碱性抛光液中H_2O_2对铜布线CMP的影响

化学机械平坦化(CMP)过程中,抛光液的化学作用对平坦化效果起着不可替代的作用。介绍了碱性抛光液中氧化剂(H2O2)对铜布线CMP的作用:H2O2对铜的强氧化性可以将铜氧化为离子状态,然后在螯合剂的螯合作用下快速去除铜膜;H2O2对铜的钝化作用可以保护凹处铜膜不被快速去除,从而有效降低高低差。此外,还研究了碱性抛光液中不同H2O2浓度对铜的静态腐蚀速率、动态去除速率及铜布线平坦化结果的影响。研究表明:抛光液对铜的静态腐蚀速率随H2O2浓度的增大逐渐降低然后趋于饱和;铜的动态去除速率随H2O2浓度的增大而逐渐降低;抛光液的平坦化能力随H2O2浓度的增大逐渐增强再趋于稳定。     

碱性铜抛光液在CMP工艺中的性能评估

研究了一种碱性铜抛光液,其基本组分是硅溶胶磨料、新型FA/O V型螯合剂、非离子表面活性剂和氧化剂(H2O2)。在压力为2 psi(1 psi=6.895 kPa)、抛头转速与抛盘转速分别为97和103 r/min、流量为300 mL/min的条件下,分析了铜膜去除速率随着螯合剂和氧化剂体积分数增加的作用规律。结果表明,加入体积分数2%的螯合剂和体积分数3%的氧化剂时,抛光液具有较好的自钝化能力和较高的铜膜去除速率。同时,研究了工艺参数在抛光过程中对去除速率和片内非均匀性(WIWNU)的影响,平坦化实验的抛光工艺选择压力1.5 psi、抛头和抛盘转速分别为87和93 r/min、流量300 mL/min。实验结果表明:此种抛光液在上述工艺条件下,抛光结束时剩余高低差为63.7 nm,具有较好的平坦化效果,对抛光液商业化提供了参考价值。     

不含抑制剂的碱性抛光液对铜布线平坦化的研究

本文提出一种碱性铜布线抛光液,其不含通用的腐蚀抑制剂,并对其化学机械抛光和平坦化 (CMP)性能进行了研究。首先研究了此抛光液对铜的静态腐蚀速率和抛光速率,并与含抑制 剂的铜抛光液做了对比实验。在静态条件下,此不含抑制剂的碱性铜抛光液对铜基本无腐蚀速率,而在动态抛光过程中对铜有较高的速率。而含抑制剂的抛光液对静态腐蚀速率略有降低,但是却大幅度降低了铜的去除速率。另外,对铜布线的化学机械平坦化研究表明,此不含抑制剂的碱性铜抛光液能够有效的去除铜布线表面的高低差,有较高的平坦化能力。此抛光液能够应用于铜CMP的第一步抛光,能够去除大量多余铜时初步实现平坦化。     

CMP碱性抛光液中的各组成成分对抛光速率影响程度的量化研究

本文结合神经网络和人工蜂群算法提出了CMP铜抛光速率预测模型,根据该模型,采用敏感性分析方法定量研究了碱性铜抛光液中的各成分（螯合剂、氧化剂、磨料和活性剂）及其交互作用对抛光速率的影响。结果表明：螯合剂、氧化剂、磨料和活性剂对抛光速率的相对影响系数分别为0.78、0.53、0.29、0.19;当抛光液中螯合剂和氧化剂含量的比例在2-7之间时,其交互作用对速率的影响最大,其敏感性系数在5-9之间;当磨料和氧化剂含量的比例>=5时,其交互作用对速率的影响比较大,其敏感性系数在2.5-6之间;活性剂和氧化剂的交互作用对抛光速率的影响不大,其敏感性系数小于3。因此,通过对神经网络和人工蜂群算法的改进,提出的CMP铜抛光速率预测模型可量化分析铜CMP抛光液的性能。     

碱性阻挡层抛光液各成分对CMP的影响

为实现图形片的全局平坦化,通过研究碱性阻挡层抛光液各成分对铜和介质(TEOS)去除速率的影响,遴选出一种碱性阻挡层抛光液。在此抛光液基础上添加不同质量分数的盐酸胍,对钽光片进行抛光,选出满足要求的抛光液,并在中芯国际图形片上验证此抛光液的修正能力。实验表明,当磨料质量分数为20%、盐酸胍质量分数为0.3%、I型螯合剂(FA/O I)体积分数为1%、非表面活性剂体积分数为3%时,钽和TEOS去除速率之和是铜去除速率的3.3倍,此种碱性阻挡层抛光液对钽的去除速率为42 nm/min,各项参数均满足工业要求。与商用酸性、碱性抛光液相比,该抛光液对碟形坑和蚀坑有更好的修正能力。     

碱性抛光液对铜与钽CMP选择比的影响

在ULSI多层铜布线中,由于钽与铜在物理及化学性质上的差别导致这两者的CMP去除速率不同,从而在抛光结束后出现蝶形坑等缺陷,影响器件性能。通过实验分析碱性抛光液中磨料、螯合剂、氧化剂、pH值、活性剂对铜与钽CMP选择比的影响。根据铜与钽的CMP去除机理,从实验结果分析出对铜、钽去除速率影响较为明显的成分,调节这些成分得到特定配比的抛光液,分别实现了铜与钽的去除速率相等、铜的去除速率大于钽、铜的去除速率小于钽。使用上述铜去除速率小于钽的抛光液对12英寸(1英寸=2.54 cm)图形片进行抛光,通过原子力显微镜观察,证明了这种抛光液能有效地修复多层布线CMP中的蝶形坑等缺陷。     

碱性铜粗抛液中氧化剂对化学机械平坦化的影响

针对不合腐蚀抑制剂苯并三氮唑(BTA)的碱性铜粗抛液,通过对3英寸(1英寸=2.54 cm)铜片上的动态抛光速率和静态腐蚀速率的研究来模拟评估氧化剂对晶圆表面平坦化的影响.在12英寸铜镀膜片和TM1图形片上分别研究氧化剂体积分数对表面平坦化的影响.实验结果表明:动态抛光速率和静态腐蚀速率均随着氧化剂体积分数的增加先逐渐增大,达到最大值,然后下降,趋于平缓.片内非均匀性和剩余高低差均随H2O2体积分数的增加,先呈下降趋势,后缓慢上升.当氧化剂体积分数为3％时,动态去除速率(vRR)为398.988 nm/min,静态腐蚀速率vER为6.834 nm/min,vRR/vER比值最大,片内非均匀性最小为3.82％,台阶高低差最小为104.6 nm/min,此时晶圆片有较好的平坦化效果.     

FA/O阻挡层抛光液在铜布线中的去除速率的选择性优化

在阻挡层平坦化的过程中,由于不同材料去除速率的要求,所以有必要研发一种阻挡层抛光液来改善Cu/barrier/TEOS(SiO2)速率的选择性来减小蚀坑和碟形坑,。本次实验中,研发了一种不含腐蚀抑制剂BTA的FA/O碱性阻挡层抛光液。它包含了20mL/L的FA/O螯合剂,5mL/L的表面活性剂,磨料浓度为1:5,pH值为8.0。通过控制抛光液的成分,有效的控制了不同材料的去除速率。最后,考察FA/O阻挡层抛光液对介电层材料的影响。在进行完CMP过程后,检测介电层材料的性能。结果显示,漏电流在皮安级,电阻2.4 kΩ,电容2.3pF,碟形坑和蚀坑都在30nm以下。介质层的各项指标完全满足工业化生产的需要。     

pH值对碱性抛光液速率稳定性的影响

通过分析pH值对碱性抛光液抛光速率稳定性的影响,得出了碱性抛光液抛光速率相对稳定的pH值区间,并与酸性抛光液进行了对比,在酸性环境中至少稳定24 h,pH≤4时甚至可稳定6天。在碱性环境中pH为8时稳定性效果较好。研究得出了不同体积分数的螯合剂对碱性抛光液速率稳定性的影响,河北工业大学微电子所研制的螯合剂为多羟多胺有机碱,具有调节pH的作用。随螯合剂的体积分数逐渐增加,碱性抛光液抛光速率的稳定性逐渐变差,因此在研究碱性抛光液配比时应注意螯合剂的体积分数,以提高稳定性。观察和分析了碱性抛光液在全pH值范围内的速率稳定性变化,并将碱性抛光液的pH值调至7以下,在不产生凝胶的前提下观察其速率的稳定性。     

新型碱性阻挡层抛光液的研究(英文)

为了达到Ta的高去除速率,通过实验改变碱性阻挡层抛光液中各组分的体积分数,研究各组分变化对阻挡层材料Cu和Ta抛光速率的影响。碱性阻挡层抛光液中,首先确定磨料及去离子水的比例,然后再改变盐酸胍和螯合剂等组分体积分数,得到Cu和Ta抛光速率的变化规律,便于选取此条件下阻挡层抛光液最佳配比。通过各种测试手段表征抛光液对12英寸(1英寸=2.54 cm)布线片碟形坑修正能力及铜布线表面粗糙度的影响。结果表明,Ta和Cu材料的抛光速率随各组分变化规律明显,当磨料体积分数为30%、盐酸胍体积分数为3%以及螯合剂体积分数为1%时,可以达到Ta和Cu的最大抛光速率差。优化后的新型阻挡层抛光液1 min内可以实现碟形坑的有效修正及粗糙度的明显降低。     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.     

Diode-end-pumped Nd:YVO4/LBO lasers with 4.2W continuous-wave output at 457 nm

A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working.     

Call for Papers

正Wireless Body-area Networks The last decade has witnessed the convergence of three giant worlds:electronics,computer science and telecommunications.The next decade should follow this convergence in most of our activities with the generalization of sensor networks.In particular with the progress in medicine,people live longer and the aging of population will push the development of wireless personal networks     

Call for Papers—Feature Topic,Vol.12,No.7,2015

正Information Centric Networking Information-Centric Networking(ICN) is an emerging direction in Future Internet architecture research,gaining significant tractions among academia and industry.Aiming to replace the conventional host-to-host communication model by a data-centric model,ICN treats data content as the first     

JOURNAL OF ELECTRONICS(CHINA)

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NOTICE OF CHANGING JOURNAL OF ELECTRONICS （CHINA） TO MICROSYSTEMS ＆ NANOENGINEERING

正Journal of Electronics(China)(JE)was founded in 1984,sponsored by the Institute of Electronics,Chinese Academy of Sciences.JE is one of the first English academic journals in China in the field of Electronics and Information technology.The journal was published quarterly since it was launched in 1984 to 2003,then it is published bimonthly till now.During