分子束外延GaAs／AlGaAs超晶格缓冲层量子阱材料的研究

采用分子束外延技术生长了ＧａＡｓ／ＡｌＧａＡｓ单量子阱得多量子阱材料。采用ＧａＡｓ／ＡｌＧａＡｓ超晶格缓冲层掩埋衬底缺陷，获得的量子阱结构材料被成功地用于制作量子阱激光器。波长为７７８ｎｍ的激光器，最低阈值电流为３０ｍＡ，室温下线性光功率大于２０ｍＷ。     

中国分子束外延技术的发展

本文评述了我国自70年代中期开始分子束外延(MBE)研究以来的MBE设备、材料及器件应用的发展和现状。     

ZnMgSSe／GaAs薄膜的分子束外延生长及其特性研究

我们用分子束外延法在ＧａＡｓ（１００）衬底上生长一种新型的Ⅱ－Ⅳ族宽禁带化合物薄膜Ｚｎ１－ｘＭｇｘＳｙＳｅ１－ｙ．改变生长条件，可以控制Ｍｇ和Ｓ的组分在０≤ｘ≤１，０≤ｙ≤１．Ｍｇ和Ｓ的组分用俄歇电子能谱测定．用Ｘ－射线衍射技术对样品结构进行的研究发现，对任意Ｍｇ和Ｓ的组分，ＺｎＭｇＳＳｅ均为闪锌矿结构．用椭圆偏振光谱仪对材料的能隙和折射率进行的研究表明，加入Ｍｇ以后ＺｎＭｇＳＳｅ样品的折射率比ＺｎＳＳｅ样品的折射率要小，并且ＺｎＭｇＳＳｅ样品的折射率随民的增大而变小．合理选择ｘ、ｙ，在２．８ｅＶ＜Ｅｇ＜     

超晶格雪崩光电二极管

报道了超晶格雪崩光电二极管的工作原理,结构,特性及其制造工艺。     

高质量GaAs—AlGaAs材料MBE生长研究及其应用

通过对分子束外延中影响ＧａＡｓ、ＡｌＧａＡｓ材料生长的一些关键因素的分析，实验与研究，得到了具有很好晶格完整性和高质量电学，光学特性的ＧａＡｓ、ＡｌＧａＡｓ单昌材料，实现了７５ｍｍ大面积范围内的厚度，组分和掺杂等的很好均匀性。研制了高质量的ＧａＡｓ／ＡｌＧａＡｓ量子阱超晶格材料，并应用于量子阱激光器材料的研制，获得了具有极低值电流密度低内损耗，高量子效率的高质量量子阱激光器外延材料。     

Al_xGa_(1-x)As/GaAs调制掺杂结构的生长研究

用分子束外延生长Al_xGa_(1-x)As/GaAs调制掺杂结构。范德堡法、光荧光谱和电化学C—V等方法测量了电学和光学特性。连续波电光检测证明材料有较好的均匀性。用该结构材料制作的HEMT器件在12GHz下,噪声系数0.76dB,相关增益6.5dB。     

Long wavelength GaAs/Al x Ga1−x As quantum well infrared photodetectors grown using metal organic chemical vapor deposition

High performance quantum well infrared photodetectors (QWIPs) have been grown using metalorganic chemical vapor deposition. Detailed optical and electrical measurements as a function of growth temperature T_G, show that the best quality samples were grown at the highest temperature tried,i.e. T _G = 700°C.     

分子束外延生长Al_xGa_(1-x)As/GaAs超晶格及结构、光学特性研究

报道了分子束外延生长80个周期的Al_xGa_(1-x)As/GaAs超晶格,X射线衍射和透射电镜的结果表明超晶格样品有良好的结构特性,光反射光谱观察到阱内的电子跃迁过程,其结果与理论计算相符。     

Deep levels and a possible d-x-like center in molecular beam epitaxial inxal1−xas

The work reported here was performed in order to establish whether or not complex defects like the D-X center can be present in InAlAs. Dominant deep electron and hole traps in lattice-matched In_0.52Al_0.48As/InP have been identified and characterized. The traps have activation energies ranging from 0.25 to 0.95 eV. The electron traps have very large capture cross-sections,~10⁻¹²-10⁻¹¹ cm², similar to attractive centers. The lattice-matched samples do not show any persistent photoconductivity effects at low temperatures. In strained In_1−xAl_xAs with 0.48 <x ≤ 0.57, an electron trap with a thermal ionization energy of 0.35 eV, a strong dependence of its concentration on donor doping and very small thermal capture cross-section, 10¹⁸ cm², is identified. These samples exhibit persistent photoconductivity. We believe this trap is similar to the D-X center commonly observed in Al_xGa_1−xAs forx ≥ 0.28. He was on leave with the Solid State Electronics Laboratory, Department of Electrical Engineering and Computer Science, The University of Michigan, Ann Arbor, MI 48109. He is with the Institute of Radio Physics and Electronics, The University of Calcutta, Calcutta, India 700 009.     

Si衬底上MBE GaAs MESFET与IC制备

叙述在MBE(分子束外延)GaAs/Si材料上制作GaAs MESFET与Ic的研究。考虑到GaAsIC与Si IC单片集成的需要,采用了Ti/TiW/Au肖特基金属化和Ni/AuGe/Ni/Au欧姆接触金属化,层间介质采用等离子增强淀积氮化硅和聚酰亚胺复合材料。在该工艺基础上,制备了性能良好的GaAs/Si MESFET与IC。     

硅衬底上异质外延生长硅化钴研究进展

综述近年国内外在CoSi2／Si异质外延生长技术领域的研究进展,在半导体衬底上异质外延具有优良导电特性的金属硅化物,从基础研究和技术发展两方面都具有重要价值。利用Co／Ti／Si多层薄膜固相反应实现CoSi2／Si异质外延,是近年取得重要进展的新方法。应用这种方法在（111）和（100）硅衬底上都可实现CoSi2外延生长,无需在超高真空下进行,与硅器件基本工艺相容性好,可形成自对准硅化物接触结构,对发展新器件制造技术有重要作用。在简要介绍分子束外延和离子合成CoSi2外延薄膜生长技术后,重点介绍和评述新型固相异质外延方法的工艺技术、机理和应用研究进展。     

AlGaAs/GaAs superlattice solar cells

A theoretical model is performed to study the viability of the AlGaAs/GaAs superlattice solar cell (SLSC). Using the Transfer Matrix Method, the conditions for resonant tunneling are established for a particular SL geometry with variably spaced quantum wells. The effective density of states and the absorption coefficient are calculated to determinate the J–V characteristic. Radiative, non‐radiative, and interface recombination were evaluated from a modeled SLSC, and their values were compared with a multiple quantum well solar cell of the same aluminum composition. A discussion about the conditions, where SLSC performance overcomes that of a multiple quantum well solar cell, is addressed. Copyright © 2011 John Wiley & Sons, Ltd.     

Growth condition dependence for GaAs selective epitaxial growth by molecular beam epitaxy

GaAs selective epitaxial growth by conventional molecular beam epitaxy (MBE) was studied while varying its growth conditions, such as substrate temperature. As pressure, growth rate, and Si or Be doping. Selectivity is improved with the increase in substrate temperature, and with the decrease in As pressure or growth rate. Si and Be were doped up to 3 x 10¹⁸ and 3 × 10¹⁹ cm⁻³, respectively. While no Si doping influence was observed, Be doping degraded the surface morphology. Selective epitaxial growth by conventional MBE with appropriate growth conditions will be applicable to device fabrication.     

大应变In0.3Ga0.7As/GaAs量子阱激光器的生长和研究

金属有机物化学气相沉积(MOCVD)方法生长应变InGaAs／GaAs量子阱，应变缓冲层结合生长中断改善量子阱的PL谱特性．用该量子阱制备的激光器有很低的阈值电流密度(43A／cm^2)和较高的斜率效率(0．34W／A，per facet)．     

半导体/超晶格分布布拉格反射镜(DBR)的分子束外延生长

用分子束外延技术 (MBE)生长了以 Ga As/Al As超晶格替代 Alx Ga1 - x As所形成的 P型半导体 /超晶格分布布拉格反射镜 (DBR) .此分布布拉格反射镜的反射谱中心波长为 85 0 nm.由实验表明 ,19个周期的反射镜获得了高达 99%以上的高反射率 .与此同时 ,采取自行设计的二次钨丝掩膜质子注入法制成 15 μm× 15 μm的正方形电流注入区 ,以此测定 P型反射镜的串联电阻 ,克服了湿化学腐蚀法中腐蚀深度不易控制及侧面同时被腐蚀的缺点 ,实验得出此 P型反射镜的串联电阻仅为 5 0 Ω 左右 .在生长过程中 ,发现在只含一个铝源的分子束外延生长系统中 ,生长这种半