Surface acoustic wave two resonator filter using synchronous coupling interdigital transducers

A surface acoustic wave (SAW) two resonator filter with coupling interdigital transducers (IDTs) located inside the reflectors, was designed, fabricated, and tested. In the filter, electrodes of the coupling IDTs are in spatial synchronism with the reflectors' electrodes. The filter, fabricated on ST-cut quartz, had a center frequency of 302.6 MHz, insertion loss about 13 dB, and minimum rejection in the stopbands of about 40 dB.     

Very small IF resonator filters using reflection of shear horizontal wave at free edges of substrate

A conventional surface acoustic wave (SAW) resonator filter requires reflectors consisting of numerous grating fingers on both sides of interdigital transducers (IDTs). On the contrary, it is considered that small-sized and low loss resonator filters without reflectors consisting of grating fingers can be realized by exploiting this characteristic of the shear horizontal (SH) wave or the Bleustein-Gulyaev-Shimizu (BGS) wave. There are two types of resonator filters: transversely coupled and longitudinally coupled. No transversely coupled filters (neither conventional nor edge-reflection) using the SH wave on a single-crystal substrate have been realized until now, because two transverse modes (symmetrical and asymmetrical modes) are not easily coupled. However, the authors have realized small low loss transversely coupled resonator filters in the range of 25 to 52 MHz using edge reflections of the BGS wave on piezoelectric ceramic (PZT: Pb(Zr,Ti)O/sub 3/) substrates for the first time by developing methods by which the two transverse modes could be coupled. Also the authors have realized small low loss longitudinally coupled resonator filters in the range of 40 to 190 MHz using edge reflection of BGS or SH waves on PZT or 36/spl deg/-rotated-Y X-propagation LiTaO/sub 3/ substrates for the first time. Despite being IF filters, their package (3/spl times/3/spl times/1.03 mm/sup 3/) sizes are as small as those of RF SAW filters.     

Small and low-loss IF SAW filters using zinc oxide film on quartz substrate

It was previously reported that a Rayleigh wave propagating on a zinc oxide film (ZnO)/ST-cut 35 degrees X propagation quartz substrate structure has the characteristics of an excellent temperature coefficient of frequency (TCF) and a large electromechanical coupling factor k(s). This substrate was applied to various intermediate-frequency (IF) stage filters. During the filter development, it was clarified that a spurious response due to the Love wave was generated. In this study, a new quartz substrate has been developed with a specific cut and propagation angle, that has the same values of the TCF and the coupling factor as the above-mentioned ones. In addition, it does not have the spurious response due to the Love wave. The combination of this specific-cut-angle quartz and ZnO film has been applied to IF filters for wideband code division multiple access (W-CDMA) and narrow-band CDMA (N-CDMA) systems. The insertion losses of their IF filters were 3-5 dB better and their TCF was superior (deltaf/f = 0.37 ppm/degrees C: one-third) compared with the conventional surface acoustic wave (SAW) filters.     

Scattering matrix approach to STW resonators

The scattering matrix method was used for the analysis of surface transverse wave (STW) resonators on quartz. An expression for the transfer function of the resonators with different numbers of electrodes in the reflectors was derived. It was found that, for a proper ratio of these numbers, the spurious signal level below the resonance frequency can be lowered. The STW resonator for the frequency near 1090 MHz was designed, fabricated, and measured. By matching the measured and calculated transfer functions, the velocity, the electromechanical coupling coefficient, and the reflection coefficient of one aluminium strip of the STW on the 36°Y-cut quartz were determined. The insertion loss about 7 dB, loaded quality coefficient near 4200, and the spurious signal level about 5 dB lower compared with the resonance one were obtained for the resonator     

Comparison between ST-cut quartz 25 degrees and -60 degrees NSPUDT propagation directions

This paper discusses directivity and other propagation properties of natural single phase unidirectional transducer (NSPUDT) propagation directions on ST-cut quartz. The work focuses on the comparison of surface acoustic wave (SAW) directivity and propagation properties between the ST-cut quartz -60°, Euler angles: (0°, 132.75°, -60°), and the ST-cut quartz 25°, Euler angles: (0°, 132.75°, 25°), NSPUDT propagation directions, including predicted and measured directivity responses for both propagation directions. The well-known SAW 25° propagation direction is used for low loss, high performance SAW filter designs for consumer products and communications applications. The ST-cut quartz -60° propagation direction has been predicted to have a reflection coefficient 2.5 times larger than ST-cut quartz 25°. In addition the ST-cut quartz -60° satisfied the NSPUDT 90° reflection coefficient phase condition much more closely, resulting in an improved directivity response. For the delay line structures used in the experiments, the measured directivity is 10.1 dB for the -60° propagation direction. For the same structures, the measured directivity along the 25° propagation direction is about 5.0 dB. The experimental results given in this paper verify that indeed ST-cut quartz -60° has a higher directivity than ST-cut quartz 25°, confirming the theoretical predictions. In addition, this work compares other propagation properties for both directions, namely, phase velocities, electromechanical couplings, temperature coefficients of delay, power flow angles, and metallic strip reflection coefficient amplitudes and phases     

Experimental investigation of acoustic substrate losses in 1850-MHz thin film BAW resonators

After optimizing for electromechanical coupling coefficient K², the main performance improvement in the thin film bulk acoustic wave resonators and filters can be achieved by improving the Q value, i.e., minimizing the losses. In Braggreflector- based solidly mounted resonator technology, a significant improvement of Q has been achieved by optimizing the reflector not only for longitudinal wave, the intended operation mode, but also for shear waves. We have investigated the remaining acoustic radiation losses to the substrate in so-optimized 1850-MHz AlN resonators by removing the substrate underneath the resonators and comparing the devices with and without substrate by electrical characterization before and after the substrate removal. Several methods to extract Q-values of the resonators are compared. Changes caused by substrate removal are observed in resonator behavior, but no significant improvement in Q-values can be confirmed. Loss mechanisms other than substrate leakage are concluded to dominate the resonator Q-value. Difficulties of detecting small changes in the Q-values of the resonators are also discussed.     

Design considerations on surface acoustic wave resonators with significant internal reflection in interdigital transducers

This paper discusses, both qualitatively and quantitatively, the operation and the design principle of current surface acoustic wave (SAW) resonators in which the internal reflection within interdigital transducers (IDTs) is not negligible and lower capacitance ratio is necessary. For the purpose, the p-matrix expression is used with the help of the coupling-of-modes theory. The internal reflection causes: deformation of the IDT passband shape, frequency dependence of the effective SAW velocity within IDTs, and suppression of higher-order resonances. It is shown that these features can be effectively used to enhance performances of both one-port SAW resonators and two-port double-mode SAW (DMS) filters. In addition, under proper designs accounting for the internal reflection, most of all structural discontinuities can be removed, and is most preferable for the reduced scattering loss at the discontinuity. Design criteria also are presented for DMS filters of wide bandwidth, and it is demonstrated how device performances are improved by proper design accounting for the criteria.     

Operation mechanism of double-mode surface acoustic wave filters with pitch-modulated IDTs and reflectors

One of the authors (KH) previously proposed pitch-modulated interdigital transducers (IDTs) and reflectors for developing low-loss and wideband longitudinally coupled double-mode SAW (DMS) filters. This paper discusses how a wide and flat passband is realized by applying the pitch-modulated IDTs and reflectors to DMS filters. It is shown that the pitch-modulated structure enables one to adjust the location of multiple resonance frequencies simultaneously by varying an effective reflective position with frequency. That is, the IDTs are pitch-modulated so that the outer portion has slightly larger pitch than the inside, and the pitch of the outermost reflectors is made largest. Accordingly, higher-order SAW resonances occur between the two pitch-modulated IDTs. The outer portion of each IDT acts as a reflector, and the inner portion is mainly responsible for SAW excitation. Lower-order SAW resonances occur between the two reflectors.     

Contribution to the electromechanical and nonlinear properties of GaPO4 crystals

In the last decade, much attention has been given to piezoelectric crystals with large electromechanical coupling coefficient. The quartz homeotypes berlinite and gallium orthophosphate (GaPO/sub 4/), along with the calcium gallo-germanates such as langasite are representative of these crystals. The coupling coefficient k/sub 26/ associated with thickness-shear mode resonators is two times greater than that of quartz, increasing the spacing between the series and parallel resonance frequencies of resonators suitable for the frequency range from 1 to 100 MHz. This is important for some types of crystal oscillators and monolithic filters. The large electromechanical coupling coefficient also increases the difference between the temperature dependencies of the fundamental resonance frequency and its harmonics. In this paper, measured resonance frequency-temperature characteristics of the fundamental and third harmonics of selected rotated Y-cut GaPO/sub 4/ resonators vibrating in the thickness-shear mode are presented. Further attention is given to the measurement of some nonlinear properties of rotated Y-cut GaPO/sub 4/ resonators. Knowledge of such nonlinear interactions is important for the analysis of intermodulation phenomena in resonators, and for the application of GaPO/sub 4/ resonators in crystal oscillators, filters and other electronic devices.     

Characteristics of strontium-doped ZnO films on love wave filter applications

The effect of dopant concentrations in strontium-doped ZnO films on Love wave filter characteristics was investigated. Strontium-doped ZnO films with a c-axis preferred orientation were grown on ST-cut quartz by radio frequency magnetron sputtering. The crystalline structures and surface morphology of films were studied by X-ray diffraction, scanning electron microscopy and atomic force microscopy. The electromechanical coupling coefficient, dielectric constant, and temperature coefficient of frequency of filters were then determined using a network analyzer. A uniform crystalline structure and smooth surface of the ZnO films were obtained at the 1-2 mol% strontium dopant level. The electromechanical coupling coefficient of the 1 mol% strontium-doped ZnO film reaches a maximum of 0.61%, and the temperature coefficient of frequency declines to + 12.87 ppm/°C at a 1.5 mol% strontium dopant level.     

Efficient analysis tool for coupled-SAW-resonator filters

The advantages of the coupled-mode (COM) formalism and the transmission-matrix approach are combined in order to create exact and computationally efficient analysis and synthesis tools for the design of coupled surface acoustic wave resonator filters. The models for the filter components, in particular gratings, interdigital transducers (IDTs) and multistrip couplers (MSCs), are based on the COM approach that delivers closed-form expressions. To determine the pertinent COM parameters, the COM differential equations are solved and the solution is compared with analytically derived expressions from the transmission-matrix approach and the Green's function method. The most important second-order effects, such as energy storage, propagation loss, and mechanical and electrical loading, are fully taken into account. As an example, a two-pole, acoustically coupled resonator filter at 914.5 MHz on AT quartz is investigated. Excellent agreement between theory and measurement is found.     

Thin film bulk acoustic wave filter

Thin film bulk acoustic wave (BAW) resonators (FBAR) are fabricated on a silicon nitride bridge using a ZnO piezolayer on a glass substrate and surface micromachining by standard thin film technology. These resonators exhibit a coupling constant k/sub t//sup 2/=7.8% at the first thickness extensional wave mode and are used as impedance elements in a ladder filter in the 1-GHz frequency band of mobile telecommunications. An electrical equivalent circuit is used to characterize the properties of the resonators and to show how the performance of the filter depends on the parameters of the resonators. 2.5% bandwidth, 2.8-dB insertion loss, and 35-dB selectivity are obtained in a filter with six resonators. The technology can be used to manufacture miniature microwave filters without any additional inductances.     

Beam-supported AlN thin film bulk acoustic resonators

A novel, suspended thin film bulk acoustic wave resonator (SFBAR) has been fabricated from an aluminum nitride film sputtered directly on a (100) silicon substrate. The suspended membrane design uses thin beams to support, as well as electrically connect, the resonator and has been fabricated using both thin film processing and bulk silicon micromachining. The quality factor and the effective electromechanical coupling coefficient were characterized as a function of the number and the length of the support beams. The length of the support beams was found to affect neither the quality factor at resonance nor the effective electromechanical coupling factor. However, longer support beams did facilitate better frequency pair response. Device performance varied with the number of support beams: 70% of the resonators tested showed a higher figure of merit with eight support beams than with four support beams.     

Numerical Development of ZnO/Quartz Love Wave Structure for Gas Contamination Detection

Love wave structures are encouraging devices for sensing applications in gaseous or liquid media because of their high sensitivity. In this paper, we first investigate basic properties of a ZnO/quartz Love wave device by the use of theoretical considerations in order to get a good gas sensor. Second, experimental results of the developed structure, ZnO(2.1 mum)/90deg ST-cut quartz, confirm the suitable characteristics, including temperature compensation, high electromechanical coupling coefficient, and good sensitivity to mass loading effect. We finally characterize the gas effect on the photoresist Shipley S1805 with the above structure, and thus we confirm our approach     

Scattering matrix approach to one-port SAW resonators

The scattering matrix method was used to derive an expression for the reflection coefficient of a one-port SAW resonator. This expression was applied to calculations of an input admittance of a synchronous resonator on ST-cut quartz. Very good agreement was obtained between calculated and measured parameters of the resonator.     

Electromechanical coupling constant extraction of thin-film piezoelectric materials using a bulk acoustic wave resonator

Thin-film piezoelectric materials such as ZnO and AlN have great potential for on-chip devices such as filters, actuators and sensors. The electromechanical coupling constant is an important material parameter which determines the piezoelectric response of these films. This paper presents a technique based on the Butterworth Van-Dyke (BVD) model which, together with a simple one-mask over-moded resonator, can be used to extract the bulk, one-dimensional electromechanical coupling constant K(2) of any piezoelectrically active thin-film. The BVD model is used to explicitly define the series resonance, parallel resonance, and quality factor Q of any given resonating mode. Common methods of defining the series resonance, parallel resonance, and Q are shown to be inaccurate for low coupling, lossy resonators such as the over-moded resonator. Specifically, an electromechanical coupling constant K(2) of (2.6+/-0.1)% was measured for an (002) c-axis textured AlN film with an X-ray diffraction rocking curve of 7.5 degrees using the BVD based extraction technique.     

Temperature-stable double SAW resonators

The temperature stability of SAW resonators on quartz can be enhanced by means of double resonators. The turnover temperatures of the double resonators' components, called single resonators, are positioned above and below room temperature. As a consequence, the temperature coefficients of frequency of the 1st order (TCF1) have opposite signs at room temperature, leading to the vanishing TCF1 of the double resonators. Frequently, different turnover temperatures are adjusted by different propagation directions on an ST cut of quartz. An overview of known and new methods for compensating the temperature coefficient of frequency of the 2nd order (TCF2) of two-port and one-port SAW double resonators is given. A concept by means of which temperature-stable circuits of single resonators are found is described. Two types of temperature-stable double resonators found by applying that concept are treated in detail: 1) a two-port resonator composed of two cascaded two-port resonators and a coupling inductance, and 2) a one-port resonator comprising a series connection of one-port resonators with an inductance in parallel with each single resonator. The substrates are 35.5 degrees rotY cuts of quartz. In both cases, the shift of resonance frequency within the temperature range from -30 degrees C to 70 degrees C is smaller than 20 ppm.     

An Investigation on Efficient Acoustic Energy Reflection of Flexible Film Bulk Acoustic Resonators

This paper investigates the issues on acoustic energy reflection of flexible film bulk acoustic resonators(FBARs). The flexible FBAR was fabricated with an air cavity in the polymer substrate, which endowed the resonator with efficient acoustic reflection and high electrical performance. The acoustic wave propagation and reflection in FBAR were first analyzed by Mason model, and then flexible FBARs of 2.66 GHz series resonance in different configurations were fabricated. To validate efficient acoustic reflection of flexible resonators, FBARs were transferred onto different polymer substrates without air cavities. Experimental results indicate that efficient acoustic reflection can be efficiently predicted by Mason model. Flexible FBARs with air cavities exhibit a higher figure of merit(FOM). Our demonstration provides a feasible solution to flexible MEMS devices with highly efficient acoustic reflection(i.e. energy preserving) and free-moving cavities, achieving both high flexibility and high electrical performance.     

SH wave propagation in a cylindrically layered piezoelectric structure with initial stress

Summary SH wave propagation in a cylindrically layered piezoelectric structure with initial stress is investigated analytically. By means of transformation, the governing equations of the coupled waves are reduced to Bessel and Laplace equations. The boundary conditions imply that the displacements, shear stresses, electric potential, and electric displacements are continuous across the interface between the layer and the substrate. The electrically open and short conditions at the cylindrical surface are applied to solve the problem. The phase velocity is numerically calculated for the electrically open and short cases, respectively, for different wavenumber and thickness of the layer. The effect of the initial stress on the phase velocity and the electromechanical coupling factor are discussed in detail for piezoelectric ceramics PZT-5H. We find that the initial stress has an important effect on the SH wave propagation in the cylindrically layered piezoelectric structures. The results also show that the ratio of the layer thickness to the wavelength has a remarkable effect on the SH wave phase velocity and electromechanical coupling factor.     

Polymer coating behavior of Rayleigh-SAW resonators with gold electrode structure for gas sensor applications

Results from systematic polymer coating experiments on surface acoustic wave (SAW) resonators and coupled resonator filters (CRF) on ST-cut quartz with a corrosion-proof electrode structure entirely made of gold (Au) are presented and compared with data from similar SAW devices using aluminium (Al) electrodes. The recently developed Au devices are intended to replace their earlier Al counterparts in sensor systems operating in highly reactive chemical gas environments. Solid parylene C and soft poly[chlorotrifluoroethylene-co-vinylidene fluoride] (PCFV) polymer films are deposited under identical conditions onto the surface of Al and Au devices. The electrical performance of the Parylene C coated devices is monitored online during film deposition. The PCVF coated devices are evaluated after film deposition. The experimental data show that the Au devices can stand up to 40% thicker solid films for the same amount of loss increase than the Al devices and retain better resonance and phase characteristics. The frequency sensitivities of Au and Al devices to parylene C deposition are nearly identical. After coating with soft PCFV sensing film, the Au devices provide up to two times higher gas sensitivity when probed with cooling agent, octane, or tetrachloroethylene.