沉积气压对磁控溅射制备ZnO薄膜的结构与光学性能影响

采用CS-400型射频磁控溅射仪在Si(111)和石英基底上成功的制备了ZnO薄膜,分别用XRD、SEM、紫外-可见光分光光度计和荧光分光光度计表征样品的结构和光学性质.实验表明,采用射频磁控溅射制备的ZnO薄膜具有六角纤锌矿结构的(002)峰和(101)峰的两种取向.在沉积气压>1.0Pa时所制备的ZnO薄膜具有(002)择优取向,并且十分稳定.SEM图表明,ZnO薄膜颗粒大小较为均匀,晶粒尺寸随着气压升高而变小,沉积气压不同时,薄膜样品的生长方式有所差异.在400～1000nm范围内,可以看出除O.5Pa下制备的ZnO薄膜外,其余ZnO薄膜在可见光区域的平均透过率超过80%,吸收边在380nm附近,所对应的光学带隙约为3.23～3.27eV,并随着沉积气压上升而变大.ZnO薄膜的PL谱上观察到了392nm的近紫外峰和419nm的蓝峰;沉积气压对Zno薄膜的发光峰位和峰强有影响.     

溶胶-凝胶法制备Y掺杂ZnO薄膜及其光电性能研究

采用溶胶-凝胶法在玻璃衬底上制备了不同掺Y浓度的ZnO透明导电薄膜。X射线衍射(XRD)表明,所制备的Y掺杂ZnO透明导电薄膜为六角纤锌矿结构的多晶薄膜,且具有C轴择优取向。随着Y掺杂浓度的升高,(002)峰向低角度方向移动。UV透射曲线表明,薄膜在可见光区(400～800nm)的平均透过率超过85%,具有明显的紫外吸收边,通过改变Y的掺入浓度,可以使吸收边向短波方向移动,从而使薄膜的禁带宽度可调。制备的Y掺杂ZnO薄膜电阻率最小值为3.68×102Ω·cm。     

沉积气压对电弧离子镀制备MgO薄膜的结构及性能的影响

采用阴极真空电弧离子沉积技术在玻璃及Si衬底上成功地制备了具有择优结晶取向的透明MgO薄膜。利用X射线衍射仪（XRD）、扫描电子显微镜（SEM）及紫外-可见吸收光谱仪分别对MgO薄膜微观结构、表面形貌及可见光透过率进行了测试与分析。XRD结果表明,所制备的MgO薄膜具有NaCl型立方结构的（100）、（110）和（111）3种结晶取向,在沉积气压为0.7～3.0Pa的范围内,薄膜的择优结晶取向随沉积气压的升高先由（100）转变为（110）,最后变为（111）。SEM图表明随着沉积气压的升高,MgO薄膜的晶粒逐渐变小,薄膜结晶质量变差。在380～900nm范围内,沉积气压为0.7Pa下制备的MgO薄膜其可见光透过率高于90%,随着沉积气压的升高,薄膜的可见光透过率有所下降。     

室温下射频磁控溅射制备ZnO∶Al透明导电薄膜及其性能研究

采用射频磁控溅射技术,在室温下,以ZnO∶Al203(2％Al2O3(质量比))为靶材,在石英玻璃基底上,采用不同工艺条件制备了ZnO∶Al(AzO)薄膜.使用扫描电子显微镜观察了薄膜的表面形貌,X射线衍射分析了薄膜的结构,四探针测量仪得到薄膜的表面电阻,轮廓仪测量了薄膜厚度,并计算了电阻率,最后采用分光光度计测量了薄膜的透过率;研究了溅射功率、溅射气压与薄膜厚度对薄膜电阻率及透过率的影响.结果表明:所制备的AZO薄膜具有(002)择优取向,并且发现薄膜厚度对薄膜的光电性能有明显影响,溅射气压和溅射功率对薄膜电学性能有较大影响,但是对薄膜透过率影响不大.当功率为1kW、溅射气压0.052 Pa、AZO薄膜厚度为250nm时,其电阻率为8.38×10-4Ω·cm,波长在550 nm处透过率为89％,接近基底的本底透过率92％.当薄膜厚度为1125 nm时薄膜的电阻率降至最低(6.16×10-4 Ω·cm).     

超声喷雾热解法制备ZnO薄膜及性能研究

以醋酸锌水溶液为前驱体溶液,使用自制的超声喷雾热解系统在玻璃基板上制备得到了ZnO薄膜.经X射线衍射(XRD),扫描电镜(SEM)分析得到ZnO薄膜的晶体结构和微观形貌.测试结果表明,ZnO薄膜为六角纤锌矿结构,在450～500℃下制备的薄膜显示出良好的结晶性能,并且沿(002)晶面择优取向生长,薄膜具有优良的均匀性和致密性.同时,制备得到的薄膜在可见光区也表现出80%以上的高透过率.     

沉积温度和退火处理对脉冲激光沉积的 ZnO∶Al 膜性能的影响

利用脉冲激光沉积法制备了ZnO∶Al透明导电薄膜.通过对膜的霍尔系数测量及 AFM、XRD分析,详细研究了温度和退火处理对薄膜结构、表面形貌及光电性能的影响.结果表明沉积温度影响膜的电学、光学性能和膜的结晶状况.制备的薄膜均具有ZnO(002)择优取向的多晶膜.在240～310℃沉积的薄膜具有最低的电阻率,其值为6.1×10-4Ω·cm,在240℃沉积的薄膜在氩气中退火薄膜的电阻率下降为4. 7×10-4Ω·cm.所有薄膜在可见光区的平均透过率均达到了90%以上.     

射频磁控溅射法低温制备ZnO：Zr透明导电薄膜及特性研究

利用射频磁控溅射法在室温水冷玻璃衬底上制备出了可见光透过率高、电阻率低的掺锆氧化锌(ZnO:Zr)透明导电薄膜.讨论了薄膜厚度对ZnO:Zr薄膜结构、形貌、光电性能的影响.实验结果表明,厚度对ZnO:Zr薄膜的形貌和电学性能有很大影响.SEM和XRD研究结果表明,ZnO:Zr薄膜为六角纤锌矿结构的多晶薄膜,具有垂直于衬底方向的C轴择优取向.当厚度为300nm时,薄膜的电阻率具有最小值1.77×10-3Ω·cm.所制备薄膜具有良好的附着性能,其可见光区平均透过率超过92%.     

氧化锌掺钇透明导电薄膜的制备及光电特性研究

采用射频磁控溅射法,室温下在玻璃衬底上制备出了具有良好附着性、低电阻率和高透过率的新型透明导电薄膜YZO(ZnO掺杂Y2O3简称YZO)。在薄膜厚度为600nm的情况下,研究了薄膜电学特性随溅射功率和溅射气压的变化情况。X射线衍射谱表明YZO薄膜是多晶膜,具有ZnO的六角纤锌矿结构,最佳取向为(002)方向。最佳溅射条件下制备的薄膜电阻率为8.71×10-4Ω.cm,在可见光范围内平均透过率达到92.3%,禁带宽度为3.57eV。     

薄膜厚度对ZnO∶Ga透明导电膜性能的影响

采用射频磁控溅射法在玻璃衬底上低温制备出镓掺杂氧化锌(ZnO∶Ga)透明导电膜,研究了薄膜的结构、电学和光学性质随薄膜厚度的变化关系。制备的ZnO∶Ga是具有六角纤锌矿结构的多晶薄膜,最佳择优取向为(002)方向。随着薄膜厚度的增加,衍射峰明显增强,晶粒增大。薄膜的最低电阻率为 3.9×10-4Ω·cm,在可见光范围内平均透过率达到了85%以上。     

退火温度对ZnO:Al透明导电薄膜结构和性能的影响

采用溶胶-凝胶法(sol-gel)在普通载玻片上制备了ZnO∶Al薄膜,在200～600℃下退火.利用XRD、紫外-可见光-近红外分光光度计和电阻测试仪等分析方法研究了不同退火温度对薄膜结构和光电性能的影响.结果表明,退火温度在300℃以上,薄膜开始结晶,400℃以上,薄膜出现明显结晶,且沿(002)方向择优取向,随着退火温度升高,(002)峰的强度逐渐增强,晶粒尺寸逐渐增加;薄膜在可见光范围内的透过率均＞85%以上,退火温度高的薄膜在可见光范围内的透过率明显提高,光学带隙在3.32～3.54eV,且随着温度的升高而降低;薄膜的电阻率随退火温度的增高而有所降低,但是仍较高,在103俜cm量级.     

Hemocompatibility of ZnO thin films prepared by filtered cathodic vacuum arc deposition

Zinc Oxide (ZnO) thin films were prepared by cathodic vacuum arc deposition (CVAD) and filtered cathodic vacuum arc deposition (FCVAD) technology with a mixture of O₂, Ar and N₂. XRD patterns indicated that ZnO thin films prepared by CVAD had a combined orientation of ZnO (002) and ZnO (101). The preferential orientation ZnO (002) could be obtained at an optimum deposition pressure. On the other hand, a perfectly oriented ZnO (002) thin film prepared by FCVAD was obtained in lower pressure, which was beneficial to enhance the crystallization. The wetting behavior showed that all the ZnO thin films prepared by FCVAD were hydrophobic with low surface energy, but the reference samples of the polyurethane (PU) and glass are hydrophilic. Platelet adhesion test indicated that fewer platelets adhered and aggregated on the ZnO thin films prepared by FCVAD. The mechanism of hemocompatibility of ZnO thin films has also been investigated. It is suggested that hydrophobic surface with lower polar component and adhesive work are the two factors responsible for the excellent hemocompatibility.     

Zinc oxide epitaxial thin film deposited over carbon on various substrate by pulsed laser deposition technique

Zinc Oxide (ZnO) is a promising candidate material for optical and electronic devices due to its direct wide band gap (3.37 eV) and high exciton binding energy (60 meV). For applications in various fields such as light emitting diode (LED) and laser diodes, growth of p-type ZnO is a prerequisite. ZnO is an intrinsically n-type semiconductor. In this paper we report on the synthesis of Zinc Oxide-Carbon (ZnO:C) thin films using pulsed laser deposition technique (PLD). The deposition parameters were optimized to obtain high quality epitaxial ZnO films over a carbon layer. The structural and optical properties were studied by glazing index X-ray diffraction (GIXRD), photoluminescence (PL), optical absorption (OA), and Raman spectroscopy. Rutherford backscattering spectroscopy (RBS), scanning electron microscopy with energy dispersive spectroscopy (SEMEDS) and atomic force microscopy (AFM) were employed to determine the composition and surface morphology of these thin films. The GIXRD pattern of the synthesized films exhibited hexagonal wurtzite crystal structure with a preferred (002) orientation. PL spectroscopy results showed that the emission intensity was maximum at -380 nm at a deposition temperature of 573 K. In the Raman spectra, the E2 phonon frequency around at 438 cm(-1) is a characteristic peak of the wurtzite lattice and could be seen in all samples. Furthermore, the optical direct band gap of ZnO films was found to be in the visible region. The growth of the epitaxial layer is discussed in the light of carbon atoms from the buffer layer. Our work demonstrates that the carbon is a novel dopant in the group of doped ZnO semiconductor materials. The introduction of carbon impurities enhanced the visible emission of red-green luminescence. It is concluded that the carbon impurities promote the zinc related native defect in ZnO.     

PZT/ZnO薄膜制备及其结构特性研究

利用固相反应制备的ZnO-Li_(2.2%)陶瓷靶和RF射频磁控溅射技术在Si(100)基片上制备了高度c轴择优取向的ZnO薄膜,XRD和电性能分析表明掺杂Li离子改善了ZnO靶材的结构和性能,同时研究了不同RF溅射温度对ZnO薄膜结构与取向的影响;然后采用sol-gel前驱单体薄膜制备方法,以ZnO为过渡层淀积PZT薄膜,探讨高度c轴(002)择优取向ZnO薄膜对PZT薄膜结构与性能的影响,实验发现在PZT/ZnO异质结构中,致密、均匀和高度c轴择优取向的ZnO可作为晶核,促进PZT钙钛矿结构转化、晶粒(110)择优取向生长,相应降低PZT薄膜的退火温度.     

Annealing effects on the structural and optical properties of growth ZnO thin films fabricated by pulsed laser deposition (PLD)

Annealed ZnO thin film at 300, 350, 400, 450 and 500 °C in air were deposited on glass substrate by using pulsed laser deposition. The effects of annealing temperature on the structural and optical properties of annealed ZnO thin films by grazing incident X-ray diffraction (GIXRD), transmittance spectra, and photoluminescence (PL) were investigated. The GIXRD reveal the presence of hexagonal wurtzite structure of ZnO with preferred orientation (002). The particle size is calculated using Debye–Scherrer equation and the average grain size were found to be in the range 5.22–10.61 ± 0.01 nm. The transmittance spectra demonstrate highly transparent nature of the films in visible region (>70 %). The calculation of optical band gap energy is found to be in the range 2.95–3.32 ± 0.01 eV. The PL spectra shows that the amorphous film gives a UV emission only and the annealed films produce UV, violet, blue and green emissions this indicates that the point defects increased as the amorphous film was annealed.     

Optical and structural properties of Mg doped ZnO thin films by chemical bath deposition method

The chemical bath deposition method has often been employed to successfully deposit pure and Mg doped ZnO thin films on a glass substrate. The impact of Mg creates a strained stress in ZnO films affecting its structural and optical properties. XRD patterns revealed that all thin films possess a polycrystalline hexagonal wurtzite structure and Mg doped ZnO thin films (002) plane peak position is shifted towards a lower angle due to Mg doping. From the SEM image, it is understood that the Mg doped ZnO thin films are uniformly coated and are seen as dense rods like pillers deposited over the film. The energy dispersive X-ray analysis confirmed the presence of Mg in doped ZnO thin films. The transmittance spectra exhibit that it is possible for Mg doping to enhance ZnO thin films. The optical energy gap of the films was assessed by applying Tauc’s law and it is observed to show an increasing tendency with an improvement in Mg doping concentrations. The optical constants such as reflectance, index of refraction, extinction coefficient and optical conductivity are determined by using transmission at normal incidence of light by using wavelength range of 200–800 nm. In PL spectra, the band edge emission shifted to the blue with increasing amount of Mg doping.     

Sn doping effects on properties of ZnO thin films deposited by RF magnetron sputtering using a powder target

In the present study, tin doped ZnO thin films (ZnO:Sn) at different contents (0–3 wt%) were deposited onto glass substrates by RF magnetron sputtering using a powder compacted target at room temperature. The effect of Sn concentration on the structural, optical and electrical properties of the ZnO:Sn thin films were investigated. The X-ray diffraction analysis shows that the pure ZnO thin film exhibits a strong intensity of the (002) peak indicating a preferential orientation along the c-axis. For Sn doped ZnO thin films, there is a change in the orientation from the (002) plane to the (101) one. The undoped ZnO thin films have transmittance 85% in the visible range and slightly increased for 0.5 wt% of Sn, while it get decreased with further increasing the Sn doping concentration. The optical band gap energy get increased with increasing the doping concentration. Moreover, the electrical conductivity and conduction mechanism are also studied by impedance spectroscopy in the frequency range of 1KHz–13 MHz at various temperatures (633–743 K). The AC conductivity in ZnO thin films increased with angular frequency. The frequency exponent S decreases with increasing temperature. Such behavior suggests that the correlated barrier hopping (CBH) model may be suitable to explain the conduction mechanism in ZnO thin films. The activation energy values calculated from angular frequency and DC conductivity are in good agreement confirming that the conduction mechanism is thermally activated by hopping between localized states.     

The effects of Al doping on the optical constants of ZnO thin films prepared by spray pyrolysis method

Aluminum doped ZnO (AZO) thin films doped with different aluminum concentrations have been prepared by spray pyrolysis method onto glass substrates. The optical and structural properties of the films have been investigated by X-ray diffraction and optical characterization methods. The X-ray diffraction spectra showed that all of the thin films are of polycrystalline nature. The thin films have (002) as the preferred orientation. The optical band gaps of the films were calculated. The E _g values decrease with increasing Al doping concentration. The refractive index, the extinction coefficient, and the real and imaginary components of dielectric constant are calculated. The obtained results show that all optical parameters keep constant in the visible region, whereas in the ultraviolet region, doping concentration strongly affects the optical parameters of AZO thin films. Optical constants tend to decrease with increasing doping concentration.     

Optical and photoconductivity properties of ZnO thin films grown by pulsed filtered cathodic vacuum arc deposition

High quality transparent conductive ZnO thin films with various thicknesses were prepared by pulsed filtered cathodic vacuum arc deposition (PFCVAD) system on glass substrates at room temperature.The high quality of the ZnO thin films was verified by X-ray diffraction and optical measurements. XRD analysis revealed that all films had a strong ZnO (200) peak, indicating c-axis orientation. The ZnO thin films are very transparent (92%) in the near vis regions. For the ZnO thin films deposited at a pressure of 0.086 Pa (6.5 × 10⁻⁴ Torr) optical energy band gap decreased from 3.21 eV to 3.19 eV with increasing the thickness. Urbach tail energy also decreased as the film thickness increased.Spectral dependence of the photoconductivity was obtained from measurements of the samples deposited at various thicknesses. Photoconductivities were observed at energies lower than energy gap which indicates the existence of energy states in the forbidden gap. Photoconductivities of ZnO thin films increase with energy of the light and reach its maximum value at around 2.32 eV. Above this value surface recombination becomes dominant process and reduces the photocurrent. The photoconductivity increases with decreasing the film thickness.     

Preferential growth of ZnO thin films by the atomic layer deposition technique

Preferred orientation of ZnO thin films deposited by the atomic layer deposition (ALD) technique could be manipulated by deposition temperature. In this work, diethyl zinc (DEZn) and deionized water (H(2)O) were used as a zinc source and oxygen source, respectively. The results demonstrated that (10.0) dominant ZnO thin films were grown in the temperature range of 155-220?°C. The c-axis crystal growth of these films was greatly suppressed. Adhesion of anions (such as fragments of an ethyl group) on the (00.2) polar surface of the ZnO thin film was believed to be responsible for this suppression. In contrast, (00.2) dominant ZnO thin films were obtained between 220 and 300?°C. The preferred orientations of (10.0) and (00.2) of the ZnO thin films were examined by XRD texture analysis. The texture analysis results agreed well with the alignments of ZnO nanowires (NWs) which were grown from these ZnO thin films. In this case, the nanosized crystals of ZnO thin films acted as seeds for the growth of ZnO nanowires (NWs) by chemical vapor deposition (CVD) process. The highly (00.2) textured ZnO thin films deposited at high temperatures, such as 280?°C, contained polycrystals with the c?axis perpendicular to the substrate surface and provided a good template for the growth of vertically aligned ZnO NWs.