共查询到18条相似文献,搜索用时 125 毫秒
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“长波长软X射线多层膜的设计与制备”这篇论文介绍了用离子束溅射法制备长波长软X射线多层膜的研究工作,并报道了一种新的材料组合C/Si用于28.4nm(43. 65eV)和30.4nm(40.78 eV)波段的多层膜反射镜,并且用离子束溅射装置制备了正入 射条件下的C/Si多层膜反射镜.同时,用软X射线反射计测量了样品的反射率,从实验结果看出,制备的多层膜样品在28.4nm和30.4nm波段附近的实测正入射反射率分别达到11.4%和14.3%,实验指标达到了国内领先水平,并接近了国际水平. 相似文献
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为了提升Al/Zr多层膜的热稳定性,采用直流磁控溅射方法制备了18个带有不同厚度Si间隔层的Al(1 wt.%Si)/Zr多层膜,并将这些样品分别进行了不同温度(100~500 ℃)的真空退火,退火时间为1 h.利用X射线掠入射反射(GIXR)和X射线衍射(XRD)的方法来研究Si间隔层对Al/Zr多层膜热稳定性的作用.GIXR测量结果表明:随着Si间隔层厚度的增大,Al膜层的粗糙度减小,而Zr膜层的粗糙度增大;XRD测量结果表明:Al和Zr膜层粗糙度的变化是由于退火后膜层中晶粒尺寸不同造成的.相比于没有Si间隔层的Al/Zr多层膜,引入厚度为0.6 nm的Si间隔层可以有效提升Al/Zr多层膜的热稳定性. 相似文献
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软X射线多层膜反射镜界面粗糙度的一种估算方法 总被引:4,自引:1,他引:3
介绍了描述单个非理想粗糙界面散射的D .G .Stearns法 ,它适用于软X射线短波段区域。将这种方法应用到多层膜结构 ,并采用它的数学模型来描述软X射线短波段区域 (1~ 10nm)多层膜界面粗糙度。在此理论下 ,对波长为 4.77nm的Co/C多层膜反射镜界面粗糙度进行了分析 ,估算出该多层镜界面间均方根粗糙度为 0 7nm。 相似文献
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介绍了D.G.Sterns的散射方法,用它来描述单个非理想粗糙界面的散射,它适用于软X射线短波段区域.将这种方法应用到多层膜结构,并采用D.G.Sterns方法的数学模型来描述软X射线短波段区域(1~10 nm)多层膜界面粗糙度.在这个理论的框架下,对我们所研制的波长为4.77 nm的Co/C多层膜反射镜界面粗糙度进行分析,估算出该多层镜界面间均方根粗糙度为0.7 nm.粗糙度估算结果与小角X射线衍射的测定结果相一致.(PE13) 相似文献
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以Si C超细粉为原料,采用热等离子体PVD(TPPVD)法快速制备了Si C膜,最大沉积速度达到1 38nm /s.为了降低Si C膜的电阻率,提高其热电性能,采用向等离子体中通入N2 的方法对Si C膜进行了掺杂.用扫描电子显微镜、X射线衍射和X射线光电子谱对薄膜的形貌和结构进行了观察和分析.实验测定了Si C膜掺杂前后的热电性能并与Si C烧结体的结果进行比较.实验结果表明:向等离子体中导入N2 是对Si C膜进行掺杂的有效方法,但同时也显著影响Si C膜的形貌、成分和沉积速度.未进行氮掺杂和经过氮掺杂后的Si C薄膜的(S2 /ρ)值在973K时分别达到1 6 0 μW/(m·K2 )和1 0 0 0 相似文献
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《微纳电子技术》2019,(4):314-318
X射线波带片是X射线显微成像系统中用于聚焦及成像的核心元件,提高波带片性能参数,更利于X射线显微成像技术的广泛应用。选择可精确控制厚度的原子层沉积(ALD)法结合聚焦离子束(FIB)切割法制备出大高宽比X射线波带片结构,即用原子层沉积法在光滑的钨丝表面交替沉积Al2O3/HfO2多层膜,其总层数为360,最外层膜宽度为10 nm。聚焦离子束的加速电压设定为30 kV,先利用束流为1 000 pA的离子束流将Al2O3/HfO2多层膜切割成设计厚度的薄片,再利用束流为350 pA的离子束流对切割的截面进行抛光,最后得到厚度为50μm、最外层膜宽度为10 nm的大高宽比X射线波带片结构。 相似文献
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Jingtao ZHU Da XU Shumin ZHANG Wenjuan WU Zhong ZHANG Fengli WANG Bei WANG Cunxia LI Yao XU Zhanshan WANG Lingyan CHEN Hongjun ZHOU Tonglin HUO 《中国光电子学前沿》2008,1(3)
In applications of solar physics, extreme ultraviolet imaging of solar corona by selecting the HeⅡ (λ = 30.4 nm) emission line requires high reflectivity multilayer mirrors. Some material combinations were studied to design the mirrors working at a wavelength of 30.4 nm, including SiC/Mg, B4C/Mg, C/Mg, C/Al, Mo/ Si, B4C/Si, SiC/Si, C/Si, and Sc/Si. Based on optimization of the largest reflectivity and the narrowest width for the multilayer mirror, a SiC/Mg material combination was selected as the mirror and fabricated by a magnetron sputtering system. The layer thicknesses of the SiC/Mg multilayer were measured by an X-ray diffractometer. Reflectivities were then measured on beamline U27 at the National Synchrotron Radiation Laboratory (NSRL) in Hefei, China. At a wavelength of 30.4 nm, the measured reflectivity is as high as 38.0%. Furthermore, a series of annealing experiments were performed to investigate the thermal stability of the SiC/Mg multilayer. 相似文献
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1 Introduction The EUV and X- ray optics has been regarded as one of the important fields in modern optics, having many promising applications in next generation lithography system, astronomical telescope, spectroscopy, plasma diagnostics and X- ray laser. However, in the EUV and X- ray regions, the nature of the complex optical con- stants of all materials makes the realization of the ideal optical elements like ones working in visible region im-possible. The development of EUV and X- ra… 相似文献
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Hailong Zhou Diagne M. Makarona E. Nurmikko A.V. Han J. Waldrip K.E. Figiel J.J. 《Electronics letters》2000,36(21):1777-1779
Optically pumped near ultraviolet vertical cavity laser operation (VCSEL) has been obtained under quasi-continuous wave conditions at room temperature near 383 nm from shallow InGaN/GaN multiple quantum wells (MQWs). Low loss optical resonators were fabricated by using in-situ grown (Al,Ga)N distributed Bragg reflectors that featured strain engineering design for high optical morphology, in combination with low-loss dielectric multilayer mirrors 相似文献
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The feasibility of using Si/C60 multilayer films as one-dimensional (1D) photonic band gap crystals was investigated by theoretical calculations using a transfer matrix method (TMM). The response has been studied both within and out of the periodic plane of Si/C60 multilayers. It is found that Si/C60 multilayer films show incomplete photonic band gap (PBG) behavior in the visible frequency range. The fabricated Si/C60 multilayers with two pairs of 70 nm C60 and 30 nm Si layers exhibit a PBG at central wavelength of about 600 nm, and the highest re?ectivity can reach 99%. As a consequence, this photonic crystal may be important for fabricating a photonic crystal with an incomplete band gap in the visible frequency range. 相似文献
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Jaehwa Kim Dong-Soo Yoon Joon Seop Kwak Hong Koo Baik Sung-Man Lee 《Journal of Electronic Materials》1999,28(1):6-12
The property of Ta as a diffusion barrier is studied for Al/Ta/Si structure. Interfacial reactions of Al(180 nm)/Ta(130 nm)/Si
and Al(180 nm)/Ta(24 nm)/Si, in the temperature range 450∼600°C for 30 min, have been investigated. In Al/Ta(130 nm)/Si system,
which is Ta-excess case, Al3Ta is formed at 500°C. At 575°C, TaSi2 is formed at the interface of Ta Si. At 600°C, after Al3Ta decomposes at the interface of Al3Ta TaSi2, free Ta is bonded to TaSi2 with the supply of Si from Si substrate and free Al diffuses through TaSi2, resulting in Al spiking. In Al/Ta(24 nm)/Si system, which is Al-excess case, Al3Ta is formed at 500°C. At the same temperature of 500°C, after Al3Ta decomposes at the interface of Al3Ta/Si, free Ta reacts with Si to form TaSi2 and free Al diffuses to Si substrate, resulting in Al spiking. The results of interfacial reactions can be understood from
the calculated Al-Si-Ta ternary phase diagram. It can be concluded that the reaction at Al/Ta should be suppressed to improve
the performance of Ta diffusion barrier in Al/Si system. 相似文献
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Temperature dependence of the properties of DBR mirrors used insurface normal optoelectronic devices
The variation in the center wavelength of distributed Bragg reflectors used in optoelectronic devices, such as surface emitting lasers and Fabry-Perot modulators, is measured as the temperature of the mirrors changes over the range 25°C to 105°C. An analytic expression for the shift in center wavelength with temperature is presented. The mirrors measured are made of InP/InGaAsP (λgap=1.15 μm), GaAs/AlAs, and Si/SiNx. The linear shifts in center wavelength are 0.110±0.003 nm/°C, 0.087±0.003 nm/°C, and 0.067±0.007 nm/°C for the InP/InGaAsP, GaAs/AlAs, and Si/SiN mirrors, respectively. Based on these data, the change in penetration depth with temperature is calculated 相似文献
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高反射率193 nm Al2O3/MgF2反射膜的实验研究 总被引:1,自引:1,他引:1
用电子束热蒸发方法在熔融石英基底上沉积了Al2O3和MgF2两种材料的单层膜,研究了两种材料的光学特性,采用光度法计算并给出了薄膜材料在180~230nm的折射率n/和消光系数k的色散曲线。以两种材料作为高低折射率材料组合,采用1/4波长规整膜系设计并镀制了193nm的高反射膜,反射膜在退火后的反射率在193nm达到96%以上。结果表明在一定工艺条件下Al2O3和MgF2两种材料能够在193nm获得较好的光学性能,适用于高反射膜的制备。 相似文献