Virtual metrology and feedback control for semiconductor manufacturing processes using recursive partial least squares

Virtual metrology (VM) is the prediction of metrology variables (either measurable or non-measurable) using process state and product information. In the past few years VM has been proposed as a method to augment existing metrology and has the potential to be used in control schemes for improved process control in terms of both accuracy and speed. In this paper, we propose a VM based approach for process control of semiconductor manufacturing processes on a wafer-to-wafer (W2W) basis. VM is realized by utilizing the pre-process metrology data and more importantly the process data from the underlying tools that is generally collected in real-time for fault detection (FD) purposes. The approach is developed for a multi-input multi-output (MIMO) process that may experience metrology delays, consistent process drifts, and sudden shifts in process drifts. The partial least squares (PLS) modeling technique is applied in a novel way to derive a linear regression model for the underlying process, suitable for VM purposes. A recursive moving-window approach is developed to update the VM module whenever metrology data is available. The VM data is then utilized to develop a W2W process control capability using a common run-to-run control technique. The proposed approach is applied to a simulated MIMO process and the results show considerable improvement in wafer quality as compared to other control solutions that only use lot-to-lot metrology information.     

Design of a Networked Tracking Control System With a Data-based Approach

Tracking control is a very challenging problem in the networked control system (NCS), especially for the process with blurred mechanism and where only input-output data are available. This paper has proposed a data-based design approach for the networked tracking control system (NTCS). The method utilizes the input-output data of the controlled process to establish a predictive model with the help of fuzzy cluster modelling (FCM) technology. Then, the deduced error and error change in the future are treated as inputs of a fuzzy sliding mode controller (FSMC) to obtain a string of future control actions. These candidate control actions in the controller side are delivered to the plant side. Thus, the network induced time delays are compensated by selecting appropriate control action. Simulation outputs prove the validity of the proposed method.      

A virtual metrology model based on recursive canonical variate analysis with applications to sputtering process

In data driven process monitoring, soft-sensor, or virtual metrology (VM) model is often employed to predict product's quality variables using sensor variables of the manufacturing process. Partial least squares (PLS) are commonly used to achieve this purpose. However, PLS seeks the direction of maximum co-variation between process variables and quality variables. Hence, a PLS model may include the directions representing variations in the process sensor variables that are irrelevant to predicting quality variables. In this case, when direction of sensor variables’ variations most influential to quality variables is nearly orthogonal to direction of largest process variations, a PLS model will lack generalization capability. In contrast to PLS, canonical variate analysis (CVA) identifies a set of basis vector pairs which would maximize the correlation between input and output. Thus, it may uncover complex relationships that reflect the structure between quality variables and process sensor variables. In this work, an adaptive VM based on recursive CVA (RCVA) is proposed. Case study on a numerical example demonstrates the capability of CVA-based VM model compared to PLS-based VM model. Superiority of the proposed model is also presented when it applied to an industrial sputtering process.     

Evaluating the reliability level of virtual metrology results for flexible process control: a novelty detection-based approach

The purpose of virtual metrology (VM) in semiconductor manufacturing is to support process monitoring and quality control by predicting the metrological values of every wafer without an actual metrology process, based on process sensor data collected during the operation. Most VM-based quality control schemes assume that the VM predictions are always accurate, which in fact may not be true due to some unexpected variations that can occur during the process. In this paper, therefore, we propose a means of evaluating the reliability level of VM prediction results based on novelty detection techniques, which would allow flexible utilization of the VM results. Our models generate a high-reliability score for a wafer’s VM prediction only when its process sensor values are found to be consistent with those of the majority of wafers that are used in model building; otherwise, a low-reliability score is returned. Thus, process engineers can selectively utilize VM results based on their reliability level. Experimental results show that our reliability generation models are effective; the VM results for wafers with a high level of reliability were found to be much more accurate than those with a low level.     

Closed-loop stable model predictive control of integrating systems with dead time

Model predictive control (MPC) applications in the process industry usually deal with process systems that show time delays (dead times) between the system inputs and outputs. Also, in many industrial applications of MPC, integrating outputs resulting from liquid level control or recycle streams need to be considered as controlled outputs. Conventional MPC packages can be applied to time-delay systems but stability of the closed loop system will depend on the tuning parameters of the controller and cannot be guaranteed even in the nominal case. In this work, a state space model based on the analytical step response model is extended to the case of integrating time systems with time delays. This model is applied to the development of two versions of a nominally stable MPC, which is designed to the practical scenario in which one has targets for some of the inputs and/or outputs that may be unreachable and zone control (or interval tracking) for the remaining outputs. The controller is tested through simulation of a multivariable industrial reactor system.     

Adaptive RTRL based neurocontroller for damping subsynchronous oscillations using TCSC

Modern interconnected electrical power systems are complex and require perfect planning, design and operation. Hence the recent trends towards restructuring and deregulation of electric power supply has put great emphasis on the system operation and control. Flexible AC transmission system (FACTS) devices such as thyristor controlled series capacitor (TCSC) are capable of controlling power flow, improving transient stability and mitigating subsynchronous resonance (SSR). In this paper an adaptive neurocontroller is designed for controlling the firing angle of TCSC to damp subsynchronous oscillations. This control scheme is suitable for non-linear system control, where the exact linearised mathematical model of the system is not required. The proposed controller design is based on real time recurrent learning (RTRL) algorithm in which the neural network (NN) is trained in real time. This control scheme requires two sets of neural networks. The first set is a recurrent neural network (RNN) which is a fully connected dynamic neural network with all the system outputs fed back to the input through a delay. This neural network acts as a neuroidentifier to provide a dynamic model of the system to evaluate and update the weights connected to the neurons. The second set of neural network is the neurocontroller which is used to generate the required control signals to the thyristors in TCSC. This is a single layer neural network. Performance of the system with proposed neurocontroller is compared with two linearised controllers, a conventional controller and with a discrete linear quadratic Gaussian (DLQG) compensator which is an optimal controller. The linear controllers are designed based on a linearised model of the IEEE first benchmark system for SSR studies in which a modular high bandwidth (six-samples per cycle) linear time-invariant discrete model of TCSC is interfaced with the rest of the system. In the proposed controller, since the response time is highly dependent on the number of states of the system, it is often desirable to approximate the system by its reduced model. By using standard Hankels norm approximation technique, the system order is reduced from 27 to 11th order by retaining the dominant dynamic characteristics of the system. To validate the proposed controller, computer simulation using MATLAB is performed and the simulation studies show that this controller can provide simultaneous damping of swing mode as well as torsional mode oscillations, which is difficult with a conventional controller. Moreover the fast response of the system can be used for real-time applications. The performance of the controller is tested for different operating conditions.     

Robust control of a hydraulically driven flexible arm

A new robust controller is proposed to regulate both flexural vibrations and rigid body motion of a hydraulically driven flexible ann. The controller combines backsteppmg control and sliding mode to arrive at a controller capable of dealing with a nonlinear system with uncertainties. The sliding mode technique is used to achieve an asymptotic joint angle and vibration regulation in the presence of payload uncertainty by providing a virtual torque input at the joint while the backstepping technique is used to regtthte the spool position of a hydraulic valve to provide the required torque. It is shown that there is no chatter in the hydraulic valve, which results in smoother operation of the system.     

基于准入概率的Web服务质量辨识与比例积分控制

提出了一种新的Web服务质量(QoS)控制策略——基于准入概率的控制,使得准入控制不再是确定性行为,而是依准入概率(AP)具有随机性。在此基础上,引入了区分服务策略,建立了区分服务的准入概率控制机制SDAPC,并采用自适应遗传算法(AGA)对比例积分(PI)控制器的控制参数进行整定,实现了优化控制。仿真实验结果表明,SDAPC机制能够很好地保障Web服务器的服务质量,同时为优质的请求提供更好的服务。     

Modelling and optimal controller design of networked control systems with multiple delays

In this paper we discuss the modelling and control of networked control systems (NCS) where sensors, actuators and controllers are distributed and interconnected by a common communication network. Multiple distributed communication delays as well as multiple inputs and multiple outputs (MIMO) are considered in the modelling algorithm. In addition, the asynchronous sampling mechanisms of distributed sensors are characterized to obtain the actual time delays between sensors and the controller. Due to the characteristics of a network architecture, piecewise constant plant inputs are assumed and discrete-time models of plant and controller dynamics are adopted to analyse the stability and performance of a closed-loop NCS. The analysis result is used to verify the stability and performance of an NCS without considering the impact of multiple time delays in the controller design. In addition, the proposed NCS model is used as a foundation for optimal controller design. The proposed control algorithm utilizes the information of delayed signals and improves the control performance of a control system encountering distributed communication delays. Several simulation studies are provided to verify the control performance of the proposed controller design.     

Optimal design of networked control systems: computer control via asynchronous communication channels

We study a linear discrete-time partially observed system perturbed by white noises. The observations are transmitted to the controller, and its outputs are sent to the actuators via communication channels that provide random transmission times and may lose messages. Various signals may incur independent delays and arrive at the destination point out of order. Under certain assumptions, a recursive minimum variance state estimator is proposed. A finite horizon linear-quadratic optimal control problem is also solved.     

Machine learning-based novelty detection for faulty wafer detection in semiconductor manufacturing

Since semiconductor manufacturing consists of hundreds of processes, a faulty wafer detection system, which allows for earlier detection of faulty wafers, is required. statistical process control (SPC) and virtual metrology (VM) have been used to detect faulty wafers. However, there are some limitations in that SPC requires linear, unimodal and single variable data and VM underestimates the deviations of predictors. In this paper, seven different machine learning-based novelty detection methods were employed to detect faulty wafers. The models were trained with Fault Detection and Classification (FDC) data to detect wafers having faulty metrology values. The real world semiconductor manufacturing data collected from a semiconductor fab were tested. Since the real world data have more than 150 input variables, we employed three different dimensionality reduction methods. The experimental results showed a high True Positive Rate (TPR). These results are promising enough to warrant further study.     

网络控制系统的滑模多步预估控制

针对网络控制系统中出现的长时滞、网络诱导噪声和数据包丢失,提出了的滑模多步预估控制器的设计方法.首先对提出的控制器进行了描述,它利用滑模控制的强鲁棒性来克服网络诱导噪声,采用多步预估的办法来处理网络中的时滞和数据包丢失.进而对导出的闭环网络控制系统的稳定性进行了分析.最后对通过网络控制的直流电机,采用所提出的方法设计了控制器,仿真结果验证了方法的有效性.     

Model predictive control for networked control systems

This paper investigates the problem of model predictive control for a class of networked control systems. Both sensor‐to‐controller and controller‐to‐actuator delays are considered and described by Markovian chains. The resulting closed‐loop systems are written as jump linear systems with two modes. The control scheme is characterized as a constrained delay‐dependent optimization problem of the worst‐case quadratic cost over an infinite horizon at each sampling instant. A linear matrix inequality approach for the controller synthesis is developed. It is shown that the proposed state feedback model predictive controller guarantees the stochastic stability of the closed‐loop system. Copyright © 2008 John Wiley & Sons, Ltd.     

滑模控制一类非线性分布式时滞系统

针对一类状态不可测的非线性不确定分布式时滞系统, 给出了系统滑动模态鲁棒渐近稳定的充分条件. 设计了一类滑模观测器, 同时采用线性矩阵不等式的处理方法给出了该观测器存在的充分条件. 再应用滑模控制的趋近率方法和基于观测器所得到的估计状态, 综合了一类滑模控制器. 该控制器同时保证了估计状态下的滑模面和估计误差状态下的滑模面的渐近可达性.     

Hybrid control for wide-area power systems based on hybrid system theory

The article focuses on a new two-level hierarchical hybrid control which contains an upper layer discrete supervisory strategy and lower layer continuous decentralised coordinated control based on hybrid system theory for wide-area power system overall stability enhancement. The discrete supervisory strategies are constituted based on an information fusion technique by using wide-area measurements (WAMs) in order to supervise and switch the control actions into apposite operation mode following a large disturbance. The continuous control is designed in the form of a local state feedback decentralised controller for each generator helped by a coordinated controller, and the coordinated controller is proposed to apply the remote signals from the WAM systems for improving dynamic performance. However, unavoidable communication time delays are involved before the remote signals are received at the coordinated controller. Taking account of the multiply delays, the authors develop a delay-dependent H _∞ robust control technique based on multiple Lyapunov stability theory. Some new stability criteria for hybrid control are derived in terms of linear matrix inequality. The so-called hybrid control is demonstrated through simulation examples to achieve the best overall performance following a large disturbance.     

Adaptive neural control for MIMO nonlinear systems with state time-varying delay

In this paper,adaptive neural control is proposed for a class of multi-input multi-output(MIMO)nonlinear unknown state time-varying delay systems in block-triangular control structure.Radial basis function(RBF)neural networks (NNs)are utilized to estimate the unknown continuous functions.The unknown time-varying delays are compensated for using integral-type Lyapunov-Krasovskii functionals in the design.The main advantage of our result not only efficiently avoids the controller singularity,but also relaxes the restriction on unknown virtual control coefficients.Boundedness of all the signals in the closed-loop of MIMO nonlinear systems is achieved,while The outputs of the systems are proven to converge to a small neighborhood of the desired trajectories.The feasibility is investigated by two simulation examples.     

考虑执行器性能约束的刚体航天器鲁棒姿态跟踪控制

针对存在模型不确定性、外界干扰力矩和执行器性能受限等约束条件下的刚体航天器姿态跟踪控制问题进行研究,并基于滑模控制、反步控制、自适应控制、辅助系统和动态面控制等方法设计相应的鲁棒姿态跟踪控制算法.利用自适应控制实现了对具有多项式形式上界函数的系统未知不确定性进行在线估计和补偿;通过建立描述执行器动态特性的低通滤波模型,并结合辅助系统方法,以确保执行器输出控制力矩的幅值及其变化率均满足一定的饱和约束;通过引入动态面控制法,避免期望虚拟控制信号的一阶导数项直接出现在控制器中,简化了闭环姿态跟踪控制器的设计形式.最后,通过数值仿真验证了所提出控制算法的有效性和可行性.     

Predictor‐based repetitive learning control for a class of remote control nonlinear systems

In this paper, a repetitive learning control (RLC) approach is proposed for a class of remote control nonlinear systems satisfying the global Lipschitz condition. The proposed approach is to deal with the remote tracking control problem when the environment is periodic or repeatable over infinite time domain. Since there exist time delays in the two transmission channels: from the controller to the actuator and from the sensor to the controller, tracking a desired trajectory through a remote controller is not an easy task. In order to solve the problem caused by time delays, a predictor is designed on the controller side to predict the future state of the nonlinear system based on the delayed measurements from the sensor. The convergence of the estimation error of the predictor is ensured. The gain design of the predictor applies linear matrix inequality (LMI) techniques developed by Lyapunov Kravoskii method for time delay systems. The RLC law is constructed based on the feedback error from the predicted state. The overall tracking error tends to zero asymptotically over iterations. The proof of the stability is based on a constructed Lyapunov function related to the Lyapunov Kravoskii functional used for the proof of the predictor's convergence. By well incorporating the predictor and the RLC controller, the system state tracks the desired trajectory independent of the influence of time delays. A numerical simulation example is shown to verify the effectiveness of the proposed approach. Copyright © 2007 John Wiley & Sons, Ltd.     

Performance measure of switched control systems based on covariance tensor approach

In this paper, controller performance measure is considered for switched systems. The covariance tensor-based method is proposed for the controller performance measure for this systems evolution with the discrete-valued switching dynamics and local models for continuous dynamics. We define a measurement tensor to construct the measured process outputs data, and employ the data processing technique of higher-order singular value decomposition. Applying the higher-order singular value decomposition, we can obtain the sets of singular values from the measurement tensor, which are used jointly to evaluate the controller performance of the overall switched systems significantly. We develop the covariance tensor-based performance assessment method for the multivariate switched control systems with characteristic information being mined from the measurement tensor and derive the calculation approach base on the sets of singular values from the measurement tensor. It is shown that by applying higher-order singular value decomposition for measured outputs tensor data, the performance assessment results can exactly reflect the controller performance under the overall dynamical process. Finally, two cases study of the numerical simulation examples and a typical industrial process system well demonstrate the effectiveness of the proposed method.     

Observer-based sliding mode control of Markov jump systems with random sensor delays and partly unknown transition rates

In this paper, the sliding mode control problem of Markov jump systems (MJSs) with unmeasured state, partly unknown transition rates and random sensor delays is probed. In the practical engineering control, the exact information of transition rates is hard to obtain and the measurement channel is supposed to subject to random sensor delay. Design a Luenberger observer to estimate the unmeasured system state, and an integral sliding mode surface is constructed to ensure the exponential stability of MJSs. A sliding mode controller based on estimator is proposed to drive the system state onto the sliding mode surface and render the sliding mode dynamics exponentially mean-square stable with H_∞ performance index. Finally, simulation results are provided to illustrate the effectiveness of the proposed results.