New high fill-factor dual-curvature microlens array fabrication using UV proximity printing

A new high fill-factor dual-curvature microlens array fabrication method using lithographic proximity printing process is reported. The proposed technology utilizes UV proximity printing by controlling a printing gap between the mask and substrate. The designed microlens array pattern with high density can produce a high fill-factor dual-curvature microlens array in photoresist. Because the UV light diffraction deflects away from the aperture edges and produces exposure in photoresist material outside the aperture edges, this method can precisely control the geometric profile of a high fill factor dual-curvature microlens array. The experimental results showed that the dual-curvature micro-lens array can be formed automatically in photoresist when the printing gap ranged from 360 to 600 μm. The gapless dual-curvature microlens array will be used to enhance the luminance uniformity for light-emitting diodes (LEDs).     

New high fill-factor triangular microlens array fabrication method using UV proximity printing

A simple and effective method for fabricating a high fill-factor triangular microlens array using the proximity printing in lithography process is reported. The technology utilizes the UV proximity printing by controlling the printing gap between the mask and substrate. The designed approximate triangle microlens array pattern can be fabricated in photoresist. This is because to the UV light diffraction deflects away from the aperture edges and produces a certain exposure in photoresist material outside the aperture edges. This method can precisely control the geometric profile of a high fill-factor triangular microlens array. The experimental results showed that the triangular photoresist microlens array could be formed automatically when the printing gap ranged from 240 to 840 μm. The gapless triangular microlens array will be used to increase the luminance for the backlight module of liquid crystal displays. An erratum to this article can be found at     

Fabrication of microlens array with graduated sags using UV proximity printing method

A graduated microlens array is presented in this paper. The proposed device has the same aperture microlens with a gradually increasing sag in the substrate. The design produces gradual decrease in the focal length and intensity when the light passes through the graduated microlens array. This paper presents a new graduated microlens array fabrication method that uses a variable printing gap in the UV lithography process. This method can precisely control the geometric profile of each microlens array without using the thermal reflow process. The angles between the mask and photoresist were placed at 5°, 8°, 10°, 15°, and 20° using a fixture designed in this study. The mask patterns were ellipses with an isosceles triangle arrangement to compensate for the partial geometry.     

New production method of convex microlens arrays for integrated fluorescence microfluidic detection systems

A new method for producing microlens array with large sag heights is proposed for integrated fluorescence microfluidic detection systems. Three steps in this production technique are included for concave microlens array formations to be integrated into microfluidic systems. First, using the photoresist SU-8 to produce hexagonal microchannel array is required. Second, UV curable glue is injected into the hexagonal microchannel array. Third, the surplus glue is rotated by a spinner at high velocity and exposed to a UV lamp to harden the glue. The micro concave lens molds are then finished and ready to produce convex microlens in poly methsiloxane (PDMS) material. This convex microlens in PDMS can be used for detecting fluorescence in microfluidic channels because a convex microlens plays the light convergence role for optical fiber detection.     

New production method of convex microlens arrays for integrated fluorescence microfluidic detection systems

A new method for producing microlens array with large sag heights is proposed for integrated fluorescence microfluidic detection systems. Three steps in this production technique are included for concave microlens array formations to be integrated into microfluidic systems. First, using the photoresist SU-8 to produce hexagonal microchannel array is required. Second, UV curable glue is injected into the hexagonal microchannel array. Third, the surplus glue is rotated by a spinner at high velocity and exposed to a UV lamp to harden the glue. The micro concave lens molds are then finished and ready to produce convex microlens in poly methsiloxane (PDMS) material. This convex microlens in PDMS can be used for detecting fluorescence in microfluidic channels because a convex microlens plays the light convergence role for optical fiber detection.

     

Novel direct‐view LED backlight unit with an aspheric microlens array and a rough‐texture sheet

Abstract— This study proposes a novel direct‐view light‐emitting‐diode (LED) backlight unit with a high‐fill‐factor aspheric microlens array and a rough‐texture sheet. An aspheric microlens array and a rough‐texture sheet made from polysiloxine were used as the grating element and optical diffuser, respectively, which increases light‐extraction efficiency and improves luminance uniformity. The specific aspheric microlens‐array mold was fabricated by using a heating encapsulated air process based on a glass wafer. This microlens array has the features of high fill factor and square‐foot boundary with a continuous surface‐relief profile. This unique out‐of‐plane surface profile creates a square light pattern with uniform luminance, and thus composes a uniform large‐sized light pattern exactly in accordance with the layout of the LED array. The rough‐texture sheet, which can scatter light uniformly, was formed by fine‐grit‐sandpaper molding. Experimental results show that by using an aspheric microlens array and rough‐texture sheet reported here as the backlight diffusing components is highly effective in improving light uniformity at a wide viewing angle. An increase in illuminance by more than 10% was achieved in comparison with commercial backlight modules. Low cost in fabricating the aspheric microlens array and rough‐texture sheet is anticipated due to the simplicity of the process.     

Microlens array fabrication by backside exposure using Fraunhofer diffraction

In UV-lithography, a gap between photoresist and UV-mask results in diffraction. Fresnel or near-field diffraction in thick positive and negative resists for microstructures resulting from a small gap in contact or proximity printing has been previously investigated. In this work, Fraunhofer or far-field diffraction is utilized to form microlens arrays. Backside-exposure of SU-8 resist through Pyrex 7740 transparent glass substrate is conducted. The exposure intensity profile on the interface between Pyrex 7740 glass wafer and negative SU-8 resist is modeled taking into account Fraunhofer diffraction for a circular aperture opening. The effects of varying applied UV-doses and aperture diameters on the formation of microlens arrays are described. The simulated surface profile shows a good agreement with the experimentally observed surface profiles of the microstructures. The paper demonstrates the ease with which a microlens array can be fabricated by backside exposure technique using Fraunhofer diffraction.     

Fabrication of a micro-tip array mold using a micro-lens mask with proximity printing

In this study, a mold for a micro-tip array is fabricated using a microlens array mask with proximity exposure. The micro-tip array uses a microlens array mask with geometrical optics. Light passing through a microlens is focused at the focal points. There is microlens on the mask and the pattern that results from the light passing through the mask is directly projected onto the photoresist surface. A concave profile is developed using a positive photoresist and the remaining photoresist microstructures are formed after the development process. By changing the distance between the mask and the photoresist and the radius of curvature of the microlens, various tip shapes can be fabricated. The exposure gap is calculated using the microlens array mask and the geometry of the mold of micro-tip array is established using the irradiance absorption maps for the different levels. These methods respectively use the model of the positive photoresist and optical software. When electroforming a metallic micro-tip copy of the patterned photoresist, masters are created. The metal micro-tip array is used membrane probe card.     

A novel fabrication method of micro-needle mold by using the micro-lens mask through contact printing

This study presents a novel and precision process for fabricating a microneedle mold. The process includes a microlens array mask with contact printing in ultraviolet lithography. This method can precisely control the geometric profile of a microneedle array without the use of an etching process. The micro tapered cone microneedle mold utilizes the microlens array mask with geometrical optics. The light passes through the microlens and a hole in a Cr film of a mask, and then radiates onto the photoresist film. The light transmitted through the microlens has an aligned focal point on the photoresist film. An optical system is set up to characterize the optical performance of the machined microneedle, and then compared with theoretical data. The results show that the length of the microneedle from the experiment is close to the derived results. Moreover, the length of the microneedle is significantly influenced by the height and diameter of the microlens. Therefore, this method could also simplify the process and reduce the time needed for the fabrication of the microneedle. The micro cone microneedle has have great potential in the area of the drug delivery applications.     

The implementation and performance evaluation of a silicon-based LED packaging module with lens configuration

This study develops a transfer molding with flexible master for a silicon-based light emitting diode packaging with an aspherical lens and a microlens array using microelectromechanical systems technology. By transferring the pattern from wafer to wafer, the precise alignment of the lens configuration and the reflector of the silicon substrate can be achieved; batch processing can be used to reduce the costs. The size of the packaging element can be further reduced to allow more applications. For evaluating the packaging performance, the transfer of the pattern of various lens profiles is accomplished successfully using silicone gel and electroplating nickel as the lens molds, and experiments to determine the mechanical reliability are conducted. The experimental results show that the lens profiles of the silicone gel and nickel masters are exactly transferred onto the surfaces of epoxy and silicone gel encapsulations, respectively, without any damage to the material surface. The brightness of the packaging elements with a single aspherical lens profile and high fill factor microlens array are increased by 26 and 16 %, respectively, as compared with optical encapsulation with a smooth curved surface. The light uniformity is greatly improved for a 100 % fill factor microlens array. The proposed packaging solution satisfies the requirements of pattern transfer in a wafer level and improves lighting performance.     

Ferrofluid-molding method for polymeric microlens arrays fabrication

This study proposes a method named as ferrofluid-molding method for polymer microlens array fabrication. In this method, the master of the mother mold for microlens molding is an array of ferrofluid droplets. We generated droplet arrays by inducing the droplet’s magnetic hydrodynamic instability under different magnetic fields, and used the field-dependent droplet dimensions to fabricate numerous mold cavities. By this we could fabricate arrays of microlens with different bottom area, height, radius of curvature, and focal length. From our analysis, all the fabricated microlens arrays possessed good uniformity, and the largest numerical aperture of our microlens array was found as 0.54. In addition, we also designed a light uniformity experiment to demonstrate a potential application of our microlens arrays.     

Viewing angle enhanced integral imaging display based on double‐micro‐lens array

A viewing angle enhanced integral imaging display, which consists of a double microlens array, and a display panel is proposed. The double microlens array includes a convex microlens array and a concave microlens array. The display panel is used to display original elemental image array. The convex microlens array, located near the display panel, is used to provide a virtual elemental image array for the concave microlens array. The concave microlens array, located far away from the display panel, is used to display integral images with the virtual elemental image array. Compared with the original elemental image, the pitch for each virtual elemental image is magnified by the corresponding convex microlens. As a result, the viewing angle is expanded. Simulations based on ray‐tracing are performed and the results agree well with the theory.     

A roller embossing process for rapid fabrication of microlens arrays on glass substrates

This paper reports an innovative technique for rapid fabrication of polymeric microlens arrays based on UV roller embossing process. In this method, a thin flat mold is fabricated by electroforming of nickel against a microlens master. The thin Ni mold with microlens cavities is then wrapped onto cylinder to form the roller. During rolling operation, the roller pressing and dragging the UV-curable photopolymer layer on the glass substrate through the rolling zone, the microlens array is formed. At the same time, the microlens array is cured by the UV light radiation while traveling through the rolling zone. The technique can be developed to an effective roll-to-roll process at room temperature and with low pressure. In this study, a roller embossing facility with UV exposure capacity has been designed, constructed and tested. Under the proper processing conditions, the 100×100 arrays of polymeric microlens, with a diameter of 100 μm, a pitch of 200 μm and a sag height of 21 μm can be successfully fabricated.     

Polydimethylsiloxane Microlens Arrays Fabricated Through Liquid-Phase Photopolymerization and Molding

We report on polydimethylsiloxane (PDMS) microlens arrays fabricated through liquid-phase photopolymerization and molding. The gist of this fabrication process is to form liquid menisci of variable radii of curvature at an array of apertures through pneumatic control, followed by photopolymerization under ultraviolet radiance. The resultant polymerized structures are then transferred to PDMS utilizing two molding steps. By adjusting the pneumatic pressure during the process, a single aperture array can be used to fabricate PDMS microlens arrays with variant focal lengths. The liquid menisci are formed by liquid-air interfaces that are pinned at the top edges of the apertures along hydrophobic-hydrophilic boundaries generated through surface chemical treatments. The microlens arrays are optically characterized. Variant focal lengths from 2.35 to 5.54 mm and f-numbers from 1.27 to 5.88, dependent on the diameter of apertures and the applied pressure to form the liquid menisci, are achieved with this relatively simple process and match well with the physical model. Owing to the formation from the liquid-air interfaces, the surface roughness of microlenses is measured to be around 25 nm.     

Self assembly polymer microlens array for integral imaging

We proposed a method to fabricate large area uniform microlens array with a wide range of focal length for integral imaging. A thin hydrophilic layer with matrix array of circular holes was first fabricated on flat substrate by photolithography. A hydrophobic layer was then imprinted on top of the hydrophilic layer. By filling a very low viscosity prepolymer material into each circular hole via drop-on-demand printing, refractive lens with spherical shape was self assembled by force of surface tension. An integral imaging system using the proposed microlens array was demonstrated by closely placing object to the microlens array. The good image quality indicates that the proposed polymer microlens array has potential applications in three-dimensional displays.     

Full‐parallax autostereoscopic display with scalable lateral resolution using overlaid multiple projection

Abstract— A method to increase the viewing resolution of an autostereoscopic display without increasing the density of microlenses is proposed. Multiple projectors are used for the projection images to be focused and overlaid on a common plane in the air behind the microlens array. The multiple overlaid projection images yield multiple light spots inside the region of each elemental lenslet of the microlens array. This feature provides scalable high‐resolution images by increasing the number of projectors. Based on the proposed method, a prototype display that includes 15 projectors was designed and built. 3‐D images were successfully reproduced on the prototype display with full parallax and a wide viewing angle of 70°.     

Design and fabrication of a freeform microlens array for uniform beam shaping

Freeform optics has become a practical solution to solving number of problems in modern optical design. In this paper, we proposed a fabrication method using the combination of ultraprecision diamond machining and microinjection molding to achieve high volume and low cost freeform microlens manufacturing. The freeform microlens array discussed in this research is capable of redistributing a collimated light into a pre determined, in this case, a uniform pattern. The optical design, slow tool servo diamond machining, microinjection molding process and optical measurement were discussed. The simple optical design provided a platform for freeform microlens calculation. Slow tool servo diamond broaching was selected to fabricate the mold insert. After the mold insert was fabricated, microinjection molding machine was utilized to replicate the optical geometry into plastic substrates. The freeform microlens array that was fabricated in this research could achieve light re-distribution at the target with approximately 80% uniformity. The research conducted in this paper can be readily implemented in optical industry.     

基于POVRAY的三维全景图像的计算机生成方法

三维全景图像技术（Integral Imaging,简称II）是一种采用微透镜阵列进行记录和显示的三维图像技术。该技术目前正成为最有希望实现下一代三维电视的方法,吸引着国际上三维技术领域的重多关注。本文提出了一种新的基于三维图形软件POVRAY的快速生成II图像的相机模型构造方法,详细阐述了该相机模型的实现算法,并采用该相机对虚拟的三维场景进行记录。实验结果表明,使用该相机模型能在保证图像质量的情况下,最大程度满足实时性要求。     

Integration of polystyrene microlenses with both convex and concave profiles in a polymer-based microfluidic system

This paper reports a new technique of fabricating polystyrene microlenses with both convex and concave profiles that are integrated in polymer-based microfluidic system. The polystyrene microlenses, or microlens array, are fabricated using the free-surface thermal compression molding method. The laser fabricated poly(methyl methacrylate) (PMMA) sheet is used as the mold for the thermal compression molding process. With different surface treatment methods of the PMMA mold, microlenses with either convex or concave profiles could be achieved during the thermal molding process. By integrating the microlenses in the microfluidic systems, observing the flow inside the microchannels is easier. This new technique is rapid, low cost, and it does not require cleanroom facilities. Microlenses with both convex and concave profiles can be easily fabricated and integrated in microfluidic system with this technique.     

Modeling and characterization of surface generation in fast tool servo machining of microlens arrays

A microlens array is composed of a series of microlens distributed in a regular pattern and has been used in a wide range of photonic products. Fast Tool Servo (FTS) machining is an enabling and efficient technology for fabricating high quality microlens arrays with submicrometer form accuracy and nanometric surface finish. Although there have been a number of studies on modeling and characterization of surface generation in Single Point Diamond Turning (SPTD), there is relatively little research on the modeling and characterization of surface generation in FTS machining of microlens arrays, which is radically different from SPTD and has additional process parameters. This paper therefore establishes a theoretical model for the prediction of surface generation in FTS machining of microlens arrays based on the cutting mechanism of FTS, cutting tool geometry, machining parameters, and the workpiece surface contour. A surface matching based method has been developed to characterize the surface quality of the microlens array as a whole instead of a single lens evaluation. A series of cutting experiments have been conducted, the actual results of which were found to largely agree with the predicted results. The successful development of the deterministic models and methods not only make the surface generation in FTS machining of microlens array more predictable, but also allow a better evaluation of the surface quality of the machined microlens array. It also helps to minimize or eliminate the need for conducting trial-and-error cutting experiments to optimize the machining process.