Mercuric ion sensing by a film bulk acoustic resonator

This paper describes a film bulk acoustic resonator (FBAR) mass sensor for detecting Hg2+ ion in water with excellent sensitivity and selectivity. When a thin Au film was deposited on the surface of an FBAR, the resonant frequency shifted to a lower value when the film was exposed to Hg2+ in aqueous solution. The FBAR sensor detected as low as 10(-9) M Hg2+ (0.2 ppb Hg2+) in water. Other ions such as K+, Ca2+, Mg2+, Zn2+, and Ni2+ had little or no effect on the resonant frequency of the FBAR. Coating of the FBAR Au surface with a self-assembled monolayer (SAM) of 4-mercaptobenzoic acid decreased the Hg2+ response.     

Sorptive behavior of monolayer-protected gold nanoparticle films: implications for chemical vapor sensing

Monolayer-protected gold nanoparticle materials were synthesized and characterized for use as sorptive layers on chemical sensors. Thiols investigated as monolayer-forming molecules included dodecanethiol, benzenethiol, 4-chlorobenzenethiol, 4-bromobenzenethiol, 4-(trifluoromethyl)benzenethiol, 4-hydroxybenzenethiol, and 4-aminobenzenethiol. Films of selected monolayer-protected nanoparticle (MPN) materials were deposited on thickness shear mode devices and vapor uptake properties were measured at 298 K. Many, but not all, MPN-based sensing layers demonstrated rapid and reversible uptake of vapors, and sorptive selectivity varies with the monolayer structure. The mass of vapor sorbed per mass of sorptive material was determined and compared with poly(isobutylene) and poly(epichlorohydrin) as examples of simple sorptive polymers that have been used on vapor sensors. The nanoparticle-based films considered here were less sorptive than the selected polymers on a per-mass basis. Partition coefficients, which measure the mass of vapor sorbed per volume of the sorptive phase, were estimated for these MPN materials and found to be comparable to or less than those of the polymer layers. Implications for the roles of sorption and transduction in determining the performance of chemical sensors coated with nanoparticle-based films are discussed.     

纳米银-聚合物菱形剪纸薄膜应变传感特性的研究

采用银镜制备法和激光切割技术获得了纳米银颗粒/聚二甲基硅氧烷剪纸结构薄膜,并系统地研究了薄膜作为柔性应变传感器的力学及压阻特性。将数值模拟与实验相结合,测量了传感薄膜的应变比γ、压阻滞回特性、线性度及压阻敏感性,重点探讨了薄膜制备工艺、结构参数与上述薄膜传感特性的定量关系。结果表明,在给定结构下,结构薄膜整体与结构单元的应变比γ为常数,反映了结构薄膜的变形特性,是理想的力学性能表征参数。菱形剪纸结构薄膜具有量级可达200的大应变比,即在大应变下,材料的实际应变很小。这一特点极大地提升了薄膜的应变测量范围、压阻稳定性、线性度,并保持了合理的压阻灵敏度。     

Equivalent-circuit model for the thickness-shear mode resonator with a viscoelastic film near film resonance

We derive a lumped-element, equivalent-circuit model for the thickness-shear mode (TSM) resonator with a viscoelastic film. This modified Butterworth-Van Dyke model includes in the motional branch a series LCR resonator, representing the quartz resonance, and a parallel LCR resonator, representing the film resonance. This model is valid in the vicinity of film resonance, which occurs when the acoustic phase shift across the film is an odd multiple of pi/2 rad. For low-loss films, this model accurately predicts the frequency changes and damping that arise at resonance and is a reasonable approximation away from resonance. Elements of the parallel LCR resonator are explicitly related to film properties and can be interpreted in terms of elastic energy storage and viscous power dissipation. The model leads to a simple graphical interpretation of the coupling between the quartz and film resonances and facilitates understanding of the resulting responses. These responses are compared with predictions from the transmission-line and Sauerbrey models.     

Ultrasensitive mass sensing with a nanotube electromechanical resonator

Shrinking mechanical resonators to submicrometer dimensions (approximately 100 nm) has tremendously improved capabilities in sensing applications. In this Letter, we go further in size reduction using a 1 nm diameter carbon nanotube as a mechanical resonator for mass sensing. The performances, which are tested by measuring the mass of evaporated chromium atoms, are exceptional. The mass responsivity is measured to be 11 Hz x yg(-1) and the mass resolution is 25 zg at room temperature (1 yg = 10(-24) g and 1 zg = 10(-21) g). By cooling the nanotube down to 5 K in a cryostat, the signal for the detection of mechanical vibrations is improved and corresponds to a resolution of 1.4 zg.     

Synthesis of Ag-Au bimetallic film at liquid-liquid interface and its application in vapor sensing

We demonstrate a novel process for preparing densely packed film of silver nanoparticles at the liquid-liquid interface followed by a transmetallation reaction with gold ion to yield a film of bimetallic nanoparticles. Films of assembled silver as well as Ag-Au bimetallic were characterized by UV-vis-spectroscopy, transmission electron microscopy (TEM) and X-ray photoelectron spectroscopy (XPS) analysis. I-V measurement shows linear behavior for both the films with ca. five orders of magnitude drop in resistance for the Ag-Au bimetallic film. Temperature dependent I-V measurement revealed a semiconductor to metal transition after transmetallation reaction. The films where checked for their potential application in chemical vapor sensing to ammonia vapors.     

Characterization of a novel 1,3-bis(p-iminobenzoic acid)indane Langmuir-Blodgett film for organic vapor sensing

In the present paper we report about the Langmuir-Blodgett thin film characterization and organic vapor sensing properties of a novel 1,3-bis(p-iminobenzoic acid)indane (IBI) containing polar carboxylic acid groups. LB film properties of IBI material is characterized by UV-visible spectroscopy, atomic force microscopy, and quartz crystal microbalance. Our results show that high-quality and uniform LB films can be prepared with the transfer ratio of over 0.95. Organic vapor sensing properties are studied using quartz crystal microbalance measurement system. IBI film is found to be significantly more sensitive to benzene and the response of LB sample is fast, large, and reversible. The sensitivity of detection of toluene, ethyl alcohol, and isopropyl alcohol is much smaller than that of benzene. This newly synthesized IBI is a suitable molecule for the fabrication of an LB film and can be regarded as a promising sensing material in the development of a room temperature gas sensor for benzene vapor applications.     

Characterization and sensing properties of ZnO film prepared by single source chemical vapor deposition

A novel deposition technique has been used to grow ZnO films. Good quality films were obtained on glass substrates by single source chemical vapor deposition (SSCVD), for gas sensing applications. The properties of ZnO films were investigated at different deposition temperatures 300, 350 and 400 °C. X-ray diffraction results show that all deposited films were polycrystalline. The morphological, structural, optical and electrical properties of the films have been investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), cathodoluminescence (CL) and Hall effect techniques. The morphology of the deposited films evolves from columnar grains, to parallel plates as the substrate temperature increases. A significant increase in the relative intensities of the green and red emission with increasing deposition temperature has been observed. Electrical properties, relevant for gas sensing behavior have been investigated as well. In the particular case of CO an operating temperature of 300 °C seems to yield the best sensitivity.     

Theoretical and experimental mass-sensitivity analysis of polymer-coated SAW and STW resonators for gas sensing applications

Polymer-coated surface transverse waves (STW) resonators have recently been successfully studied for organic gas sensing applications. The first results indicate increased absolute and even relative sensitivity as compared to similar resonators with surface acoustic waves (SAW). However, the gain in sensitivity is accompanied by the adverse effect of an increased attenuation and the advantage frame is difficult to establish quantitatively. In this paper, a new set of experimental samples with Parylene C-coated quartz substrates are studied. The samples are matched in frequency and wavelength. The results are compared and the obtained features explained using available theoretical algorithms for analyzing layered SAW and Love configurations, and a recently developed STW algorithm. The approximate limits of advantageous applicability of the STW resonator gas sensors are discussed.     

新型电阻(金属膜)专用镀膜机的研制

新型磁控溅射电阻镀膜机是在同一台设备上能制作出中、低和高阻值金属膜电阻的专用设备。文章主要是对它的结构及设计核心部分进行了论述，并将研制中的一些数据和关键部分予以阐明。     

AlN薄膜体声波谐振器研究

采用一维Mason模型,研究了体声波谐振器的频率特性,探讨了压电薄膜AlN和上电极膜厚对谐振频率的影响,压电参数d33及压电薄膜与电极的厚度比率对机电耦合系数的影响,同时研究了谐振区域的面积和声能在衬底中的损耗对品质因数的影响.测量的体声波谐振器频率特性曲线与模拟结果吻合的较好.     

Multiwalled carbon nanotube film for strain sensing

We have studied the possibility of using multiwalled carbon nanotube (MWCNT) films as strain sensors. The MWCNT films were prepared by a solution/filtration method and were bonded directly onto specimens by a nonconductive adhesive. For comparison, conventional foil strain gages were also bonded to the structure on the opposite side. The specimens then underwent a uniaxial tensile load-unload cycle to evaluate them as strain sensors. To ensure good electrical contact between carbon nanotube film and the wires, a thin layer of copper was thermally deposited on both ends of the film as electrodes, and the wires were connected to the electrodes by silver ink. Wheatstone bridges were used to convert the resistance changes of the MWCNTs to voltage output. Results indicated that the output voltages were proportional to the strain readings from the stain indicator. The effect of temperature on the resistance was measured and the MWCNT film resistance was found to be independent of temperature over the range 273-363?K. The optimal film dimension for strain sensing was evaluated as well. Dynamic tests suggest that the MWCNTs were able to extract the structural signature. Our results indicate that MWCNT film is potentially useful for structural health monitoring and vibration control applications.     

Single-walled carbon nanotube networks for ethanol vapor sensing applications

Networks of pristine high quality single walled carbon nanotubes (SWNTs), the SWNTs after Ar-plasma treatment (from 2 to 12 min) and carbon nanobuds (CNBs) have been tested for ethanol vapor sensing. It was found that the pristine high quality SWNTs do not exhibit any ethanol sensitivity, while the introduction of defects in the tubes results in the appearance of the ethanol sensitivity. The CNB network showed ethanol sensitivity without plasma treatment. Both CNB and low defect (after 3 min treatment) SWNT networks exhibit significant drift in the resistance baseline, while heavily plasma-treated (9 min) SWNTs exhibited high ethanol vapor sensitivity without the baseline change. The mechanisms of the ethanol sensitivity and stability after the plasma irradiation are attributed to the formation of sensitive dangling bonds in the SWNTs and formation of defect channels facilitating access of the ethanol vapor to all parts of the bundled nanotubes.      

Electrophoretically deposited nano-structured polyaniline film for glucose sensing

Electrophoretically deposited nano-structured polyaniline (NS-PANI) film has been utilized for fabrication of glucose biosensor by covalent immobilization of glucose oxidase (GOx) using N-ethyl-N-(3-dimethylaminopropyl) carbodiimide and N-hydroxysuccinimide chemistry. This GOx/NS-PANI/ITO bioelectrode has been characterized using scanning electron microscopy, FT-IR, UV-Visible spectroscopy and differential pulse voltammetry (DPV) techniques. The response studies carried out on GOx/NS-PANI/ITO bioelectrode using DPV and photometric studies reveal linearity up to 400 mgdL^− 1 with sensitivity as 1.05 × 10^− 4 mA mg^− 1 dL and 3.887 × 10^− 5 Abs mg^− 1 dL, respectively. The lower value of Michaelis-Menten constant obtained for immobilized GOx (2.1 mM) compared with that of free GOx (5.85 mM) suggests high affinity of enzyme to this matrix.     

Spatial coherence of the generalized diffraction-filtered resonator copper vapor laser

The results of a study on the spatial coherence of a generalized diffraction-filtered resonator (GDFR) copper vapor laser (CVL) for various magnifications are presented. The coherence width and output power are compared with that of unstable resonators (UR's) of equivalent magnifications. It is established, by use of reversal shear interferometry, that the GDFR CVL beam has better spatial coherence and average power characteristics than the UR CVL beam for equivalent resonator magnifications.     

The open resonator with a longitudinally placed dielectric film in measurement technique

The case when a thin dielectric film is placed longitudinally in an open resonator is considered. When measuring the parameters of the film this arrangement enables one to increase the volume of material introduced into the field without any appreciable distortion of the field of the open resonator and also increases the deviations of the measured parameters.Translated from Izmeritel'naya Tekhnika, No. 10, pp. 50–51, October, 1993.We wish to thank V. N. Apletalin for his help with the experiment.     

Ultrasensitive vapor detection with surface-enhanced Raman scattering-active gold nanoparticle immobilized flow-through multihole capillaries

We developed novel flow-through surface-enhanced Raman scattering (SERS) platforms using gold nanoparticle (Au-NP) immobilized multihole capillaries for rapid and sensitive vapor detection. The multihole capillaries consisting of thousands of micrometer-sized flow-through channels provide many unique characteristics for vapor detection. Most importantly, its three-dimensional SERS-active micro-/nanostructures make available multilayered assembly of Au-NPs, which greatly increase SERS-active surface area within a focal volume of excitation and collection, thus improving the detection sensitivity. In addition, the multihole capillary's inherent longitudinal channels offer rapid and convenient vapor delivery, yet its micrometer-sized holes increase the interaction between vapor molecules and SERS-active substrate. Experimentally, rapid pyridine vapor detection (within 1 s of exposure) and ultrasensitive 4-nitrophenol vapor detection (at a sub-ppb level) were successfully achieved in open air at room temperature. Such an ultrasensitive SERS platform enabled, for the first time, the investigation of both pyridine and 4-nitrophenol vapor adsorption isotherms at very low concentrations. Type I and type V behaviors of the International Union of Pure and Applied Chemistry isotherm were well observed, respectively.     

A study of Langmuir-Blodgett thin film for organic vapor detection

In this work, arachidic acid was deposited onto a quartz crystal using a standard Langmuir-Blodgett (LB) thin film deposition procedure. Quartz Crystal Microbalance (QCM) technique was used to monitor the reproducibility of the LB film monolayer and was employed to study the organic vapor sensing properties of chloroform, toluene, benzene, ethyl alcohol and isopropyl alcohol. QCM results show that arachidic acid monolayer was successfully organised and deposited from the water surface onto a quartz crystal substrate. This LB film is found to be highly sensitive and selective to chloroform vapor than other vapors. The response of the sample against chloroform is fast, large and reversible.