Chemical bonding structure of TiO2 thin films grown on n-type Si

Titanium dioxide thin films were obtained by RF magnetron sputtering system with different Ar and O atmospheres. Chemical bonding structures of the thin films were investigated using the Fourier transform infrared spectroscopy (FTIR) in the range of 400-7500 cm^− 1 for as-deposited and conventionally thermal annealed films at different temperature in air. These structural characterizations of the films were carried out by describing the low-frequency fluctuations of the FTIR spectra using the noninvasive (i.e. error controllable) procedure of the optimal linear smoothing. This approach is based on the criterion of the minimal relative error in selection of the proper smoothing window. It allows the receiving an optimal separation of a possible trend from the high-frequency fluctuations, defined as a random sequence of the relative fluctuations possessing zero trends. Thus, the noise can be read and extra information about the structures was then obtained by comparing with the experimental results. In the film annealed at 900 °C, the rutile phase was the dominant crystalline phase as revealed by infrared spectroscopy. At the annealing temperatures lower than 900 °C, both the anatase and the rutile phases were coexisting. In addition, symmetric and asymmetric Si-O-Si vibrations modes were observed at around 1000 cm^− 1 and 800 cm^− 1, respectively. These peaks suggest that a thin SiO₂ film was formed at the TiO₂/Si interface during the growth and the annealing of the TiO₂ films. It was also observed that the reactivity between TiO₂ film and Si substrate is increased with the increasing annealing temperature.     

The electrical properties of CuInSe2 thin films deposited onto CaF2 substrates

CuInSe₂ thin films were deposited onto (111)-oriented CaF₂ substrates by flash evaporation in the substrate temperature range T_s = 650–890 K. Epitaxial growth was found at T_s = 770–800 K; at lower and higher substrate temperatures the films were partly polycrystalline. Films produced at T_s ? 675 K showed n-type conductivity due to a donor with an ionization energy of 78 ± 5 meV ascribed to indium interstitials. At T_s ? 725 K the films exhibited p-type conductivity due to a shallow acceptor with an ionization energy characteristic of indium vacancies. The important role of the substrate material in establishing the electrical parameters of CuInSe₂ thin films is proved by a comparative study of thin films deposited onto GaAs and CaF₂ substrates.     

Effects of annealing temperatures on optical and electrical properties of vacuum evaporated Ga15Se77In8 chalcogenide thin films

The optical constants (absorption coefficient, optical band gap, refractive index, extinction coefficient, real and imaginary parts of dielectric constants) of amorphous and thermally annealed thin films of Ga₁₅Se₇₇In₈ chalcogenide glasses with thickness 4000 Å have been investigated from absorption and reflection spectra as a function of photon energy in the wave length region 400-800 nm. Thin films of Ga₁₅Se₇₇In₈ chalcogenide glasses were thermally annealed for 2 h at three different annealing temperatures 333 K, 348 K and 363 K, which are in between the glass transition and crystallization temperature of Ga₁₅Se₇₇In₈ glasses. Analysis of the optical absorption data shows that the rule of non-direct transitions predominates. It was found that the optical band gap decreases with increasing annealing temperature. It has been observed that the value of absorption coefficient and extinction coefficient increases while the values of refractive index decrease with increasing annealing temperature. The decrease in optical band gap is explained on the basis of the change in nature of films, from amorphous to crystalline state. The dc conductivity of amorphous and thermally annealed thin films of Ga₁₅Se₇₇In₈ chalcogenide glasses is also reported for the temperature range 298-393 K. It has been observed that the conduction is due to thermally assisted tunneling of the carriers in the localized states near the band edges. The dc conductivity was observed to increase with the corresponding decrease in activation energy on increasing annealing temperature in the present system. These results were analyzed in terms of the Davis-Mott model.     

Low-temperature deposition of crystallized TiO2 thin films

Crystallized TiO₂ thin films were deposited on a non-heated substrate by two methods: oxygen-ion-assisted reactive evaporation (ORE) and high-rate reactive sputtering (HRS) using two sputtering sources. When the films were deposited on an unheated glass substrate, amorphous films were initially grown on the substrate in case of both deposition methods, although an increase in oxygen-ion energy above 600 eV led to a growth of a crystallized layer on the amorphous films in the case of ORE. When the films were deposited by HRS on a crystallized TiO₂ seed layer, homo-epitaxial growth was observed, and crystallized TiO₂ films with an excellent hydrophilic property were obtained on unheated substrate. In contrast, when the films were deposited by ORE, amorphous films were initially grown on the crystallized TiO₂ seed layer in a similar manner to the deposition of films on a glass substrate, and homo-epitaxial growth was not observed. These results suggest that the large kinetic energy of titanium atoms arriving at the substrate during HRS is a key factor in promoting epitaxial growth of the TiO₂ film at low temperature.     

Structural and electrical properties of evaporated ZnTe thin films

Zinc telluride thin films of various thicknesses are deposited by vacuum evaporation onto glass substrates at room temperature. The X-ray diffraction technique is used to determine the crystalline structure and grain size of the films, respectively. The structure was found to be cubic with preferential orientation along a (1 1 1) plane and crystallite size of about 50-80 nm. The degree of preferred orientation and crystallite size are increased as the film thickness increases. The current density-voltage (J-V) characteristics showed ohmic conduction in the lower voltage range and space-charge-limited conductivity in the higher voltage range. Capacitance measurements indicated that the films have a relative permittivity, ε_r, of approximately 8.19. Further evidence for this conduction process was provided by linear dependence of V_t on d². Analysis of the results yielded hole concentration , which is correlated with the structural properties.     

Deposition of HfO2 thin films on ZnS substrates

HfO₂ thin films with columnar microstructure were deposited directly on ZnS substrates by electron beam evaporation process. SiO₂ thin films, deposited by reactive magnetron sputtering, were used as buffer layers, HfO₂ thin films of granular microstructure were obtained on SiO₂ interlayer by this process. X-ray diffraction patterns demonstrate that the as-deposited HfO₂ films are in an amorphous-like state with small amount of crystalline phase while the HfO₂ films annealed at 450 °C in O₂ for 30 min and in Ar for 150 min underwent a phase transformation from amorphous-like to monoclinic phase. Antireflection effect in certain infrared wave band, such as 3–6 μm, 4–12 μm, 4–8 μm and 3–10 μm, can be observed, which was dependent on the thickness of thin films. The cross-sectional images of HfO₂ films, obtained by field emission scanning electron microscopy, revealed that there was no distinct morphological change upon annealing.     

Effect of SnO2 on the photocatalytical properties of TiO2 films

TiO₂/SnO₂ thin films with different tin atomic percentages were successfully prepared on glass substrates by the spray pyrolysis method from an alcoholic solution of TiO[C₅H₇O₂]₂ with different concentrations of SnCl₄. The TiO₂/SnO₂ thin films prepared at 450 °C presented the anatase phase in polycrystalline configuration from %Sn = 0 in the starting solution up to %Sn = 20, at higher tin content the films present an amorphous configuration. The resulting thin films have a homogeneous surface structure with some porosity. The photocatalytical properties of the films were evaluated with the degradation of methylene blue. The products of the degradation reaction were identified by ¹H nuclear magnetic resonance and the film properties were studied by atomic force microscopy, scanning electron microscopy, UV–Vis spectroscopy, and X-ray diffraction.     

Chemical deposition of Al2O3 thin films on Si substrates

Uniform Al₂O₃ films were deposited on silicon substrates by the sol–gel process from stable coating solutions. The technological procedure includes spin coating deposition and investigating the influence of the annealing temperature on the dielectric properties. The layers were studied by Fourier transform infrared spectroscopy and Scanning Electron Spectroscopy. The electrical measurements have been carried out on metal–insulator–semiconductor (MIS) structures. The C–V curves show a negative fixed charge at the interface and density of the interface state, Dit, 3.7 × 10¹¹ eV^− 1cm^− 2 for annealing temperature at 750 °C.     

Growth and electrical properties of AgGaS2 thin films

Polycrystalline and amorphous thin films of AgGaS₂ were grown by flash evaporation for the first time. From a detailed investigation of the growthconditions it was possible to derive the first so-called structural phase diagram of a ternary chalcopyrite compound. In addition, the crystallization behaviour of amorphous films in a second heat treatment step was studied extensively. The crystal structures and chemical composition were analysed by X-ray diffraction, thermogravimetry and atomic absorption spectroscopy. The films were characterized by electrical and photo-electrical measurements.     

Substrate and Fe-doping effects on the hydrophilic properties of TiO2 thin films

Titanium dioxide films are known for their hydrophilic and photocatalytic characteristics. Increasing specific surface area and doping can enhance their photocatalytic activity and hydrophilicity. We report here results regarding the enhancement of the photocatalytic properties of titania by both controlling surface morphology and the anatase/rutile ratio. The samples were deposited on glass, indium tin oxide covered glass, and SrTiO₃ by sputtering and laser ablation techniques. Film structure and surface morphology were investigated by X-ray diffraction and atomic force microscopy. Film hydrophilicity was assessed from contact angle measurements during- and post-irradiation with UV light. The contact angle data are discussed in terms of the synergic effects of surface morphology, structure and composition of the films.     

Effect of preparation conditions on properties of atomic layer deposited TiO2 films in Mo–TiO2–Al stacks

TiO₂ films were grown by atomic layer deposition on Mo electrodes in order to elucidate the dominating conductance mechanism and its dependence on the growth chemistry. TiCl₄ and Ti(OC₂H₅)₄ served as titanium precursors, and H₂O or H₂O₂ as oxygen precursors. The films grown at lower temperatures were amorphous. With increasing growth temperatures the crystallization first started in the TiCl₄–H₂O process. The films grown in this process were clearly leakier compared to the films grown from Ti(OC₂H₅)₄ and H₂O and from Ti(OC₂H₅)₄ and H₂O₂. In the Ti(OC₂H₅)₄-based processes, the application of H₂O₂ instead of H₂O resulted in the films with considerably lowered conductivity, although structural differences in these films were insignificant. Space–charge-limited currents were prevailing in all our amorphous Mo–TiO₂–Al packages. Measurements at different temperatures suggested quite high trap densities likely due to the presence of impurities and structural disorder, while the strong differences in conductivity seemed to be due to different densities of gap states.     

Effect of crystallization on humidity sensing properties of sol-gel derived nanocrystalline TiO2 thin films

In the present work, we describe the effect of crystallization on humidity sensing properties of nanocrystalline TiO₂ thin films prepared by sol-gel techniques. Here, we report an enhancement in the relative humidity (RH) sensitivity just after the crystallization at 375 °C, which is attributed to increased surface activity near crystallization and lower crystallite size. After crystallization, the RH sensitivity was found to decrease with increasing grain size. The complex impedance of the sensor, measured using impedance spectroscopy, fits well with an equivalent circuit consisting of inter-granular resistance and capacitance in parallel. It was found that with the change in RH, only resistance changes significantly, when compared with the capacitance.     

Study on TiO2 thin films grown by advanced pulsed laser deposition on ITO

TiO₂ films were grown by an advanced pulsed laser deposition method (PLD) on ITO substrates to be used as functional electrodes in the manufacturing of solar cells. A pure titanium target (99.99%) was irradiated by a Nd:YAG laser (355 and 532 nm, 5 ns, 35 mJ, 3 J/cm²) in an oxygen atmosphere at different pressures (20-160 mTorr) and at room temperature. After deposition, the films were subjected to an annealing process at 350 °C. The film structure, surface morphology, thickness, roughness, and optical transmission were investigated. Regardless of the wavelength used, the films deposited at room temperature presented only Ti₂O and TiO peaks. After thermal treatment, the TiO₂ films became strongly crystalline, with a tetragonal structure and in the anatase phase; the threshold temperature value was 250 °C. The deposition rate was in the range of 0.035-0.250 nm/pulse, and the roughness was 135-305 nm. Optical transmission of the films in the visible range was between 40% and 60%.     

Structural and physical properties of Mg-doped CuAlO2 thin films

The CuAl_1−xMg_xO₂ (x = 0, 0.01, 0.02 and 0.05) thin films were successfully deposited on quartz substrate by using the RF magnetron sputtering technique. XRD patterns indicate that the delafossite structure could be guaranteed for all CuAl_1−xMg_xO₂ films. The conductivity measured at room temperature for CuAl_0.98Mg_0.02O₂ film is three orders of magnitude higher than that of undoped CuAlO₂ film and the band gaps of CuAl_1−xMg_xO₂ (x = 0, 0.01, 0.02 and 0.05) thin films decrease with the increase of the doping concentration, which is related to the formation of impurity energy levels with increasing the doping concentration.     

The investigation of structural, electrical, and optical properties of thermal evaporated AgGaS2 thin films

AgGaS₂ (AGS) thin films were deposited onto glass substrates by sequential thermal evaporation of AgGaS₂ single crystalline powder and excess silver (Ag) interlayer. Systematic optimization to obtain single phase AgGaS₂ thin films was carried out by changing the thickness of the excess silver layer. The structure and composition of as-grown and annealed films were studied by means of X-ray diffraction and energy dispersive X-ray analysis, respectively. The optical properties of AGS thin films determined by transmittance and reflection measurements showed that they had quite high absorption coefficient with the values around 10⁴ (cm⁻¹). The calculated band gap values were found to be between 2.30 and 2.75 eV depending on annealing temperature. The refractive index (n) and extinction coefficient (k) of the films were determined by the envelope method. Finally, photo-electrical measurements under different illumination intensities were carried out, and different sensitizing and recombination centers were defined.     

A study of textured non-stoichiometric MoTe2 thin films used as substrates for textured stoichiometric MoS2 thin films

Textured MoTe₂ films have been prepared by sequential evaporation of the constituents followed by annealing under a tellurium pressure. The films are systematically textured with the c-axis of the crystallites perpendicular to the plane of substrate, however, the film composition is difficult to control and even after process optimization the films are tellurium deficient. This is thought to be caused by the electro negativity difference of the constituents.The textured MoTe₂ films have been used as substrates on which to grow MoS₂ films by annealing under a pressure of sulfur that allows textured MoS₂ films to be grown with good crystalline properties. The presence of sulfur at the surface and annealing under dynamic vacuum is important for this process and moreover, suppresses the superficial oxidation of the Mo and Te constituents.     

Structural, optical and electrical characterization of spray-deposited TiO2 thin films

Titanium oxide (TiO₂) thin films were deposited onto glass substrates by means of spray pyrolysis method using methanolic titanyl acetyl acetonate as precursor solution. The thin films were deposited at three different temperatures namely 350, 400 and 450 °C. As-deposited thin films were amorphous having 100–300 nm thickness. The thin films were subsequently annealed at 500 °C in air for 2 h. Structural, optical and electrical properties of TiO₂ thin films have been studied. Polycrystalline thin films with rutile crystal structure, as evidenced from X-ray diffraction pattern, were obtained with major reflexion along (1 1 0). Surface morphology and growth stages based on atomic force microscopy measurements are discussed. Electrical properties have been studied by means of electrical resistivity and thermoelectric power measurements. Optical study shows that TiO₂ possesses direct optical transition with band gap of 3.4 eV.     

Impact of substrate temperature on the microstructure, electrical and optical properties of sputtered nanoparticle V2O5 thin films

Applying reactive direct current (DC) magnetron sputtering method, nanoparticle vanadium pentoxide thin films were deposited onto glass slides and KBr substrates at different substrate temperatures. The films were characterized by X-ray photoelectron spectroscopy and atomic force microscope. Infrared spectra were recorded with a Fourier transform infrared spectrophotometer. It was found that, excepting the compositions, the film growth and vanadium oxygen bonds were strongly affected by the substrate temperature. Electrical measurements indicated that the square resistances of films showed an exponential decrease from 46 MΩ/□ to 33 kΩ/□ with substrate temperature increasing from 433 K to 593 K, and that the square resistance-temperature curves of films exhibited typical semiconducting behavior. Optical investigations were carried out in the near infrared and ultraviolet-visible range. Transmittance varied from about 95 to 55% in near-infrared range when the substrate temperature was elevated. In ultraviolet-visible range, optical band gaps and refractive indexes of films were deduced according to the transmission and reflection spectra.     

Frequency and temperature dependence of dielectric and electrical properties of radio-frequency sputtered lead-free K0.48Na0.52NbO3 thin films

Lead-free K_0.48Na_0.52NbO₃ (KNN) ferroelectric thin films were prepared using the radio-frequency magnetron sputtering method. The crystallized KNN phase was confirmed using X-ray diffraction. The KNN thin film exhibited a well-saturated ferroelectric polarization-electric field hysteresis loop with high remanent polarization. The dielectric and electrical properties of the KNN thin film were investigated over a wide range of frequencies from 10 Hz to 1 MHz, and over a wide range of temperatures from 25 °C to 500 °C. The complex impedance relaxations are shown in an impedance Cole-Cole plot. With increasing temperature, the AC conductivity increased, which obeys the power law, σ(ω) = σ₀ + Aω^s. The activation energy for the conduction process is calculated to be 0.57 eV from the slope of the AC conductivity at the low frequency.     

On the optical, structural, and morphological properties of ZrO2 and TiO2 dip-coated thin films supported on glass substrates

This article reports the optical and morphological properties of dip-coated TiO₂ and ZrO₂ thin films on soda-lime glass substrates by metal-organic decomposition (MOD) of titanium^IV and zirconium^IV acetylacetonates respectively. Thermogravimetric and differential thermal analysis (DTA–TG) were performed on the precursor powders, indicating pure TiO₂ anatase and tetragonal ZrO₂ phase formation. Phase crystallization processes took place in the range of 300–500 °C for anatase and of 410–500 °C for ZrO₂. Fourier Transform Infrared Spectroscopy (FT-IR) was used to confirm precursor bidentate ligand formation with keno-enolic equilibrium character. Deposited films were heated at different temperatures, and their structural, optical and morphological properties were studied by grazing-incidence X-ray Diffraction (GIXRD) and X-Ray Photoelectron Spectroscopy (XPS), Ultraviolet Visible Spectroscopy (UV-Vis), and Atomic Force Microscopy (AFM) respectively. Film thinning and crystalline phase formation were enhanced with increasing temperature upon chelate decomposition. The optimum annealing temperature for both pure anatase TiO₂ and tetragonal ZrO₂ thin films was found to be 500 °C since solid volume fraction increased with temperature and film refractive index values approached those of pure anatase and tetragonal zirconia. Conditions for clean stoichiometric film formation with an average roughness value of 2 nm are discussed in terms of material binding energies indicated by XPS analyses, refractive index and solid volume fraction obtained indirectly by UV-Vis spectra, and crystalline peak identification provided by GIXRD.