拟了各层参数对器件频率响应特性的影响.模拟结果表明,吸收层、倍增层厚度及电荷层面电荷密度可影响器件的-3 dB带宽;随增益的增加,器件带宽会逐渐降低;电荷层面电荷密度对器件击穿电压有明显影响.结合此模拟结果,制作出了高速InGaAs/InP雪崩光电二极管,并对器件进行了封装测试.测试结果表明,该结果与模拟结果相吻合.器件击穿电压为30 V;在倍增因子为1时,器件响应度大于0.8 A/W;在倍增因子为9时,器件暗电流小于10 nA,-3 dB带宽大于10 GHz,其性能满足10 Gbit/s光纤通信应用要求.     

一种低暗电流高响度InGaAs/InP pin光电探测器

分析了InGaAs/InP pin光电探测器暗电流和响应度的影响因素,并对MOCVD外延工艺以及器件结构进行优化,从而提高器件响应度和降低暗电流。采用低压金属有机化学气相沉积设备(LP-MOCVD)成功制备了InGaAs/InP pin光电探测器,得到了高质量的晶体材料,InGaAs吸收层的背景浓度低于4×1014 cm-3。利用扩Zn工艺制作出感光区直径为70μm的平面光电探测器。测量结果显示,在反偏电压为5 V时,暗电流小于0.05 nA,电容约为0.4 pF。此外,在1 310 nm激光的辐照下,器件的响应度可达0.96 A/W以上。     

Comparison of heterostructure-emitter bipolar transistors (HEBTs) with InGaAs/GaAs superlattice and quantum-well base structures

The characteristics of InGaP/GaAs heterostructure-emitter bipolar transistors (HEBTs) including conventional GaAs bulk base, InGaAs/GaAs superlattice-base, and InGaAs quantum-well base structures are presented and compared by two-dimensional simulation analysis. Among of the devices, the superlattice-base device exhibits a highest collector current, a highest current gain and a lowest base–emitter turn-on voltage attributed to the increased charge storage of minority carriers in the InGaAs/GaAs superlattice-base region by tunneling behavior. The relatively low turn-on voltage can reduce the operating voltage and collector–emitter offset voltage for low power consumption in circuit applications. However, as to the quantum-well base device, the electrons injecting into the InGaAs well are blocked by the p⁺-GaAs bulk base and it causes a great quantity of electron storage within the small energy-gap n-type GaAs emitter layer, which significantly increases the base recombination current as well as degrades the collector current and current gain.     

Simulated analysis for InGaP/GaAs heterostructure-emitter bipolar transistor with InGaAs/GaAs superlattice-base structure

A novel InGaP/GaAs heterostructure-emitter bipolar transistor (HEBT) with InGaAs/GaAs superlattice-base structure is proposed and demonstrated by two-dimensional analysis. As compared with the traditional HEBT, the studied superlattice-base device exhibits a higher collector current, a higher current gain of 246, and a lower base–emitter (B–E) turn-on voltage of 0.966 V at a current level of 1 μA, attributed to the increased charge storage of minority carriers in the InGaAs/GaAs superlattice-base region by tunneling behavior. The low turn-on voltage can reduce the operating voltage and collector–emitter offset voltage for low power consumption in circuit applications.     

新结构InGaP/GaAs/InGaP DHBT生长及特性研究

设计并生长了一种新的InGaP/GaAs/InGaP DHBT结构材料,采用在基区和集电区之间插入n+-InGaP插入层结构,以解决InGaP/GaAs/InGaP DHBT集电结导带尖峰的电子阻挡效应问题。采用气态源分子束外延(GSMBE)技术,通过优化生长条件,获得了高质量外延材料,成功地生长出带有n+-InGaP插入层结构的GaAs基InGaP/GaAs/InGaP DHBT结构材料。采用常规的湿法腐蚀工艺,研制出发射极面积为100μm×100μm的新型结构InGaP/GaAs/InGaP DHBT器件。直流特性测试的结果表明,所设计的集电结带有n+-InGaP插入层的InGaP/GaAs/InGaP DHBT器件开启电压约为0.15V,反向击穿电压达到16V,与传统的单异质结InGaP/GaAs HBT相比,反向击穿电压提高了一倍,能够满足低损耗、较高功率器件与电路制作的要求。     

A novel InGaP/InGaAs/GaAs double /spl delta/-doped pHEMT with camel-like gate structure

The author reports a novel InGaP/InGaAs/GaAs double delta-doped pseudomorphic high-electron mobility transistor (pHEMT) with n/sup +/-GaAs/p/sup +/-InGaP/n-InGaP camel-like gate structure grown by MOCVD. Due to the p-n depletion from the p/sup +/-InGaP gate to the channel region and the presence of /spl Delta/Ec at the InGaP/InGaAs heterostructure, the turn-on voltage of gate is larger than 1.7 V. For a 1/spl times/100-/spl mu/m/sup 2/ device, the experimental results show an extrinsic transconductance of 107 mS/mm and a saturation current density of 850 mA/mm. Significantly, an extremely broad gate voltage swing larger than 6 V with above 80% maximum g/sub m/ is obtained. Furthermore, the unit current cut-off frequency f/sub T/ and maximum oscillation frequency are up to 20 and 32 GHz, respectively. The excellent device performance provides a promise for linear and large signal amplifiers and high-frequency circuit applications.     

High breakdown characteristic δ-doped InGaP/InGaAs/AlGaAstunneling real-space transfer HEMT

A novel δ-doped InGaP/InGaAs/AlGaAs tunneling real-space transfer high-electron mobility transistor (TRST-HEMT) has been successfully fabricated by low-pressure metal organic chemical vapor deposition (LP-MOCVD). Three-terminal N-shaped negative differential resistance (NDR) phenomenon due to the hot electrons real-space transfer (RST) at high electric field is observed. Two-terminal gate-to-drain breakdown voltage is more than 40 V with a leakage current as low as 0.27 mA/mm. High three-terminal on-state breakdown voltage as high as 19.2 V and broad plateau of current valley as high as 15 V are achieved. These characteristics are attributed to the use of high Schottky barrier height, high bandgap of InGaP Schottky layer, δ-doping, and GaAs subspacer layers. The measured maximum peak-to-valley ratio (PVR) value is 2.7     

高性能六边形发射极InGaP/GaAs异质结双极型晶体管

六边形发射极的自对准InGaP/GaAs异质结具有优异的直流和微波性能.采用发射极面积为2μm×10μm的异质结双极型晶体管,VCE偏移电压小于150mV,膝点电压为0.5V(IC=16mA),BVCEO大于9V,BVCBO大于14V,特征频率高达92GHz,最高振荡频率达到105GHz.这些优异的性能预示着InGaP/GaAs HBT在超高速数字电路和微波功率放大领域具有广阔的应用前景.     

用于单片集成光接收机前端的GaAs基InP/InGaAs HBT

实现了一种可用于单片集成光接收机前端的GaAs基InP/InGaAs HBT。借助超薄低温InP缓冲层在GaAs衬底上生长出了高质量的InP外延层。在此基础上,只利用超薄低温InP缓冲层技术就在半绝缘GaAs衬底上成功制备出了InP/InGaAsHBT,器件的电流截止频率达到4.4GHz,开启电压0.4V,反向击穿电压大于4V,直流放大倍数约为20。该HBT器件和GaAs基长波长、可调谐InP光探测器单片集成为实现适用于WDM光纤通信系统的高性能、集成化光接收机前端提供了一种新的解决方法。     

Low turn-on voltage InGaP/GaAsSb/GaAs double HBTs grown by MOCVD

A novel InGaP/GaAs_0.92Sb_0.08/GaAs double heterojunction bipolar transistor (DHBT) with low turn-on voltage has been fabricated. The turn-on voltage of the DHBT is typically 150 mV lower than that of the conventional InGaP/GaAs HBT, indicating that GaAsSb is a suitable base material for reducing the turn-on voltage of GaAs HBTs. A current gain of 50 has been obtained for the InGaP/GaAs_0.92Sb_0.08/GaAs DHBT. The results show that InGaP/GaAsSb/GaAs DHBTs have a great potential for reducing operating voltage and power dissipation     

GaAs基InAlAs/InGaAsMHEMT直流特性研究

报道了用 MBE技术生长的 Ga As基 In Al As/In Ga As改变结构高电子迁移率晶体管 (MHEMT)的制作过程和器件的直流性能。对于栅长为 0 .8μm的器件 ,最大非本征跨导和饱和电流密度分别为 3 5 0 m S/mm和1 90 m A/mm。源漏击穿电压和栅反向击穿电压分别为 4V和 7.5 V。这些直流特性超过了相同的材料和工艺条件下 Ga As基 PHEMT的水平 ,与 In P基 In Al As/In Ga As HEMT的性能相当     

High-speed InGaP/GaAs HBTs with a strained InxGa1-xAs base

A self-aligned InGaP/GaAs heterojunction bipolar transistor with a compositionally graded In_xGa_1-xAs base has been demonstrated with f_T=83 GHz and f_max=197 GHz. To our knowledge, these results are the highest reported for both parameters in InGaP/GaAs HBT's. The graded base, which improves electron transport through the base, results in a DC current gain and a cutoff frequency which are 100% and 20% higher, respectively, than that achieved by an identical device with a nongraded base. The high f_max results from a heavily doped base, self-aligned base contacts, and a self-aligned collector etch. These results demonstrate the applicability of InGaP/GaAs HBT's in high-speed microwave applications