紫外激光器及其在微加工中的应用

紫外激光以其波长短、加工精度高、冷加工等特性,在微细制造中具有独特优势,能够有效提高制造品质。近年来,随着现代电子产业的快速发展,其对生产制造的要求不断提高,紫外激光的应用和发展也受到人们的广泛关注。紫外激光在微加工过程中对材料尺寸形状要求小,加工过程灵活可变,产生的热影响区小,能够实现精密复杂结构的加工。本文介绍了紫外激光器的发展过程,并对目前主要用于微加工的两类紫外激光器：准分子激光器和全固态激光器的工作原理和技术特点进行了简要的概述。重点讨论紫外激光在半导体、光学元件和聚合物等领域的技术发展和应用现状,并进一步对未来研究方向进行预测和展望。

     

紫外辐照改性聚砜超滤膜

用紫外辐照的方法改性聚砚超滤膜，紫外辐照后膜性能的变化与辐照时间，改性剂种类，改性剂浓度等有关。聚砚超滤膜经紫外辐照改性后，通量增加，膜的亲水性增强，并讨论了此外辐照改性超滤膜的机理。     

Polyaniline/CuCl nanocomposites prepared by UV rays irradiation

In present paper, polynailine (PANI)/CuCl nanocomposites were prepared by UV rays irradiation method. In this method, photons in the UV rays and Cu²⁺ ions replaced conventional oxidant such as ammonium persulfate (APS) to promote polymerization of aniline monomer. The PANI/CuCl nanocomposites were characterized by infrared spectroscopy (FT-IR), X-ray diffraction (XRD), transmission electron microscopy (TEM), high-resolution transmission electron microscope (HRTEM), and electron diffraction (ED). The results indicated that aniline could polymerize to PANI by UV rays irradiation. Meanwhile, the results of HRTEM and ED confirmed that the CuCl dispersed into PANI was single crystal with cubic crystal structure. A potential formation mechanism of PANI/CuCl nanocomposites was investigated and suggested.     

UV photoconductivity characteristics of ZnO nanowire field effect transistor treated by proton irradiation

We investigated the UV photoconductivity characteristics of ZnO nanowire field effect transistors (FETs) irradiated by proton beams. After proton beam irradiation (using a beam energy of 10 MeV and a fluence of 10¹² cm^− 2), the drain current and carrier density in the ZnO nanowire FETs decreased, and the threshold voltage shifted to the positive gate bias direction due to the creation of interface traps at the SiO₂/ZnO nanowire interface by the proton beam. The interface traps produced a higher surface barrier potential and a larger depletion region at the ZnO nanowire surface, affecting the photoconductivity and its decay time. The UV photoconductivity of the proton-irradiated ZnO nanowire FETs was higher and more prolonged than that of the pristine ZnO nanowire FETs. The results extend our understanding of the UV photoconductivity characteristics of ZnO nanowire devices and other materials when irradiated with highly energetic particles.     

Thermoluminescent behaviour of diamond films subjected to UV irradiation

The thermoluminescent behaviour of diamond films subjected to UV irradiation was studied by using an UV lamp of 254 nm wavelength. The UV irradiation was achieved by placing the samples 15 cm away from an UV source for different periods. The thermoluminescent signal was integrated from 0 to 350°C at a linear heating rate of 10°C/s in a N₂ atmosphere. The corresponding luminescence spectra show an excitation band centered at 450 nm while the emission band is centered around 500 nm at room temperature. The diamond films were synthesized on molybdenum substrates by the combustion flame technique and characterized by Raman spectroscopy and scanning electron microscopy. Received: 31 May 1999 / Reviewed and accepted: 22 July 1999     

Imprinting on empty hard gelatin capsule shells containing titanium dioxide by application of the UV laser printing technique

The purpose of this study was to examine the application of ultraviolet (UV) laser irradiation to printing hard gelatin capsule shells containing titanium dioxide (TiO₂) and to clarify how the color strength of the printing by the laser could be controlled by the power of the irradiated laser. Hard gelatin capsule shells containing 3.5% TiO₂ were used in this study. The capsules were irradiated with pulsed UV laser at a wavelength of 355?nm. The color strength of the printed capsule was determined by a spectrophotometer as total color difference (dE). The capsules could be printed gray by the UV laser. The formation of many black particles which were agglomerates of oxygen-defected TiO₂ was associated with the printing. In the relationship between laser peak power of a pulse and dE, there were two inflection points. The lower point was the minimal laser peak power to form the black particles and was constant regardless of the dosage forms, for example film-coated tablets, soft gelatin capsules and hard gelatin capsules. The upper point was the minimal laser peak power to form micro-bubbles in the shells and was variable with the formulation. From the lower point to the upper point, the capsules were printed gray and the dE of the printing increased linearly with the laser peak power. Hard gelatin capsule shells containing TiO₂ could be printed gray using the UV laser printing technique. The color strength of the printing could be controlled by regulating the laser energy between the two inflection points.     

准分子激光引起的非晶硅薄膜晶化行为的研究

利用KrF准分子激光对非晶硅薄膜的表层进行了晶化.研究了激光能量密度和照射脉冲数对薄膜结晶度的影响,并对晶化后薄膜的形貌和结构进行了表征.结果表明:该非晶硅薄膜晶化阈值约为110 mJ/cm2,且不受照射脉冲数的影响;激光能量密度是影响薄膜结晶度的首要因素,但在较低的能量密度时,增加照射脉冲数也会显著的提高薄膜结晶度;结构及形貌表征发现,薄膜晶化层厚度约为400～500 nm,平均晶粒尺寸为30～50 nm.     

Effect of laser irradiation on silica substrate contaminated by aluminum particles

A major issue in the use of high-power lasers, such as the Laser Megajoule (LMJ), is laser-induced damage of optical components. One potential damage initiator is particulate contamination, but its effect is hard to distinguish from that of other damage precursors. To do so, we introduced artificial contaminants typical of metallic pollution likely to be present on the optical components of the LMJ chains. More precisely, aluminum particles of two different sizes were placed on a silica sample. These dots were characterized by optical microscopy and profilometry. Then they were exposed to a laser beam with a pulse length of 6.5 ns at 1064 nm and fluences in the range from 1 to 40 J/cm(2). Each dot was characterized again with the same techniques and also by photothermal microscopy. To complete the experimental results, we performed numerical simulations with a one-dimensional Lagrangian hydrodynamics code. We show that the particle removal by laser irradiation produces a modification of the silica surface that does not evolve into catastrophic damage under subsequent irradiation. However, the effect does depend on the size of the dots. We demonstrate that a procedure exists that removes the dot and leaves the site capable of resisting high fluence.     

电子束照射下钼纳米微粒的形成

使用高分辨透射电子显微镜在室温台上通过电子束照射ＭｏＯ３，制备钼及钼的亚氧化物钠米微粒，实验发现微米级ＭｏＯ３颗粒强度为１０＾２１ｅ／ｃｍ＾２．ｓ的电子束照射下转变为纳米级亚氧化钼，经过电子束的进一步照射后，亚氧化钼转变为钼。这种现象可能是由于电子束的激发作用和通过撞击效应而使原子发生错排引起氧原子分离造成的。     

Allotropie phase transformation induced by UV power laser irradiation of boron nitride

The optically induced allotropic phase transformations of boron nitride were studied. Under irradiation with laser beam of 337.1 nm wavelength, at energy density of 1.9mJ per 0.1 mm² a hexagonal boron nitride transformed into the cubic form. The suggestion is made that the results obtained could be explained by the multiphoton excitation and recombination of electrons.     

紫外光纤的激光传输特性测试

为适应紫外激光传输需要，试制了高透过紫外石英光纤，设计了实验装置，并测量了该种光纤的紫外传输损耗、弯曲损耗、激光损伤阈值和非线性光学效应，并与普通商用石英光纤作比较。分析并获得了紫外光纤的激光传输特性。     

Effect of ion irradiation on internal stress of amorphic carbon films produced by pulsed laser

Amorphic carbon films either 50 or 160 nm thick were deposited on Si(100) and glass substrates at room temperature in a high-vacuum environment using a Q-switched Nd-YAG pulse laser focused on a graphite target. These films were irradiated with Ti⁺ or C⁺ ions having kinetic energies of 35 and 75 keV, and the changes in internal stresses of the films with varying ion influence were investigated by measuring substrate bending using stylus profilometry. The ion energy and the film thickness were chosen such that the ion penetration depth, R_p, corresponded to either the film thickness or one half of the film thickness. The results indicate that there is an optimum ion fluence leading to a stress-free film for a given ion species and energy. Interpretation of the resulting stress behavior from ion irradiation was made based on the relaxation resulting from damage inside the film together with interfacial mixing. The scanning electron microscopy pictures and surface roughness measurements showed a very smooth surface for both as-deposited and ion-irradiated films. The ion-irradiated films had a Vickers hardness greater than 22 GPa, and were adherent to both Si and glass substrates. An investigation of the film characteristics using Raman scattering and electron-energy loss spectra has revealed that high-energy ion irradiation of an intermediate ion fluence can be utilized successfully to deposit an adherent and hard carbon film with controlled internal stress without changing the film structure significantly.     

紫外激光传输用光纤的研制

对PCVD法制备的纯硅芯、掺氟硅芯、掺锗硅芯以及氟锗共掺硅芯光纤预制棒的芯区进行了紫外吸收谱测试，并考察了248nm紫外激光辐照及热处理后紫外吸收谱的变化。结果表明，纯硅芯深紫外区的强吸收尾部延伸至紫外波段，掺氟后使深紫外段的吸收限向短波方向移动，从而降低了其对紫外波段的影响，辐照后纯硅芯的紫外吸收增加而掺氟硅芯的吸收出现下降。掺锗硅芯、氟锗共掺硅芯中均在240nm附近出现了氧不足锗缺陷（GODC）引起的吸收峰，但后者吸收峰强度明显低于前者，因为氟能与GODC发生反应从而降低了GODC浓度，且氟同时还能愈合GeE’，辐照后氟锗共掺硅芯的吸收改变程度也要低于掺锗硅芯，表明掺氟能降低掺锗硅芯的紫外吸收。     

激光照射原位生成SiC晶须时粘结剂对晶须的影响

进行了含粘结剂和不含粘结剂的SiC纳米颗粒激光照射原位生成SiC晶须的比对试验,用X射线衍射仪(XRD)和扫描电子显微镜(SEM)分析了晶须的相组成和微观形貌,研究了粘结剂对生成晶须的影响。结果表明,在适当的激光参数下,不含粘结剂和含粘结剂的样品中均有晶须生成,不含粘结剂样品中晶须数量较少,而含粘结剂样品中晶须数量众多,且尺寸、形态各异。SiC纳米颗粒中掺入粘结剂可大幅度提高SiC晶须的生成数量,但并不影响晶须的纯度。     

Studies of graphite surface after laser irradiation

Graphite was irradiated by CO₂ laser of energy 10J and pulse width 4 μs. SEM and XRD examinations were carried out before and after laser irradiation. It was observed that XRD pattern changed after irradiation and new entities were seen on surface. Amorphous graphite was also irradiated and it was found that it became partly crystalline. The changes were explained on the basis of phase changes induced by high pressures and temperatures during laser irradiation.     

Periodic microstructures produced by femtosecond laser irradiation on titanium plate

The periodic microstructures on titanium plate were formed by the irradiation of the femtosecond laser with the laser wavelength of 800 nm and the pulse length of 100 fs. They were oriented to the direction parallel to the laser polarization vector and their (parallel periodic microstructures) period was 1.5–2.4 μm. The periodic nanostructures were also produced by the femtosecond laser ablation, which were oriented to the direction perpendicular to the laser polarization vector and whose period was about 700 nm. Our results indicated that the laser fluence required for the parallel periodic microstructures was higher than that for the periodic nanostructures. The parallel periodic microstructures and the periodic nanostructures might be formed by an intensity modulation, which arose from the interaction of the laser and its scattered wave with a surface wave. The number of laser pulses to irradiate Ti plate was increased from 10 to 110. From 50 pulses, microdots were generated on the hills of the parallel periodic microstructures. From 70 pulses, the parallel periodic microstructures were varied to those with spatial modulation on the hills and the period of them was increased due to the bonding of the hills.     

Fabrication of diffractive optical elements inside polymers by femtosecond laser irradiation

Bragg-type gratings were prepared by irradiation inside a series of optical polymers with femtosecond laser pulses and the preparation conditions of the grating were examined. Repeated scanning irradiation with femtosecond laser pulses formed gratings due to refractive index changes inside polymers. Among the polymers examined in the present study, polymethylpentene (PMP) showed the highest diffraction efficiency, which was an order of magnitude higher than those of other optical polymers. The density of PMP was the lowest among the polymers evaluated in the present study, and the large volume contraction based on its low density was responsible for the larger refractive index change of PMP. Furthermore, we fabricated large-area diffractive optical elements (DOEs) in PMP measuring 15 × 25 mm² by widening the scanning area.     

Dissimilar welding of carbon steel to 5754 aluminum alloy by Nd:YAG pulsed laser

Laser welding of low carbon steel to 5754 aluminum alloy was studied in keyhole welding mode in steel-on-aluminum overlap configuration. In order to decrease formation of intermetallic components during laser welding, effect of laser power, pulse duration and overlapping factor was investigated. Tensile test was performed to identify the effect of each parameter on the weld. The phase composition was characterized by energy dispersive spectrometry and Vickers microhardness test and microstructure by optical and scanning electronic microscopes. Results obtained show that increasing peak power (in constant pulse energy), pulse duration (in constant peak power) and overlapping factor (in constant pulse energy and peak power) will increase percentage of intermetallic components (PIC). On the other hand, decreasing the mentioned parameters will cause destructive effects such as inadequate penetration depth, spattering and cavity formation. Improvement in the tensile strength was attributed to low values of intermetallic components in weld metal. Finally, an optimized peak power, pulse duration and overlapping factor were reported.     

Fatigue life prediction of damaged copper film by laser irradiation repairing

The mechanism of fatigue life improvement for damaged and undamaged copper film specimens with thickness of 25 um was investigated by laser surface irradiation under optimal parameters of laser irradiation at different loading levels. The results showed that the degree of improvement in fatigue life for the damaged specimens is more evident when the applied nominal stress was larger. The hardening induced by laser irradiation and a smooth surface feature can be obtained after the laser irradiation treatment, which results in fatigue life to be extended. A fatigue life prediction method was proposed by the view of equivalent stress. The predicted lives by the proposed prediction method were in good agreement with the experimental results.