基于电流控制的压电陶瓷驱动器

为了解决电压控制型压电陶瓷驱动器驱动压电陶瓷时存在的迟滞、蠕变和带宽窄的问题,设计了基于电流控制的压电陶瓷驱动器,利用压电陶瓷致动器位移与其所带电荷量间的线性关系,该驱动器通过控制压电陶瓷的充电电流和时间控制其位移量．在此基础上,提出了以分辨率换取稳定性的动态保持控制方法,采用该电流型驱动器,实现了开环下对压电陶瓷致动器的稳定、快速、高精度定位．实验结果表明,该驱动器驱动行程为10μm的压电陶瓷时,满行程带宽大于1．5kHz,重复定位精度小于4nm（0．4％）．     

基于锆钛酸铅薄膜的变形镜微致动器

以锆钛酸铅（PZT）薄膜作为驱动材料,制备了变形镜的微致动器阵列．使用有限元软件对致动器进行了模拟仿真,得到了驱动器上电极尺寸、Si弹性层厚度等参数对致动器性能的影响,获得了最优化的致动器结构．以钙钛矿相的镍酸镧（LNO）作为PZT薄膜在Pt衬底上生长的缓冲层,增强了PZT薄膜的（100）取向,减小了PZT薄膜的内部应力,提高了致动器的驱动性能．最终制备出的1μm厚PZT薄膜驱动的变形镜微致动器,在10V直流电压的激励下,具有2．0μm的变形量．以PZT薄膜作为驱动材料制备的变形镜微致动器阵列,对变形镜致动器的微型化和系统集成度的提高具有重要意义．     

MFC致动器的动态迟滞模型辨识及补偿控制EI北大核心CSCD

压电宏纤维(marco fiber composite,MFC)具有柔性好、变形能力强的优点,但MFC致动器驱动的柔性臂的迟滞非线性严重影响系统定位精度。提出一种具有非对称性的改进Prandtl-Ishlinskii(PI)迟滞模型,解决经典PI迟滞模型的缺陷(对称性);该模型基于经典PI迟滞模型,叠加一系列不同权重、不同阈值的双边死区算子获得,基于最小二乘法的迟滞模型辨识结果表明,改进PI迟滞模型对MFC致动器的迟滞建模误差从PI迟滞模型误差的16.06%降到5.58%。另外,建立系统的离散传递函数模型来描述系统的线性动态特性,并与改进PI迟滞模型串联得到组合模型,解决纯迟滞模型仅能描述低频、准静态情况下的迟滞特性问题。在前馈补偿下,对MFC致动的柔性臂进行正弦波轨迹跟踪试验,测得补偿后实测位移与期望跟踪位移基本吻合,跟踪精度达到93.62%以上。试验结果证明,所提出的改进PI迟滞模型、离散传递函数模型及补偿方法的有效性。     

介电弹性体致动器及其应变响应研究

用介电弹性体制作的致动器,具有变形量大、能驱动较大的负载、可塑性很好的特点.给出了一种使用介电弹性体制作基本致动器的方法,对电极、预应变等对该方法制作的致动器的影响进行了实验研究.结果表明,电极的柔软度必须与材料的性质匹配.太硬的电极会使应变变小,而太柔的电极会使薄膜易于击穿.预应变虽减弱了单位电压下的变形量,但却能提高致动器的最大应变量.     

MEMS变形镜用PZT厚膜致动器阵列的制备及性能表征

提出了一种基于锆钛酸铅(PZT)压电厚膜致动器阵列驱动的MEMS微变形镜,建立了该微变形镜的结构模型,分析了其结构中各层厚度对其性能的影响.PZT压电厚膜是通过基于PZT压电陶瓷体材料的湿法刻蚀技术制备的,刻蚀液为1BHF2HCl4NH4 Cl4H2O.以数字锁相方法测试了压电厚膜的介电性能,在100 kHz以下时,其介电常数和介质损耗分别优于2400和3%.利用悬臂梁方法测试了压电厚膜的也.横向压电系数,约为-250 pm/V.制备了4×4阵列的压电致动器阵列.采用激光多普勒测试压电致动器的电压位移曲线,在100 V的电压驱动下致动器的变形量大约为2.2/μm;测试了致动器的频率响应,其谐振频率高于100 kHz;致动器刚度大,带负载能力强.     

基于电荷泵的压电致动器迟滞非线性改善研究北大核心CSCD

压电致动器在精密定位、微纳米测量等领域得到了广泛的应用,然而迟滞和非线性现象严重影响了其定位精度和性能。虽然电荷驱动的方法可以降低大部分迟滞,但仍存在较为明显的残余迟滞,尤其是电压工作范围较大时,压电致动器的迟滞呈现增大的趋势。基于残余迟滞的分析和计算,提出了一种用于电荷泵驱动的残余迟滞改进方法,研究了校正参数的推导方法,改善了经典电荷泵驱动的迟滞非线性。通过实验发现,在驱动电压范围为0~100 V、驱动频率为0.1~2 Hz时,相比经典电荷泵驱动的2.79%迟滞,改进后的电荷泵驱动方法可以将迟滞进一步降低至0.47%以下,比经典的电荷泵驱动方法降低了83%左右。所提方法在精密测量等领域具有较好的应用价值。     

新型纳米级微位移致动器的设计

磁致伸缩型微位移致动器通常采用多晶或孪晶结构材料作为驱动单元 ,由于晶界和孪晶界对畴壁的移动具有阻碍作用 ,其低场下的位移输出较小 ,调控精度受到较大影响。采用Tb Dy Fe单晶材料可以有效解决这一问题 ,本文介绍了采用这一单晶材料设计的新型高精度微位移致动器以及致动器的结构和数控电源     

空间引力波望远镜超前瞄准机构致动器电荷驱动位移行为研究

超前瞄准机构(PAAM)是空间引力波探测望远镜的关键部件,其主要通过给压电致动器输入电压或电荷精确控制位移量,实现对望远镜高精度角度控制。因此,压电陶瓷致动器位移响应直接影响超前瞄准机构指向控制性能。本文提出等效电容量计算方法定量分析压电致动器在电荷驱动下的位移响应特性,并通过数值模拟仿真和实验验证等方式验证了计算方法的准确性和可行性。结果表明：在使用幅值5 V、频率0.05 Hz～5 Hz的正弦波信号控制的电荷放大器驱动某型号压电致动器时,采用本文方法分析结果与实验结果相比,二者位移响应最大偏差小于1.35%,为空间引力波探测望远镜超前瞄准机构的高精度指向控制提供了可能的分析方法和实现途径。     

超磁致伸缩单晶微位移致动器特性研究

采用高性能Tb0 .3 Dy0 .7Fe2 单晶材料 ,通过优化微位移致动器的机械、磁路参数 ,研制出了具有非水冷结构的新型微位移致动器。致动器的最大线性工作区间为 0 .5～ 3 5 .5 μm ,工作电压为 2～ 2 4V ,饱和驱动量可达 3 9.5 μm     

压电致动的谐振式水下柔性结构动态迟滞建模及前馈补偿

具有运动灵活且操作方便优点的宏压电纤维复合材料(macro fiber composite, MFC)致动水下柔性结构广泛应用于水下仿生推进和变形控制系统中，但是MFC的迟滞非线性严重影响了系统的定位精度和操控性能。提出了一种改进Prandtl-Ishlinskii(PI)静态迟滞和传递函数动态模型串联的复合式模型来描述MFC致动水下柔性结构谐振状态下的动态迟滞行为。首先基于所提出水下结构的准静态迟滞特性辨识得到改进PI迟滞模型参数，然后通过传递函数串联馈通环节的动态模型捕捉MFC致动柔性结构的水下谐振特性。实验结果表明所建立的复合式动态迟滞模型能够很好地描述MFC致动水下柔性结构在谐振状态下的动态迟滞行为，并且在固有频率附近一定带宽范围内仍具有较高准确性。基于复合式逆模型的前馈补偿下，水下柔性结构在谐振状态下跟踪正弦轨迹的实测位移与期望位移基本重合，补偿后二者线性度较高，显著提升了MFC致动柔性结构谐振状态下的动态定位和跟踪精度，证实了所提出动态迟滞模型和补偿方法的有效性。     

Fabrication and characterization of microcantilever integrated with PZT thin film sensor and actuator

The purpose is to find the potential application of PZT thin film for microsensor and microactuator. Pb(Zr_0.5Ti_0.5)O₃ thin film is deposited by sol-gel method. Piezoelectric microcantilever with two-segment top electrodes is fabricated using bulk micromachining techniques. Piezoelectricity of the deposited PZT thin film and sensing and actuation capability of the each segment of microcantilever is proved. Experiments are performed when one segment acts as an actuator or vibrator and another segment as force sensor. The results show that the proposed PZT thin film microcantilever can be used in force feedback and object manipulation simultaneously.     

Thickness dependence of electrical properties of PZT films deposited on metal substrates by laser-assisted aerosol deposition

Dependence of electrical properties-dielectric, ferroelectric, and piezoelectric properties-on film thickness was studied for lead-zirconate-titanate (PZT) thick films directly deposited onto stainless-steel (SUS) substrates in actuator devices by using a carbon dioxide (CO₂), laser-assisted aerosol deposition technique. Optical spectroscopic analysis data and laser irradiation experiments revealed that absorption at a given wavelength by the film increased with increasing film thickness. Dielectric constant epsiv, remanent polarization value P_r, and coercive field strength E_c of PZT films directly deposited onto a SUS-based piezoelectric actuator substrate annealed by CO₂ laser irradiation at 850degC improved with increasing film thickness, and for films thicker than 25 mum, e > 800, Pr > 40 muC/cm², and E_c < 45 kV/cm. In contrast, the displacement of the SUS-based actuator with the laser-annealed PZT thick film decreased with increasing film thickness.     

晶体结构对压电陶瓷微位移驱动器特性的影响

对钙钛矿结构的ＰＺＴ－５和钨青铜结构的ＰＢＮＮ二种压电陶瓷制成的压电微位移器进行了电压－位移特性的比较和分析，发现我们所研制的ＰＢＮＮ压电微位移器具有线性好、回零好、等优点。     

基于PZT薄膜面内极化工作的低应力压电微传声器

本文设计、制作并测试了一种基于压电PZT薄膜面内极化工作的压电微传声器.利用压电薄膜的纵向压电常数,并通过压电微传声器面内电极的设计提高电极间距,以提高压电微传声器的灵敏度.由于基于PZT薄膜的多层结构常具有很大的残余应力,通过5种不同振动膜材料与PZT薄膜的应力匹配实验,研究了降低振动膜应力的方法.结果表明,对于相同尺寸的膜片,PZT/ZrO2/LTO/Si3N4具有最小的变形,其中心处的变形(200 nm)仅为膜片PZT/ZrO2/Si3N4/SiO2中心处变形(17μm)的1%.采用体硅微加工工艺制作了具有方形振动膜(2 mm×2 mm)的压电微传声器结构,采用LTO/Si3N4多层结构作为振动膜结构,方形膜片中心的圆形结构为PZT薄膜,环形叉指结构为Au/Cr电极.压电微传声器在0.15 kHz~6 kHz频率范围内的灵敏度约为0.1 mV/Pa.     

A Resistivity Gradient Piezoelectric FGM Actuator

To whom correspondence should be addressedE-mail: zymeng@guomai.sh.cn1. IntroductionDuring the last several years the application ofpiezoelectric materials as reliable micro scale positioner has undergone considerable research and development work[1-3]. The two most common typesof piezoelectric actuators are the multilayer ceramicactuator with internal electrodes and the cantileveredbimorph actuator. However these technologies havetheir limitations in regard to size, weight, maximum displacem…     

Design and fabrication of multilayer actuator using floating electrode

PZT (lead zirconate titanate) multilayer actuators were of interest due to their small volume, fast response, low power consumption and low driving voltage. But this multilayer actuator had some problems. However, due to internal stress around electrodes, crack and delamination were very important issues. Around the edge of conventional inter-digital electrodes, non-uniform electric field generates the stress concentration, which causes the ceramic crack and delamination. The internal stress distribution in multilayer actuator was analysed by a numerical simulation. And by using float electrode, multilayer actuator was manufactured to decrease internal stress concentration of inter-digital electrode. The float electrode could suppress the electric field concentration and cracking in the actuator.

Destruction mechanism in multilayer ceramic actuators has been investigated under cyclic electric fields. Crack propagation has been observed dynamically by using optical microscopy, and the accompanying characteristic of acoustic emission was measured.     

Comparative analysis for the crystalline and ferroelectric properties of Pb(Zr,Ti)O3 thin films deposited on metallic LaNiO3 and Pt electrodes

The crystalline quality and ferroelectricity of the Pb(Zr,Ti)O₃ (PZT) films deposited on the metallic LaNiO₃ (LNO) and Pt electrodes were comparatively analyzed to investigate the possibility for their application to non-volatile memory devices. LNO thin films were successfully deposited on various substrates by using r.f. magnetron sputtering even at a low temperature ranging from 250 to 500 °C, and the ferroelectric PZT thin films were spin-coated onto the LNO and Pt bottom electrodes. Metallic LNO thin films exhibited [100] orientation irrespective of the substrate species and PZT films coated onto LNO films had highly a- and c-axis orientations, while those with Pt bottom electrode were polycrystalline. PZT films with LNO bottom electrode had smaller grain size and larger dielectric constant compared to those grown on the Pt electrode. The ferroelectric thin films fabricated on LNO bottom electrode displayed an asymmetric D–E hysteresis loop, which was explained by the defect effects formed at the interface. Especially, the LNO/PZT/LNO capacitor was found to significantly improve the polarization fatigue and the effects of the LNO electrodes to the fatigue were discussed.     

Effects of the deposition and patterning processes of the top electrode on the ferroelectric properties of Pt/Pb(Zr,Ti)O<Subscript>3</Subscript>/Pt thin film capacitors

The deformation in the hysteresis loop of Pt/PZT/Pt thin film capacitors due to deposition and patterning processes of the top electrode has been investigated. The PZT film was aged during the deposition of the top electrode and was positively poled during reactive ion etching (RIE) of the top electrode. The PZT film having sputtered top electrode was very sensitive to the RIE process. The film with a thinner top electrode showed less initial switching polarization due to less compressive stress, but better fatigue characteristics due to an enhanced partial switching region.     

Composites with piezoelectric thin fibers – first evidence of piezoelectric behavior

 The integration of functional components into composite materials is still a challenge for materials science. The integrated components themselves acting as sensor and/or as actuator should not interfere with the excellent mechanical properties of fiber-reinforced composite materials. Using this approach the implementation of ”one-dimensional”geometries – like fibers with small diameters – is recommended. Thin fibers consisting of piezoelectric materials like PZT are among the promising candidates offering the sensor/actuator coupling. Sol-gel processing is useful for fabricating PZT fibers thin enough to behave flexibly. Therefore, they offer the opportunity to make composite materials adaptive while maintaining the structural conformity. Sol-gel derived high-quality PZT fibers with diameters smaller than 30 μm have been successfully integrated into planar fiber architectures. Within them the fibers are oriented uni-directionally. These architectures are embedded with interdigital electrodes. After embedding the fiber/electrode architectures within glass fiber-reinforced polymers the fibers can be poled and become piezoelectric. The resulting structures were suitable to be tested as adaptive components. It has been demonstrated that such structures can detect impacts and tensions. They can also be driven actively leading to a vibration of the structure. Received: 21 July 1998 / Reviewed and accepted: 22 October 1998