应用高斯波束理论设计波束波导天线

以高斯波束理论为基础,根据天线基本参数要求,分析确定出波束波导系统中各反射面尺寸、反射面彼此间距及各部件相对位置。以此系统为实例,给出各个反射面处高斯波束特征参数值,并分析比较了反射面之间距离、反射面辐射口径等参数对截获效率的影响。波束经过两反射面反射后均会产生交叉极化模,给出计算反射效率公式,得出结论为:两反射面姿态对称条件下彼此产生的交叉极化模可以互相抵消。     

激光光束特定方向准直方法与技术

基于光束漂移量反馈通过PZT驱动的微角度控制,实时动态检测和控制激光光束特定方向的平漂量和角漂量,以达到出射光束特定方向的高稳定性。准直系统中对光束平漂量和角漂量进行了分离检测,并各自构成了平漂量和角漂量反馈控制执行系统,减小了平漂量和角漂量反馈控制中的相互耦合,提高了准直精度及准直效率。实验表明,该方法特定方向准直精度可达5×10-8rad。     

Slanted-Wall Beam Propagation

We present a new algorithm for wide-angle propagation through a general class of optical-waveguide structures defined by dielectric interfaces that may be slanted with respect to the direction of propagation. No regularity of the structure shapes is assumed, no coordinate transformations are employed, and the movement of each grid point between propagation steps is arbitrary within modest angular limitations. When used with an appropriate grid-generation algorithm, this method allows the modeling of an extremely wide variety of high-index-contrast waveguide structures, including meanders and tapers, with good phase accuracy and energy conservation.     

Fly's Eye Beam

JPSA Laser’s new Fly’s Eye Beam Homogenizer converts the characteristically non-uniform beam of a UV Excimer laser into a homogeneous beam with 95% uniformity while utilizing >80% of the laser power. This long working distance single element array easily adapts to most commercial excimer lasers, and offers optimum price/performance ratio (single element for lowest cost and lowest beam loss). The JPSA Fly’s Eye Beam Homogenizer’s long working distance — typically between 1–2 meters — provides a beam size ranging from 8mm to 1.5cm. It is easily re-imaged due to the long working distance and slow optical F-number.Excimer laser beams are not perfectly uniform in intensity over the area of the beam and therefore only a portion of the area of the beam is usable for high-uniformity materials processing. In some cases, only the most uniform section or “filet” of the beam will be selected for use, and the non-uniform section of the laser beam will be discarded. Due to the premium price associated with UV photons, high beam utilisation in many cases is a key economic factor. Beam shaping optics and beam homogenisers can be employed to shape the beam and simultaneously make the laser energy uniform so that the maximum amount of the available laser power can be used. The resultant uniform, large area beam can then be subdivided using near-field imaging to project complex patterns onto a part or make simultaneous multiple laser ablations, a key advantage of UV Excimer lasers.Visit www.three-fives.com for the latest advanced semiconductor industry news     

离子束刻蚀

介绍了几种常用的干法刻蚀的机理,重点介绍了离子束刻蚀的基本原理,给出了５５种不同材料在５００ｅＶ能量１ｍＡ／ｃｍ＾２束不充密度条件下的刻蚀速率,并给出了刻胡束流和束流密度增加而增加的试验结果和实际图形刻蚀的扫描电镜分析结果,对有关问题进行了讨论。     

全息分束器

提出一种利用全息复合光栅制作连续变化分束器的方法，这种全息分束器（ＨＢＳ）容易制作，特别适用于大景深全息所需要的多光束照明。     

一种能产生针状波束和扇形波束的面天线

本文设计出了一种既能产生针状波束又能产生扇形波束的新型面天线,该天线的增益和方向图通过理论计算计算出来。本文设计实例中的面天线的针状波束的E、H平面的半功率宽度分别为2.320、2.240,而扇形波束的E、H平面的半功率宽度分别为2.010,6.40。     

用局域光束质量因子M_L来描述新光束

应用局域光束质量因子ＭＬ的概念来描述等效光束质量因子Ｍ＜１的新光束，并与基模输出特性作了比较与分析     

时间监控离子束溅射沉积倍频波长分离膜

采用双离子束溅射技术、时间控厚方式制备波长532 nm绿光激光器用倍频波长分离膜.针对制备过程中产生的半波孔现象,在简单分析形成原因的基础上,采用分组厚度优化方式调整膜层厚度,从而制备出无半波孔的高品质倍频波长分离膜.为时间监控制备非规整膜系的厚度修正提供了一种切实可行的办法.     

Phase Step Beam Waveguide

Experimental tests on a new type of beam waveguide constituted by a series of equispaced dielectric frames are described. Field-pattern and power-loss measurements have been performed on short-circuited sections of the waveguide working at 10 GHz and on the 37-GHz prototype constituted by Teflon square frames. In comparison with the more common iris and lens beam waveguides, it presents advantages concerning diffraction, reflection, and dissipation losses. In addition, it is lightweight and compact. The experimental results confirm these advantages, along with a low sensitivity to assembling and constructive imperfections. Design criteria are suggested as a result of the optimization for the lowest losses obtained through numerical computations performed on the equivalent open resonator.     

纳米电子束曝光

JEOL JBX- 5 0 0 0 L S是矢量扫描的电子束曝光机 .系统采用 L a B6 灯丝 ,可以工作在 2 5 k V和 5 0 k V的加速电压下 .对该系统的分辨率、稳定性、场拼接和套刻精度进行了系列研究 ,得到了分辨率为 30 nm的图形 ,图形的套刻精度也优于 4 0 nm.     

纳米电子束曝光

JEOL JBX-5000LS是矢量扫描的电子束曝光机.系统采用LaB6灯丝,可以工作在25kV和50kV的加速电压下.对该系统的分辨率、稳定性、场拼接和套刻精度进行了系列研究,得到了分辨率为30nm的图形,图形的套刻精度也优于40nm.     

非傍轴厄米-正弦-高斯光束的特性

为了研究厄米-正弦-高斯(HSiG)光束在非傍轴情形下受参量影响的特性,基于光强二阶矩理论,经过一系列复杂的数学计算,得出了非傍轴厄米-正弦-高斯光束的远场发散角、束腰宽度以及光束传输因子的解析式,并通过数值模拟,得到了它们与离心参量的关系。结果表明,在束腰宽度与波长比取值逐渐减小时,随着离心参量趋于0,当阶数为奇数和偶数时.发散角分别趋于63.435°和73.898°。束腰宽度和光束传输因子随参量的增加呈现较大的起伏,非傍轴情形下的光束传输因子取值与傍轴情况有很大的不同,其受参量影响不仅可以小于1,甚至趋于0。     

全光学偏振控制器

提出了一种全光学偏振控制器,它能够将光纤输出的随机偏振光变为稳定的具有确定偏振态的光信号,整个器件全部采用无源光学零件实现。测试表明,该器件插入损耗小于0.7dB,偏振相关损耗小于0.02dB,并具有体积小、结构紧凑、宜于装配、与其他光器件组合简单的优点。     

环形障碍物后的无衍射光重建产生局域空心光束

利用Hankel波理论和几何光学原理对无衍射光经环形障碍物的重建过程进行分析,结果表明轴棱锥产生的无衍射光是由从轴棱锥出射的两列Hankel波的叠加而形成的,并用Zemax软件对无衍射光经环形障碍物的过程进行光线仿真,模拟了环形障碍物后的轴上不同位置处的截面光强图,研究了局域空心光尺寸与环形障碍物参数之间的关系。并通过实验进行验证,实验中利用轴棱锥输出无衍射光,且在最大无衍射距离内放置环形障碍物,用CCD系统记录无衍射光经环形障碍物后的光强变化,实验和仿真结果基本吻合。仿真和实验结果均表明无衍射光束经环形障碍物后会重建并能产生中心光强为零的局域空心光束(Bottle beam),在光镊和光学微操作等方面具有潜在的应用价值。     

非傍轴双曲余弦高斯光束质量因子的研究

运用非傍轴标量光束的光强二阶矩理论,计算了非傍轴双曲余弦高斯光束的束腰半径、远场发散角、质量因子,并与傍轴双曲余弦高斯光束的质量因子进行了比较研究。数值计算表明:当双曲余弦高斯光束束腰半径较大时,傍轴与非傍轴理论计算的光束质量因子变化规律完全相同;束腰半径较小时,傍轴理论的计算结果有较大误差。     

PALM Micro Beam Laser

PALM （Positioning and Ablation with Laser Microbeams） Microlaser Technologies GmbH, a subsidiary of Carl Zeiss MicroImaging GmbH, has unveiled the PALM MicroBeam laser microdissection system, the only instrument capable of simultaneous microdissection fluorescence extended focus. visualization and under mnltichannel illumination and extended focus.     

The Reflecting Beam Waveguide

In this paper a type of beam waveguide which uses appropriately shaped metal reflectors instead of dielectric lenses as the phase correcting devices is described. A theory has been developed which, subject to certain restrictions, describes the modes of this type of beam waveguide and predicts a loss of the order of 0.01 db per iteration. A reflecting beam waveguide comprising eight aluminum reflectors has been investigated at a wavelength of 4 millimeters. The measured loss per iteration is approximately 0.015 db which is in good agreement with the theoretical value. The cross-sectional electric field distribution has also been measured and found to be in satisfactory agreement with the theory. It is shown that the reflecting beam waveguide is a practical system for the transmission of power at submillimeter wavelengths.     

光激励微型悬臂梁谐振器

介绍一种全新的光激励微型悬臂梁谐振器,谐振器的振动可以用激光反馈干涉的方法进行测量。     

离子束曝光技术

论述了离子束曝光技术的原理、特点，分析了其面临的关键技术问题，如掩模技术、离子源技术、图像对准技术等，并介绍了这些年来国外的一些研究机构及公司在离子束曝光技术上的研究进展及取得的一些新结果。