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一、概述我们在本厂激光定位动态光刻台的基础上,增加光栅参数处理的电气装置,构成了激光定位光栅动态检测仪(以下简称检测仪), 用于光栅综合参数的测定。该仪器既能直接打印测量数据,又能自动绘制光栅尺全长精度曲线、相位漂移曲线、直流电平漂移曲线及交流幅度漂移曲线。此外,还能测出光栅尺的相邻误差(以栅距计),为分析全长精度与光栅其 相似文献
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精密长光栅作为高档数控机床中的核心部件,其制造能力和精度直接决定高精密机床的制造水平.本文对纳米滚压印技术制造长光栅中的核心部件——圆柱母光栅的制造开展研究,建立了高精度的母光栅刻划制造平台,保证了母光栅制造的精度要求;分析了微尺度毛刺的形成机理和抑制方法,对母光栅材料选择及微尺度刻划工艺参数进行了优化,实现了直径110mm,周期分别为20μm、10μm和4μm整圈圆柱母光栅的高精度微刻划制造.母光栅刻划总条数为数万条,4μm周期母光栅连续刻划时间超过62h,最终实现母光栅的首尾拼接误差控制小于300mm.另外,针对滚压印加工中的填充问题,利用聚焦离子束(FIB)技术制备了V形、梯形等形状金刚石刀具,获得了良好的光栅压印结果. 相似文献
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在分度运动控制系统中以 DMC2210控制卡为核心,采用光栅尺为分度运动反馈器件,实现了高精度的实时监测反馈。针对工作台“过冲”现象进行了两方面的分析优化:一方面,分析了步进电机减速方式对刻划效果的影响,通过分段减速初步改善了工作台“过冲”现象;另一方面,分析并模拟了弹簧(联接工作台和分度丝杠螺母)刚度对工作台“过冲”问题的影响,更换大刚度弹簧后,很大程度改善了工作台“过冲”现象。改进后对光栅刻线密度为79 g/mm的中阶梯光栅进行了多次刻划试验,计算的机器分度精度均在5 nm以内,选取其中一组较好的数据(机器分度精度为2.887 nm)与之前多次刻划试验中较好的一组数据(机器分度精度为7.759 nm)进行了比较,结果表明刻划机分度精度得到很大的提高。 相似文献
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本文对用于计量圆光栅的超微粒乳胶感光特性进行了讨论。其结果表明:要获得理想的高反差光栅盘或其它光学元件,必须合理地选择光刻时的曝光量、曝光时间、显影液及显影时间。本文对提高计量光栅的刻划精度及表面质量,有一定的实际意义。 相似文献
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分析了圆刻度机进行圆分划的误差来源,提出了用对径布置双刀架光刻方法来消除圆刻度机主轴晃动及刀架切向位移所引起的刻划误差。在同一圆刻度机上多次试验表明,直径为100毫米、刻线为10800条的圆光栅,用单刀架光刻,最大直径误差为1.0角秒左右;用对径双刀架光刻,最大直径误差为0.2~0.4角秒。实践证明,对径布置双刀架光刻法是提高圆刻度机刻划精度的有力手段。 相似文献
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用动态全积分法提高圆分度精度 总被引:1,自引:0,他引:1
论述了动态全积分法的基本原理和误差分析,比较了几种基本结构和信号处理方法的优缺点,对实现方法的关键技术进行了讨论。组合装配成原理实验装置,并作了三个对比实验,取得了较好的初步结果。实验表明动态全积分法能很好地消除光栅刻划误差及偏心的影响,提高了圆分度精度。此法适用于高精度测量系统。 相似文献
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光栅测量系统常用硬件进行信号细分,存在细分数不高、硬件复杂等问题。为此,研究了一种神经网络细分方法,即利用一种改进的小脑模型神经网络的泛化能力实现光栅信号的连续细分。该小脑模型神经网络采用直接权地址映射技术,将光栅样本信号直接映射到联想存储器,对非样本信号经联想泛化即可实现连续细分。仿真实验结果表明,仅用少量样本即可达到很高的细分精度。 相似文献
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The conventional experimental setup used to measure anomalous dispersion by the hook method has been modified by replacing the spectrograph by a single grating in combination with a camera. The grating is used for diffraction angles close to pi/2 rad, and the focal distance for projection of the hook spectrum is 4 m. The high dispersion thus obtained (typically 200 mm/nm) considerably facilitates the use of the hook method for diagnostic purposes. Further, it is demonstrated that, for such large diffraction angles, a focusing element after diffraction at the grating can be avoided without losing too much sharpness in the hook spectrum. 相似文献
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The laser-induced thermal grating technique has been used to determine the thermal diffusivity of liquids and liquid mixtures. But the dynamic behaviour of the transient thermal grating has not yet been thoroughly investigated, and the systematic errors, which result from the departures from one-dimensional heat conduction, have scarcely been studied quantitatively. In this paper. a three-dimensional numerical simulation and results of the transient thermal grating technique are presented, which enable a good understanding of the dynamic behaviour of the transient thermal grating. The results of this simulation are important for the proper design of the experimental setup to keep the systematic errors for the diffusivity measurement small. Based on the simulation method, the systematic errors were analyzed quantitatively. Here, the following effects were studied: (I) sample thickness, (2) intersection angle, (3) absorption, (4) Gaussian beam intensity distribution and focusing of heating laser beam, and (5) heating pulse duration and laser power. This error analysis makes it possible to specify the criteria for optimum measuring conditions, to correct the measured thermal-diffusivity values for systematic errors, and to estimate the accuracy of the measurements. 相似文献
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Dinesen PG Hesthaven JS 《Journal of the Optical Society of America. A, Optics, image science, and vision》2000,17(9):1565-1572
A boundary variation method for the analysis of both infinite periodic and finite aperiodic waveguide grating couplers in two dimensions is introduced. Based on a previously introduced boundary variation method for the analysis of metallic and transmission gratings [J. Opt. Soc. Am. A 10, 2307, 2551 (1993)], a numerical algorithm suitable for waveguide grating couplers is derived. Examples of the analysis of purely periodic grating couplers are given that illustrate the convergence of the scheme. An analysis of the use of the proposed method for focusing waveguide grating couplers is given, and a comparison with a highly accurate spectral collocation method yields excellent agreement and illustrates the attractiveness of the proposed boundary variation method in terms of speed and achievable accuracy. 相似文献
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不依赖于长度基准的光栅细分精度的评定方法 总被引:4,自引:0,他引:4
分析了光栅细分精度与利萨如图形的关系,给出了通过利萨如图形评定光栅细分精度的方法。该方法将对测量条件要求极高的细分误差评定工作转化为普通的电压测量和计算,使光栅细分精度的评定不再依赖于高精度的长度基准。该方法适用于各种误差模型的光栅信号,也适用于其它任何以相位差为90度的两种信号进行细分计量仪器。 相似文献
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Symmetric multilayer grating structures that have an embedded vacuum channel and that are powered by external laser beams are analyzed for their ability to manipulate charged particle beams. It is shown that acceleration, deflection and focusing forces can all be generated in a controlled fashion from the same grating architecture and by adjustment of phase of the incoming laser beams 相似文献