衬底温度对磁控溅射制备外延ZnO薄膜结构特性的影响

在不同的衬底温度下,采用磁控溅射方法在蓝宝石(0001)衬底上制备了外延生长的ZnO薄膜.采用原子力显微镜(AFM)、X射线衍射仪(XRD)、可见-紫外分光光度计系统研究了衬底温度对ZnO薄膜微观结构和光学特性的影响.AFM结果表明在不同村底温度制备的ZnO薄膜具有较为均匀的ZnO晶粒,且晶粒的尺寸随衬底温度的增加逐渐增大.XRD结果显示不同温度生长的ZnO薄膜均为外延生长,400℃生长的薄膜具有最好的结晶质量;光学透射谱显示在370nm附近均出现一个较陡的吸收边,表明制备的ZnO薄膜具有较高的质量,其光学能带隙随着衬底温度的增加而减小.     

衬底温度对Si(111)衬底上MBE异质外延3C-SiC薄膜的影响

利用固源分子束外延(SSMBE)技术, 在Si(111)衬底上异质外延生长3C-SiC单晶薄膜, 通过RHEED、XRD、AFM、XPS等实验方法研究了衬底温度对薄膜结构、形貌和化学组分的影响. 研究结果表明, 1000℃生长的样品具有好的结晶质量和单晶性. 在更高的衬底温度下生长, 会导致大的孔洞形成, 衬底和薄膜间大的热失配使降温过程中薄膜内形成更多位错, 从而使晶体质量变差. 在低衬底温度下生长, 由于偏离理想的化学配比也会导致薄膜的晶体质量降低.     

衬底温度对沉积的NiTi薄膜晶化行为的影响

将采用直流磁控溅射方法制备的NiTi薄膜沉积在热的衬底上，应用X射线散射和小角X射线散射技术研究了NiTi合金薄膜中生成的晶化粒子的界面特征和晶粒大小．结果表明：衬底加热可降低薄膜的晶化温度，衬底温度在350℃以上，溅射的NiTi薄膜已部分晶化；衬底温度在350、370℃和420℃溅射的NiTi薄膜，对应的晶化粒子的半径分别是2．40、2．59、2．81nm；薄膜中的晶化粒子以形核长大的方式进行，结晶粒子与基底之间有清晰的界面。     

衬底温度对碳纳米管生长和结构的影响

用CH4、NH3和H2为反应气体,利用等离子体增强热丝化学气相沉积在沉积有Ta缓冲层和Ni催化剂层的Si衬底上制备了准直碳纳米管,并用扫描电子显微镜和透射电子显微镜研究了它们的生长和结构随温度的变化.结果表明生长的准直碳纳米管是竹节型结构,其直径随衬底温度的降低而减小,生长速率随衬底温度的升高有一极值.从催化剂在衬底温度作用下的变化开始,分析了衬底温度对碳纳米管生长和结构的影响.     

衬底温度对ZnS薄膜微结构和应力的影响

采用射频磁控溅射法分别在不同温度衬底上制备了厚度为320nm的ZnS薄膜,用XRD和光学相移技术研究了不同衬底温度下薄膜的微结构和应力.结果表明:不同温度衬底上沉积的ZnS薄膜均呈多晶状态,衬底温度由50℃上升到400℃的过程中,其择优取向发生了变化,晶粒有明显的生长方向;ZnS薄膜应力随着衬底温度升高逐渐减小,衬底温度在250～350℃之间的ZnS薄膜应力较小且在选区内分布比较均匀.     

衬底温度对低温制备纳米晶硅薄膜的影响

采用传统的射频等离子体增强化学气相沉积技术,在较高的工作气压130Pa和较高的射频功率70W下,在＞100℃的低温下,以0.14nm/s速率制备出优质的纳米晶硅薄膜.研究结果表明,薄膜晶化率和沉积速率与衬底温度有密切关系.当衬底温度＞100℃,薄膜由非晶相向晶相转化,随着衬底温度的进一步升高,薄膜晶化率增大,当温度为300℃时,薄膜的晶化率达82%,暗电导率为10-4·cm-1数量级,激活能为0.31eV.当薄膜晶化后,沉积速率随衬底温度升高而略有增加.     

衬底温度对共溅射法制备TZO薄膜光电性能的影响

以金属Ti和ZnO陶瓷作为溅射靶材,采用直流和射频双靶磁控共溅射方法在玻璃衬底上制备Ti掺杂ZnO(TZO)透明导电薄膜,探究了衬底温度对薄膜光电性能的影响。采用扫描电子显微镜、原子力显微镜、X射线衍射仪、紫外-可见分光光度计和四探针测试仪对薄膜微观形貌、结构及光电性能进行了表征和分析。结果表明:制备的TZO薄膜均具有C轴取向生长的六角纤锌矿结构,衬底温度为350℃时TZO薄膜结晶质量最好,电阻率最小,为2.78×10~(-3)Ω·cm,品质因子最高,达到334.1S/cm。所有薄膜样品在波长380～780nm区间平均透过率大于91%,随着衬底温度的升高,TZO薄膜的吸收边出现了蓝移。     

衬底温度对共蒸法制备CIGS薄膜结构和形貌的影响

采用一步共蒸法制备铜铟镓硒(CIGS)薄膜,研究讨论不同衬底温度条件对制得薄膜结构和形貌的影响。薄膜的结构和形貌分别利用X射线衍射(XRD)与扫描电子显微镜(SEM)进行检测。结果表明,衬底温度对CIGS薄膜的生长有很大的影响,当温度为250℃时,开始有CIGS晶相生成;随着温度的升高晶体颗粒逐渐增大;当温度达到450℃时,生成了结晶度较好(112)择优取向的CuIn0.7Ga0.3Se2相,制得的CIGS薄膜初步达到制备CIGS电池的条件。     

衬底温度对碲化镉薄膜性质及太阳电池性能的影响

蒸汽输运法是制备高质量且大面积均匀的CdTe薄膜的一种优良的方法。采用自主研发的一套蒸汽输运沉积系统制备了CdTe多晶薄膜, 并研究了衬底温度对CdTe薄膜性质及太阳电池性能的影响。利用XRD、SEM、UV-Vis和Hall等测试手段研究了衬底温度对薄膜的结构、光学性质和电学性质的影响。结果表明, 蒸汽输运法制备的CdTe薄膜具有立方相结构, 且沿(111)方向高度择优。随着衬底温度的升高(520℃~640℃), CdTe薄膜的平均晶粒尺寸从2 μm增大到约6 μm, CdTe薄膜的载流子浓度也从1.93×10¹⁰ cm^-3提高到2.36×10¹³ cm^-3, 说明提高衬底温度能够降低CdTe薄膜的缺陷复合, 使薄膜的p型更强。实验进一步研究了衬底温度对CdTe薄膜太阳电池性能的影响, 结果表明适当提高衬底温度, 能够大幅度提高电池的效率、开路电压和填充因子, 但是过高的衬底温度又会降低电池的长波光谱响应, 导致电池转换效率的下降。经过参数优化, 在衬底温度为610℃、无背接触层小面积CdTe薄膜太阳电池的转换效率达到11.2%。     

溶液温度和衬底对电化学沉积Cu2O薄膜形貌的影响

以透明导电玻璃(TCO)、纳米TiO2/TCO、CNTs/TCO、铜片分别为工作电极,用简单铜盐通过阴极还原制备了Gu2O薄膜,并研究了溶液温度和衬底对电化学沉积Gu2O薄膜形貌的影响.结果表明:以TCO和铜片为衬底时,由于表面微粒为微米级,不管溶液温度高低,只能得到微米级的Cu2O薄膜;以纳米TiO2/TCO和CNTs/TCO为衬底,池温高于30℃只能得到微米级的Cu2O薄膜,而池温降到0℃时,都可得到纳米Cu2O.     

Influence of target-substrate distance and composition on the preferential orientation of yttria-stabilized zirconia thin films

The use of yttria-stabilized zirconia (YSZ) thin films calls for a controlled deposition with full understanding on the influence of deposition parameters on the crystallographic properties of YSZ. YSZ thin films were deposited using magnetron sputtering from two sources, enabling to modify the sample composition in a flexible way. The influence of target-substrate (T-S) distance and the Y content on the crystallographic orientation were studied under different chamber pressures. Correlations were found under both conditions. This way, a two-dimensional map was obtained by showing the change in preferential orientation as a function of sample composition. This map shows the existence of two different trends depending on the pressure. At low pressure, the addition of Y and the decrease in T-S distance, change the orientation from [200] to a complete [111] out-of-plane orientation resulting in a competition between the fastest growth direction and the lowest surface energy. However, a different trend was observed at high pressure, where T-S distance and composition do not influence the preferential orientation of the film.     

An orientation competition in yttria-stabilized zirconia thin films fabricated by ion beam assisted sputtering deposition

A previously found orientation competition in ion beam sputtered yttria-stabilized zirconia thin films was studied in detail. The effects of sputtering energy and deposition angle were analyzed in ion sputtered films without assisting ions bombardment. It is found that for normally deposited films, (001) and (011) orientations are favored at low and high sputtering energy respectively. For inclined substrate deposited films, as deposition angle increases, (001), (011) and (111) orientations are advantaged in turn. The results can be attributed to the in-plane energy exchange of deposition atom and adatoms. In ion beam assisting deposited YSZ films of low assisting ions energy and current, a (001) oriented biaxial texture is gradually induced as ion energy increased. In the case of ion beam assisted inclined deposition of 45°, (001) orientation is enhanced and two preferential in-plane orientations are found coexist.     

The effect of deposition parameters on the properties of yttria-stabilized zirconia thin films

Yttria-stabilized zirconia (YSZ) films were deposited by RF magnetron sputtering in order to examine the effects of sputtering conditions on the properties of the resulting thin-films. X-ray diffraction (XRD), Rutherford backscattering spectroscopy (RBS) and scanning electron microscopy (SEM) were used to characterize the films. Additionally, films were deposited on alumina bars to examine the effect of the coatings on the strength of a brittle substrate. RBS analysis indicated that the ratio of oxygen to zirconium in the films varied from 1.84 to 2.10. XRD showed that there was a wide variation in the amount of monoclinic and tetragonal phases that appeared to be related to the O:Zr ratio. Despite these variations, there was no significant difference found in flexural strength found among the groups of alumina bars that were coated with YSZ. The likely cause is the columnar grain morphology of the deposited thin-films, which does not allow strengthening mechanisms to become operative.     

Chemical vapor deposition of electrolyte thin films based on yttria-stabilized zirconia

Gas-tight electrolyte films are obtained by chemical vapor deposition for solid oxide fuel cells from yttria-stabilized zirconia (YSZ) with a thickness of 4–15 μm on supporting porous ceramic anodes (YSZ/NiO). Volatile metal complexes with dipivaloylmethane Zr(dpm)₄ and Y(dpm)₃ are used as precursors. On the basis of an analysis of thermal properties of the starting compounds, parameter ranges in deposition processes are determined. Dependences of the structure, composition, and electrical characteristics on deposition conditions are found for YSZ electrolyte films. Electrochemical solid oxide fuel cells that operate at low temperatures with an open circuit voltage of 0.98–1.08 V and specific power up to 440 mW/cm² at 1073 K and 1200 mW/cm² at 1173 K are constructed.     

Semiconducting behaviour of thin bismuth films vacuum-deposited at different substrate temperatures

Thin bismuth films (thickness 25 nm) have been vacuum-deposited onto glass substrates at different substrate temperatures in a vacuum of 2×10^–5 torr. The resistance of the films has been measured as a function of temperaturein situ during and after annealing. It is found that the resistance of all the annealed films decreases with increasing temperature thus showing a semiconducting type of behaviour. The films do not show a resistivity minimum observed in thicker films [1]. The absence of a resistivity minimum is attributed to the thinness of the films and consequent larger energy band gap and smaller grain size.     

Electrical properties of plasma-sprayed yttria-stabilized zirconia films

Yttria-stabilized zirconia films, 100 to 200 m thick, were prepared by plasma spraying. The electrical properties were investigated by complex impedance spectroscopy. The results are compared with those obtained on sintered pellets prepared with the same powders used for spraying and on commercial single crystals. The ionic conductivity and the activation energies of sprayed films and single crystals are found to be very similar, and no grain-boundary effect is observed in the film complex impedance plots. These results are explained by the high density and purity of the sprayed films.     

Compositional and metal-insulator transition characteristics of sputtered vanadium oxide thin films on yttria-stabilized zirconia

Vanadium dioxide (VO₂) thin films have been shown to undergo a rapid electronic phase transition near 70 °C from a semiconductor to a metal, making it an interesting candidate for exploring potential application in high speed electronic devices such as optical switches, tunable capacitors, and field effect transistors. A critical aspect of lithographic fabrication in devices utilizing electric field effects in VO₂ is the ability to grow VO₂ over thin dielectric films. In this article, we study the properties of VO₂ grown on thin films of Yttria-Stabilized Zirconia (YSZ). Near room temperature, YSZ is a good insulator with a high dielectric constant ($\epsilon _{\rm r} > 25$\epsilon _{\rm r} > 25). We demonstrate the sputter growth of polycrystalline VO₂ on YSZ thin films, showing a three order resistivity transition near 70 °C with transition and hysteresis widths of approximately 7 °C each. We examine the relationship between chemical composition and transition characteristics of mixed phase vanadium oxide films. We investigate changes in composition induced by low temperature post-deposition annealing in oxidizing and reducing atmospheres, and report their effects on electronic properties.     

Characterization of yttria-stabilized zirconia thin films deposited by electron beam evaporation on silicon substrates

Structure, phase composition and electrical conductivity of thin yttria-stabilized zirconia (YSZ) films deposited by electron beam evaporation on a silicon (1 0 0) substrate at different temperatures i.e. room temperature (r.t.), 700 and 830°C, as well as the quality of the YSZ–Si interface have been investigated. The phase composition was verified by Raman spectroscopy and by infrared (i.r.) transmission measurements. The structure of films changed in agreement with their electrical conductivity depending on the deposition temperature. Both structure and thereby electrical conductivity were influenced by the high concentration of Y2O3 stabilizer used and by the post-deposition thermal treatment of films. The deposition temperature was also important in determining the quality of the YSZ–Si interface and hence the accessible sweep of the surface potential. The capacitance–voltage characteristics of the metal–insulator–semiconductor (MIS) structures incorporating YSZ films measured at r.t. showed hysteresis and positive shifts of the flat-band voltages. © 1998 Chapman & Hall     

Deposition of yttria-stabilized zirconia buffer layer on Si and its suitability for Y-Ba-Cu-O thin films

The deposition of yttria-stabilized zirconia (YSZ) as buffer layer on (100) silicon has been studied by rf sputtering with a view to subsequently preparing superconducting films of YBa₂Cu₃O _x on it. As-deposited films were found to be (100) oriented. The thermal mismatch and reaction between Si and YSZ at high temperatures were found to give rise to cracks in the films. Grain growth of buffer layer on annealing helped in the formation of superconducting phase.     

Sputter deposition of ZnO thin films at high substrate temperatures

ZnO thin films have been deposited on GaN and ZnO substrates at substrate temperatures up to 750 °C by radio-frequency sputtering using ZnO ceramic targets in pure argon or in a mixture of argon and oxygen. By optimizing the sputter parameters, such as sputtering power, Ar/O₂ sputtering gas ratio and temperature of the substrates high quality films were obtained as judged from the X-ray rocking curve half width and luminescence line width. The crystallinity of the ZnO films increases with increasing substrate temperature. Yet there are distinct differences between films grown on GaN templates and on O- and Zn-polar ZnO substrates.