High temperature fast response pressure probe for use in liquid metal droplet dispensers

A miniature fast response high temperature pressure probe, with demonstrated use in liquid metals up to 255 °C (528 K), has been developed. Innovative packaging technologies have been applied to integrate a conventional piezoresistive silicon pressure sensor into the probe, without the need of an auxiliary water-cooling system. In situ static calibrations are used to verify the linearity of the pressure signal and the stability of the pressure sensitivity (0.5% standard deviation over 70 min at 255 °C). Dynamic calibration, completed in an air shock tube facility, yields the probe's natural frequency. This frequency, when corrected for probe operation in liquid tin, is found to be 100 kHz. The reliability and accuracy of the probe is assessed by mounting it in a tin droplet dispenser for use in an extreme ultraviolet light source. Droplet dispensers typically include an excitation mechanism, which can be based on the generation of acoustic pressure waves to impose a desired droplet frequency. The probe accuracy is verified by the comparison of pressure measurements with laser Doppler vibrometry measurements of the pressure generating structure. A reference pressure measurement, conducted at representative conditions, shows a complex frequency response, with peaks distributed over three orders of magnitude and maximum amplitude of 440 mbar. Time variance of the excitation mechanism due to thermal transients is studied by monitoring the pressure response during operation. Finally, the linearity of the excitation system, with respect to the excitation amplitude, is verified by response measurements. In conclusion, the developed probe is capable of characterizing the excitation mechanism of a liquid metal droplet dispenser. Additionally, real-time monitoring of the performance of the excitation system during long-term operation is possible.     

Compact and accurate digital thermometer based on Anderson’s loop and Pt-100 sensor

A simple and practical digital thermometer with an accuracy better than 0.1°C over a near-room-temperature (from −10°C to 50°C) measurement range has been developed. The instrument is compact and battery operated and provides for both digital and analog outputs. A four-lead platinum thermal sensor, driven by a constant current loop, allows for accurate temperature readings with high immunity to the contact resistances and to their variations. A low-noise electronics allows for temperature measurements with a 1 mK resolution. By experimentally characterizing the non-linearity of the adopted Pt-100 sensor, a suitable readout correction table has been calculated in order to compensate for the sensor non-linear behavior. This compensating procedure allows for a wider (from −50°C to +200°C) and higher accuracy (0.05°C) measurement range. The ultimate accuracy was essentially limited by the accuracy of the temperature standard used for calibration.     

Evaluation of high temperature pressure sensors

It is becoming more important to measure the pressure in high temperature environments in many industrial fields. However, there is no appropriate evaluation system and compensation method for high temperature pressure sensors since most pressure standards have been established at room temperature. In order to evaluate the high temperature pressure sensors used in harsh environments, such as high temperatures above 250 °C, a specialized system has been constructed and evaluated in this study. The pressure standard established at room temperature is connected to a high temperature pressure sensor through a chiller. The sensor can be evaluated in conditions of changing standard pressures at constant temperatures and of changing temperatures at constant pressures. According to the evaluation conditions, two compensation methods are proposed to eliminate deviation due to sensitivity changes and nonlinear behaviors except thermal hysteresis.     

An artificial neural network-based smart capacitive pressure sensor

A smart capacitive pressure sensor (CPS) using a multi-layer artificial neural network is proposed in this paper. A switched capacitor circuit (SCC) converts change in capacitance of the CPS due to applied pressure into a proportional voltage. The nonlinear characteristics of the CPS make the SCC output nonlinear. Further, due to dependence of the CPS characteristics on ambient temperature, the SCC output becomes quite complex for obtaining correct digital output of the applied pressure, especially when the ambient temperature varies with time and/or place.

To circumvent this difficulty, an ANN is employed to model the sensor. By training the ANN model suitably, the digital readout of the applied pressure can be obtained which is independent of ambient temperature. A new idea for collecting temperature information from the sensor characteristics themselves, and automatic feeding of this information into the ANN-based CPS model is proposed. From the simulation results it is verified that the ANN model can give correct readout of the applied pressure within ±1% error (FS) over a wide range of temperature variation starting from −20°C to 70°C. This modeling technique of the CPS provides greater flexibility and accuracy in a changing environment.     

通用型高温压阻式压力传感器研究

针对石油化工等领域高温下压力测量的要求,设计了压阻式压力传感器硅芯片,采用SIMOX 技术SOI晶片,在微加工平台上制作了硅芯片.对不同的用户工况设计了装配结构,采用耐高温封装工艺,研究了耐高温微型压力传感器封装材料匹配与热应力消除技术,解决了内外引线的技术难点.从低成本、易操作性出发,设计了温度系数补偿电路,研制了精度高、稳定性佳的耐高温通用压力传感器.     

基于微流量气体传感器的数据采集系统

系统采用微流量气体热导传感器TCS208F进行H2浓度数据采集,设计了信号调理电路,并在传感器外部设计环境温度控制电路实现传感器的恒温检测.传感器输出的微弱信号经放大电路送入微处理器S3C44B0中进行后续处理,完成H2浓度的数据采集与显示.理论研究和实验表明:该数据采集系统克服了传统热导传感器检测误差大、环境温度补偿困难等诸多问题,具有广阔的应用前景.     

基于虚拟仪器的压力传感器自动补偿校正系统

针对压力传感器的误差和温度漂移问题，推导了传感器组件的输出电压与压力、温度的关系，并提出了一种基于虚拟仪器技术的压力传感器自动补偿校正系统。该系统能对压力传感器的零点误差、灵敏度误差和温度漂移进行自动的补偿校正。实际测试显示，补偿校正前传感器相对期望值的精度≤13．2％，经补偿校正后，传感器组件相对期望值的精度≤1％。这说明该系统可高效地对压力传感器进行补偿校正，且补偿校正效果好，适合对压力传感器进行批量补偿校正。     

数控机床主轴轴心线热偏移测试与分析

采用激光非接触式位移传感器和红外热像仪,得到数控机床主轴箱温度场数据和主轴回转运动中心线的偏移数据,结合数控机床各系统结构运行原理,分析机床主轴热态特性及其热敏感点,利用特定机床热敏感点处的温升与主轴各方向热位移关系的数学模型,进行温升热偏移补偿的可行性研究。     

ANN-based intelligent pressure sensor in noisy environment

A novel artificial neural network (ANN)-based intelligent capacitive pressure sensor (CPS) in noisy environment is proposed in this paper. A switched capacitor circuit (SCC) is used to convert the change in capacitance of the CPS due to applied pressure into a proportional voltage which is then applied to the ANN model to estimate the pressure. Because of the nonlinear response characteristics of the CPS and its temperature dependence, complex signal processing of the SCC output is required to estimate the applied pressure accurately, especially when the room temperature changes with time, place, or both. The situation becomes further complicated when the CPS encounters random noise, as is the case in many practical situations.

To alleviate these difficulties in estimation of unknown applied pressure in a CPS, a multilayer perceptron (MLP) has been utilized to model the CPS characteristics over a wide temperature range with noise. By training the MLP model suitably, a direct digital readout of the applied pressure can be obtained. From the simulation studies it was verified that the performance of this model is quite satisfactory for a wide variation of temperature, starting from −20°C to 70°C, and for a signal-to-noise ratio (SNR) of 40 dB and above. This modeling technique provides greater flexibility and accuracy in a changing and noisy environment.     

膜片式微型F-P腔光纤压力传感器研究

对基于Fabry-Perot（F-P）干涉仪原理的膜片式微型光纤压力传感器的制作工艺进行了实验研究。在单模光纤端面上直接熔接外径约175μm的毛细石英管,在石英管的另一端制作敏感膜片,从而在光纤端面与膜片内表面之间形成F-P干涉腔。首先采用电弧熔接、切割、腐蚀膜片的方法制作了石英膜片式压力传感器,该传感器在0-3.1MPa压强范围内F-P腔的腔长变化灵敏度为41.09nm/MPa,压强测量分辨率681Pa,并具有很小的温度敏感系数。在30-140℃的温度范围内,温度交差敏感小于1.07KPa/℃。为了克服石英膜片减薄困难的缺点,选用聚合物材料（PSQ）作为压力敏感膜片制作了F-P传感器,室温下在0.1-2.1MPa压强范围内PSQ膜片的F-P腔长变化灵敏度达到 1 886.85nm/MPa,压强测量分辨率达到53Pa。     

基于虚拟仪器的光纤MEMS法-珀压力传感器复用系统

提出一种基于虚拟仪器的光纤MEMS法-珀压力传感器的空分复用系统,实现了多个光纤F-P传感器的准分布式实时测量。利用虚拟仪器技术,对传感器的反射信号进行采集和相应的处理,从而解调出传感器所受到的压力。传感器的反射信号以及所受压力值都能在图形界面上实时显示并保存。实验结果表明,该系统具有良好的线性、灵敏度和精度,复用能力强,能实现压力的准分布式测量,操作方便,响应速度快。     

压力传感器数据采集系统的设计

设计了一种实时压力数据采集系统,数据采集卡主要由采集传感器数据的ADuC824单片机和实现UART转USB的CP2101桥接芯片组成,再通过USB接口与上位机实现数据通信。基于VB6.0软件编写了上位机的应用程序,实现了对采集数据的实时显示和曲线显示。系统具有结构紧凑、便于携带和稳定的特点。     

Application of Fabry-Pérot and fiber Bragg grating pressure sensors to simultaneous measurement of liquid level and specific gravity

An approach is proposed for obtaining simultaneous measurements of the level and specific gravity of a liquid using a dual-pressure-sensor system comprising a fiber Bragg grating (FBG) pressure sensor and a Fabry-Pérot (FP) pressure sensor. In the FBG sensor, the pressure is derived from the FBG wavelength shift induced when the sensor is immersed in the liquid. Meanwhile, in the FP sensor, the pressure is calculated from the change in cavity length which takes place when the sensor is immersed. The advantageous concept of the dual-pressure-sensor system is atmospheric pressure compensation. The experimental results show that the FBG and FP pressure sensors have sensitivities of 0.1495 nm/kPa and 0.1569 μm/kPa, respectively. Analytical formulae are derived for the level and specific gravity of the liquid in terms of the FBG wavelength shift, the change in cavity length, and the vertical separation distance between the two sensors.     

Calibrated Thermal Microscopy of the Tool-Chip Interface in Machining

This paper presents the results of calibrated, microscopic measurement of the temperature fields at the tool-chip interface during the steady-state, orthogonal machining of AISI 1045 steel. The measurement system consists of an infrared imaging microscope with a 0.5 mm square target area, and a spatial resolution of less than 5 µm. The system is based on an InSb 128 × 128 focal plane array with an all-reflective microscope objective. The microscope is calibrated using a standard blackbody source from NIST. The emissivity of the machined material is determined from the infrared reflectivity measurements. Thermal images of steady state machining are measured on a diamond-turning class lathe for a range of machining parameters. The measurements are analyzed by two methods: 1) energy flux calculations made directly from the thermal images using a control-volume approach; and 2) a simplified finite-difference simulation. The standard uncertainty of the temperature measurements is ± 52°C at 800°C.     

高性能MEMS电容压力传感器的设计及其热分析

为了进一步提高接触式电容压力传感器的性能,设计了一种高性能双凹槽结构的接触式电容压力传感器,并对该传感器在高温环境中的总体性能进行了分析。推导了热传导和热弹性理论,并对影响传感器热分析的各个因素与温度的依赖关系进行了描述;在整个分析过程中,使用ANSYS软件并结合有限元方法对全尺寸传感器的热效应进行模拟。结果表明,在接触工作状态双凹槽接触式电容压力传感器的温度对输入(压力)-输出(电容)特性的影响是线性的,且线性范围内初始压力随温度的升高而降低;当温度载荷为550 K时,双凹槽结构的灵敏度为1.21×10-6pF/Pa,比传统单凹槽的0.8×10-6pF/Pa高出50%,表明该压力传感器有着非常优异的高温特性。     

高压环境下温度传感器矫正系统研制及应用

现有的热敏电阻温度传感器在高气压环境下使用时大都会出现温度测试值不准的问题,对同样温度的热源在常压与高压下进行温度测试的结果偏差较大,表明该类温度传感器在高压环境下使用存在较大的偏差。本研究设计了一套高压下使用的温度矫正系统来解决高压下温度测试不准的问题,通过加压舱内设置水银温度计与热敏电阻温度传感器的对比测试,得出测试温度与矫正温度的数据,并通过数据拟合的方式得出矫正公式,为常用温度传感器在高压下的矫正使用提供了合理的技术支持。     

An all-fiber Fabry-Pérot interferometer for pressure sensing in different gaseous environments

A gas pressure sensor based on an all-fiber Fabry-Pérot interferometer (FFPI) is reported. The sensing head consists of a small section of silica rod spliced with a large offset between two single-mode fibers. The silica rod is used only as mechanical support so that an air cavity can be formed between both SMF. It is shown that the FFPI sensor is sensitive to gas pressure variation and when submitted to different gaseous environments, namely carbon dioxide, nitrogen and oxygen – sensitivities of 6.2, 4.1 and 3.6 nm/MPa, respectively, were attained. The refractive index change on nitrogen environment by means of gas pressure variation was also determined and a sensitivity of 1526 nm/RIU was obtained. The response of the sensing device to temperature variations in air was also studied and a sensitivity of −14 pm/°C was attained.     

基于赝电容的高线性度柔性压力传感器研究

基于可逆氧化还原反应的赝电容式柔性压力传感器具备高灵敏性能,可用于微弱压力检测,然而,目前赝电容式柔性压 力传感器线性度较差,只能在有限压力区间内保持较高灵敏度。 为此,本文利用 MXene 材料作为电极,设计了一种内部具有孔 隙且表面粗糙的双尺度随机微结构离子凝胶膜,增加了其压缩过程中的缓冲空间,使凝胶膜应力变形更加均匀,确保了灵敏度 在受压过程中保持稳定。 实验数据表明,传感器在 0 ~ 1 MPa 范围内具有超高的线性度(相关系数 ~ 0. 994),优异的灵敏度 ( ~ 2 133. 7 kPa -1 )、快速的响应和恢复时间(分别为~15 和~23 ms),较低的检测限( ~ 2. 5 Pa)和优异的机械稳定性。 将传感器 用于水下,可高线性检测水深,同时传感器可以高灵敏检测到不同水深下螺旋桨扰动产生的微弱水流变化。     

Modeling and development of an ANN-based smart pressure sensor in a dynamic environment

In many engineering applications, a capacitive pressure sensor (CPS) is placed in a dynamic environment in which the temperature variation is quite large. Since the response characteristics of a CPS are highly nonlinear and temperature dependent, in such situations, complex signal processing techniques are needed to obtain correct readout of the applied pressure. We have proposed an artificial neural network (ANN)-based smart capacitive pressure sensor, whose response characteristics can be estimated within an accuracy of ±1% error over a wide variation of temperature starting from −50°C to 150°C. This modeling scheme automatically takes care of all the nonidealities, such as, nonlinearity, offset, gain and temperature dependence, of the sensor. A novel idea of automatic collection of temperature information and its feeding into the ANN model is also proposed. In the practical implementation of this scheme, the hardware complexity poses a serious impairment. Since the tanh() functions are needed for implementation in the ANN-based model, to reduce the hardware requirement, we provide a simple scheme for computation of tanh(). Sensitivity analysis of the model with respect to the finite word-length constraint on the final stored weight values, and number of terms used in the implementation of tanh() function, have been carried out. A microcontroller-based implementation scheme for the ANN-based model is also suggested.     

Cushion pressure control system for an intelligent air-cushion track vehicle

This paper presents the control system of cushion pressure for the developed intelligent air-cushion track vehicle (IACTV) for operating on swamp terrain and wet fields. A novel auto-adjusting supporting system is designed for the vehicle’s intelligent air-cushion system. Focusing on minimizing the total power demand of the vehicle, an optimization model has been established, for examining the effects of vehicle parameters and load distribution on power consumption by controlling air-cushion pressure. Then optimum cushion pressure is determined based on the developed optimum pressure — sinkage relationship and the pressure in the cushion chamber is controlled by the Fuzzy controller by maintaining volume flow rate and continuously monitored by the pressure sensor attached with the cushion chamber. The ultrasonic displacement sensor is used to measure the sinkage of the vehicle. The output voltages of the ultrasonic displacement are used to operate the pull-in solenoid switch through the microcontroller which closes the circuit of the compressor motor. Distribution of vehicle load to the air-cushion system is controlled by Fuzzy Logic controller by maintaining the inside pressure of the cushion.