生长条件对InGaN/GaN多量子阱表面v型缺陷的影响

我们研究了生长温度、TMIn/TEGa和Ⅴ/Ⅲ比对 InGaN/GaN多量子阱表面v型缺陷的影响。当TMIn的流量从180sccm增加到200sccm,v型缺陷的密度也从2.7210¹⁸/cm² 增加到了5.2410¹⁸ /cm², v型缺陷的深度和宽度也随着TMIn流量的增加而增加。当生长温度从748℃增加到758℃, v型缺陷的密度分别是2.0510⁸/cm², 2.7210⁸/cm² 和 4.2310⁸/cm²,V型缺陷的密度随着生长温度的增加而增加。当NH3的流量从5000sccm增加到8000sccm, v型缺陷的密度分别为 6.3410¹⁸/cm², 2.7210¹⁸/cm², 4.1310¹⁸/cm²。我们在753℃, TMIn 流量为180sccm, NH3 流量为6600sccm时,得到了晶体质量最好的InGaN/GaN 多量子阱,表面平整,v型缺陷的密度也比较少。V型缺陷的深度从10nm到30nm,宽度从100nm到200nm,为了抑制v型缺陷对GaN基LEDs反向电流(IR)和静电放电 (ESD) 的影响,我们需要生长更厚的p-GaN来填充这些v型缺陷。     

卫星PSAC载荷陆地观测中气溶胶和地表参数的信息量分析

针对卫星载荷大气校正仪分系统PSAC在陆地上空气溶胶反演领域的应用需求,基于最优化反演框架,引入信息量和后验误差分析方法,讨论了不同观测模式下气溶胶和地表参数的信号自由度（DFS）的观测角度依赖性,给出了气溶胶和地表参数的后验误差。在此基础上,分析了气溶胶和地表参数的DFS随光学厚度（AOD）和地表反射率的变化趋势。研究表明：1）不同的观测几何下,气溶胶参数总的DFS有很大差异,反演气溶胶参数的最优散射角范围是140°～180°; 2）任意观测角度,细粒子为主的细模柱浓度,粗粒子为主的气溶胶柱浓度和能被反演出来,谱分布部分参数以及折射指数部分参数在大散射角能被反演获得; 3）对不同AOD和地表反射率下参数的DFS分析,偏振信息的增加有助于亮地表下气溶胶参数的反演,增加短波红外波段能提升在AOD高值条件下对地表参数的获取能力。     

Characterization of Hg0.7Cd0.3Te n- on p-type structures obtained by reactive ion etching induced p- to n conversion

This paper presents transport measurements on both vacancy doped and gold doped Hg_0.7Cd_0.3Te p-type epilayers grown by liquid phase epitaxy (LPE), with N_A=2×10¹⁶ cm⁻³, in which a thin 2 μm surface layer has been converted to n-type by a short reactive ion etching (RIE) process. Hall and resistivity measurements were performed on the n-on-p structures in van der Pauw configuration for the temperature range from 30 K to 400 K and magnetic field range up to 12 T. The experimental Hall coefficient and resistivity data has been analyzed using the quantitative mobility spectrum analysis procedure to extract the transport properties of each individual carrier contributing to the total conduction process. In both samples three distinct carrier species have been identified. For 77 K, the individual carrier species exhibited the following properties for the vacancy and Au-doped samples, respectively, holes associated with the unconverted p-type epilayer with p ≈ 2 × 10¹⁶ cm⁻³, μ ≈ 350 cm²V⁻¹s⁻¹, and p ≈ 6 × 10¹⁵ cm⁻³, μ ≈ 400 cm²V⁻¹s⁻¹; bulk electrons associated with the RIE converted region with n ≈ 3 × 10¹⁵cm⁻³, μ ≈ 4 × 10⁴ cm²V⁻¹s⁻¹, and n ≈ 1.5 × 10¹⁵ cm⁻³, μ ≈ 6 × 10⁴ cm²V⁻¹s⁻¹; and surface electrons (2D concentration) n ≈ 9 × 10¹² cm⁻² and n ≈ 1 × 10¹³ cm⁻², with mobility in the range 1.5 × 10³ cm²V⁻¹s⁻¹ to 1.5 × 10⁴ cm²V⁻¹s⁻¹ in both samples. The high mobility of bulk electrons in the RIE converted n-layer indicates that a diffusion process rather than damage induced conversion is responsible for the p-to-n conversion deep in the bulk. On the other hand, these results indicate that the surface electron mobility is affected by RIE induced damage in a very thin layer at the HgCdTe surface.     

新息增量法评估FY-3E/HIRAS-II观测质量

FY-3E/HIRAS-II作为世界上第一个晨昏轨道的星载红外高光谱仪器,评估其观测资料质量对提高资料同化分析场和全球数值天气预报精度具有十分重要的作用。本文基于2021年12月-2022年1月及2022年3月共35天的HIRAS-II观测,采用新息增量法检验了其在轨辐射观测资料质量,按陆地和洋面分别统计了O-B偏差和标准差的分布特征;进一步匹配相同时间段、相同区域的MetOp-B/IASI观测资料,使用双重差异的O-B法分析了HIRAS-II观测资料质量,可消除偏差中辐射传输模式模拟的影响。结果表明,不论海洋还是陆地,HIRAS-II长波与中波大部分通道的O-B平均偏差均小于0.5 K、标准差在1 K以内,陆地上标准差比洋面偏大（尤其是窗区通道）。664~665 cm^-1 CO₂吸收带和1 300~1 680 cm^-1 水汽吸收带,由于再分析资料的偏差引起RTTOV模拟的辐射值存在系统性误差,使得偏差较大;980~1 080 cm^-1 O₃吸收带和1 300 cm^-1 CH₄吸收带附近较大的偏差是由于辐射传输模式RTTOV中吸收气体浓度采用固定的气候廓线值造成的,这些波段与MetOp-B/IASI相比的double O-B偏差均趋近于0 K,说明O-B偏差主要是由于辐射传输模式模拟误差造成的,而不是仪器观测的质量低。短波大部分通道的O-B平均偏差在2 K~2 K之间,标准差在2 K以内。1 920 cm^-1附近通道由于是仪器中波与短波的交界处,采用的探测器不同造成较大的O-B偏差。2 267~2 380 cm^-1较大的偏差是由于RTTOV模拟亮温时没有考虑非局地热力平衡NLTE效应的影响。波数大于2 400 cm^-1的短波波段由于太阳污染使得偏差和标准差都逐渐增大。HIRAS-II O-B偏差随扫描角存在不对称现象,使用时需要进行扫描角偏差订正。     

分子束外延高铟组分InGaAs薄膜研究

研究了分子束外延生长条件对高铟组分InGaAs材料性能的影响,分析了生长温度、V/III比和As分子束形态对In_0.74Ga_0.26As材料光致发光和X射线衍射峰强度、本底载流子浓度和迁移率的影响。测试结果表明：适中的生长温度和V/III比可以提高材料晶格质量,减少非辐射复合,降低本底杂质浓度。As分子束为As₂时In_0.74Ga_0.26As材料质量优于As₄分子束。当生长温度为570 ℃,As分子束形态为As₂,V/III比为18时,可以获得较高的光致发光和X射线衍射峰强度,室温和77 K下的本底载流子浓度分别达到6.3×10¹⁴ cm^-3和4.0×10¹⁴ cm^-3,迁移率分别达到13 400 cm²/Vs和45 160 cm²/Vs。     

PCM测试参数与CCD工艺关系研究

PCM(Process Control Monitor)是一种反映生产线工艺状况的质量监控技术。文章围绕影响电荷耦合器件(CCD)工艺中PCM测试结果的工艺因素展开研究,并对PCM测试结果进行统计分析,以达到测试结果用于工艺改进的目的,并最终获取最佳工艺条件。结果表明:低压化学气相沉积(LPCVD)温度为700℃、膜厚为580nm时的方块电阻为18Ω/□；孔工艺采用干法刻蚀CF₄流量为15cm³/min、CHF₃流量为45cm³/min下的接触电阻为7Ω；栅下埋沟注入磷离子能量为250keV、剂量为2.5×10¹²atom/cm²时,MOS管阈值电压为-8.5V；二次铝刻蚀主刻蚀采用Cl₂流量为90cm³/min,BCl₃流量为45cm³/min,N₂流量为30cm³/min可有效避免因残留物引起的金属同层漏电。     

脉冲Nd:YAG激光器选区晶化制备多晶硅薄膜

采用三倍频后的Nd:YAG固体脉冲激光系统(波长为355 nm)选区诱导晶化非晶硅薄膜,以制备多晶硅薄膜。分别测试了激光晶化前后薄膜的表面形貌和拉曼光谱。在文中分析了400 nm厚薄膜在激光扫描前后的表面形貌变化。拉曼光谱显示薄膜的晶化程度随着激光能量的增加而提高。最优的激光晶化能量密度与薄膜的厚度相关。对于300 nm和400 nm厚的非晶硅薄膜,有效晶化非晶硅的能量密度分别在440-634 mJ/cm²,777-993 mJ/cm²之间。在激光能量密度分别为634 mJ/cm²,975 mJ/cm²和1571 mJ/cm²时,300 nm、400 nm和500 nm厚薄膜达到最好的晶化效果。     

（英）高压甲烷近红外吸收光谱展宽特性及参数精确测量

通过搭建的测量实验平台,获取了甲烷6 046.96 cm^-1处高压气体吸收光谱.通过经验模态分解算法减弱了高压引起窗片形变而产生的探测噪声,吸光度信号的均方根误差（RMSE）降低了3.87倍,通过洛伦兹线型拟合算法获得的吸光度拟合残差优于±1%.研究表明,谱线线宽随着压力增大而增大,计算的高压环境的氮气-甲烷分子的互展宽系数为0.063 1 cm^-1atm^-1.此外,随着压力的增大,吸收线出现“红移”现象,计算得到氮气诱导压力频移系数为-0.008 48 cm^-1atm ^-1.由此提出一种利用检测波长、压力和压力频移系数的线性关系反演高压环境下气体浓度的算法.总之,高压环境下光谱展宽特性研究为工业环境下的光谱检测打下基础.     

四结叠层太阳电池中AlGaAs/GaAs隧穿结的特性和表现

III-V族化合物叠层太阳电池是具有超高转换效率的第三代新型太阳电池。四结叠层电池GaInP/GaAs/InGaAs/Ge,各子电池的带隙分别为1.8, 1.4, 1.0, 0.7(ev)。为了使各子电池之间电流匹配,在各子电池之间以隧穿结互相连接。本文主要探索研究了四结叠层电池GaInP/GaAs/InGaAs/Ge隧穿结的特性,三个隧穿结的材料选取,探讨了隧穿结对整体叠层电池的特性的补偿作用,对各子电池电流密度的影响,以及在此基础上对整体电池效率的增加。选用AlGaAs/GaAs作为隧穿结运用PC1D进行电池的整体模拟仿真,得到各子电池电流密度分别为16.02mA/cm²,17.12 mA/cm²,17.75 mA/cm²,17.45 mA/cm²,电池在AM0下的开路电压Voc为3.246V,转换效率为33.9%。     

渠道火花烧蚀法制备In2O3∶Mo透明导电薄膜

采用渠道火花烧蚀技术在普通玻璃基板上制备了掺钼氧化铟In₂O₃∶Mo透明导电薄膜，研究了烧蚀时氧气压强对薄膜光电性能的影响. 在基板温度Ts=350℃时，薄膜的电阻率和载流子浓度随氧气压强增大分别呈凹形和凸形的变化趋势. 薄膜电阻率最小值是4.8e-4Ω·cm，载流子浓度为7.1e20cm^-3. 载流子迁移率最高可达49.6cm²/ (V·s) . 可见光区域平均透射率大于87%以上，由紫外光电子谱分析得到薄膜的表面功函数为4.6eV. X射线衍射分析表明，薄膜结晶性良好并在（222）晶面择优取向生长. 原子力显微镜观察薄膜样品表面得到方均根粗糙度为0.72nm,平均粗糙度为0.44nm，峰谷最大差值为15.4nm.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.