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Aroused problems in the deposition of diamond-like carbon films by using the liquid phase electrodeposition technique 总被引:2,自引:0,他引:2
He-Sun Zhu Jin-Ting Jiu Qiang Fu Hao Wang Chuan-Bao Cao 《Journal of Materials Science》2003,38(1):141-145
Hydrogenated diamond-like carbon (DLC) films were prepared by using liquid phase electrodeposition technique. The effects of the applied potential and the carbon sources on the deposition process and film structures were studied. It has been found that the organic liquids with high dielectric constants, small viscosities and the methyl group bonding to the polar group are appropriate carbon sources. The increasing of potential improves the formation of sp3 carbon during the deposition process. In a high electric field, organic molecules are polarized and reacted on the surface of the electrode, turning out DLC and other products. It is believed that the reaction follows a polarization-reaction mechanism. 相似文献
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Jin-Ting Jiu Li-Ping Li Chuan-Bao Cao He-Sun Zhu 《Journal of Materials Science》2001,36(24):5801-5804
We have deposited diamond-like carbon (DLC) films by electrodeposition technique in methanol liquid. XPS showed the films mainly contain carbon. IR spectrum indicated that as-deposited films are hydrogenated carbon films, with the hydrogen mainly bonded to sp3 carbon. Raman measurement suggested that the films consisted of sp3 and sp2 carbon. The field emission (FE) property of DLC coated on Si has been measured. The field emission of DLC films started at an applied voltage of 160 V, compared with silicon tip arrays at 600 V, and an emission current of DLC films up to 55 A at 360 V was achieved. 相似文献
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采用液相法,在以硅片为阳极的工艺条件下沉积了一层DLC薄膜。通过Raman和FFIR光谱的分析,证实了该薄膜为含氢类金刚石薄膜(a-C:H)。并且对薄膜的交流阻抗谱(EIS)进行了测试和分析,确定该膜有非常高的阻抗值和良好的耐蚀性。 相似文献
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Xiao Liu D. M. Photiadis J. A. Bucaro J. F. Vignola B. H. Houston Huey-Daw Wu D. B. Chrisey 《Materials Science and Engineering: A》2004,370(1-2):142-145
We have studied the internal friction of amorphous diamond-like carbon films prepared by pulsed-laser deposition from 0.4 to 300 K. The low temperature internal friction below 10 K is dominated by the atomic tunneling states for amorphous solids, which is a measure of structure disorder. We have tried to vary the content of sp3 carbon atoms versus sp2 ones by changing laser fleunce, by doping with N and Ar, and by annealing at 500 °C for 20 min. Our results show that the internal friction varies about one order of magnitude from 2×10−5 to 2×10−4, and its value is higher with higher sp3 content when the film quality is generally considered superior. However, it is known that as-deposited diamond-like carbon films with high sp3 content are heavily stressed. Annealing and doping are used to release the stress. We conclude that in addition to tetrahedral bonding, low stress is also important in reducing structure disorder associated with the low energy tunneling states in amorphous solids. 相似文献
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Diamond-like carbon films, grown on microscope slides by a dual-ion beam sputtering system, were implanted by 110 keV N+ under the doses of 1 × 1015, 1 × 1016 and 1 × 1017ions cm−2 respectively. The implantation induced changes in electrical resistivity of the films and in infrared (IR) transmittance of the specimens were investigated as a function of implantation dose. The structural changes of the films were also studied using IR spectroscopy and Raman spectroscopy. It was observed that, with the increase of implantation dose, the diamond-like carbon films display two different stages in electrical and optical behaviours. The first is the increase of both the film resistivity and the IR transmittance of specimen at the dose of 1 × 1015 ions cm−2 which, we consider, is attributed to the implantation-induced increase sp3 C---H bonds. However, when the doses are higher than 1 × 1015 ions cm−2, the film resistivity and the IR transmittance of specimen decrea significantly and the decrease rates at dose range of 1×1016 to 1×1017 ions cm−2 are smaller than those between 1×1015 and 1 × 1016 ions cm−2. We conclude that the significant reductions of the two parameters at high doses are caused by the decreases of bond-angle disorder and of sp3 C---H bonds, the increases of sp2 C---C bonds dominated the crystallite size and/or number and also the sp2 C---H bonds. The smaller decrease rates at a dose range of 1 × 1016 to 1 × 1017 ions cm−2 may be caused by further recombination of some retained hydrogen atoms to carbon atoms. 相似文献
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The effect of surfactant on the formation, structure and properties of ZnO films synthesized by electrodeposition was studied in this work. It was carried out in an aqueous Zn(NO3)2 solution containing surfactant op-10 using cathodic galvanostatic method. The results showed that the additive surfactant effectively inhibited hydrogen evolution reaction on cathode surface, maintained stability of the solution pH and improved deposition rate of the films to two times. Grown ZnO films with uniform grain and smooth surface were observed by using atomic force microscopy. Optical characterizations indicated that average optical transmittance of such films was more than 80% in the visible wavelength range, and its optical band gap was near 3.21 eV. 相似文献
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反应磁控溅射法沉积的氟化类金刚石薄膜的结构分析 总被引:4,自引:0,他引:4
以高纯石墨作靶、Ar/CHF3作源气体采用射频反应磁控溅射法室温下制备了氟化类金刚石薄膜(F-DLC)。发现随着射频功率的增加,F-DLC薄膜拉曼光谱的D峰与G峰强度之比ID/IG加大,薄膜中芳香环式结构比例上升。红外吸收光谱则显示射频功率增加导致薄膜中的氟含量上升.氟原子与碳原子以及芳香环的耦合加强。控制射频功率可以有效调制薄膜中的氟含量以及芳香环结构的比例,F—DLC可能成为热稳定性较好的碳氟薄膜。 相似文献
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Diamond-like carbon (DLC) films with different structures were deposited on Si (100) and stainless steel substrates in a hybrid deposition system with Ar and CH4 as the feedstocks. The effects of the bias voltage, Ti-interlayer, Ti functional gradient layer and Ti-doping on the internal stress in DLC films were investigated. The results show that the internal stress in DLC films arises from both the intrinsic stress generated during the film growth and the thermal stress generated due to the mismatching of the thermal expansion coefficient between the DLC films and the substrate materials. The intrinsic stress can be released through doping titanium element at the expense of reducing the sp3/sp2 ratio. The thermal stress in DLC films can be decreased through introducing Ti-interlayer or Ti functional gradient layer. Noticeably, DLC films with very low internal stress deposited on stainless steel can be obtained through the combination of Ti-doping and Ti functional gradient layer. 相似文献
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分别以氩气-甲烷、氩气-乙炔为辅助气体,高纯石墨为靶材,利用中频脉冲非平衡磁控溅射技术制备了类金刚石薄膜.采用Raman光谱、X射线光电子能谱、纳米压痕测试仪、原子力显微镜对所制备类金刚石薄膜的键结构、机械性能、表面形貌进行了分析.Raman光谱和X射线光电子能谱测试结果表明,以氩气-甲烷为辅助气体制备的类金刚石薄膜中sp3杂化键的含量比以氩气-乙炔为辅助气体制备的类金刚石薄膜的高.纳米压痕测试结果表明,以氩气-甲烷为辅助气体制备的类金刚石薄膜的纳米硬度比以氩气-乙炔为辅助气体的高.原子力显微镜测试结果表明,以氩气-甲烷为辅助气体制备的类金刚石薄膜的RMS表面粗糙度比以氩气-乙炔为辅助气体的低.以上结果说明辅助气体组成对类金刚石薄膜的键结构、机械性能、表面形貌有较大的影响. 相似文献
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Diamond-like carbon (DLC) thin films are extensively utilized in the semiconductor, electric and cutting machine industries owing to their high hardness, high elastic modulus, low friction coefficients and high chemical stability. DLC films are prepared by ion beam-assisted deposition (BAD), sputter deposition, plasma-enhanced chemical vapor deposition (PECVD), cathodic arc evaporation (CAE), and filter arc deposition (FAD). The major drawbacks of these methods are the degraded hardness associated with the low sp3/sp2 bonding ratio, the rough surface and poor adhesion caused by the presence of particles. In this study, a self-developed filter arc deposition (FAD) system was employed to prepare metal-containing DLC films with a low particle density. The relationships between the DLC film properties, such as film structure, surface morphology and mechanical behavior, with variation of substrate bias and target current, are examined. Experimental results demonstrate that FAD-DLC films have a lower ratio, suggesting that FAD-DLC films have a greater sp3 bonding than the CAE-DLC films. FAD-DLC films also exhibit a low friction coefficient of 0.14 and half of the number of surface particles as in the CAE-DLC films. Introducing a CrN interfacial layer between the substrate and the DLC films enables the magnetic field strength of the filter to be controlled to improve the adhesion and effectively eliminate the contaminating particles. Accordingly, the FAD system improves the tribological properties of the DLC films. 相似文献
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Characterization of ion-beam-deposited diamond-like carbon films 总被引:3,自引:0,他引:3
Diamond-like carbon (DLC) films are excellent prospects for a wide range of high-technology applications but their precise structure and properties are not well understood. The purpose of the present work was to use several complementary techniques to characterize the nature, structure and microstructure of DLC films. Thin DLC films were deposited on various substrates in the presence of a Si interlayer (500 Å thick) using CH4 ion-beam deposition at an acceleration energy of 750 eV and a current density of about 2.5 mA cm−2. The Si interlayer was deposited by either e-beam evaporation or Si evaporation enhanced by Ar+ beam bombardment (1 keV). The produced DLC films were featureless, very smooth and of high hardness (2900–3300 kg mm−2). Auger electron spectroscopy and electron diffraction showed that the films were mainly amorphous. Their microstracture was characterized by a three-dimensional network structure with a medium-range order of about 25 nm. Fourier transform infrared and Raman spectroscopies showed that the films were mainly composed of sp3 and sp2 carbon-bonded hydrogen. The sp3/sp2 ratio varied from 3.2 to 4.1 and was found to depend on the nature of the Si bond layer. The results showed that the nucleation of the diamondlike structure was promoted on the Si interlayer that was deposited under Ar+ beam bombardment. This effect can be explained by the higher surface roughness produced in this interlayer as suggested by the reflectivity measurements. Spectroscopic ellipsometry revealed that the films had an optical band gap between 1.56–1.64 eV. The present results are consistent with previous proposals suggesting that the DLC structure is composed of small graphitelike clusters (involving fused six-fold rings) that are interconnected by sp3-bonded carbon. 相似文献
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Yukinori Yamauchi Masayuki KuzuyaYasushi Sasai Shin-ichi Kondo 《Thin solid films》2011,519(20):6693-6697
We have examined the effect of annealing on physicochemical properties of the diamond-like carbon (DLC) films to produce higher quality films by the electron spin resonance spectral analyses of the immobilized dangling-bond sites (DBS), since amount of DBS reflects the characteristics of DLC films. On heat treatment of DLC deposited from ethylene monomer under anaerobic condition, the DBS decay was clearly shown, as the temperature raised. The decay described by second-order kinetics indicated that the recombination reaction of DBS progressed on heat treatment, suggesting that annealing treatment would accelerate the carbon-carbon covalent bonding network to produce harder films. In fact, the resulted DLC film derived from ethylene monomer showed non-existence of any type of oxygen atom based on X-ray photoelectron spectrum measurement, and water contact angle measurement showed higher hydrophobic surface of the DLC films. 相似文献
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Surface plasmon effect in nanocrystalline copper/DLC composite films by electrodeposition technique 总被引:1,自引:0,他引:1
Composite films of nanocrystalline copper embedded in DLC matrix prepared by electrodeposition technique were studied for
their optical properties. Particle size and metal volume fractions were tailored by varying the amount of copper containing
salt in the electrolyte. Blue-shift of the surface plasmon resonance peak in the absorbance spectra of the films was observed
with the reduction in size and volume fraction of metal particles. Mie theory was found to describe the experimental spectra
quite well. 相似文献
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Zinc oxide (ZnO) films with c-orientation were deposited on Si (1 1 1) substrates at room temperature (RT) by RF-magnetron sputtering. Violet (394 and 412 nm) and green (560 and 588 nm) photoluminescence (PL) were observed from the as-deposited and annealed samples. The PL intensity was increasing with increasing annealing temperature (Ta). The 412 nm violet peak shifted from 412 to 407 nm and the 394 nm violet peak shifted from 394 to 399 nm on increasing the temperature from 500 to 900 °C, whereas no shift in PL green peaks was observed over the whole range of temperature examined. The 412 nm violet luminescence is ascribed to radiative defects related to the interface traps existing at grain boundaries. With the increase of Ta, the stress in the films changed from compressive to tensile, which is believed to have resulted in the observed 412 nm violet emission peak shifts from 412-407 nm. The 394 nm violet luminescence observed is attributed to free excitonic emission, and the increase of the crystal size may result in the 394 nm violet emission peak shifts from 394 to 399 nm. The other two PL bands located at 560 and 588 nm are attributed to oxygen deficiency. 相似文献