氧杂质及热处理过程对Ge-Sb-Te薄膜的光学性质和晶体结构的影响

研究了氧掺杂Ge Sb Te磁控溅射相变薄膜在 4 0 0～ 80 0nm区域的光学常数 (n ,k) ,发现不同氧成分薄膜的光学性质有较大差别 ,经过热处理后薄膜的光学性质也发生了较大变化。由热处理前后薄膜的X射线衍射 (XRD)发现 ,经过退火处理后薄膜发生了从非晶态到晶态的相变。由薄膜内应力变化和薄膜的结构变化解释了薄膜光学性质的变化     

Effect of Deposition Time on Structural,Morphological and Optical Properties of PVA Capped SnS Films Grown by CBD Process

Semiconductors - In this study, the effect of deposition time on physical properties of tin monosulphide films capped by polyvinyl alcohol was investigated. Chemical bath deposition technique was...     

电沉积法制备SnS薄膜

采用了电沉积在SnO2透明导电玻璃上制备了硫化锡（SnS)薄膜，并对用电化学法实现Sn和S共沉积的条件参数进行了理论探讨，实验中，利用SnCl2和Na2S2O3的混合水溶液作为电沉积液制备了均匀的SnS薄膜，对实验参数进行了优化，对薄膜进行了X－射线衍射（XRD），扫描电子显微（SEM）测量及光学测试，。实验发现，制备的薄膜为多晶的斜方晶系结构，晶粒大小约为150nm，直接光学带隙在1．36－1．73eV之间可调。     

Al掺杂ZnO薄膜的表面形貌和光学性质

用原子力显微镜、紫外-可见分光光度计和荧光光谱仪观察采用溶胶-凝胶法制备的Al掺杂ZnO薄膜的表面形貌、透射光谱和光致发光谱.结果表明,Al掺杂量为0.5at 9/6的ZnO薄膜经550℃退火处理后,粗糙度为1.817,Al掺杂量为1.0at%的ZnO薄膜经600℃退火处理后,粗糙度增大到4.625.样品在可见光范围内的平均透过率均大于80%.当激发波长为325 nm时,在397 nm(3.13 eV)附近出现紫外发光峰;当激发波长为360 nm时,在443 nm(2.80 eV)附近出现蓝色发光峰.探讨了样品的蓝光发光机制.     

高RF功率制备的ZnO:Li薄膜性能研究

实验采用射频(RF)磁控溅射法在高射频功率(550 W)下制备了Zn0.9Li0.1O薄膜,探讨了薄膜的光学性能,并与低溅射功率制备的薄膜性能进行了比较。结果表明,高功率下溅射的薄膜晶粒均匀细小,表面平整致密,在可见光波长范围内,透过率达80%。该薄膜的光学带隙约3.29 eV,明显低于低功率溅射的薄膜(3.44 eV)。其室温光致发光(PL)谱结果显示,最强峰是由Li杂质能级引起的399 nm峰,热处理后,370 nm的带间发光峰增强,而低功率制备的薄膜其PL谱与纯ZnO材料的特征谱相似。     

光学薄膜,光电子薄膜及光学有机薄膜

本文评介了新技术，新材料和新工艺在薄膜技术的应用及其最新发展。     

Study of the Transport Properties and Domain Structure of Thin CoPt Films Obtained by Electron Evaporation

Journal of Communications Technology and Electronics - Abstract—CoPt films obtained by electron beam evaporation with deposition of ten Co and Pt bilayers with a total thickness of 8 nm are...     

SnS薄膜的制备及其特性研究

以硫代乙酰胺、三乙醇胺、氯化亚锡和氨水作反应物,氯化铵作缓冲剂,采用化学浴法在玻璃衬底上沉积SnS薄膜。用XRD,SEM等手段分别对薄膜样品的晶体结构及表面形貌进行了表征。XRD分析结果表明薄膜样品为具有斜方晶体结构的多晶SnS薄膜,SEM测量结果显示薄膜晶粒尺寸为数十纳米。此外,本文还简要分析了氯化铵在反应中的作用。     

Influence of Deposition Parameters on the Morphology, Structural, and Optical Properties of ZnSe Nanocrystalline Thin Films

Zinc selenide (ZnSe) nanocrystalline thin films were prepared by using chemical bath deposition at different ammonia concentrations and different deposition temperatures. The structural and optical properties of ZnSe nanocrystalline thin films were investigated as a function of the ammonia concentration in precursors or the deposition temperature using scanning electron microscopy, energy-dispersive spectrometry, x-ray diffraction measurements, and ultraviolet (UV)–visible spectrophotometry measurements. The results reveal that the ZnSe thin films are composed of a large number of uniform spherical particles. Each spherical particle contains several nanocrystals 5 nm to 7 nm in crystallite size. An increase in both the average diameter of the spherical particles and the crystallite size of the nanocrystals occurs with an increase in ammonia concentration and/or deposition temperature. The Se/Zn atom ratios in the ZnSe thin films increase and the optical band gaps, E _g, of the ZnSe thin films decrease with an increase in ammonia concentration or deposition temperature. The kinetics and reaction mechanism of the ZnSe nanocrystalline thin films during deposition are discussed.     

Spatial Mapping of Morphology and Electronic Properties of Air‐Printed Pentacene Thin Films

To accelerate the pace of materials discovery and application, comprehensive links need to be established between a material's structure, properties, and process conditions used to obtain the material and/or final application format. This work examines the dry printing of pentacene thin film transistor (TFT) channels by guard flow‐enhanced organic vapor jet printing (GF‐OVJP), a technique that enables direct, solvent‐free, additive patterning of device‐quality molecular semiconductors in air. Deposition in air entails non‐trivial effects at the boundary between ambient surroundings and the gas jet carrying the semiconductor vapor that influence the morphology and properties of the resulting electronic devices. Synchrotron X‐ray diffraction is employed, complemented by measurement of electronic properties of GF‐OVJP deposited films in a TFT to reveal how the morphology and electronic properties of the films depend on thickness, location within the printed pattern, nozzle translation velocity, and other process parameters. The hole field‐effect mobility of the printed pentacene film is linked quantitatively with its crystallinity, as well as with extent of exposure to ambient air during deposition. The analysis can be extended to accurately predict the performance of devices deposited in air by GF‐OVJP, which are demonstrated here for a planar, large area deposit.     

斜角入射沉积TiO_2薄膜的光学特性和表面粗糙度

采用电子束热蒸发技术在K9玻璃基底上以不同的沉积入射角沉积了单层TiO2薄膜,研究了不同入射沉积角沉积的TiO2薄膜的光学特性、填充密度和表面粗糙度,并比较了不同膜层厚度下薄膜表面粗糙度与入射沉积角之间的关系。研究结果表明,随着入射沉积角的增加,TiO2薄膜的透射率增加,透射峰值向短波移动,薄膜的填充密度从入射沉积角0°时的0.801降低到入射沉积角为75°时的0.341;薄膜的表面粗糙度随着入射沉积角的增加而增加,当入射沉积角为75°时,薄膜的表面粗糙度略高于基底的表面粗糙度。在沉积入射角不变时,随着膜层厚度的增加,膜层的表面粗糙度降低。     

TiN薄膜表面形貌的分形表征及其演化特征

用反应磁控溅射方法在Si基片上沉积TiN膜,用原子力显微镜(ARM)观察薄膜表面形貌.比较研究了尺码法、盒计数法、功率谱密度法与高度-高度相关函数法计算的表面形貌分形维数Df结果,并研究了TiN膜表面形貌的演化特征.结果表明,功率谱密度法与高度-高度相关函数法计算的Df值与AFM观测尺度不相关,具有较好的稳定性,随着膜厚h增加,薄膜分形维数Df先减小再增加,这是由生长初期基片表面影响与生长后期的晶粒长大所导致的.     

溶胶-凝胶法制备Co,Cu共掺杂ZnO薄膜 结构及光学特性

采用溶胶-凝胶法在玻璃基片上制备了纯ZnO薄膜和高浓度Cu掺杂的Co,Cu共掺ZnO(Zn0.90CoxCu0.1-xO,x=0.01,0.03,0.05)薄膜。扫描电镜观察到无论是纯ZnO还是掺杂ZnO薄膜表面都有均匀分布的颗粒,但是在Cu含量较高时均匀性更好。X射线衍射揭示所有样品都具有纤锌矿结构,但是Cu掺杂量的增加使晶格常数略有减小,而晶粒尺寸却略有增大。XPS测试结果表明样品中Co离子的价态为+2价和+3价,Cu离子的价态为+2价和+1价共存。室温光致发光测量在所有样品中均观察到较强的紫外发光峰、蓝光双峰和较弱的绿光发光峰。     

氮掺杂对a-C:F薄膜表面形貌和键结构的影响

用射频等离子体增强化学气相沉积设备制备了氮掺杂a-C:F(氟化非晶碳)薄膜,研究了不同氮源流量比对薄膜表面形貌和键结构的影响。AFM观察结果发现:随氮流量的增加,薄膜表面粗糙度降低,颗粒粒径变小,薄膜更加均匀致密。Raman光谱分析表明:氮源流量的增加会引起薄膜内sp2键态含量增加,即芳香环式结构比例上升,当r(N2/(CF4+CH4+N2))为68%时,ID/IG由未掺N2时的1.591增至4.847,薄膜的热稳定性增强。     

脉冲法电沉积SnS:Ag薄膜

用脉冲电沉积技术,在ITO玻璃基片上制备了SnS:Ag薄膜.用X射线衍射(XRD)和原子力显微镜(AFM)观察了薄膜的物相结构和表面形貌,结果表明SnS:Ag薄膜出现了新物相Ag6SnS6,结晶度好,颗粒度大.用光电流测试研究了其导电性能,表明SnS:Ag薄膜是p型半导体材料.霍尔测量表明掺杂后载流子浓度增大,电阻率降低.     

真空蒸发法制备SnS薄膜及其光电性能研究

采用真空蒸发法,在载玻片上制备了SnS薄膜。分析表明,此法制备的SnS薄膜的导电类型为p型,在(111)晶面上有很强的择优取向;其晶粒呈棒状,平均长度约为0.2~0.3μm,薄膜中的S与Sn原子非常接近化学计量比,在吸收边附近薄膜的吸收系数约为105cm-1,光学能隙Eg约为1.35 eV,电阻率约为240Ω.cm,比其它方法制备的SnS薄膜,其在光学与电学性能上有较大的改善,更适合做薄膜太阳能电池的吸收层。成功制备出了ITO/p-SnS/n-Si/Ag结构的太阳电池,其光电转换效率达0.71%。     

ZnO纳米颗粒薄膜的制备及其光学特性

采用化学回流法制备了3种不同粒径的ZnO纳米颗粒,然后旋涂在ITO玻璃衬底上,形成样品a、b和c3种ZnO纳米颗粒薄膜.场发射扫描电子显微镜(FESEM)结果显示,3种样品晶粒都呈颗粒形状,形成的薄膜较平整,平均晶粒尺寸分别为(φ)5 nm、(φ)25 nm和(φ)40 nm.X线衍射(XRD)结果表明,ZnO纳米颗粒为多晶六方晶系纤锌矿结构.样品a、b在可见光区有很少的光吸收,在紫外光区有很强的吸收,而由于纳米颗粒的直径较大,样品c在紫外和可见光区都存在很强的吸收.室温下的光致发光谱表明,样品a有一个近带边(NBE)紫外发射峰和蓝光发射峰,样品b、c出现一很宽的深能级缺陷相关的可见光发光带,这说明3种薄膜都存在大量的本征缺陷.     

Effect of Duty Cycle on Properties of Pulse-electro-deposited SnS:Ag Thin Films

SnS∶Ag thin films were deposited on ITO glasses by pulse electro-deposition. By studying the effect of duty cycle on the properties of SnS∶Ag thin films, the optimum off-time(toff) is obtained to be 5 s, namely, the optimal duty cycle is about 67%. The primary phase of SnS∶Ag films deposited on optimum parameters condition is SnS compound with good crystallization, and the films prefer to grow towards (111) plane. The films are dense, smooth and uniform with good microstructure, and the grains in the films are densely packed together, and their direct bandgap is about 1.40 eV. In addition, the bandgap of the films first rises and then drops with the increase of the duty cycle.     

热蒸发紫外LaF3薄膜光学性能和结构表征

在不同的沉积温度下,用热蒸发方法在熔融石英(JGS1)上制备了LaF3单层薄膜。分别采用分光光度计测量了薄膜样品的透射率和反射率光谱,反演得出薄膜的折射率和消光系数;采用原子力显微镜(AFM)观察了样品的表面形貌,并通过表面粗糙度计算得出总积分散射损耗;采用X射线衍射仪(XRD)测试了薄膜的晶体结构,由衍射谱图拟合得到衍射峰的半峰全宽,进而计算出薄膜晶粒的平均尺寸。实验结果表明,随着沉积温度的升高,LaF3薄膜的结晶状况明显变好,晶粒尺寸逐渐变大,膜层变得更加致密,薄膜的光学常数和折射率不均匀性均呈线性变化。沉积温度的增加对薄膜表面粗糙度的影响不明显,散射损耗在光学损耗中所占比例较小,所以光学损耗的变化主要由吸收损耗引起。