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1.
采用射频磁控反应溅射法分别在Si和蓝宝石衬底上沉积SiO2薄膜.通过改变沉积薄膜的工艺参数,考察反应气体流量比、沉积温度、射频功率等因素对SiO2薄膜内应力的影响.采用压痕裂纹法分析了镀膜前后蓝宝石的表面应力.结果表明:制备SiO2薄膜时,工艺参数影响SiO2薄膜的成分,当O2/Ar流量比值为1.25,衬底温度为300℃,射频功率为100 W时,可以制备出化学计量比的SiO2薄膜,此时薄膜中的内应力较小;制备的SiO2薄膜呈压应力状态,镀SiO2薄膜可以改变蓝宝石的表面应力,蓝宝石的表面应力已由原来的拉应力变为压应力.  相似文献   

2.
采用直流与射频磁控反应溅射法在硬质合金YG8衬底上制备了氮化碳(carbon nitride,CNx)薄膜。研究了溅射方式、衬底腐蚀处理对薄膜摩擦学性能的影响。结果表明:射频反应磁控溅射制备的CNx薄膜的膜基结合力和摩擦因数明显高于直流反应磁控溅射薄膜的,适当的负偏压可以提高膜基结合力。衬底化学腐蚀预处理能够大幅度提高CNx薄膜的膜基结合力,对直流溅射CNx薄膜的摩擦因数影响不大,但能降低射频溅射CNx薄膜的摩擦因数。射频反应磁控溅射法制备的CNx薄膜比直流溅射法制备的CNx薄膜耐磨性能好。衬底化学腐蚀预处理和溅射时对衬底施加适当的负偏压均有利于耐磨性能的提高。  相似文献   

3.
李晓东  邵世强 《玻璃》2015,(12):27-30
氮化硅(Si_3N_4)薄膜具有化学稳定性高、电阻率高、绝缘性好、光学性能良好(其折射率在2.0左右)等特性。同时氮化硅膜是一种很好的耐磨材料,其铅笔硬度理论上可以达到9H以上,通过在其它的镀膜产品上加镀一层氮化硅膜,可有效改善原有镀膜产品的耐磨性,避免膜层出现膜面划伤而造成的外观不良。本文主要研究采用中频磁控反应溅射制备氮化硅薄膜,氮化硅薄膜的耐磨性能取决于镀膜过程中的各种工艺参数,包括:N_2/Ar比、沉积温度、溅射功率、膜层厚度2等。通过对不同工艺条件下镀制的氮化硅薄膜的耐磨性及膜层结构进行对比,筛选出具有优良耐磨性能的氮化硅薄膜的工艺参数。  相似文献   

4.
以10%SnO2和90%In2O3(以质量计)烧结成的ITO氧化物陶瓷为靶材,采用射频磁控溅射法在玻璃基片成功地制备出光电性能优异的ITO透明导电薄膜。研究了基片温度和氧分压溅射工艺参数对ITO薄膜的结构和光电性能的影响。实验结果表明,采用氧化铟锡陶瓷靶射频磁控溅射制备的ITO薄膜沿(222)晶面生长,薄膜紫外透射光谱的吸收截止边带随着衬底温度和氧分压的升高向短波长方向漂移。  相似文献   

5.
采用直流磁控反应溅射的方法在金属铝基板表面沉积AlN薄膜。通过XRD、SEM对绝缘膜层进行了研究分析,并测试了膜层的介电性能。结果表明:在靶基距和溅射功率分别为5cm、150W,衬底温度在室温25℃~300℃内制备的AlN薄膜为六方晶型,沿c轴平行于衬底表面的(100)和(110)晶面生长。AlN薄膜表面有很多蠕虫状形态的晶粒随机地分布在膜平面内,这可能是200℃的衬底温度下AlN薄膜介电性能较好的原因。  相似文献   

6.
Cu3N薄膜的晶面取向、沉积速率、电学特性等性质除与制备方法有关外,还和制备工艺参数有很大关系。溅射法制备Cu3N薄膜工艺参数主要有,混合气体(N2+Ar)中氮气分压比r、基底温度T(℃)、溅射功率P(W)。为了研究Cu3N薄膜的性能与其制备工艺参数之间关系,本文采用反应射频磁控溅射法,在玻璃基底上成功制备了Cu3N薄膜,并研究了工艺参数对其晶面取向、膜厚、电学性能、沉积速率的影响。  相似文献   

7.
CVD金刚石衬底上抗氧化、增透膜的制备与性能   总被引:1,自引:0,他引:1  
采用射频磁控反应溅射法在化学气相沉积(chemical vapor deposition,CVD)的金刚石衬底上制备了AlN薄膜以及AlN/Si和AlN/Ge膜。通过X射线衍射分析了衬底加热温度对薄膜微结构的影响和薄膜高温下的氧化行为。结果表明:在衬底加热温度低于380℃时制备的AlN薄膜为非晶态,480℃时AlN薄膜为六方多晶。AlN薄膜在800℃热暴露后开始氧化,900℃时基本被氧化为Al2O3。在CVD金刚石上制备的AlN/Si和AlN/Ge膜都能提高金刚石在长波红外波段(8~10μm)的透过性能,单面最大增透分别为8%和3%。镀有AlN/Ge膜的CVD金刚石在800℃高温热暴露实验中,有AlN/Ge膜保护的金刚石表面未发生刻蚀。高温下AlN/Ge膜对金刚石有很好的保护作用,同时增透效果没有明显下降。  相似文献   

8.
陈英  郭卫 《玻璃》2018,45(6):42-45
讨论了采用磁控溅射镀膜工艺在玻璃衬底上制作AZO透明导电薄膜的工艺方法。分析了AZO透明导电膜产品的质量指标,介绍了磁控溅射镀膜工艺及设备、靶材的选择、玻璃基板加热温度的选择、溅射气体的压力的选择等。  相似文献   

9.
采用射频磁控反应溅射技术,在不同的Ar:O2条件下制备Er2O3薄膜,然后把样品分别在600、700和800℃退火60min,研究分析了Ar:O2比例和退火温度对样品的结构和介电性能的影响。结果表明:600℃以上退火处理后,Er203薄膜从非晶态转变为多晶,使薄膜的介电常数和击穿场强明显增加,漏电流密度减小,但不同的退火温度对这些性能的影响不大,退火温度的提高会在Si和Er2O3薄膜的界面形成类SiO2过渡层。但Ar:O2比对薄膜的结晶性能和介电性能影响不大,但工作气体中较少的Ar会导致在Si和Er2O3薄膜的界面形成类Si02过渡层。  相似文献   

10.
非晶硅太阳能电池背反ZnO:Al薄膜制备   总被引:1,自引:0,他引:1  
以ZnO:Al(2%Al2O3,质量分数)为靶材,用射频磁控溅射在玻璃衬底上制备ZnO:Al薄膜,分析了各沉积参数对薄膜光电性能的影响。结果表明:溅射功率对ZnO:Al的透过率影响最大,其次是反应腔室压力,而衬底温度对透过率几乎没有影响。ZnO:Al的电阻率主要取决于衬底温度和溅射功率。综合考虑透过率和电阻率,确定了背反ZnO:Al的最佳沉积参数(衬底温度为200℃,溅射功率为200W,反应腔室压力为0.6Pa),得到了透过率大于85%,电阻率最小为7.6×10-4Ωcm的ZnO:Al薄膜。制备了ZnO:Al/Ag/ss(stainless steel)背反电极,并将其用于非晶硅太阳能电池。与无背反的不锈钢衬底上的电池相比,非晶硅太阳能电池短路电流密度增加了16%。  相似文献   

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Vismiones and ferruginins, representatives of a new class of lypophilic anthranoids from the genusVismia were found to inhibit feeding in larvae of species ofSpodoptera, Heliothis, and inLocusta migratoria.  相似文献   

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14.
Despite its industrial importance, the subject of freeze-thaw (F/T) stability of latex coatings has not been studied extensively. There is also a lack of fundamental understanding about the process and the mechanisms through which a coating becomes destabilized. High pressure (2100 bar) freezing fixes the state of water-suspended particles of polymer binder and inorganic pigments without the growth of ice crystals during freezing that produce artifacts in direct imaging scanning electron microscopy (SEM) of fracture surfaces of frozen coatings. We show that by incorporating copolymerizable functional monomers, it is possible to achieve F/T stability in polymer latexes and in low-VOC paints, as judged by the microstructures revealed by the cryogenic SEM technique. Particle coalescence as well as pigment segregation in F/T unstable systems are visualized. In order to achieve F/T stability in paints, latex particles must not flocculate and should provide protection to inorganic pigment and extender particles. Because of the unique capabilities of the cryogenic SEM, we are able to separate the effects of freezing and thawing, and study the influence of the rate of freezing and thawing on F/T stability. Destabilization can be caused by either freezing or thawing. A slow freezing process is more detrimental to F/T stability than a fast freezing process; the latter actually preserves suspension stability during freezing. Presented at the 82nd Annual Meeting of the Federation of Societies for Coatings Technology, October 27–29, 2004 in Chicago, IL. Tied for first place in The John A. Gordon Best Paper Competition.  相似文献   

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In 2002–2004, we examined the flight responses of 49 species of native and exotic bark and ambrosia beetles (Coleoptera: Scolytidae and Platypodidae) to traps baited with ethanol and/or (−)-α-pinene in the southeastern US. Eight field trials were conducted in mature pine stands in Alabama, Florida, Georgia, North Carolina, and South Carolina. Funnel traps baited with ethanol lures (release rate, about 0.6 g/day at 25–28°C) were attractive to ten species of ambrosia beetles (Ambrosiodmus tachygraphus, Anisandrus sayi, Dryoxylon onoharaensum, Monarthrum mali, Xyleborinus saxesenii, Xyleborus affinis, Xyleborus ferrugineus, Xylosandrus compactus, Xylosandrus crassiusculus, and Xylosandrus germanus) and two species of bark beetles (Cryptocarenus heveae and Hypothenemus sp.). Traps baited with (−)-α-pinene lures (release rate, 2–6 g/day at 25–28°C) were attractive to five bark beetle species (Dendroctonus terebrans, Hylastes porculus, Hylastes salebrosus, Hylastes tenuis, and Ips grandicollis) and one platypodid ambrosia beetle species (Myoplatypus flavicornis). Ethanol enhanced responses of some species (Xyleborus pubescens, H. porculus, H. salebrosus, H. tenuis, and Pityophthorus cariniceps) to traps baited with (−)-α-pinene in some locations. (−)-α-Pinene interrupted the response of some ambrosia beetle species to traps baited with ethanol, but only the response of D. onoharaensum was interrupted consistently at most locations. Of 23 species of ambrosia beetles captured in our field trials, nine were exotic and accounted for 70–97% of total catches of ambrosia beetles. Our results provide support for the continued use of separate traps baited with ethanol alone and ethanol with (−)-α-pinene to detect and monitor common bark and ambrosia beetles from the southeastern region of the US.  相似文献   

18.
Halyomorpha halys (Stål) (Pentatomidae), called the brown marmorated stink bug (BMSB), is a newly invasive species in the eastern USA that is rapidly spreading from the original point of establishment in Allentown, PA. In its native range, the BMSB is reportedly attracted to methyl (E,E,Z)-2,4,6-decatrienoate, the male-produced pheromone of another pentatomid common in eastern Asia, Plautia stali Scott. In North America, Thyanta spp. are the only pentatomids known to produce methyl 2,4,6-decatrienoate [the (E,Z,Z)-isomer] as part of their pheromones. Methyl 2,4,6-decatrienoates were field-tested in Maryland to monitor the spread of the BMSB and to explore the possibility that Thyanta spp. are an alternate host for parasitic tachinid flies that use stink bug pheromones as host-finding kairomones. Here we report the first captures of adult and nymph BMSBs in traps baited with methyl (E,E,Z)-2,4,6-decatrienoate in central Maryland and present data verifying that the tachinid, Euclytia flava (Townsend), exploits methyl (E,Z,Z)-2,4,6-decatrienoate as a kairomone. We also report the unexpected finding that various isomers of methyl 2,4,6-decatrienoate attract Acrosternum hilare (Say), although this bug apparently does not produce methyl decatrienoates. Other stink bugs and tachinids native to North America were also attracted to methyl 2,4,6-decatrienoates. These data indicate there are Heteroptera in North America in addition to Thyanta spp. that probably use methyl 2,4,6-decatrienoates as pheromones. The evidence that some pentatomids exploit the pheromones of other true bugs as kairomones to find food or to congregate as a passive defense against tachinid parasitism is discussed.  相似文献   

19.
收集了2007年7月~2008年6月世界塑料工业的相关资料,介绍了2007~2008年国外塑料工业的发展情况,提供了世界塑料产量、消费量及全球各类树脂的需求量及产能情况.按通用热塑性树脂(聚乙烯、聚丙烯、聚苯乙烯、聚氯乙烯、ABS树脂)、工程塑料(尼龙、聚碳酸酯、聚甲醛、热塑性聚酯、聚苯醚)、特种工程塑料(聚苯·硫醚、液晶聚合物、聚醚醚酮)、通用热固性树脂(酚醛、聚氨酯、不饱和聚酯树脂、环氧树脂)不同品种的顺序,对树脂的产量、消费量、供需状况及合成工艺、产品应用开发、树脂品种的延伸及应用的进一步扩展等技术作了详细介绍.  相似文献   

20.
收集了2005年7月~2006年6月国外塑料工业的相关资料,介绍了2005—2006年国外塑料工业的发展情况。提供了世界塑料产量、消费量及全球各类树脂生产量以及各国塑料制品的进出口情况。作为对比,介绍了中国塑料的生产情况。按通用热塑性树脂(聚乙烯、聚丙烯、聚苯乙烯、聚氯乙烯、ABS树脂)、工程塑料(聚酰胺、聚碳酸酯、聚甲醛、热塑性聚酯、聚苯醚)、通用热固性树脂(酚醛、聚氨酯、不饱和树脂、环氧树脂)、特种工程塑料(聚苯硫醚、液晶聚合物、聚醚醚酮)的品种顺序,对树脂的产量、消费量、供需状况及合成工艺、产品开发、树脂品种的延伸及应用的扩展作了详细的介绍。  相似文献   

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