硅纳米线的合成及表征

目前已通过气-液-固生长机理及氧化物辅助生长等机理合成了大量硅纳米线,电镜、能量色散X射线分析、X射线光电子能谱、拉曼光谱、近边X射线吸收精细结构光谱、I-V测量、光致发光、场发射、电子输运测量等是表征硅纳米线的有效手段,介绍了硅纳米线在合成及表征方面的最新进展,并对其发展做了展望.     

1D Tellurium Nanostructures: Photothermally Assisted Morphology‐Controlled Synthesis and Applications in Preparing Functional Nanoscale Materials

A facile visible‐light‐assisted solution‐phase approach has been successfully developed to synthesize trigonal Te 1D nanostructures. By varying the relative amount of H₂TeO₃ and water‐soluble polymers, wirelike, beltlike, tubular Te, and Te nanoparticle‐joined 1D aggregates, as well as a novel thorny 1D assembly of Te nanothreads can be synthesized on a large scale. The diameter of the Te nanowires can be modulated by controlling the nucleation and growth process through modulation of the pH value of the reaction mixture. It is believed that the light irradiation and thermal effect play a significant role in this photothermally assisted technique. We have shown that the Te nanowires can be used as a template to prepare Pt–Te nanochains, where the composition of Pt in the Pt–Te 1D products can be modulated by adjusting the ratio of the Te nanowires and Pt salts. Preliminary optical investigations reveal that blue–violet emission of Te nanowires can be enhanced by the formation of defects or dislocations in the Te region through the galvanic replacement reaction between Te nanowires and H₂PtCl₆. In addition, we demonstrate that Te 1D nanostructures can be utilized to prepare Te at carbon‐rich nanocables and carbonaceous nanotubes. Te–Pt at carbon‐rich nanocables can also be fabricated using Te–Pt nanochains as the template. These Pt–Te nanochains and carbonaceous nanostructures are expected to find wide applications in electrochemistry, catalysis, fuel cells, sensors, and other fields. Furthermore, the successful preparation of Te 1D nanostructures with abundant shapes, Pt–Te nanochains, and their carbonaceous composite nanomaterials will offer great opportunities to explore the dependence of novel properties of nanomaterials on their morphology and composition, regulate the photoconductivity of semiconductors, and also be essential for the manufacture of potential optoelectronic devices.     

Electronic transport in silicon nanocrystals and nanochains

Si nanocrystals and nanochains, prepared by material synthesis, provide a means to define nanoscale devices using growth rather than lithographic techniques. Electronic transport in thin films of Si nanocrystals is influenced strongly by single-electron charging and quantum-confinement effects, and by the grain boundary regions between nanocrystals. This paper reviews electronic transport mechanisms in Si nanocrystal materials. These include thermionic emission of electrons across grain boundaries, space charge limited current, hopping transport, and single-electron charging effects. The fabrication of single-electron devices in Si nanocrystal thin films and nanochains is considered, particularly with regards to their operation at room temperature.     

恒磁场对Si、Ge基二极管I-V特性的影响及机理分析

在恒磁场为0～2T的范围内,对Si、Ge基二极管的反向饱和电流和正向电流进行了测试.结果表明,在一定的电学条件下,随着磁感应强度B的增大,磁场对Ge基二极管的反向饱和电流的影响比Si基二极管的更明显.磁场对Si基二极管的正向特性几乎没有影响,但可以观测到Ge基二极管的正向电流随磁场的增强发生了变化.依据半导体理论基础,对实验结果进行了分析并通过建立理论模型对磁场中二极管的I-V特性进行了模拟.     

The aligned Si nanowires growth using MW plasma enhanced CVD

New and simple modification of vapor-liquid-solid process for Si nanowires growth based on microwave plasma enhanced chemical vapor deposition that uses solid-state Si target as a source of Si atoms was developed. The method was temperature and pressure controlled evaporation of solid phase of Si source in hydrogen microwave plasma. Aligned growth of Si nanowires was performed in local electric field by applying of constant negative bias to substrate holder. Deposited Si nanowires were studied by scanning electron microscopy (SEM), Raman and photoluminescence spectroscopy. Correlation between photoluminescence spectra and Si nanowires properties were studied.     

应变Si/SiGe沟道功率UMOSFET的模拟分析

提出一种应变Si/SiGe UMOSFET结构,并与Si-UMOSFET器件的电流-电压特性进行比较;对SiGe区域在UMOSFET器件中的不同厚度值进行静态电学仿真。应变Si/SiGe异质结能够有效地提高沟道区载流子的迁移率,增大IDS,降低Vth及器件的Ron;且应变异质结与载流子有效传输沟道距离的大小,对器件的Vth、Isat、V(BR)DSS及电流-电压特性都有较大的影响。因此在满足击穿电压要求的基础上,应变Si/SiGe沟道异质结的UMOSFET相对Si-UMOSFET在I-V特性和Ron方面有较大的改进。     

水热法合成的六方晶相WO_3伏安特性的研究

利用水热法制备了六方晶相WO3纳米线,研究了单根WO3纳米线在不同条件下的伏安特性。结果表明:在空气环境中,所制WO3纳米线具有线性伏安特性,其电导率约为1.7×10–3S/cm。在紫外光激励下,由于气体吸附、W6+与W5+的相互转换,WO3纳米线的电导率逐渐增加为原来的200倍左右;在氨气环境中,由于氧空位的产生和扩散,WO3纳米线的I-V特性曲线呈回滞现象,其电导率随紫外光激励时间的增加而迅速增加为原来的100倍左右。该水热法合成的WO3纳米线对NH3具有很好的气敏性。     

Grain boundary layer behavior in ZnO/Si heterostructure

The grain boundary layer behavior in ZnO/Si heterostucture is investigated. The current-voltage (I-V) curves, deep level transient spectra (DLTS) and capacitance-voltage (C-V) curves are measured. The transport cur-rents of ZnO/Si heterojunction are dominated by grain boundary layer as high densities of interracial states existed. The interesting phenomenon that the crossing of In I-V curves of ZnO/Si heterojunction at various measurement temper-atures and the decrease of its effective barrier height with the decrement of temperature are in contradiction with the ideal heterojunction thermal emission model is observed. The details will be discussed in the following.     

Observation of Metal-Layer Stress on Si Nanowires in Gate-All-Around High- κ/Metal-Gate Device Structures

This letter reports, for the first time, the observation of mechanical stress from metal-gate layer on the Si nanowires formed by the top-down scheme. High-kappa (HfO2 ~ 5 nm) and metal-gate (TaN ~ 100 nm) are evaluated on Si nanowires having ~5-7 nm diameter. While no significant mechanical effect is observed after high-kappa deposition, the TaN metal layer is found to viciously stretch and twist the straight wires. The wire lengths increase significantly (~3%), which suggests that the Si nanowires are subjected to large tensile strain ( > 4 GPa), assuming that the wires obey Hooke's law with Young's modulus ~150 GPa for bulk Si. Interestingly, the twisted nanowires maintained their physical continuity, as demonstrated by the excellent performance of the fully functional gate-all-around MOSFETs fabricated with the wires as channels.     

Growth and characterization of ZnO nanowires grown on the Si(1 1 1) and Si(1 0 0) substrates: Optical properties and biaxial stress of nanowires

In this paper the effects of silicon substrates with different orientations on the morphological and optical properties as well as biaxial stress of ZnO nanowires were investigated. The ZnO nanowires were grown on Si(1 0 0) and Si(1 1 1) substrates by the vapor–solid (VS) method using a physical vapor deposition reactor. In addition ZnO nanowires were grown on Si(1 1 1) substrate by the vapor–liquid–solid (VLS) method using an Au film as catalyst, which were deposited on Si(1 1 1) substrate using a sputtering method, with the same conditions. Room temperature photoluminescence (PL) spectrum showed a stronger ultraviolet (UV) peak at 381 nm for the nanowires that were grown on Si(1 1 1) by the VS method than those that were grown on Si(1 0 0) with the same green emission (deep-level emission (DLE)) intensities at about 520 nm peak. On the other hand, the PL result of the ZnO nanowires, which were grown by the VLS method, showed the same intensities for the both UV and DLE peaks. Furthermore, the effects of silicon substrate orientation and Au catalyst on biaxial stress of the nanowires were studied by Raman spectrometer. It was discussed that Au catalyst was one of the important factors that could affect the biaxial stress value of the ZnO nanowires that were grown on Si substrates.     

Si纳米线表面Ni薄膜生长工艺

研究了Si纳米线表面Ni薄膜生长工艺。采用热蒸发法以SiO为起始原料制备自组生长的Si纳米线,再以5%(体积分数)HF剔除Si纳米线表面硅氧化合物,采用氩离子磁控溅射的方法在Si纳米线表面溅射一定厚度的无定形Ni颗粒,此后对镀Ni的Si纳米线进行完整晶体结构的退火处理。应用高分辨透射电镜(HRTEM)等结构表征工具分析了Si纳米线表面Ni薄膜的形成过程,HRTEM结果表明,在350℃左右退火得到的Si纳米线表面能形成连续的、结构完整的Ni薄膜;退火温度低于300℃时,表面溅射的Ni结晶效果较差;退火温度在800℃时,表面Ni薄膜发生团聚,形成了分立的纳米颗粒。     

Observation of Ni silicide formations and field emission properties of Ni silicide nanowires

The Ni silicide nanowires were grown by physical vapor deposition. The morphological changes of silicide formation were observed on a gradient Ni film thickness, which visualized the critical thickness is 60-80 nm to grow nanowires. The field emission measurement provided uniform characteristics and high field enhancement factors were obtained to be 3180 and 3002 from the Ni silicide nanowires grown on a Si substrate and a tungsten plate, respectively. By using a conductive tungsten plate, the emission current was enhanced to be 172.5 μA/cm² comparing to 76.5 μA/cm² from a Si substrate at 5 V/μm.     

Electrical transport properties in electroless-etched Si nanowire field-effect transistors

We report the electrical transport of the Si nanowires in a field-effect transistor (FET) configuration, which were synthesized from B-doped p-type Si(1 1 1) wafer by an aqueous electroless etching method based on the galvanic displacement of Si by the reduction of Ag⁺ ions on the wafer surface. The FET performance of the as-synthesized Si nanowires was investigated and compared with Ag-nanoparticles-removed Si nanowires. In addition, high-k HfO₂ gate dielectric was applied to the Si nanowires FETs, leading to the enhanced performance such as higher drain current and lower subthreshold swing.     

利用金作为催化剂在不同衬底上制备二氧化硅纳米线

利用金作为催化剂分别在二氧化硅及硅衬底上制备出二氧化硅纳米线。用扫描电子显微镜（SEM）及x射线光电子能谱（XPS）对纳米线进行了结构表征。SEM结果表明二氧化硅纳米线的长度为几个纳米,直径为20-150纳米。XPS结果给出硅与氧的原子比为1:2,说明所得到的为二氧化硅纳米线。二氧化硅纳米线的生长机理为气-液-固（VLS）机制。实验发现退火时间影响二氧化硅纳米线的形貌。我们也讨论了衬底对纳米线生长的影响。     

锗纳米线的性能与应用

重点分析讨论了锗纳米线在电学、光学、光电导等特性及其在场效应晶体管制造方面的研究应用现状与最新进展。综合分析表明,未经处理的锗纳米线表面存在一层氧化物及缺陷,与电极连接时欧姆接触性能较差,在制备锗纳米线器件以前必须对锗纳米线表面进行钝化以便沉积电极;对锗纳米线进行掺杂可以改善Ge纳米线的性能,制造出实用Ge纳米线器件。指出在一根纳米线上生长硅/锗半导体纳米线形成硅/锗半导体界面,直接用单根纳米线制造具有完整功能的电子器件是将来重要的研究方向。     

Growth of SiO_2 nanowires on different substrates using Au as a catalyst

SiO_2 nanowires were prepared on a SiO_2/Si(111) or Si substrate using Au as a catalyst.The products were characterized using scanning electron microscopy(SEM) and X-ray photoelectron spectroscopy(XPS).SEM shows that large amounts of SiO_2 nanowires with a diameter of 20-150 nm and length of several nanometers were formed on the entire surface of the substrate.XPS analysis indicates that the nanowires have the composition of Si and O in an atomic ratio of about 1:2,and their composition approximates that...     

长直SiO_2纳米线的制备和结构表征

采用磁控溅射法,以Si粉和溅金Si(111)为原料,加入C粉,在Si(111)衬底上制备无定形SiO2纳米线。首先,在Si(111)衬底上分别溅射厚度为18和36 nm的Au。然后,在1 100℃条件下处理80 min。用扫描电子显微镜(SEM)、X射线光电子能谱(XPS)、傅里叶红外光谱(FTIR)和X射线衍射方法 (XRD)等测试手段对退火后的SiO2纳米线的表面相貌、微观结构进行分析。结果表明,反应后有大量长而直的SiO2纳米线生成。而且随着溅射Au厚度的增加,SiO2纳米线的数量增多,且长度更长。这表明,SiO2纳米线的生长与溅射Au的厚度密切相关。     

Electric‐Driven Rotation of Silicon Nanowires and Silicon Nanowire Motors

In this work, the first highly controllable assembly and rotation of silicon nanowires and nanomotors in suspension are reported. Si and Si composite nanowires are fabricated with precisely controlled dimensions via colloidal assisted catalytic etching. The nanowires can be rotated with deterministic speed and chirality. The rotation speed and orientation not only depend on the applied AC electric frequency, but also on the electronic type, geometry, surface coating, as well as the electric conductance of suspension mediums. Theoretical analysis is used to understand the rotation of Si nanowires, and also the electric resistivity of Si nanowires is determined from their mechanical rotation. The Si nanowires are precisely assembled into nanomotors that can be rotated with controlled speeds and orientations at prescribed locations. This work provides a new paradigm for designing and actuating various Si‐based nanoelectromechanical system (NEMS) devices, which are relevant to man‐made nanomotors, nanorobots, and nanoengines.     

Hetero-emitter-like characteristics of phosphorus doped polysiliconemitter transistors. Part I: band structure in the polysilicon emitterobtained from electrical measurements

This paper reports on the cause of hetero-emitter-like characteristics recently discovered for a phosphorus doped poly-Si emitter transistor, the poly-Si emitter of which is crystallized from an in-situ phosphorus doped amorphous Si film. The band structure in the poly-Si emitter is investigated using (1) the transistor characteristics and (2) the I-V characteristics of the interface between the poly-Si emitter layer and the Si substrate. As a result, a new kind of potential barriers are observed on the conduction band and the valence band at the interface. The potential barrier on the valence band is proved to be the origin of the hetero-emitter-like characteristics. According to the I-V characteristics of the interface, the formation of the barriers is probably due to band discontinuity at the interface     

Si(100)衬底对ZnO纳米线阵列生长方向的控制作用

采用热分解ZnO粉末法,以Au为催化剂,在Si(100)衬底上外延生长了ZnO纳米线阵列。用扫描电子显微镜(SEM)分析表明:ZnO纳米线的直径在100nm左右,长度约3μm,与衬底表面的夹角约为70.5°,纳米线具有四个特定的倾斜方向A,B,C,D。X射线衍射(XRD)图谱上只有ZnO(0002)衍射峰,说明ZnO纳米线沿C轴择优生长。结合Si与ZnO的晶格结构特征,理论研究得出ZnO纳米线与Si基片的晶格匹配关系为:[0001]_(ZnO)∥[114]_(Si),[0001]_(ZnO)∥[■■4]_(Si),[0001]_(ZnO)∥[1■4]_(Si),[0001]_(ZnO)∥[■14]_(Si),失配度为1.54%。得出了Si(100)衬底对ZnO纳米线生长方向具有控制作用的结论。