共查询到20条相似文献,搜索用时 31 毫秒
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Tran Trong-Hieu Wang Yu-Jen Cheng Chun-Kai Chao Paul C.-P. Wang Chun-Chieh 《Microsystem Technologies》2018,24(11):4493-4509
Microsystem Technologies - This study presents a new six-DOF force/torque sensor and its calibration method. This calibration method apply the method of so-called maximum likelihood estimation... 相似文献
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Nafari A. Karlen D. Rusu C. Svensson K. Olin H. Enoksson P. 《Journal of microelectromechanical systems》2008,17(2):328-333
Here, we present a MEMS atomic force microscope sensor for use inside a transmission electron microscope (TEM). This enables direct in situ TEM force measurements in the nanonewton range and thus mechanical characterization of nanosized structures. The main design challenges of the system and sensor are to reach a high sensitivity and to make a compact design that allows the sensor to be fitted in the narrow dimensions of the pole gap inside the TEM. In order to miniaturize the sensing device, an integrated detection with piezoresistive elements arranged in a full Wheatstone bridge was used. Fabrication of the sensor was done using standard micromachining techniques, such as ion implantation, oxide growth and deep reactive ion etch. We also present in situ TEM force measurements on nanotubes, which demonstrate the ability to measure spring constants of nanoscale systems. 相似文献
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六自由度并联机器人动力学方程 总被引:2,自引:0,他引:2
本文研究了6自由度并联机器人机构的显式动力学方程的建立。文中首先导出了构件6维惯性力矢关于主动副速度、加速度的显表达式,引入了仅与机构位形和质量分布有关的一、二阶惯性影响系数,进而应用达朗伯原理方便地建立起6自由度并联机器人的显式动力学方程。最后进行了实例计算。 相似文献
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Motorized CPM/CAM physiotherapy device with sliding-mode Fuzzy Neural Network control loop 总被引:1,自引:0,他引:1
Continuous passive motion (CPM) and controllable active motion (CAM) physiotherapy devices promote rehabilitation of damaged joints. This paper presents a computerized CPM/CAM system that obviates the need for mechanical resistance devices such as springs. The system is controlled by a computer which performs sliding-mode Fuzzy Neural Network (FNN) calculations online. CAM-type resistance force is generated by the active performance of an electric motor which is controlled so as to oppose the motion of the patient's leg. A force sensor under the patient's foot on the device pedal provides data for feedback in a sliding-mode FNN control loop built around the motor. Via an active impedance control feedback system, the controller drives the motor to behave similarly to a damped spring by generating and controlling the amplitude and direction of the pedal force in relation to the patient's leg. Experiments demonstrate the high sensitivity and speed of the device. The PC-based feedback nature of the control loop means that sophisticated auto-adaptable CPM/CAM custom-designed physiotherapy becomes possible. The computer base also allows extensive data recording, data analysis and network-connected remote patient monitoring. 相似文献
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Present-day commercial endoscopic graspers do not have any built-in sensors, thus, the surgeon does not have the necessary tactile feedback to manipulate the tissue safely. This paper presents the design, fabrication, testing, and experimental results of a micromachined tactile sensor, which can be integrated with the tips of commercial endoscopic graspers. The prototype sensor consists of three layers. The top layer is made of micromachined silicon with a rigid tooth-like structure similar to the present-day endoscopic grasper. The bottom layer is made of flat Plexiglass serving as a substrate. Packaged between the Plexiglass and the silicon is a patterned Polyvinglidene Fluoride (PVDF) film. The proposed sensor exhibits high sensitivity, a large dynamic range, and a high signal-to-noise ratio. Through experimental results, it is shown that the magnitude and position of an applied force can be determined from the magnitude and slope of the output signals from the PVDF sensing elements. Structural analysis is also performed using the finite-element method, and the results are compared with the experimental analysis. The advantages and limitations of this sensor are also reported. A discussion of how the design of the sensor can be integrated with the design of an endoscopic grasper is also presented 相似文献
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针对外科手术力觉信息采集对多维力传感器提出的低量程和高分辨率的要求,对常规的十字梁六维力传感器进行结构改进,设计了一种具有滑移结构的低维间耦合的小量程六维力传感器。分析了传感器结构抑制维间耦合的机理,通过有限元方法分析了其受力变形情况。标定实验表明:该六维力传感器非线性误差与维间耦合误差均小于2%,具有高灵敏度、高分辨率和低维间耦合的特点。 相似文献
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Parylene surface-micromachined membranes for sensor applications 总被引:2,自引:0,他引:2
Zhifang Fan Engel J.M. Chen J. Chang Liu 《Journal of microelectromechanical systems》2004,13(3):484-490
This paper reports the design, fabrication process, and testing results of Parylene surface-micromachined membranes with integrated strain gauges or thermal resistors made of thin film metals. The membrane is suspended above the substrate. This paper demonstrates the feasibility of sensor applications with a force (tactile) sensor and a fluid shear stress sensor. 相似文献
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A Stewart Platform-Based System for Ankle Telerehabilitation 总被引:3,自引:1,他引:2
The Rutgers Ankle is a Stewart platform-type haptic interface designed for use in rehabilitation. The system supplies six-DOF resistive forces in response to virtual reality-based exercises running on a host PC. The Stewart platform uses double-acting pneumatic cylinders, linear potentiometers as position sensors, and a six-DOF force sensor. The Rutgers Ankle controller contains an embedded Pentium board, pneumatic solenoid valves, valve controllers, and associated signal conditioning electronics. Communication with the host PC is over a standard RS232 line. The platform movement and output forces are transparently recorded by the host PC in a database. This database can be accessed remotely over the Internet. Thus, the Rutgers Ankle Orthopedic Rehabilitation Interface will allow patients to exercise at home while being monitored remotely by therapists. A prototype was constructed, and proof-of-concept trials were conducted at the University of Medicine and Dentistry of New Jersey. The results indicate that the system works well as a diagnostic tool. The subjective evaluation by patients was very positive. Further medical trials are needed before the system clinical efficacy in rehabilitation can be established. 相似文献
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In this work, a novel six-component force sensor with its force-sensing member in the form of four identical T-shaped bars is presented. The force-sensing member is subjected to finite element analysis in conjunction with a design optimization for high measurement sensitivities. Although significant measurement couplings exist in this six-component force sensor, however, they distribute only in a few sparse places in the calibration matrix, making the calculations for the force components relatively easy and quick. The condition number under the full rated loading conditions for this sensor is 1.543, which represents a rather good measurement isotropy, as compared to approximately 2–4 for a Maltese crossbar sensor under similar conditions. In addition, only 20 strain gauges are required in the design, which is less than that used in a Maltese crossbar type sensor, in which at least 24 strain gauges are used. 相似文献
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《Advanced Robotics》2013,27(9):913-928
We are studying the robotic application of ionic polymer–metal composite (IPMC). The characteristics of IPMC greatly depend on the type of counterions, and it is considered that the performance of the actuators can be improved by combining the actuators with several types of counterions and applying an integrated control. IPMC also has a sensor function, as the IPMC film generates an electromotive force when it is deformed. It has the possibility to be integrated into an IPMC actuator with soft actuation. In this paper, we consider an integrated design of an IPMC actuator/sensor, and investigate control of the combined IPMC actuators using H ∞ control and the construction of an IPMC sensor system. 相似文献
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Woo-Tae Park Rama Krishna Kotlanka Liang Lou Muhammad Hamidullah Chengkuo Lee 《Microsystem Technologies》2013,19(7):1005-1015
This paper describes the design and characterization of a micro-electro-mechanical systems tri-axial force sensor that can be mounted on the tip of an 1-French guidewire (0.014″). Piezoresistive silicon nanowires (SiNWs) are embedded into four beams forming a cross-shape to allow the detection of forces in three axes. The electrical resistance changes in the four SiNWs are used to decode arbitrary force applied onto the force sensor. Finite element analysis was used in the structural design of the force sensor. Robustness of the force sensor is improved due to the novel design of incorporating a mechanical stopper on the tip of the stylus. Flip chip bonding, using gold stud bumps, is used to mount the force sensor on a substrate for characterization and to simplify the assembly process. The sensor is robust enough to withstand normal forces higher than 20 gf. The proposed sensor can be used for new medical applications in vascular interventions and robotic surgeries. 相似文献
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为了满足新型战略导弹武器的研制需求,要求伺服机构结构紧凑,集成度高,并能够适应恶劣的工作环境和有限的空间结构,实现伺服作动器齿条位移的测量及反馈。一种小型高可靠分体式多冗余线位移传感器的研制,在传统的分体式线位移传感器的基础上,通过四冗余的结构设计,印制电阻膜的设计,零位输出可调的设计,多指型电刷受力的优化设计,实现了线位移传感器的结构小型化和紧凑化的冗余功能,能够耐高温,工作寿命长,线性精度高的性能。试验和仿真分析表明设计技术方案有效可行,能够满足伺服系统的要求。 相似文献
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Haedo Cho Hyosang Lee Yeongjin Kim Jung Kim 《International Journal of Control, Automation and Systems》2017,15(1):16-24
Among the various ways to estimate user intention in hand exoskeletons, a contact force measurement is definitely the most straightforward and intuitive method. A force sensor, located at the center of a fingertip usually, hinders the tactile sensation of the user by blocking the contact between an object and the fingertip. To overcome this problem, a soft force sensor with horse shoe shape is utilized to measure the contact force and provide the tactile sensation to the user. This work presents the mechanical design, implementation and evaluation of a soft fingertip force sensor. To maximize tactile sensation of the user, we adopted a horse shoe shape structure to leave the finger pad exposed. An optical sensing mechanism was selected for its relatively fast response compared to other soft sensors. The whole sensor system has a soft exterior providing flexibility and a user-friendly interface. To evaluate the sensor’s performance, we carried out sensor optimization process and calibration experiment with a customized test bed. Then, we investigated both static and dynamic response and observed the mechanical behavior and light intensity changes caused by the cross sectional shape and base/agent ratio of PDMS. Lastly, we applied the proposed sensor to the glove type fingertip force monitoring system. The sensor estimates the index finger tip force with high accuracy (R 2 = 0:96) within 5N range. 相似文献