Low-resistance self-aligned Ti-silicide technology for sub-quartermicron CMOS devices

A low-resistance self-aligned Ti-silicide process featuring selective silicon deposition and subsequent pre-amorphization (SEDAM) is proposed and characterized for sub-quarter micron CMOS devices. 0.15-μm CMOS devices with low-resistance and uniform TiSi₂ on gate and source/drain regions were fabricated using the SEDAM process. Non-doped silicon films were selectively deposited on gate and source/drain regions to reduce suppression of silicidation due to heavily-doped As in the silicon. Silicidation was also enhanced by pre-amorphization, using ion-implantation, on the narrow gate and source/drain regions. Low-resistance and uniform TiSi₂ films were achieved on all narrow, long n⁺ and p⁺ poly-Si and diffusion layers of 0.15-μm CMOS devices. TiSi₂ films with a sheet resistance of 5 to 7 Ω/sq were stably and uniformly formed on 0.15-μm-wide n⁺ and p⁺ poly-Si. No degradation in leakage characteristics was observed in pn-junctions with TiSi₂ films. It was confirmed that, using SEDAM, excellent device characteristics were achieved for 0.15-μm NMOSFET's and PMOSFET's with self-aligned TiSi₂ films     

Cutoff frequency and propagation delay time of 1.5-nm gate oxideCMOS

The high-frequency AC characteristics of 1.5-nm direct-tunneling gate SiO₂ CMOS are described. Very high cutoff frequencies of 170 GHz and 235 GHz were obtained for 0.08-μm and 0.06-μm gate length nMOSFETs at room temperature. Cutoff frequency of 65 GHz was obtained for 0.15-μm gate length pMOSFETs using 1.5-nm gate SiO₂ for the first time. The normal oscillations of the 1.5-nm gate SiO₂ CMOS ring oscillators were also confirmed. In addition, this paper investigates the cutoff frequency and propagation delay time in recent small-geometry CMOS and discusses the effect of gate oxide thinning. The importance of reducing the gate oxide thickness in the direct-tunneling regime is discussed for sub-0.1-μm gate length CMOS in terms of high-frequency, high-speed operation     

Damascene W/TiN gate MOSFETs with improved performance for 0.1-/spl mu/m regime

W/TiN gate CMOS technologies with improved performance were investigated using a damascene metal gate process. 0.1-/spl mu/m W/TiN stacked gate CMOS devices with high performance and good driving ability were fabricated successfully by optimizing the W/TiN stacked gate structure, improving the W/TiN gate electrode sputtering technology, and reducing W/TiN stacked gate MOSFET surface states and threshold voltages. A super steep retrograde (SSR) channel doping with heavy ion implantation, /sup 115/In/sup +/ for NMOS and /sup 121/Sb/sup +/ for PMOS, was applied here to obtain a reasonably lower threshold voltage and to suppress short-channel effects (SCEs). Non-CMP technology, used to replace CMP during the damascene metal gate process, was also explored. The propagation delay time of 57 stage W/TiN gate CMOS ring oscillators was 13 ps/stage at 3 V and 25 ps/stage at 1.5 V, respectively. Better performance would be achieved by using Co/Ti salicide source/drain (S/D) and thinner gate dielectrics.     

The investigation of key technologies for sub-0.1-μm CMOS devicefabrication

The fabrication of sub-0.1-μm CMOS devices and ring oscillator circuits has been successfully explored. The key technologies include: lateral local super-steep-retrograde (SSR) channel doping with heavy ion implantation, 40-nm ultrashallow source/drain (S/D) extension, 3-nm nitrided gate oxide, dual p⁺/n⁺ poly-Si gate electrode, double sidewall scheme, e-beam lithography and RIE etching for sub-0.1-μm poly-Si gate pattern, thin and low sheet resistance SALICIDE process, etc. By these innovations in the technologies, high-performance sub-0.1-μm CMOS devices with excellent short-channel effects (SCEs) and good driving ability have been fabricated successfully; the shortest channel length is 70 nm. 57 stage unloaded 0.1-μm CMOS ring oscillator circuits exhibiting delay 23.8 ps/stage at 1.5 V, and 17.5 ps/stage and 12.5 ps/stage at 2 V and 3 V, respectively, are achieved     

An 0.1-μm voidless double-deck-shaped (DDS) gate HJFET withreduced gate-fringing-capacitance

This paper describes a novel double-deck-shaped (DDS) gate technology for 0.1-μm heterojunction FETs (HJFETs) which have about half the external gate fringing capacitance (C_f^ext) of conventional T-shaped gate HJFET's. By introducing a T-shaped SiO₂-opening technique based on two-step dry-etching with W-film masks, we fabricated 0.1-μm gate-openings which were suitable for reducing the C_f^ext and filling gate-metals with voidless. The fine gate-openings are completely filled with refractory WSi/Ti/Pt/Au gate-metal by using WSi-collimated sputtering and electroless Au-plating, resulting in high performance 0.1-μm DDS gate HJFETs are fabricated. The 0.1-μm n-Al _0.2Ga_0.8As/i-In_0.15Ga_0.85As pseudomorphic DDS gate HJFETs exhibited an excellent V_th standard-deviation (σV_th) of 39 mV because dry-etching techniques were used in all etching-processes. Also, an HJFET covered with SiO₂ passivation film had very high performance with an f_T of 120 GHz and an f_max of 165 GHz, due to the low C_f^ext with the DDS gate structure. In addition, a high f_T of 151 GHz and an f_max of 186 GHz were obtained without a SiO₂ passivation film. This fabrication technology shows great promise for high-speed IC applications     

Suppression of boron penetration in BF/sub 2/-implanted p-type gate MOSFET by trapping of fluorines in amorphous gate

This paper reports the use of amorphous/polysilicon gate electrode in BF/sub 2/-implanted poly-gated P-MOSFETs to suppress the boron penetration. SIMS analysis clearly illustrates that fluorine prefers to accumulate in the layer of amorphous silicon. The retardation of boron diffusion is therefore achieved by the trapping of fluorine in the amorphous layer of stacked amorphous/polysilicon (SAP) p-type gate due to a lower diffusion rate of fluorine in the amorphous silicon layer. Polysilicon depletion effect did not become more severe by introducing the amorphous silicon. In addition, gate oxide reliability is not degraded by using this gate structure. Results show that the structure is a promising gate electrode for future dual-poly gate CMOS technology development.<>     

A low-resistance self-aligned T-shaped gate for high-performancesub-0.1-μm CMOS

This paper describes the high performance of T-shaped-gate CMOS devices with effective channel lengths in the sub-0.1-μm region. These devices were fabricated by using selective W growth, which allows low-resistance gates smaller than 0.1 μm to be made without requiring fine lithography alignment. We used counter-doping to scale down the threshold voltage while still maintaining acceptable short-channel effects. This approach allowed us to make ring oscillators with a gate-delay time as short as 21 ps at 2 V with a gate length of 0.15 μm. Furthermore, we experimentally show that the high circuit speed of a sub-0.1-μm gate length CMOS device is mainly due to the PMOS device performance, especially in terms of its drivability     

High-performance 0.10-μm CMOS devices operating at roomtemperature

The authors have fabricated 0.10-μm gate-length CMOS devices that operate with high speed at room temperature. Electron-beam lithography was used to define 0.10-μm polysilicon gate patterns. Surface-channel type p- and n-channel MOSFETs were fabricated using an LDD structure combined with a self-aligned TiSi₂ process. Channel doping was optimized so as to suppress punchthrough as well as to realize high transconductance and low drain junction capacitance. The fabricated 0.10-μm CMOS devices have exhibited high transconductance as well as a well-suppressed band-to-band tunneling current, although the short-channel effect occurred somewhat. The operation of a 0.10-μm gate-length CMOS ring oscillator has been demonstrated. The operation speed was 27.7 ps/gate for 2.5 V at room temperature, which is the fastest CMOS switching ever reported     

Characteristics of low-energy BF2- or As-implantedlayers and their effect on the electrical performance of 0.15-μmMOSFET's

Low-energy ion implantation is investigated in detail as a method of fabricating ultrashallow and low resistance source/drain (S/D) extensions for 0.15-μm MOSFETs. High-temperature rapid thermal annealing (RTA) is found to be essential for obtaining a shallow junction with low sheet resistance. Significant degradation of carrier activation efficiency and a serious increase in sheet resistance were observed when the acceleration energy was lowered to 10 keV. Only 10% of the implanted atoms were activated by either 1-keV BF₂or As-implantation. Both p- and n-MOSFETs were fabricated using low-energy (10-20 keV) BF₂- and As-implantation with RTA. The p- and n-MOSFETs with a 0.15-μm gate length showed adequate short-channel characteristics, but their drive current was too low. The analysis of the S/D parasitic resistance shows that the low current drivability is due to the increase in the S/D sheet resistance of extensions for a p-MOSFET and the S/D edge resistance under the gate electrode for an n-MOSFET     

An advanced 0.5-μm CMOS disposable TiN LDD/salicide spacerprocess

An advanced 0.5-μm CMOS technology which features disposable TiN spacers to define both lightly doped drain (LDD) implantation and self-aligned silicided source, drain, and gate regions is discussed. Since the LDD implantation sequences are reversed using the disposable TiN spacers, this process results in CMOS devices with low salicided junction leakage, reduced source/drain lateral diffusion, and shallow phosphorus N^- and boron P^- regions for improved short-channel behavior     

Merged BiCMOS logic to extend the CMOS/BiCMOS performance crossoverbelow 2.5-V supply

The authors discuss the merged BiCMOS (MBiCMOS) gate, a unique circuit configuration to improve BiCMOS gate performance at low supply voltages. MBiCMOS maintains a measured delay and power-delay advantage over CMOS into the 2-V supply range, in a simple four-device gate that does not require any change in the standard BiCMOS processing sequence. In a 2-μm technology, MBiCMOS outperforms CMOS down to a 2.6-V supply. Gates designed for fabrication in a 0.5-μm technology and simulated using measured device parameters indicate that MBiCMOS can be used to extend the performance crossover voltage to below 2 V in the submicrometer regime. A full-swing version of the MBiCMOS gate (FS-MBiCMOS) is introduced. Simulations of 2-μm gates show FS-MBiCMOS/CMOS performance crossover voltages of 2.2 V     

A new methodology for design of BiCMOS gates and comparison withCMOS

A gate comparison methodology is presented to accurately compare the performance of an arbitrary BiCMOS logic gate with a pure CMOS gate. The concept of the sizing plane (SP) is introduced as a geometrical framework in which the gate comparison methodology is represented. The sizing plane is also shown to be an elegant platform to represent the constraints and tradeoffs in BiCMOS gate design and this is demonstrated by an example for a 1-μm BiCMOS technology. To illustrate the comparison methodology, BiCMOS and CMOS gates are fabricated in a 2-μm BiCMOS technology. The measured performance results are presented and interpreted using the sizing plane. A technology comparison methodology is proposed that predicts the relative performance of a BiCMOS versus a pure CMOS implementation of any arbitrary block of digital logic     

A selective-epitaxial-growth SiGe-base HBT with SMI electrodesfeaturing 9.3-ps ECL-gate delay

An ultra-high-speed selective-epitaxial-growth SiGe-base heterojunction bipolar transistor (HBT) with self-aligned stacked metal/in-situ doped poly-Si (IDP) (referred to as SMI) electrodes is developed. A 0.5-μm-wide SiGe base self-aligned to the 0.1-μm-wide emitter was selectively grown by using a UHV/CVD system. This self-aligned structure effectively reduces collector capacitance. In SMI technology, a tungsten film is selectively stacked on all poly-Si electrodes (base, emitter, and collector) in a self-aligned manner by using selective deposition without any heat treatment. So this technology does not cause unwanted diffusion of the base dopants and keeps a shallow intrinsic base profile. SMI technology can therefore provide low parasitic resistances and is well-suited to an SiGe-base HBT. A 2-μm-wide BPSG/SiO₂ refilled trench was introduced in order to reduce the substrate capacitance. The low dielectric constant of BPSG/SiO₂ and the wide trench are very effective in reducing the sidewall element of substrate capacitance. This technology makes it possible to obtain ultra-high-speed operation with a 9.3-ps-gate-delay emitter-coupled-logic (ECL) circuit     

High performance of silicided silicon-sidewall source and drain (S4D) structure

A silicided silicon-sidewall source and drain (S⁴D) structure is proposed for sub-0.1-μm devices. The merit of the S⁴D structure is that the series resistance of the source and drain is significantly reduced since the silicide layer is attached very close to the gate electrode and the silicon sidewall can be doped very highly. Thus, very high drain current drive can be expected, Another advantage of this structure is that the source and drain extensions are produced by the solid-phase diffusion of boron from the highly doped silicon-sidewall. Thus, shallow extensions with very high doping can be realized. A 75-nm gate length pMOSFET fabricated with this structure is shown to exhibit excellent electrical characteristics     

A transistor performance figure-of-merit including the effect ofgate resistance and its application to scaling to sub-0.25-μm CMOSlogic technologies

This paper presents an improved figure-of-merit (FOM) for CMOS performance which includes the effect of gate resistance. Performance degradation due to resistive polysilicon gates is modeled as an additional delay proportional to the RC product of a polysilicon line. The new FOM is verified from delay measurements on inverter chains fabricated using a 0.25-μm CMOS process. A furnace TiSi₂ process is used to underscore the effect of increased sheet resistance of narrow polysilicon lines. Excellent correlation between measured and predicted inverter chain delays is obtained over a variety of design, process and bias conditions. An expression for the gate sheet resistance requirement is derived from the new FOM. Using this expression, requirements on the gate sheet resistance are calculated corresponding to a technology roadmap for performance and oxide thickness     

0.1-μm p+-GaAs gate HJFET's fabricated using two-stepdry-etching and selective MOMBE growth techniques

This paper reports the first successful fabrication of high-performance, 0.1-μm p⁺-gate pseudomorphic heterojunction-FET's (HJFET's). By introducing the two-step dry-etching technique which compensates for the poor dry-etching resistance of PMMA, 0.1-μm or less gate-openings with a high aspect-ratio of 3.5 in SiO ₂ film are achieved. In addition, by using the gate electrode filling technique with selective MOMBE p⁺-GaAs growth, 0.1-μm voidless p⁺-GaAs gate electrodes with a high aspect-ratio are achieved for the first time. The fabrication technology leads to a reduction of external gate fringing capacitance (Ce^ext _f) in a T-shaped gate-structure and an improvement in gate turn-on voltage. The fabricated 0.1-μm, T-shaped, p⁺-gate n-Al_0.2Ga_0.8As/In_0.25Ga_0.75 As HJFET exhibits a high gate turn-on voltage (V_f) of about 0.9 V, and a good gm_max of 435 mS/mm. Also, an excellent microwave performance of f_T=121 GHz and f_max =144 GHz is achieved due to the C^ext_f reduction. The technology and device show great promise for future high-speed applications, such as in power devices, MMIC's, and digital IC's     

1-V power supply high-speed digital circuit technology withmultithreshold-voltage CMOS

1-V power supply high-speed low-power digital circuit technology with 0.5-μm multithreshold-voltage CMOS (MTCMOS) is proposed. This technology features both low-threshold voltage and high-threshold voltage MOSFET's in a single LSI. The low-threshold voltage MOSFET's enhance speed performance at a low supply voltage of 1 V or less, while the high-threshold voltage MOSFET's suppress the stand-by leakage current during the sleep period. This technology has brought about logic gate characteristics of a 1.7-ns propagation delay time and 0.3-μW/MHz/gate power dissipation with a standard load. In addition, an MTCMOS standard cell library has been developed so that conventional CAD tools can be used to lay out low-voltage LSI's. To demonstrate MTCMOS's effectiveness, a PLL LSI based on standard cells was designed as a carrying vehicle. 18-MHz operation at 1 V was achieved using a 0.5-μm CMOS process     

Dipole heterostructure field-effect transistor

It is proposed to reduce the gate current by using a dipole created by two doped planes, n⁺⁺ and p⁺⁺, in charge control layer, dipole heterostructure field-effect transistors (dipole HFETs) fabricated in AlGaAs/GaAs use doped p⁺⁺ and n ⁺⁺ planes in the charge control AlGaAs layer to form a dipole that provides a considerably larger barrier between the channel and the gate than that in conventional heterostructure FETs. This leads to a reduction of the forward-biased gate current in enhancement-mode n-channel devices, by a factor of approximately 9 at 1.2 V in the experimental devices, when compared with equivalent conventional HFETs. A much broader transconductance region, in the range of 0.5-2.5-V gate bias, a higher maximum drain current, and no negative transconductance are also observed. A comparison between the gate current-voltage characteristics of conventional and dipole HFETs for 1-μm-long and 10-μm-wide gate devices is given. The measured results clearly indicate that a dipole HFET has a much smaller gate leakage current leading to superior performance of enhancement-mode devices. The results demonstrate the effectiveness of the dipole layer concept for digital HFET devices     

A 0.2-μm 180-GHz-fmax 6.7-ps-ECL SOI/HRS self-alignedSEG SiGe HBT/CMOS technology for microwave and high-speed digitalapplications

A technology for combining 0.2-μm self-aligned selective-epitaxial-growth (SEG) SiGe heterojunction bipolar transistors (HBTs) with CMOS transistors and high-quality passive elements has been developed for use in microwave wireless and optical communication systems. The technology has been applied to fabricate devices on a 200-mm SOI wafer based on a high-resistivity substrate (SOI/HRS). The fabrication process is almost completely compatible with the existing 0.2-μm bipolar-CMOS process because of the essential similarity of the two processes. SiGe HBTs with shallow-trench isolations (STIs) and deep-trench isolations (DTIs) and Ti-salicide electrodes exhibited high-frequency and high-speed capabilities with an f_max of 180 GHz and an ECL-gate delay of 6.7 ps, along with good controllability and reliability and high yield. A high-breakdown-voltage HBT that could produce large output swings for the interface circuit was successfully added. CMOS devices (with gate lengths of 0.25 μm for nMOS and 0.3 μm for pMOS) exhibited excellent subthreshold slopes. Poly-Si resistors with a quasi-layer-by-layer structure had a low temperature coefficient. Varactors were constructed from the collector-base junctions of the SiGe HBTs. MIM capacitors were formed between the first and second metal layers by using plasma SiO₂ as an insulator. High-Q octagonal spiral inductors were fabricated by using a 3-μm thick fourth metal layer     

A 5-μm-wide 18-cm-long low-loss YBa2Cu3O7-δ coplanar line for future multichip moduletechnology

Narrow and low-loss YBa₂Cu₃O_7-δ (YBCO) coplanar lines, which can be used in multichip module technology for future high-density and high-speed digital circuits, have been developed. Etch-back planarization and a patterning process combining Ar-ion milling and wet-etching enabled us to form an 18-cm-long 5-μm-wide YBCO coplanar line without electrical shorts, even for the narrow spacing of 2.5 μm. The surface resistance of this line was kept at a level comparable to that of 10- or 25-μm-wide YBCO coplanar lines and also comparable to that of unpatterned films. This indicates successful fabrication of the 5-μm-wide YBCO coplanar line without notable loss increase resulting from process damage. The 5-μm-wide line showed a low-transmission loss of 0.49 dB at 10 GHz and 55 K. This level of loss is similar to that in Cu coaxial cables. No significant increase in transmission loss was observed up to an input power level of 16 mW at 10 GHz and 55 K. This input power is comparable to the power-handling capability required for transmitting high-speed digital signals through the lines with characteristic impedance of 50 Ω. These results show that the narrow 5-μm-wide YBCO coplanar line has great potential for high-density and high-speed digital circuits