Competitive mechanism of laser energy and pulses on holes ablation by femtosecond laser percussion drilling on AlN ceramics

In laser microstructure machining, results are derived through the action of multiple laser processing parameters (LPPs); therefore, multiple studies on the effect of LPPs on machining results are available. Further, few studies observed how competitive mechanism of each LPP affects machining results. As the most important LPPs, single-pulse energy and the number of pulses were varied to assess their effect on hole dimension and morphology. Additionally, competitive mechanism of LPPs on hole ablation was further explored. The study was based on femtosecond laser percussion drilling on aluminum nitride (AlN) ceramics surface. It was found that laser energy has a dominant role in initial ablation, determining both ablation and ablation mechanism. Additionally, it also determined hole inlet surface morphology and ablation mechanism remained the same regardless of increase in the number of pulses. Laser pulses assumed a dominant role after intersection point of LPPs acceleration rate and hole dimension acceleration rate. Hence, final hole dimensions and its sidewall morphology were defined. It was found that deep holes can be processed both in gentle ablation and strong ablation with lots of pulses. However, there are opposite mechanisms for inducing hole sidewall morphology; for example, in strong ablation, solidification effect is enhanced with increase of hole depth, while it is decreased in gentle ablation.     

Laser drilling of structural ceramics—A review

Structural ceramics are becoming widely popular in numerous fields because of high mechanical and physical properties. It is of great difficulty for conventional techniques to machine brittle and hard materials. As one of nontraditional machining methods, laser beam machining has emerged as an effective technique for drilling of ceramics. This paper reviews the research work on laser drilling of structural ceramics from its different pulse width. Lasers have been discussed to understand effects of critical experimental parameters on the quality characteristics and physical mechanisms involved in drilling ceramics. In addition, it is held that heat and liquid-assisted laser processing serves as a useful method to improve processing quality. Computational approaches of ANSYS and COMSOL are used to predict laser input parameters’ effects on quality of hole and describe the physical phenomena during processing. Comments on laser drilling of ceramics developments and future directions are provided at the end.     

Effect of laser scanning speed on geometrical features of Nd:YAG laser machined holes in thin silicon nitride substrate

0.5 mm thick Silicon nitride (Si₃N₄) substrates with MgO-Y₂O₃ additives were employed for hole machining study with a Nd:YAG two-dimensional laser machining (cutting) system. The effects of laser scanning speed on features of the machined holes such as hole diameter, hole circularity, taper angle, heat affected zone (HAZ), recast layer, and micro-cracks were studied. The results show that the diameters at the front side are larger than the back side for all holes machined at different spot scanning speed. The taper angle of the machined holes decreases, while the hole circularity increases with the increase of the spot scanning speed. In addition, the heat-affected-zone (HAZ) was observed clearly around the back side of drilled holes, whose area decreases with the increase of the laser spot scanning speed. The result shows that the HAZ is the largest when the laser scanning speed is 20 mm/min. Nevertheless, the machined hole did not completely cross through the thickness of the substrate when the laser scanning speed was 60 mm/min. To obtain holes with relatively good quality, laser scanning speed should be controlled between 30 mm/min and 50 mm/min.     

Effect of laser parameters and atmosphere in the structuring of aluminum nitride

The characteristics and formation mechanism of V-shaped groove formed by laser-activated metallization of aluminum nitride (AlN) ceramic under different shielding gas environments of air, nitrogen, and argon are investigated, using a novel analysis way which is based on the intensity distribution of the focused laser beam. It is found that the width of the V-shaped groove is slightly different under different gas environments, and the depth of the V-shaped groove is nearly the same, which means that the energy thresholds required for laser decomposition of AlN ceramic are different in various gas environments: air > nitrogen > argon, and the energy required for laser etching AlN ceramic is the same. It is also found that the nonlinearity in the curves of depth and width versus different machining parameters, which are explained in detail.     

Mechanical and heat transfer properties of AlN/Cu joints based on nanosecond laser-induced metallization

In this paper, AlN ceramic was directly joined to copper without active brazing filler metal. By exerting the nanosecond laser irradiation on the AlN surface, the AlN ceramic was thermally decomposed to aluminum and the surface was metalized. The as-metalized AlN ceramic was successfully joined to copper through the eutectic reaction between aluminum and copper. The effect of the groove interface structure fabricated with various laser scanning speeds on the mechanical and heat transfer properties of AlN/Cu joints was investigated. The joints obtained optimal shear strength and thermal diffusivity of 10.64 MPa and 51.75 mm²/s at the scanning speed of 250 mm/s. The micro groove structures of the interface contributed to the enhancement of mechanical and heat transfer properties of joints. The approach of laser-irradiation assisted joining proposed in this paper provided a novel thought for the fabrication of metal/ceramic composite structures.     

A study of laser machining combined with dynamic chemical etching in micro-hole drilling of 2.5D SiCf/SiC composites

In this study, we used a novel method of laser machining combined with dynamic chemical liquid etching (LMDCE) to drill holes in 2.5D SiC_f/SiC ceramic matrix composites (CMC-SiC). A chemical solution that could quickly remove the recast layer without damaging the substrate was selected. Severe recast layer and microcrack defects were observed when laser machining was performed in the air. The surface of the material was highly carbonized due to the thermal effect of the laser. The effect of different defocus amounts and scanning speeds on the hole taper was studied. A lower scanning speed can ensure that a smaller taper is obtained by the microhole. The bore diameter of the holes processed with a defocusing amount of 0 or −1 mm is more uniform. The results show that with the assistance of a dynamic chemical solution, the fibers break neatly into needle-like shapes, the thermal effect of the laser on the ceramic substrate is significantly weakened, the microhole shows good roundness, and there are no recast layers and oxides on the sample surface. In addition, microcracks are significantly reduced, and high-quality microholes without a heat-affected zone (HAZ) are machined. The method provides a new idea on how to eliminate machining defects and achieve higher-quality micromachining for ceramic matrix composites.     

Study on the three-dimensional topography of the machined surface in laser-assisted machining of Si3N4 ceramics under different material removal modes

The surface topography directly impacts the component performance. However, the two-dimensional (2D) surface roughness parameters in the previous studies have been inefficient and inadequate to describe a surface. In this study, with the help of a confocal laser scanning microscope and a scanning electron microscope, the three-dimensional (3D) topography of a machined Si₃N₄ surface using laser assisted machining (LAM) under different material removal modes was comprehensively characterised and compared using the standard ISO 25178–2:2012 surface texture parameters. The relationship between the 3D topography parameters and service properties was analysed. LAM is effective for machining ceramics with a high hardness and high brittleness. Different material removal modes were obtained by changing the power of the laser and were inferred by comprehensively analysing the macroscopic and microscopic topography of the chips, tool wear, and machined surface. In ductile material removal mode, the surfaces are anisotropic and cutting marks are clearly visible. Decreasing the power of the laser increases the value of the height and functions parameters. Decreasing the power of the laser also decreases the value of the hybrid and feature parameters.     

Laser drilling of liquid crystal polymer composite

This investigation studies the laser machining behavior of a glass fiber reinforced liquid crystalline polymer (LCP) composite by using two different types of lasers, namely; pulsed Nd:YAG and excimer. A theoretical model is established to predict the maximum depth-of-drill of the YAG laser machined holes. Moreover, the effects of the YAG laser output parameters on the geometry and the quality of the machined surface of the hole are discussed. The laser machining characteristics of the composite are compared for the two different types of lasers in terms of laser absorptivity. The results show that the glass fiber reinforced LCP has a higher absorption towards UV radiation than infrared light. Scanning electron microscopy examinations were also conducted to assess the surface quality of the machined holes. In YAG laser drilling, a high pulse energy or excessive pulses caused severe carbonization of the surface, and many cracks formed. On the other hand, excimer laser did not cause any significant carbonization of the surface; however, a large number of voids were found in the process affected zone.     

Deep precision machining of SiC ceramics by picosecond laser ablation

Silicon carbide (SiC) ceramic is becoming widely used in multiple industrial applications, owing to its exceptional high-temperature properties. Yet it is still a challenge to machine SiC using traditional means without causing damage due to its high hardness and brittleness. In this study, a subtractive manufacturing technique based on the use of a fiber picosecond laser was employed to remove material from the reaction bonded SiC surface or create micro-patterns with the minimum damage to the surface, maximum surface quality and precision. Multiple laser processing parameters were investigated with the purpose of obtaining deep high-quality cuts with the minimum surface roughness and the minimum amount of the re-deposited material. The heat affected zone was analyzed by grazing angle X-ray diffractometry, cross-sectional scanning electron microscopy, energy dispersive and micro Raman spectroscopy techniques. The cut shape, depth, surface roughness as well as the kerf width and re-deposition height were assessed using a 3D laser scanning microscopy. The optimum values were established for the focal position, the laser power, linear speed, wobble frequency, wobble pattern, and number of passes. This study also identified the processing parameters for shallow and deep high-precision SiC cutting at a material removal rate of ～2 mm³/min. The work demonstrated that the developed laser machining process is an efficient subtractive manufacturing tool that can be integrated into the automated precision cutting systems for machining hard ceramic materials such as SiC and alumina.     

Progress in non-traditional machining of amorphous alloys

Amorphous alloys are a new type of multi-functional advanced material with the properties of general metal materials and glass, which are also called metallic glasses. They have good comprehensive properties, such as a wide application range, low cost, and high reusability. Using reasonable process parameters, non-traditional machining can not only realize the machining of complex amorphous parts, but also avoid the crystallization and oxidation of amorphous alloys, realizing tasks that cannot be accomplished by traditional machining. Therefore, this review systematically summarizes the research status and development potential of amorphous alloys fabricated using non-traditional machining methods. First, we introduce the principles of laser machining, ultrasonic machining, electrical discharge machining, electrochemical machining, and other non-traditional machining methods for amorphous alloys. Subsequently, the influence of the machining parameters and other external conditions on the machining effect is summarized. The machining cost, machining efficiency, and environmental impact of these non-traditional machining methods were compared. Finally, non-traditional machining technology for amorphous alloys is summarized and discussed.     

Character and mechanism of surface micromachining for C/SiC composites by ultrashort plus laser

A new surface micromachining way of ultrashort plus laser for C/SiC composites with high quality and efficiency was demonstrated, including picosecond and femtosecond laser. Surface morphologies, element content and bonding states of C/SiC composites were analysed in detail after machined by picosecond and femtosecond laser power respectively. For femtosecond laser machining, the amount of nanoparticles increased with increasing laser power. At 20 and 50?mW, Si–C, C–C and Si–O bonds existed in nanoparticles, while Si–C bonds disappeared at 70?mW. For picosecond laser machining, cauliflower-like particles and periodic ripple with certain depth were formed distinctly. Furthermore, thermal ablation phenomenon occurred, and only Si–O bonds existed in particles due to the oxidation of the carbon fibres and SiC matrix. The results showed that femtosecond laser with low power was more suitable to the surface machining due to better machining quality and less machining damage compared with high power picosecond laser.     

The formed surface characteristics of SiCf/SiC composite in the nanosecond pulsed laser ablation

For the advantages of high-temperature resistance, corrosion resistance and ultra-high hardness, SiC_f/SiC composite is becoming a preferred material for manufacturing aero-engine parts. However, the anisotropy and heterogeneity bring great challenges to the processing technology. In this study, a nanosecond pulsed laser is applied to process SiC_f/SiC composite, where the influence of the scanning speed and laser scanning direction to the SiC fibers on the morphology of ablated grooves is investigated. The surface characteristics after ablation and the involved chemical reaction of SiC_f/SiC are explored. The results show that the increased laser scanning speed, accompanied by the decreasing spot overlap rate, leads to the less accumulation of energy on the material surface, so the ablation effect drops. In addition, for the anisotropy of the SiC_f/SiC material, the obtained surface characteristics are closely dependent on the laser scanning direction to the SiC fibers, resulting in different groove morphology. The element composition and phase analysis of the machined surface indicate that the main deposited product is SiO₂ and the carbon substance. The results can provide preliminary technical support for controlling the machining quality of ceramic matrix composites.     

New laser machining technology of Al2O3 ceramic with complex shape

A new method was developed for the fabrication of complex-shaped Al₂O₃ ceramic parts by combining laser machining and gelcasting technique. The unwanted ceramic powders parts were selectively removed by laser machining specified by a computer program, and the gelcast Al₂O₃ green bodies were machined to a designed shape by a CO₂ laser at a wavelength of 10.6 μm. The influences of solid loading, laser output power, scanning speed and nitrogen purge on the machining of green Al₂O₃ ceramic bodies were studied. The experimental parameters were optimized, the green Al₂O₃ bodies with solid loading of 40 vol% or below were easier to be machined, while the green bodies with solid loading of 45 vol% or above were hard to be further machined due to the surface sintering. Better machining quality and deeper machining depth could be obtained when the laser power is 30 W. The green Al₂O₃ bodies with complex shape were obtained by the laser machining.     

Influences of repetition rate of laser pulses on growth of crystalline AlN films on sapphire(0001) substrates by pulsed laser deposition

We investigated influences of a repetition frequency of laser pulses on growth of AlN crystalline films by pulsed laser deposition. The structural and morphological properties of the films were studied by X-ray diffraction and scanning electron microscopy. Employment of high frequency laser pulses not only enhanced the growth of AlN crystallites, but also afforded the crystal growth at higher nitrogen pressures. Growth of α-AlN was dramatically enhanced with an increase in the laser pulse frequency, while β-AlN was grown at the high frequency of laser pulses and high nitrogen pressures.     

氮化铝粉末的制备方法与机理

论述了氮化铝陶瓷粉末的各种制备方法,评述了各种方法的优缺点,总结了氮化铝形成的主要机理以及影响氮化铝粉末质量的因素.提供了一些有用的工艺参数和有关氮化铝粉末质量的数据.     

Onset of selective laser flash sintering of AlN

Flash sintering uses a combination of heating and electric fields to rapidly densify ceramics. Previously, it has been shown that a scanning laser can be used to initiate flash sintering in localized regions on an yttria-stabilized zirconia (YSZ) sample in a process known as selective laser flash sintering (SLFS). In this work, we show using a combination of measurements of electric current flowing through the sample and observations of necks formed between powder particles that aluminum nitride (AlN) can also undergo SLFS. Scan conditions required to initiate SLFS are characterized over a range of laser powers and laser scan speeds in a dry nitrogen environment. It is shown that initiation of SLFS in AlN is governed by both the local input energy density per scan and heat dissipation and a numerical model is developed to predict temperatures during SLFS. Assuming the minimum temperature along the conductive path determines the onset of SLFS, the minimum temperature and time required is 450–670 K in 2–0.25 s for the pressed AlN pellets used in this study for laser scan speeds of 33–300 m/s, laser powers of 10–30 W, and an applied electric field of 3000 V/cm.     

导电Al2O3基陶瓷刀具材料的超声—放电复合加工技术研究

采用超声－放电复合加工技术对Ａｌ２Ｏ３／（Ｗ,Ｔｉ）Ｃ,Ａｌ２Ｏ３／ＴｉＢ２,Ａｌ２Ｏ３／ＴｉＢ２／ＳｉＣｗ三种Ａｌ２Ｏ３基陶瓷刀具材料表面定位方孔进行加工,研究了共加工机理和加工参数对不同陶瓷材料加工效率,加工表面粗糙度的影响,由于该复合加工技术有产地结合了超扬波加工和放电加工的特点,因而能高效,高质量地加工陶瓷材料。试验结果表明,在同样的加工条件下,材料去除率的大小顺序为Ａｌ２Ｏ３／（Ｗ,Ｔｉ     

Hybrid laser processes for thick silver coating fabrication on AlN substrate

Aluminum nitride (AlN) are particularly suitable as integrated circuits (ICs) substrates due to its high thermal conductivity and excellent electricity insulation. However, its poor weldability with metals limits its usage. Recent research on surface metallization of AlN provides possible solutions to tackle this defect. Nevertheless, these solutions show some shortages such as complicated processes or insufficient electrical conductivity. In this paper, we report a method that consists of laser induced surface metallization and laser sintering of silver (Ag) coatings. A nanosecond laser was applied to induce a 10 μm thick aluminum (Al) layer from the AlN substrate. Afterwards, laser sintering of Ag layers was implemented, which could enhance the conductivity and the bonding performance between layers. With optimized laser parameters applied, both the electrical conductivity and the bonding tests demonstrated excellent physical properties. Finally, simulation and EDS analysis illustrated the melting evolution and confirmed a metallurgical combination of Al and Ag, thus enhancing bonding strength. Thanks to the small size of focused laser spot, electrical circuits width could be greatly narrowed if these findings were applied; hence highly dense ICs on AlN substrate become potentially available.     

浅析涂装防腐

介绍了涂装防腐的常用方法、经验总结,从电泳孔、电压、高泳透力电泳漆、生产组织和设备维护等方面进行了论述,同时通过具体案例分析了涂装电泳孔的开孔思路。     

Investigations on continuous-wave laser and pulsed laser induced controllable ablation of SiCf/SiC composites

To lay a foundation for the feasibility exploration of laser-induced ablation-assisted machining for SiC_f/SiC composites, combined with numerical simulation and experiments, the laser-induced ablation mechanism of SiC_f/SiC composites was studied, and the relationship between laser parameters and ablation depth was analyzed. The laser-induced ablation products of SiC_f/SiC composites mainly consisted of recrystallized 3C-SiC and amorphous SiO₂, which were powdery and porous. According to the stratification characteristic, the ablation products were divided into attached smoke dust layer, sublimate recrystallization layer, heat-affected layer, and unaffected layer from the surface to the inside of the material. By adjusting the laser parameters (significant factors were the scanning speed and the scanning spacing), the depth of laser-induced ablation was adjustable and controllable. The ablation depth was greater in continuous-wave (CW) mode due to the continuous energy input. Therefore, CW laser is more suitable for generating larger and various ablation depths to match various cutting allowances.