Microtribology of silicon,oxide, and carbide surfaces

This paper presents an overview of the microtribological properties of silicon oxide, sapphire, and titanium carbide surfaces as well as a self‐assembled monolayer with respect to their application in microsystems. Testing was performed with a reciprocating microtribometer with normal loads in the micronewton to millinewton range. Silicon and titanium carbide balls were used as counterbodies. For silicon oxide, sapphire and a perfluorodecyltrichlorosilane self‐assembled monolayer (FDTS), the microfriction corresponds to the water contact angle when the smoother titanium carbide ball or the relatively rougher silicon ball was used as a counterbody. Microfriction measurements performed on tribopairs of the same material, but having different roughnesses, showed that the friction of the rougher tribopairs is lower than that of the smoother ones. Interestingly, in the microforce regime, reduction in friction was significant and almost as much as when hydrophobic self‐assembled monolayers are applied on smooth surfaces. This investigation showed that comparative microtribological investigations between different material systems can be very challenging due to the fact that comparable roughness values on samples and countersamples are difficult to realize. Copyright © 2006 John Wiley & Sons, Ltd.     

Tribochemical interactions of Si-doped DLC film against steel in sliding contact

This study concerns the effects of tribochemical interactions at the interface of Si-DLC (silicon-doped diamond-like carbon) film and steel ball in sliding contact on tribological properties of the film. The Si-DLC film was over-coated on pure DLC coating by radio frequency plasma-assisted chemical vapor deposition (r.f. PACVD) with different Si concentration. Friction tests against steel ball using a reciprocating type tribotester were performed in ambient environment. X-Ray photoelectron spectroscopy (XPS) and auger electron spectroscopy (AES) were used to study the chemical characteristics and elemental composition of the films and mating balls after tests. Results showed a darkgray film consisting of carbon, oxygen and silicon on the worn steel ball surface with different thickness. On the contrary, such film was not observed on the surface of the ball slid against pure DLC coating. The oxidation of Si-DLC surface and steel ball was also found at particular regions of contact area. This demonstrates that tribochemical interactions occurred at the contact area of Si-DLC and steel ball during sliding to form a tribofilm (so called transfer film) on the ball specimen. While the pure DLC coating exhibited high coefficient of friction (∼0.06), the Si-DLC film showed a significant lower coefficient of friction (∼0.022) with the presence of tribofilm on mating ball surface. However, the Si-DLC film possesses a very high wear rate in comparison with the pure DLC. It was found that the tribochemical interactions strongly affected tribological properties of the Si-DLC film in sliding against steel.     

Small amplitude reciprocating wear performance of diamond-like carbon films: dependence of film composition and counterface material

Small amplitude (50 μm) reciprocating wear of hydrogen-containing diamond-like carbon (DLC) films of different compositions has been examined against silicon nitride and polymethyl-methacrylate (PMMA) counter-surfaces, and compared with the performance of an uncoated steel substrate. Three films were studied: a DLC film of conventional composition, a fluorine-containing DLC film (F-DLC), and silicon-containing DLC film. The films were deposited on steel substrates from plasmas of organic precursor gases using the Plasma Immersion Ion Implantation and Deposition (PIIID) process, which allows for the non-line-of-sight deposition of films with tailored compositions. The amplitude of the resistive frictional force during the reciprocating wear experiments was monitored in situ, and the magnitude of film damage due to wear was evaluated using optical microscopy, optical profilometry, and atomic force microscopy. Wear debris was analyzed using scanning electron microscopy and energy dispersive spectroscopy. In terms of friction, the DLC and silicon-containing DLC films performed exceptionally well, showing friction coefficients less than 0.1 for both PMMA and silicon nitride counter-surfaces. DLC and silicon-containing DLC films also showed significant reductions in transfer of PMMA compared with the uncoated steel. The softer F-DLC film performed similarly well against PMMA, but against silicon nitride, friction displayed nearly periodic variations indicative of cyclic adhesion and release of worn film material during the wear process. The results demonstrate that the PIIID films achieve the well-known advantageous performance of other DLC films, and furthermore that the film performance can be significantly affected by the addition of dopants. In addition to the well-established reduction of friction and wear that DLC films generally provide, we show here that another property, low adhesiveness with PMMA, is another significant benefit in the use of DLC films.     

The Beneficial Effect of High-Temperature Oxidation on the Tribological Behaviour of V and VN Coatings

This paper investigates the influence of the applied load and sliding velocity on the microfrictional properties of native oxide-covered Si(100) and Si(100) coated with octadecyltrichlorosilane (OTS) and perfluorodecyltrichlorosilane (FDTS) self-assembled monolayers (SAMs) using a precision microtribometer. Microfriction was investigated as a function of the applied load and sliding velocity. As has been confirmed in earlier studies, in the microtribological regime, OTS and FDTS significantly reduce the friction force in comparison to the bare native oxide-covered (hydrophilic) silicon surface. The friction versus applied load curve of the substrate material as well as the SAMs-covered surfaces can be described by a model based on contact mechanics. For the native oxide surface, microfriction is reduced with increasing sliding speed. The friction force of the OTS- and FDTS-covered surfaces increases with load and is proportional to the natural logarithm of sliding speed. The increase with sliding velocity gets larger for higher normal loads. It can be shown that this increase is proportional to the contact area of the counter sample with the SAMs.     

箔片空气轴承表面钛掺杂DLC膜的制备与表征

采用中频非平衡磁控溅射方法在箔片空气轴承的主轴材料40Cr钢、支承元件铍青铜箔片及硅片上制备了钛掺杂的DLC膜,并对膜的结构、摩擦磨损性能、结合强度以及内应力等进行了表征.结果表明:所制备的DLC膜含有较多的sp2键,与基体结合力强,两种轴承材料上沉积DLC膜之间的摩擦配副的减摩抗磨效果较好,摩擦因数在0.06～0.0...     

负偏压对DLC薄膜结构和摩擦学性能的影响

采用离子束溅射沉积镀膜法制备了DLC薄膜,研究了偏压对薄膜性能的影响。通过原子力显微镜(AFM)和拉曼光谱对DLC薄膜的表面形貌以及内部结构进行了分析表征。并用UTM-2摩擦磨损仪对其摩擦学性能进行了测试。结果表明,利用离子束溅射沉积制备的DLC薄膜具有良好的减摩抗磨性能。随着偏压的增加薄膜的摩擦因数先减小后增加,在-150 V偏压时,薄膜的摩擦学性能最好。     

Improvement of boundary lubrication properties of diamond-like carbon (DLC) films due to metal addition

The effects of added materials such as metals like titanium (Ti), molybdenum (Mo) and iron (Fe) diamond-like carbon (DLC) films on boundary lubrication and microtribological properties were investigated. The nanoindentation hardness and microwear resistance can be improved by adding the proper metal to DLC films, as evaluated by atomic force microscopy (AFM). Boundary lubrication properties of DLC films with metals are improved as comparing with DLC films without metal under lubricant with both MoDTC and ZDDP additives. Moreover, lower friction coefficient of μ=0.03 than carburized steel is exhibited with the appropriate quantity of Ti added. The tribochemical reactant was formed on the sliding surface of the Ti-containing DLC film like as carburized steel. Higher mechanical damping materials containing elements, such as Mo, Zn, P and S, formed tribochemical reactors as observed by X-ray photoemission spectroscopy (XPS) and AFM force modulation methods.     

Load dependence and lifetime studies of self‐assembled monolayers

A comparative study of the microtribological properties of native oxide on Si (100), Si (100) coated with octadecyltrichlorosilane (OTS) and perfluorode‐cyltrichlorosilane (FDTS) self‐assembling monolayers (SAMs) is presented. The frictional properties between these samples and a bare silicon sphere were examined using a microtribometer. Microfriction was investigated as a function of the normal load and relative humidity. Also, the microfriction of OTS‐ and FDTS‐coated surfaces was studied as a function of sliding time and normal load to examine the lifetime of these monolayers. Confirming the results of earlier studies, in the microtribological regime OTS and FDTS significantly reduce the friction force in comparison to the bare, native oxide covered (hydrophilic) silicon surface. The friction vs. normal load curve of oxide‐covered surfaces as well as the SAMs can be described by contact mechanics. Lifetime measurements of the SAMs, examined as a function of the normal load and relative humidity, indicate that the OTS monolayers wear quickly in both dry and moist environments, while the lifetime of FDTS monolayers appears to increase in moist environments. Copyright © 2006 John Wiley & Sons, Ltd.     

Hardness effect of stainless steel substrates on tribological properties of water-lubricated DLC films against AISI 440C ball

Diamond-like carbon (DLC) films were deposited on stainless steel substrates with different hardness by thermal electron excited plasma CVD method, and their tribological properties in water-lubricated conditions were investigated. EDS was used to estimate the wear of the films. The results show that the hardness of the substrates has little effect on the friction and, the wear loss of the films is much smaller than that measured by an optical interferometer. The deep wear track is mainly due to the plastic deformation of the substrates and the films but not due to wear. However, the failure of the films is closely related to the hardness of their substrates. The harder the substrate, the higher the failure-resistant capability. The film deposited on a soft substrate is easy to crack and fail due to the low deformation resistance of the substrate and rubbing at a high contact-pressure. On the other hand, the wear of the counter balls increases with the hardness of the substrates.     

Friction and Wear Performance of Boron Doped,Undoped Microcrystalline and Fine Grained Composite Diamond Films

Chemical vapor deposition(CVD) diamond films have attracted more attentions due to their excellent mechanical properties. Whereas as-fabricated traditional diamond films in the previous studies don’t have enough adhesion or surface smoothness, which seriously impact their friction and wear performance, and thus limit their applications under extremely harsh conditions. A boron doped, undoped microcrystalline and fine grained composite diamond(BD-UM-FGCD) film is fabricated by a three-step method adopting hot filament CVD(HFCVD) method in the present study, presenting outstanding comprehensive performance, including the good adhesion between the substrate and the underlying boron doped diamond(BDD) layer, the extremely high hardness of the middle undoped microcrystalline diamond(UMCD) layer, as well as the low surface roughness and favorable polished convenience of the surface fine grained diamond(FGD) layer. The friction and wear behavior of this composite film sliding against low-carbon steel and silicon nitride balls are studied on a ball-on-plate rotational friction tester. Besides, its wear rate is further evaluated under a severer condition using an inner-hole polishing apparatus, with low-carbon steel wire as the counterpart. The test results show that the BD-UM-FGCD film performs very small friction coefficient and great friction behavior owing to its high surface smoothness, and meanwhile it also has excellent wear resistance because of the relatively high hardness of the surface FGD film and the extremely high hardness of the middle UMCD film. Moreover, under the industrial conditions for producing low-carbon steel wires, this composite film can sufficiently prolong the working lifetime of the drawing dies and improve their application effects. This research develops a novel composite diamond films owning great comprehensive properties, which have great potentials as protecting coatings on working surfaces of the wear-resistant and anti-frictional components.     

Tribological behaviour of MW PACVD diamond coatings in vibrating contacts

Six diamond coatings were produced by microwave plasma-assisted chemical vapour deposition (MW PACVD) on polished SiC substrates. Process gas pressure and process gas composition were varied systematically, resulting in different coating morphologies, roughnesses and grain sizes. Friction and wear were investigated for unlubricated vibrating contact conditions in air at room temperature. Tribological tests on diamond coatings were performed in a ball-on-disc configuration, with steel balls (100Cr6) and alumina balls acting as counterbodies. For comparison of the tribological performance of the diamond coatings, standard tests were performed with a stroke of 200 μn, a load of 10 N, and a frequency of 20 Hz. The effect of relative humidity (RH) was investigated by testing in dry (3% RH), in normal (50% RH), and in moist air (100% RH), respectively To investigate running-in effects and wear propagation, the test duration (10⁴, 10⁵, and 1.2·10⁶ sliding cycles) was varied. For steel/diamond pairings, high wear at the steel ball and high friction were measured, influenced by roughness and grain size of the diamond coating and by relative humidity. For Al₂O₃ against diamond, a pronounced running-in of friction and wear was found. High friction and high wear at the beginning of each test are followed by a stationary phase with extremely low friction coefficients (⩽ 0.05) and with wear rates below the limit of resolution. This running-in depends on grain size and roughness of the coating, on relative humidity, as well as on the operational parameters. Surface analysis using SEM, EDX, LRS and AFM was conducted, to investigate tribologically induced surface changes.     

Friction and Wear of Various DLC Films in Water and Air Environments

Three types of diamond-like carbon (DLC) films, pure DLC, F-containing DLC, and a Si-containing DLC film, were deposited on a WC–Co substrate by a plasma-enhanced CVD technique. Friction and wear properties were determined using a ball-on-plate type reciprocating friction tester in water, comparing the water results to those in ambient air. The friction coefficient of DLC and F–DLC films in water was considerably lower than that in air. With Si–DLC, the friction was almost the same level in both water and air, and was less than 0.1. The specific wear rate of films in water was much smaller than that in air and varied around the low level of 10^–8 mm³/Nm in water, The mating ball wear was also less than 10^–8 mm³/Nm. With DLC and F–DLC films, the transferred amount of material on the friction surface of a mating ball was larger in a water environment than that in air. With a Si–DLC film, the difference in the transferred amount when exposed to either the water or air environment was negligible.     

Tribochemical effects on the friction and wear behaviors of diamond-like carbon film under high relative humidity condition

Friction and wear behaviors of diamond-like carbon (DLC) film in humid N₂ (RH-100%) sliding against different counterpart ball (Si₃N₄ ball, Al₂O₃ ball and steel ball) were investigated. It was found that the friction and wear behaviors of DLC film were dependent on the friction-induced tribochemical interactions in the presence of the DLC film, water molecules and counterpart balls. When sliding against Si₃N₄ ball, a tribochemical film that mainly consisted of silica gel was formed on the worn surface due to the oxidation and hydrolysis of the Si₃N₄ ball, and resulted in the lowest friction coefficient and wear rate of the DLC film. The degradation of the DLC film catalyzed by Al₂O₃ ball caused the highest wear rate of DLC film when sliding against Al₂O₃ ball, while the tribochemical reactions between DLC film and steel ball led to the highest friction coefficient when sliding against steel ball.     

Microtribological behaviour of thin DLC films using different testing methods

To enhance the lifetime and reliability of microcomponents, thin microtribological films are applied to microparts. With reduction of the component size, investigation methods for tribological testing must be adapted. This paper studies the microtribological behaviour of thin diamond‐like carbon (DLC) films using different testing methods. To tie in with macroscopic results, to determine friction we used the well‐known pin‐on‐disc test with spherical surfaces of 10 mm diameter under a typical load of 3 N. For investigations of the behaviour under single asperity contact, Atomic Force Microscope (AFM) methods with applied loads of a few hundred micronewtons were used. Investigations on thin DLC films showed that the friction coefficient under single asperity contact is strongly dependent on the applied load and the resulting contact area. Especially for thin films (up to a few hundred nanometres) the friction coefficient is influenced by the substrate material. With decreasing substrate Young's modulus the friction coefficient also decreases. On the other hand, an increase in the abrasive wear resistance was observed using soft substrate materials. In this paper we show that the friction coefficient was also reduced by a simple surface structure. For investigations we used photolithography to create concentric circles in different substrates. This resulted in a behaviour like riding on rails for the pin‐on‐disc test. Depending on the tribological pairing the friction coefficient was reduced to more than 50% of the original value. Copyright © 2006 John Wiley & Sons, Ltd.     

沉积温度对脉冲真空弧源沉积类金刚石薄膜性能的影响

利用脉冲真空弧源沉积技术在Cr17Ni14Cu4不锈钢和Si(100)基体上制备了类金刚石(DLC)薄膜,研究了基体沉积温度对DLC薄膜的性能和结构的影响。研究表明,随着沉积温度由100 ℃提高到400 ℃,DLC薄膜中sp3 键质量分数减少,sp2键质量分数增多,薄膜复合硬度逐渐降低。当DLC薄膜沉积温度达到400 ℃时,薄膜中C原子主要以sp2键形式存在,与沉积温度为100 ℃时制备的DLC薄膜相比,薄膜复合硬度降低50%。DLC薄膜具有优异的耐磨性,摩擦因数低,随着沉积温度由100 ℃提高到400 ℃,Cr17Ni14Cu4不锈钢表面沉积的DLC薄膜耐磨性降低。沉积温度为100 ℃时,Cr17Ni14Cu4不锈钢表面沉积的DLC薄膜后,耐磨性大幅度提高。DLC薄膜与不锈钢基体结合牢固。     

Tribological Properties of DLC Coatings in Helium

The aim of this research work was to investigate tribological properties of low-friction DLC coatings when operating in helium atmosphere. Two commercial DLC coatings (a-C:H and Me-C:H) were included in the investigation and compared to reference PTFE-based coatings, normally used on components operating in helium. Coatings were deposited on hardened 100Cr6 bearing steel discs and tested against uncoated steel balls in low-load pin-on-disc contact configuration. Investigation was focused on the effect of substrate roughness (R _a ?=?0.05?C0.2???m) and contact conditions, including contact pressure (150?C350?MPa) and sliding speed (0.2?C0.4?m/s) on the coefficient of friction of DLC coatings operating in helium. Results of this investigation show that for low-load sliding contact DLC coatings provide low friction in helium atmosphere, similar to soft PTFE-based coatings. At the same time DLC coatings investigated were found to substantially reduce wear of the coated surface. However, while the wear of the coated part has been more or less eliminated, application of DLC coating prolongs running-in and increases wear of the steel counter-part. Furthermore, also in helium atmosphere tribolgical behaviour of DLC coatings showed dependence on the coating type and contact conditions.     

Tribological Performance of Diamond and Diamondlike Carbon Films at Elevated Temperatures

In this study, the authors investigated the tribological performance of diamond and diamondlike carbon (DLC) films as a function of temperature. Both films were deposited on silicon carbide (SiC) by microwave plasma chemical vapor deposition and ion-beam deposition processes. Tribological tests were performed on a reciprocating wear machine in open air (20 to 30% relative humidity) and under a 10 N load using SiC pins. For the test conditions explored, the steady-state friction coefficients of test pairs without a diamond or DLC film were 0.7 to 0.9 and the average wear rates of pins were 10^?5 to 10^?7 mm³/N·m, depending on ambient temperature. DLC films reduced the steady-slate friction coefficients of the test pairs by factors of three to five and the wear rates of pins by two to three orders of magnitude. Low friction coefficients were also obtained with the diamond films, but wear rates of the counterface pins were high due to the very abrasive nature of these films. The wear of SiC disks coated with either diamond or DLC films was virtually unmeasurable while the wear of uncoated disks was substantial. Test results showed that the DLC films could afford low friction up to about 300° C. At higher temperatures, the DLC films graphitized and were removed from the surface. The diamond films could withstand much higher tempera-lures, but their tribological behavior degraded. Raman spectroscopy and scanning electron microscopy were used to elucidate the friction and wear mechanisms of both films at high temperatures.     

Molecular dynamics simulations of atomic-scale tribology between amorphous DLC and Si-DLC films

Silicon-doped diamond-like carbon (Si-DLC) films possess the potential to improve wear performance of DLC films in humid atmospheres and at higher temperatures. But many experimental results of Si-DLC films show that their structures and tribological properties changed greatly with silicon content. Therefore, molecular dynamics (MD) simulations were used to study the sliding friction process between DLC and Si-DLC films on un-lubricated boundary condition. The results show that a part of sp² bonding of the Si-DLC films is converted into sp³ bonding with the addition of silicon atoms, and the sp³/sp² ratio increases with the increase in silicon content. A transfer film between the DLC and Si-DLC films is formed and the friction force changes with the silicon content. Moreover, the simulations have showed that the silicon addition promotes the bonding of interfilms being formed.     

Effect of Water Adsorption on Microtribological Properties of Hydrogenated Diamond-Like Carbon Films

Microtribological properties of diamond-like carbon (DLC) films in the presence of water molecule have been studied. The amount of water adsorbed on DLC films was measured by the quartz crystal microbalance (QCM), while microtribological properties of the film were evaluated by an environment-controlled microtribometer. The hydrogenated-DLC showed an advancing water contact angle of 97°, indicating a relatively hydrophobic surface. No hysteresis in adsorption and desorption isotherms were observed. This suggests an absence of micropores at the DLC surface. The greatest adhesion and friction forces between a W-tip and DLC films deposited onto QCM were observed at a water coverage of 2-3 monolayers, which corresponds to a relative humidity of 70-80%. This abrupt increase in adhesion was explained by the generation of a meniscus from the condensed water between tip and DLC surface. The atomically flat DLC surface showed maximum adhesion and friction forces at lower humidity than those of DLC on OCM, implying the importance of surface texturing, which reduces the effect of water condensation.     

Tribological Properties of Hard Carbon Films on Zirconia Ceramics

In this study, the authors investigated the tribological properties of hard diamondlike carbon (DLC) films on magnesia-partially stabilized zirconia (MgO-PSZ) substrates over a wide range of bads, speeds, temperatures, and counterface materials. The films were 2 μm thick and produced by ion-beam deposition at room temperature. Tribological tests were conducted on a ball-on-disk machine with MgO-PSZ balls, in open air of 30 to 50% relative humidity under contact loads of 1 to 50 N, at sliding velocities of 0.1 to 6 m/s, and at temperatures of 400°C. Al₂O₃ and Si₃N₄ balls were also rubbed against the DLC-coaled MgO-PSZ disks, primarily to assess their friction and wear performance and to compare it with that of MgO-PSZ balls. A series of long-duration lifetime tests was run at speeds of 1, 2, and 6 m/s under a 5 N load to assess the durability of these DLC films. Results showed that the friction coefficients of MgO-PSZ balls sliding against MgO-PSZ disks were 0.5-0.8, and the average specific wear rates of MgO-PSZ balls ranged from 1 × 10^?5 to 5 × 10^?4 mm³/N·m, depending on sliding velocity, contact load, and ambient temperature. The friction coefficients of MgO-PSZ balls sliding against the DLC-coaled MgO-PSZ disks ranged from 0.03 to 0.1. The average specific wear rates of MgO-PSZ, balls were reduced by three to four orders of magnitude when rubbed against the DLC-coaled disks. These DLC films could last 1.5 to 4 million cycles, depending on sliding velocity. Scanning electron microscopy and micro-laser Raman spectroscopy were used to elucidate the microstructural and chemical nature of the DLC films and worn surfaces.