离子束诱导电荷显微术的现状与发展趋势

离子束诱导电荷显微术（IBIC）是核子微探针显微成像技术的又一新发展，它具有低束流（fA量级），高效率的特点，已被广泛应用于半导体材料和微电子材料研究中。本文简述了离子束诱导电荷显微术（IBIC）的原理和实验方法，综述了IBIC 研究的现状和进展。     

Ion beam characterization of advanced luminescent materials for application in radiation effects microscopy

The ion photon emission microscope (IPEM) is a technique developed at Sandia National Laboratories (SNL) to study radiation effects in integrated circuits with high energy, heavy ions, such as those produced by the 88” cyclotron at Lawrence Berkeley National Laboratory (LBNL). In this method, an ion-luminescent film is used to produce photons from the point of ion impact. The photons emitted due to an ion impact are imaged on a position-sensitive detector to determine the location of a single event effect (SEE). Due to stringent resolution, intensity, wavelength, decay time, and radiation tolerance demands, an engineered material with very specific properties is required to act as the luminescent film. The requirements for this material are extensive. It must produce a high enough induced luminescent intensity so at least one photon is detected per ion hit. The emission wavelength must match the sensitivity of the detector used, and the luminescent decay time must be short enough to limit accidental coincidences. In addition, the material must be easy to handle and its luminescent properties must be tolerant to radiation damage. Materials studied for this application include plastic scintillators, GaN and GaN/InGaN quantum well structures, and lanthanide-activated ceramic phosphors. Results from characterization studies on these materials will be presented; including photoluminescence, cathodoluminescence, ion beam induced luminescence, luminescent decay times, and radiation damage. Results indicate that the ceramic phosphors are currently proving to be the ideal material for IPEM investigations.     

慢正电子束研究N^＋注入金属镍中生成的缺陷

用慢正电子束配合多普勒湮没能谱测量技术研究N~+离子注入镍样品产生的缺陷。由未注入的样品得到了正电子在镍中的扩散参数E_0=4.6keV。比较两个样品的S参数随入射正电子能量变化的曲线给出了95keV、6.4×10~(17)/cm~2剂量的N~+注入镍样品所产生的缺陷分布;缺陷由表面一直延伸到190nm,浓度最大的区域在27—110nm。这些都与由Trim程序的Monte Carlo模拟计算的结果很好地符合。     

Mapping ion beam induced current changes in a commercial MOSFET

We demonstrate a novel nuclear microprobe imaging and analysis modality for micrometre-scale field effect transistor devices probed with focused beams of MeV ions. By recording the drain current as a function of time during ion irradiation it is possible to identify current transients induced by the passage of single ions through the sensitive structures of the device. This modality takes advantage of the fact that the ionization produced by the passage of a single ion acts in an equivalent way to a transient change in the gate bias which therefore modulates the drain current as a function of time. This differs from the traditional ion beam induced charge technique where the ionization drifts in an internal electric field and induces a single charge pulse in an electrode applied to the device. Instead a richer variety of phenomena are observed, with different time constants which depend on the proximity of the ion strike to the channel of the device. The signals may be used to examine device function, radiation sensitivity or to count ion impacts within the channel.     

离子束混合及离子注入陶瓷材料表面改性研究概述

对离子注入陶瓷材料引起的辐照损伤和材料力学性能、摩擦学性能的改善及陶瓷基体上金属薄膜的离子束混合增强粘着研究的进展进行了综述。     

In situ luminescence qualification of radiation damage in aluminas: F-aggregation and Al colloids

Recent work for in situ sequential measurement of ion beam induced luminescence and surface electrical conductivity has identified a correlation between surface electrical degradation and the luminescence for aluminas and sapphire during 45 keV He ion bombardment. Detailed measurements for the initial stages of degradation where rapid changes in the luminescence emission bands occur, have now identified processes related to oxygen vacancy (F centre) aggregation and aluminium colloid production as precursors to measurable surface electrical degradation in the irradiated region. This understanding enhances the possibility of using ion beam induced luminescence as a potential monitoring tool for material evolution and insulator surface degradation during irradiation, not only in ITER and future fusion devices, but also in present experimental reactor materials test programmes.     

Monte Carlo study of molecular weight distribution changes induced by degradation of ion beam irradiated polymers

In this work we study a polymeric material that degrades upon irradiation due to the energy inhomogeneously deposited by heavy ion beams. Ion beam irradiation of polymers generates rather different effects than those induced by “classical” low ionizing particles such as electrons or gamma rays. This is due to the high electronic stopping power and the inhomogeneous distribution of deposited energy. This energy is transferred to the material within a small volume along the ion path forming the so called “nuclear track” or “latent track”. The track size primarily depends on the ion velocity, and it is determined by the secondary electrons (delta rays) generated along the ion trajectory. By means of Monte Carlo simulations we first obtained equilibrated polymer configurations using a coarse-grained model, and then investigated the spatially inhomogeneous chain scission process due to the passage of the ions. The number average molecular weight, weight average molecular weight and the polydispersity were calculated as a function of track radius, scission probability within the ion track and irradiation fluence. Finally we compared our results with a numerical implementation of a model for random homogeneous degradation.     

中国科学院物理研究所的离子束分析及离子注入改性研究

介绍了中国科学院物理研究所离子束研究室的主要设备、分析方法、离子注入材料改性研究以及近年来在半导体材料、高Ｔｃ超导材料、环保等领域中的研究工作。     

Effect of different ion beam energy on properties of amorphous carbon film fabricated by ion beam sputtering deposition (IBSD)

Amorphous carbon (a-C) films were fabricated by ion beam sputtering technique. The influence of sputtering ion beam energy on bonding structure, morphologic, mechanical properties, tribological properties and corrosion resistance of a-C films are investigated systematically. Morphology study shows that lowest surface roughness exists for mid-ion beam energy. Improved adhesion is observed for the films that are prepared under high ion beam energy, attributed to film graphitization, low residual stress and mixed interface. Relatively, a-C films prepared with ion beam energy of 2 keV exhibits optimum sp³ bond content, mechanical properties and corrosion resistance. It is found that the wear rate of DLC films decrease with increased ion beam energy in general, consistent with the varied trend of the H/E value which has been regarded as a suitable parameter for predicting wear resistance of the coatings. The correlation of the sp³ bond fraction in the films estimated from Raman spectroscopy with residual stress, nanohardness and corrosion resistance has been established.     

离子束混合改善钢铁试样耐磨性能试验

在几种钢铁试样上进行了离子束混合改善耐磨性能的试验，发现一些试样的耐磨性能有大幅度提高（４－１５倍），通过Ｘ射线衍射分析，发现这些试样表现出现了新的化学成分Ｔｉ２Ｎ、ＴｉＮ、ＴｉＣ等。     

Intensive irradiation of carbon nanotubes by Si ion beam

Multi-walled carbon nanotubes were irradiated with 40 keV Si ion beam to a dose of 1×10^7 cm^-2. The multiple-way carbon nanowire junctions and the Si doping in carbon nanowires were realized. Moreover, the formation processes of carbon nanowire junctions and the corresponding mechanism were studied.     

强流脉冲离子束发射度的测量

介绍了一台基于多缝单丝法的强流离子束发射度仪,讨论了发射度仪硬件的系统构成和设计要点,并对测量计算软件进行了介绍.利用该发射度仪对北京大学重离子物理研究所电子回旋共振(Electron cyclotronresonance,ECR)离子源引出的强流脉冲质子束的发射度进行了测量,并对测量数据进行了分析.     

离子束辅助沉积MoSx膜的特性研究

从轰击离子种类，辅助沉积方式、不同衬底材料以及存放环境湿度等因素对离子束辅助沉积的ＭｏＳｘ膜作特性的影响作了研究。发现这些因素在膜的沉积或使用过程中对其品质和特性都产生不能忽视的影响。     

利用离子束技术及PECVD制备碳化硅

阐述利用离子注入、离子束增强沉积、反应离子束溅射及反应离子束辅助沉积等方法制备碳化硅薄膜的实验结果，并报道利用等离子体增强化学气相沉积技术制备可光致发光的非晶态α－ＳｉＣ：Ｈ薄膜的工作。     

微波离子枪离子束光学的数值模拟

用数值模拟方法研究了聚焦离子束系统中微波离子枪的束光学性能，将离子枪看作由源等离子体极和Ｏｒｌｏｆｆ－Ｓｗａｎｓｏｎ透镜组成的双级加速系统，分析了各参对束发射特性的影响。结果展示出引出束光学主要取决于引出导流系数和电势分布，在一定条件下可获得发散度小的离子束。     

Metastable phases in Co–Ag system formed by ion beam assisted deposition at the glancing ion incidence

Co metastable structures are formed in Co–Ag alloy films with the aid of glancing incident ions during deposition. The structures of Co are characterized by X-ray absorption near-edge structure (XANES) spectroscopy at the Co K-edge. The results indicate that two kinds of Co phases coexist in every film. One is -Co or β-Co and the other is named fcc-II with a = 4.06 Å. It is thought that the stress between Co and Ag clusters induces the formation of β-Co and the fcc-II phase. The role of glancing incident ions is to trigger a collision cascade on the surface and to facilitate both thermodynamics and kinetics aspects of cluster mixing.     

强脉冲离子束辐照混合的RBS研究

采用卢瑟福背散射(Rutherford backscattering spectroscopy,RBS)方法对强脉冲离子束辐照Ti/Al、Al/Ti和Ni/Ti三组薄膜/衬底体系所形成的混合层进行了研究.在Ni/Ti组合中形成了厚度比离子射程大得多的、混合度较高的梯度混合层.发现熔融态混合的程度不仅取决于两材料在熔融态的表面张力的差别,而且取决于它们熔点的差异.这两个参量较接近的混合程度较好.