Growth of InN layers on Si (111) using ultra thin silicon nitride buffer layer by NPA-MBE

Indium nitride (InN) epilayers have been successfully grown by nitrogen-plasma-assisted molecular beam epitaxy (NPA-MBE) on Si (111) substrates using different buffer layers. Growth of a (0001)-oriented single crystalline wurtzite-InN layer was confirmed by high resolution X-ray diffraction (HRXRD). The Raman studies show the high crystalline quality and the wurtzite lattice structure of InN films on the Si substrate using different buffer layers and the InN/β-Si₃N₄ double buffer layer achieves minimum FWHM of E₂ (high) mode. The energy gap of InN films was determined by optical absorption measurement and found to be in the range of ~ 0.73-0.78 eV with a direct band nature. It is found that a double-buffer technique (InN/β-Si₃N₄) insures improved crystallinity, smooth surface and good optical properties.     

The role of the Zn buffer layers in the structural and photoluminescence properties of ZnO films on Zn buffer layers deposited by RF magnetron sputtering

Highly c-axis oriented ZnO thin films were grown on Si (100) substrates with Zn buffer layers. Effects of the Zn buffer layer thickness on the structural and optical qualities of ZnO thin films were investigated for the ZnO films with the buffer layers 90, 110, and 130 nm thick using X-ray diffraction (XRD), photoluminescence (PL) and atomic force microscopy (AFM) analysis techniques. It was confirmed that the quality of a ZnO thin film deposited by RF magnetron sputtering was substantially improved by using a Zn buffer layer. The highest ZnO film quality was obtained with a Zn buffer layer 110 nm thick. The surface roughness of the ZnO thin film increases as the Zn buffer layer thickness increases.     

Structural and optical properties of wurtzite InN grown on Si(111)

We report the structural and optical properties of InN films on Si(111) prepared by ion-beam-assisted filtered cathodic vacuum arc technique. X-ray diffraction and Raman spectroscopy measurements indicated that all the InN films were hexagonal crystalline InN. The InN films deposited at substrate temperature of 475 °C exhibited highly (0001) preferred orientation and texturing (cratered) surface morphology. The oxygen incorporated in the InN films was segregated in the form of amorphous indium oxide or oxynitride phases at the grain boundaries. Photoluminescence emission of ∼ 1.15 eV was observed at room temperature from the InN films.     

A comparative study of InN growth on quartz,silicon, C-sapphire and bulk GaN substrates by RF magnetron sputtering

In this work, we investigate the growth of indium nitride (InN) films on quartz, bulk GaN, sapphire (001) and Si (111) substrates. An InN buffer layer was first deposited on all the substrates, then an InN film was grown on bare substrate and InN buffered substrates. The films were polycrystalline in nature with preferred orientation along (002) plane. Best structural quality was observed on InN buffered Si substrate. The structural properties were explained by calculating the full width at half maximum, crystallite size, micro-strain, and dislocation density. The morphology of the films revealed similar granular features except for bare sapphire substrate which showed cracks and more oxygen percentage. The application of buffer layer increased the surface roughness for quartz and reduced in other cases. The band gap of InN films was determined using UV–visible reflectance spectroscopy. The lowest band gap value was observed for InN buffered quartz substrate.     

Ellipsometry study of InN thin films prepared by magnetron sputtering

Indium nitride (InN) thin films have been deposited on Si(1 0 0) substrates at temperature of 100–400 °C by reactive radio frequency (RF) magnetron sputtering. We measured the ellipsometric spectra of the InN film samples, and obtained the optical constants for the wavelength range of 410–1100 nm. The absorption edge of the InN films is 1.85–1.90 eV. The thicknesses of various InN films are found to be dependent on the substrate temperature.     

Piezoelectric coefficient of InN films prepared by radio-frequency sputtering

An interferometric method has been used to measure the piezoelectric coefficient d₃₃ in indium nitride films deposited by radio-frequency sputtering on borosilicate glass coated with gold. This low temperature growth technique has the advantage of being able to produce samples for piezoelectric measurements where the InN film is grown directly on an Au metal back contact, allowing the accurate measurement of the piezoelectric coefficient of the InN layer without any parasitic series resistance. The InN growth conditions are described, and both crystal and optical characterizations of the film are presented. The measured value of the coefficient was found to be 4.0 ± 0.1 pm V^− 1.     

Near-infrared photoluminescence of vertically aligned InN nanorods grown on Si(111) by plasma-assisted molecular-beam epitaxy

We demonstrate that vertically aligned InN nanorods have been grown on Si(111) substrates by plasma-assisted molecular-beam epitaxy (PA-MBE) at low and high growth temperatures (LT- and HT-InN nanorods). High-resolution scanning electron microscopy images clearly show that InN nanorods grown on Si(111) are hexagonal in shape, vertically aligned, well separated and densely distributed on the substrate. The size distribution of LT-InN nanorods is quite uniform, while the HT-InN nanorods exhibit a broad, bimodal distribution. The structural analysis performed by Raman scattering indicates that PA-MBE grown InN nanorods have the wurtzite-type InN single-crystal structure with the rod axis (growth direction) along the c-axis. In addition, both types of nanorods contain high concentrations of electrons (unintentionally doped). Compared to the HT-InN nanorods and the PA-MBE-grown InN epitaxial film, the LT-grown InN nanorods have a considerable number of structural defects. Near-infrared photoluminescence (PL) from LT- (∼ 0.77 eV) and HT-InN (∼ 0.70 eV) nanorods is clearly observed at room temperature. In comparison with the LT-InN nanorods, the PL efficiency of HT-InN nanorods is better and the PL peak energy is closer to that of InN-on-Si epitaxial films (∼ 0.66 eV). We also find that the PL band at low temperatures from nanorods is significantly weaker (compared to the InN film case) and exhibits anomalous temperature effects. We propose that these PL properties are results of considerable structural disorder (especially for the LT-InN nanorods) and strong surface electron accumulation effect (for both types of nanorods).     

Epitaxial growth of InN on c-plane sapphire by pulsed laser deposition with r.f. nitrogen radical source

We have grown InN films on c-plane sapphire substrates by pulsed laser deposition (PLD) with a radio frequency nitrogen radical source for the first time and investigated the effect of the substrate surface nitridation on the structural and electrical properties of InN films with reflection high energy electron diffraction (RHEED), atomic force microscope, the Hall effect measurements and high-resolution X-ray diffraction (HRXRD). RHEED and HRXRD characterizations revealed that high-quality InN grows epitaxially on sapphire by PLD and its epitaxial relationship is InN (0 0 0 1)∣∣sapphire (0 0 0 1) and InN [2 -1 -1 0]∣∣sapphire [1 0 -1 0]. The InN crystalline quality and the electron mobility are improved by the substrate nitridation process. The area of the pits at the InN surface is reduced by the substrate nitridation process probably due to the reduction in the interface energy between InN and the substrate. The full width at half maximum of the -1 -1 2 4 X-ray rocking curve for InN grown by the present technique without using any buffer layers was as small as 34.8 arcmin. These results indicate that the present technique is promising for the growth of the high-quality InN films.     

Structural and optical properties of high quality ZnO thin film on Si with SiC buffer layer

ZnO thin films are grown on Si substrates with SiC buffer layer using ion plasma high frequency magnetron sputtering. These substrates are fabricated using a technique of solid phase epitaxy. With this technique SiC layer of thickness 20-200 nm had been grown on Si substrates consisting pores of sizes 0.5-5 μm at SiC and Si interface. Due to mismatching in lattice constants as well as thermal expansion coefficients, elastic stresses have been developed in ZnO film. Pores at the interface of SiC and Si are acting as the elastic stress reliever of the ZnO films making them strain free epitaxial. ZnO film grown on this especially fabricated Si substrate with SiC buffer layer exhibits excellent crystalline quality as characterized using X-ray diffraction. Surface topography of the film has been characterized using Atomic Force Microscopy as well as Scanning Electron Microscopy. Chemical compositions of the films have been analyzed using Energy Dispersive X-ray Spectroscopy. Optical properties of the films are investigated using Photoluminescence Spectroscopy which also shows good optical quality.     

MOCVD growth of GaN layer on InN interlayer and relaxation of residual strain

100 nm InN layer was grown on sapphire c-plane using a metal-organic chemical vapor deposition (MOCVD) system. Low temperature (LT) GaN layer was grown on InN layer to protect InN layer from direct exposure to hydrogen flow during high temperature (HT) GaN growth and/or abrupt decomposition. Subsequently, thick HT GaN layer (2.5 μm thick) was grown at 1000 °C on LT GaN/InN/sapphire template. Microstructure of epilayer-substrate interface was investigated by transmission electron microscopy (TEM). From the high angle annular dark field TEM image, the growth of columnar structured LT GaN and HT GaN with good crystallinity was observed. Though thickness of InN interlayer is assumed to be about 100 nm based on growth rate, it was not clearly shown in TEM image due to the InN decomposition. The lattice parameters of GaN layers were measured by XRD measurement, which shows that InN interlayer reduces the compressive strain in GaN layer. The relaxation of compressive strain in GaN layer was also confirmed by photoluminescence (PL) measurement. As shown in the PL spectra, red shift of GaN band edge peak was observed, which indicates the reduction of compressive strain in GaN epilayer.     

Low-temperature growth of highly c-oriented InN films on glass substrates with ECR-PEMOCVD

High quality InN films are deposited with an interlayer of high c-orientation (002) AZO (Aluminium-doped Zinc Oxide; ZnO:Al) films on glass substrates by electron cyclotron resonance plasma-enhanced metal organic chemical vapor deposition (ECR-PEMOCVD) at low temperature. AZO films used as a buffer layer are effective for the epitaxial growth of InN films. The influence of Trimethyl Indium (TMIn) flux on the properties of InN films is systematically investigated by reflection high energy electron diffraction (RHEED), X-ray diffraction analysis (XRD), atomic force microscopy (AFM) and optical transmittance spectra. The results indicate that high quality InN films with high c-orientation and small surface roughness are successfully achieved at an optimized Trimethyl Indium (TMIn) flux of 5.5 sccm. The InN/AZO structures have great potential for the development of full spectra solar cells.     

Raman scattering and Rutherford backscattering studies on InN films grown by plasma-assisted molecular beam epitaxy

A series of InN thin films was grown on sapphire substrates via plasma-assisted molecular beam epitaxy (PA-MBE) with different nitrogen plasma power. Various characterization techniques, including Hall, photoluminescence, Raman scattering and Rutherford backscattering, have been employed to study these InN films. Good crystalline wurtzite structures have been identified for all PA-MBE grown InN films on sapphire substrate, which have narrower XRD wurtzite (0002) peaks, showed c-axis Raman scattering allowed longitudinal optical (LO) modes of A₁ and E₁ plus E₂ symmetry, and very weak backscattering forbidden transverse optical (TO) modes. The lower plasma power can lead to the lower carrier concentration, to have the InN film close to intrinsic material with the PL emission below 0.70 eV. With increasing the plasma power, high carrier concentration beyond 1 × 10²⁰ cm^− 3 can be obtained, keeping good crystalline perfection. Rutherford backscattering confirmed most of InN films keeping stoichiometrical In/N ratios and only with higher plasma power of 400 W leaded to obvious surface effect and interdiffusion between the substrate and InN film.     

Carrier concentration dependent optical properties of wurzite InN epitaxial films on Si(111) studied by spectroscopic ellipsometry

The refractive index and optical absorption of wurzite InN epilayers grown on Si(111) substrates with a β-Si₃N₄/AlN(0001) double-buffer by nitrogen-plasma-assisted molecular-beam epitaxy were studied by employing spectroscopic ellipsometry (SE). The crystalline quality of the InN epilayers were investigated by cross-sectional transmission electron microscopy, X-ray diffraction, and scanning electron microscopy. SE results analyzed by the Adachi's model for the dielectric function show that the optical absorption edge of InN varies in the range of 0.76–0.83 eV depending on the carrier concentration, which in turn can be adjusted by the thickness of the AlN buffer layer.     

Temperature dependence of InN film deposition by an RF plasma-assisted reactive ion beam sputtering deposition technique

Indium nitride (InN) films were deposited on Si(100) substrates using a radiofrequency (RF) plasma-assisted reactive ion beam sputtering deposition technique at various substrate temperatures. The X-ray diffraction patterns of the InN films suggest that the InN films deposited at substrate temperatures up to 370 °C were cubic crystalline InN; and at 500 °C, the InN film was hexagonal crystalline InN. In a scanning electron microscope image of the InN film surface, facets of cubic single-crystalline InN grains were clearly observed on the InN film deposited at 370 °C. The inclusion of metallic indium appeared on the InN film deposited at 500 °C.     

Structural and photoluminescence study of thin GaN film grown on silicon substrate by metalorganic chemical vapor deposition

GaN epitaxial layer was grown on Si(111) substrate by metalorganic chemical vapor deposition (MOCVD). The structure consists of 50 nm thick high-temperature grown AlN buffer layer, 150 nm thick AlGaN layer, 30 nm low-temperature grown AlN layer, 300 nm GaN layer, 50 nm AlGaN superlattice layer, followed by 100 nm GaN epitaxial layer. The low-temperature AlN interlayer and AlGaN superlattice layer were inserted as the defect-blocking layers in the MOCVD grown sample to eliminate the dislocations and improve the structural and optical properties of the GaN layer. The dislocation density at the top surface was decreased to ∼ 2.8 × 10⁹/cm². The optical quality was considerably improved. The photoluminescence emission at 3.42-3.45 eV is attributed to the recombination of free hole-to-donor electron. The observed 3.30 eV emission peak is assigned to be donor-acceptor transition with two longitudinal optical phonon side bands. The relationship of the peak energy and the temperature is discussed.     

Effects of substrate on the structural, electrical and optical properties of Al-doped ZnO films prepared by radio frequency magnetron sputtering

Transparent and conductive Al-doped ZnO (AZO) thin films were deposited on substrates including alkali-free glass, quartz glass, Si, and SiO₂ buffer layer on alkali-free glass by using radio frequency magnetron sputtering. The effects of different substrates on the structural, electrical and optical properties of the AZO films were investigated. It was found that the crystal structures were remarkably influenced by the type of the substrates due to their different thermal expansion coefficients, lattice mismatch and flatness. The AZO film (100 nm in thickness) deposited on the quartz glass exhibited the best crystallinity, followed sequentially by those deposited on the Si, the SiO₂ buffer layer, and the alkali-free glass. The film deposited on the quartz glass showed the lowest resistivity of 5.14 × 10^− 4 Ω cm among all the films, a carrier concentration of 1.97 × 10²¹ cm^− 3 and a Hall mobility of 6.14 cm²/v·s. The average transmittance of this film was above 90% in the visible light spectrum range. Investigation into the thickness-dependence of the AZO films revealed that the crystallinity was improved with increasing thickness and decreasing surface roughness, accompanied with a decrease in the film resistivity.     

Synthesis of ultra-smooth and ultra-low friction DLC based nanocomposite films on rough substrates

Rough TiC/a-C films were intentionally grown on smooth surface to simulate a rough finishing of industrial substrates. Surface roughness and growth dynamics of TiC/a-C nanocomposite films deposited on such rough surfaces by non-reactive pulsed-DC (p-DC) sputtering of graphite targets at 350 kHz pulse frequency were studied using atomic force microscopy, cross-sectional scanning electron microscopy. Intensive concurrent ion impingement during the film growth at higher pulse frequency of p-DC sputtering leads to rapid smoothing of such initial rough surfaces. It was shown that rapid smoothing of initially rough surfaces with RMS roughness ~ 6 nm to < 1 nm can be effectively achieved by 350 kHz p-DC sputtering. These films exhibit dense and glassy microstructure. The surface roughness strongly influences the frictional behavior of TiC/a-C nanocomposite films where the rougher surfaces yielded higher steady state friction coefficient (CoF).The observed dynamic smoothing phenomenon was applied to obtain ultra-smooth and ultra-low friction (μ ~ 0.05) TiC/a-C:H nanocomposite films on industrial polished steel substrates by 200 and 350 kHz p-DC sputtering of Ti-targets in an argon/acetylene atmosphere.     

Structure and optical properties of InN and InAlN films grown by rf magnetron sputtering

The structure and optical properties of InN and In-rich InAlN films grown by magnetron sputtering were investigated. The XRD results show that these films are highly c-axis oriented. The film morphology and microstructure of these films were observed by AFM and SEM which reveals that the films grown in island growth mode. Optical properties of these films were studied by absorption method. The band gap energy of the InN film grown under substrate temperature of 400 °C is 1.38 eV. By studying the E _g values of InN films deposited under different substrate temperature, the Burstein-Moss effect on band gap of InN was examined. The significant band gap bowing of our In-rich InAlN films was found to be correlated with the In contents. The bowing parameter of 3.68 eV was obtained which is in agreement with previous theoretical predictions.     

Heteroepitaxy of Ir films on silicon with a ceria/yttria stabilized zirconia buffer layer

Heteroepitaxial Ir films on Si(001) with a double ceria/yttria stabilized zirconia heteroepitaxial buffer layer were grown by magnetron sputtering. As-deposited CeO₂ films covered with {111} faceted pyramids resulted in iridium films with the [001] axis normal to the substrate plane. The buffered substrates annealed at 1115 °C have a smooth surface; Ir films on such substrates have the (111) orientation and consist of grains turned at 90° toward each other.     

Comparison of silicon nanocrystals embedded silicon oxide films by sputtering and PECVD

The material and optical properties of the silicon rich oxide (SRO) films prepared by PECVD and sputtering were comprehensively studied. The optical properties were found strongly depend on the material properties of the SRO films. The photocurrent of the photodiodes using PECVD deposited SRO was ~ 3 order higher than that prepared by the sputtering, while the leakage current of the later was much lower than the former, leading the light/dark current ratio of the sputtered photodiodes was higher than the PECVD prepared ones when the bias voltage exceeded ~ 1.6 V. The transmission electron microscopy and the X-ray photoelectron spectroscopy were used to investigate the variations of the constitutive Si nanocrystals and the oxidation states. After annealing, size of the nanocrystals decreased and the oxidation states changed, changing the optical properties of the photodiodes.