宽范围可调MEMS集成滤波器的设计与制作

基于MEMS平面螺旋电感和MEMS可调平行板电容设计并制作了一种宽可调范围的集成可调带通滤波器。理论分析并计算了可调滤波器电感和可调电容的取值范围,利用HFSS设计得到各元件结构参数,并使用AnsoftDesigner分析软件对可调滤波器电路进行了模拟仿真。设计得到的可调滤波器中心频率调节范围为400～700MHz,可调率达75%,实现了宽范围可调,3dB相对带宽范围为5%～10%,插入损耗小于5dB,芯片尺寸为20mm×6mm×0.4mm。给出了一套基于MEMS平面工艺的MEMS集成可调滤波器的制作流程,实现了MEMS集成可调滤波器的工艺制作及测试。测试结果表明,获得的可调滤波器实现了通带频率宽范围可调。     

集成光学型快速可调谐滤波器的研究

本文提出并设计了一种新的基于LiNbO3衬底的非对称马赫－曾德（Mach-Zehnder,M-Z)结构集成光学型电光可调制谐滤波器,并利用耦合模方程和光束传播法（BPM）对单个滤波器的电压响应特性和频率响应特性进行了分析模拟。文中还利用多个滤波器级联实现多个波长的动态滤波和路由,所得各种特性满足全光网（AON）的要求。     

基于光纤环形镜的全光脉冲整形器

提出了一种基于光纤环形镜的全光脉冲整形器。该全光脉冲整形器利用波分复用器将控制光脉冲引入光纤环形镜中，控制光脉冲由于交叉相位调制在信号光上产生了非线性附加相移。信号光在耦合器中发生干涉，经过整形的信号光脉冲从脉冲整形器的出射端出射，信号脉冲的波形由非线性附加相移的波形决定。实验中．利用对控制脉冲光谱整形和啁啾展宽的方法来对控制脉冲进行时间脉冲的整形，该全光脉冲整形器实现了对单纵模激光的脉冲整形，同时实现了飞秒脉冲和单纵模整形脉冲的精确同步。在理论上数值计算了该全光脉冲整形器的输出特性，理论计算结果和实验结果相一致，并为“快点火”实验提供了一条可行的技术途径。     

An InP-Based Monolithically Integrated Reconfigurable Optical Add–Drop Multiplexer

We demonstrate an InP-based monolithically integrated reconfigurable optical add-drop multiplexer consisting of an array waveguide grating, a semiconductor optical amplifier, four 2x2 Mach-Zehnder optical switches, and four PIN photodetectors using the asymmetric twin waveguide technology. The total chip size is 10 x 6 mm, and each of the components in the circuit exhibited performance similar to that achieved in a discrete form. The add-drop functionality of the chip is demonstrated via the routing of the signal from the add port to the drop/output port.     

Full Complex Amplitude Digital Holograms： Design, Fabrication and Optical Characterization

Diffractive optical elements have a large number of industrial applications, such as beam shaping and optical filtering. Traditionally, these elements modulate the phase of the incoming light or its amplitude, but not both. To overcome this limitation, full complex-amplitude modulation diffractive optical elements were developed. Well-established integrated circuit fabrication steps were employed to fabricate the devices with high precision. Using this approach, the new element‘s optical performances are improved also for near field operations. With this device it is possible to obtain 100% efficient spatial filtering and low noise reconstructed images.     

短波长OEIC光接收机前端设计及制作

基于国内的材料和工艺技术,研制出850 nm单片集成光接收机前端,集成形式包括PIN/TIA、PIN/DA、MSM/TIA和MSM/DA等.对光探测器和电路分别进行了研究和优化.通过Silvaco软件,建立了探测器器件模型,并通过实验数据验证.分布放大器-3 dB带宽接近20 GHz,跨阻增益约46 dBΩ,输入、输出驻波比均小于2,噪声系数在3.03～6.5 dB之间.跨阻前置放大器-3 dB带宽接近10 GHz,跨阻增益约43 dBΩ,输入、输出驻波比均小于3.5,噪声系数在4～6.5 dB之间.集成芯片最高工作速率达到5 Gb/s.     

Mode-Locked InP-Based Laser Diode With a Monolithic Integrated UTC Absorber for Subpicosecond Pulse Generation

Future optical transmission systems and signal processing circuits will require optical pulse sources capable of producing subpicosecond (sub-ps) pulses with low timing jitter at repetition rates of tens of gigahertz. In this paper, we present the theory, design, and measurements of a novel InP-based hybrid mode-locked laser diode (MLLD) structure with an ultrafast monolithically integrated, reverse-biased, uni-traveling-carrier (UTC) absorber. The necessity of an ultrafast absorber to obtain sub-ps pulses is analyzed and explained with our advanced time-domain rate-equation model. The realized MLLD demonstrated clean sub-ps pulses of 900 fs at 42-GHz repetition rate and the potential in an optimized device to reach values around 600 fs.      

Design and Fabrication of Monolithic Distributed Traveling-Wave Photodetectors Integrated With Polymer Optical Waveguides

We have designed and fabricated monolithic distributed balanced traveling-wave metal-semiconductor-metal photodetectors (MSM PDs) distributed along single-mode polymer optical waveguides. We demonstrate that monolithically integrated polymer optical waveguides on a semiconductor can provide efficient optical interconnects in an optoelectronic circuit. A responsivity of 0.44 A/W and a 3-dB bandwidth of 10 GHz were obtained in a PD array with five MSM PDs. A high photocurrent of 7.3 mA was measured in an array having eight MSM PDs. Impulse response measurements were performed and the results were compared with frequency domain results.     

偏振无关集成光学模反射镜的研制

根据双模干涉理论分析了集成光学反射镜的原理 ,并用光束传播法 (BPM)计算了反射镜的反射特性以及对波长变化的适应性 ,通过对反射镜的结构参数进行优化 ,设计了一种与偏振无关的反射镜 ,其反射比大于 2 0dB(99% )。实际制作了这种反射镜 ,实验测量表明 ,TE/TM模的反射比均在 1 8 5dB以上     

集成光学声光可调谐滤波器中的权重切趾

理论分析了权重耦合的声指向耦合器的原理及其在滤波器切趾中的应用 ,并且根据理论设计了声波导的方案 ,分析了应用这种声波导的滤波器的转换特性。在X切Y传的LiNbO3基底上实际制作了这种滤波器。实验测定表明 ,侧瓣被抑制到 - 14dB ,- 3dB带宽为 2 0nm。     

InP基低阈值单向双稳态工作微环激光器的设计与制备

由于半导体微环激光器(SML)具有波长转换、可调谐和光学双稳态等特点,因此成为全光逻辑和全光存储领域的研究热点。在分析背散射耦合系数与SML工作区域(双向连续波、双向交替振荡和单向双稳态)的基础上,优化设计了环形谐振腔的结构参数和工艺流程,研制出一种低阈值、直接进入单向双稳态工作的InP基微环激光器。测试结果表明,激光器的中心激射波长为1569.65 nm,阈值电流为56 mA,当驱动电流超过阈值电流后,器件可不经过双向工作区直接进入单向双稳态,降低了双稳态工作的电流和功耗,非常适合用作光随机存储器单元。     

Design, Fabrication, and Characterization of an Ultracompact Low-Loss Photonic Crystal Corner Mirror

An ultracompact, low-loss, and broad-band corner mirror, based on photonic crystals, is investigated in this paper. Based on the theoretical analysis of the loss mechanism, the boundary layers of the photonic crystal region are revised to improve the extra losses, and the transmission characteristics are evaluated by using the 3-D finite-difference time-domain method. The device with optimized structure was fabricated on silicon-on- insulator substrate by using electron-beam lithography and inductively coupled plasma etching. The measured extra losses are about 1.1plusmn0.4 dB per corner mirror for transverse-electronic polarization for the scanning wavelength range of 1510-1630 nm. Dimensions of the achieved PC corner mirror are less than 7times7 mum², which are only about one tenth of conventional waveguide corner mirrors.     

InP基MOEMS可调谐器件的梁变形模拟

InP基微光机电系统(MOEMS)可调谐器件的梁在实验中常出现弯曲变形的现象,其原因是在生长的时候,As原子进入InP梁,产生了内部梯度应力.使用有限元分析软件,建立了一种无须测量内部应力的模拟梁变形的方法.模拟了单臂梁和双臂梁的弯曲变形情况,理论与实验吻合.研究了As原子浓度和梁厚度对梁变形情况的影响,结果表明降低As原子浓度和增大梁厚度都有助于抑制梁的变形.     

Design, Fabrication, and Assembly of an Optical Biosensor Probe Package for OCT (Optical Coherence Tomography) Application

A miniaturized optical bioprobe package is developed using a 3-D micromirror and is tested for bio-imaging application. A silicon optical bench is designed and micromachined to assemble the fiber, lens, and the 3-D micromirror device. A 45$^circ$ angle trench is used to place the micromirror to achieve larger scanning range. Trace lines are formed on the optical bench and are connected to silicon micromirror using solder. A GRIN lens with lower numerical aperture has been used to focus the optical beam onto the micromirror. The bioprobe is packaged and is tested in a time domain optical coherence tomography (OCT) setup and optical image is obtained for plant tissue.      

Analytical Characterization of Optical Pulse Propagation in Polarization-Sensitive Semiconductor Optical Amplifiers

In this paper, we perform analytical characterization of optical pulses propagating through a polarization-sensitive semiconductor optical amplifier (SOA). We derive analytical expressions for the carrier density, gain and phase evolution along the SOA and show how these expressions prove useful in optical signal processing applications. The propagation of counter-propagating pulses as well as pulse streams across SOAs have been analysed and expressions for energy gain have been derived in all these cases. We also show that our analytical results reduce to corresponding results of polarization insensitive SOAs already published. The analytical results are in excellent agreement with detailed numerical simulations done in MATLAB using the NIMROD portal. The analytical calculations lead to significant savings with regard to simulation time and processing capacity requirements. We further prove that the energy gain difference for counter-propagating pulse streams is directly proportional to the difference delay between in them and hence can be used as a measure of the delay difference. This theoretical result agrees well with experimental results.     

集成微热沉系统的设计和制作

研究了将冷却微通道、微型测温元件以及微型发热元件集成在同一张单晶硅片上的设计和制作方法，同时讨论了由掺磷多晶硅制成的测温元件和发热元件的电阻温度特性，并给出微型测温元件的电流／温度曲线，以及微型发热元件的热流／电压曲线。该集成微热沉系统可用于微电子芯片的发热模拟以及微热沉冷却性能的实验研究。     

Two-Dimensional Ferroelectric Photonic Crystal Waveguides: Simulation, Fabrication, and Optical Characterization

The optical properties of two dimensional photonic crystal (PhC) waveguides were investigated using ferroelectric barium titanate (BTO) thin films as the optical medium. The photonic band structure was calculated using a 2-D finite difference time domain (FDTD) method; a broad band gap is observed that results from the high refractive index contrast. The simulated transmission spectra indicate the stop band of PhC is mainly determined by three parameters: lattice constant, refractive index contrast, and waveguide mode order. From transmission measurements the PhC with a lattice constant ${a}=420$ nm shows a strong light dispersion and the other PhC with ${a}=450$ nm shows a 120-nm broad stop band. Strong localization of visible light within the PhC cavities is demonstrated from the light scattering images. The observed strong light confinement and its spatial intensity profile due to resonance agree with the calculated profiles. From polarized optical microscopy we discovered the scattered light wavelength was highly sensitive to magnitude of the lattice constant. The optical scattering properties indicate BTO PhC can potentially serve as micrometer size electro-optically tunable switches and color filters.      

集成光学高压脉冲电场传感系统中的噪声分析

给出了集成光学高压脉冲电场传感系统的工作原理, 使用1.2μs/50μs高压脉冲信号作为信号源对传感系统进行测试。分析了探测到的信号中噪声的主要来源: 包括传感器电极、天线及封装外壳等寄生元件产生的寄生振荡, 以及含光源、光电探测器引入的电路噪声等。采用快速傅里叶变换(FFT)对信号源和探测到的信号进行频谱分析, 得到信号源主要集中在0~160kHz范围内, 噪声频率主要集中在大于160kHz范围内。使用基于FPGA的频域数字滤波法对探测到的信号进行去噪声处理, 结果表明信号源与被探测信号的均方误差由在滤除噪声前的20.4277降为滤除噪声后的1.8678。     

可调谐超短中红外激光脉冲的参变产生与放大及其最新进展

介绍了基于非线性光学参变过程产生和放大中红外可调谐超短激光脉冲的主要方法,比较了参变振荡、差频产生、光学参变放大和啁啾脉冲光学参变放大等4种产生与放大方法的技术特点,重点评述了最近10年来国内外利用光学参变放大和啁啾脉冲光学参变放大实现大增益宽带和高峰值功率输出的最新进展.探讨了获得更高能量/功率和更短脉冲(更大带宽)...     

集成光学高压脉冲电场传感系统中的噪声分析

给出了集成光学高压脉冲电场传感系统的工作原理,使用1.2μs/50μs高压脉冲信号作为信号源对传感系统进行测试。分析了探测到的信号中噪声的主要来源:包括传感器电极、天线及封装外壳等寄生元件产生的寄生振荡,以及含光源、光电探测器引入的电路噪声等。采用快速傅里叶变换(FFT)对信号源和探测到的信号进行频谱分析,得到信号源主要集中在0~160kHz范围内,噪声频率主要集中在大于160kHz范围内。使用基于FPGA的频域数字滤波法对探测到的信号进行去噪声处理,结果表明信号源与被探测信号的均方误差由在滤除噪声前的20.427 7降为滤除噪声后的1.867 8。