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1.
High-fidelity haptic synthesis of contact with deformable bodies   总被引:2,自引:0,他引:2  
A method for synthesizing the haptic response of nonlinear deformable objects from data obtained by offline simulation helps create surgical simulators with high-fidelity haptic feedback. Haptic displays provide users with artificially created tactile sensations. One important use of these displays is to recreate the experience caused by contact between a tool and an object. This capability can be useful in several applications, such as surgical simulators, because users experience an enhanced sense of realism when a haptic simulation is combined with a graphic simulation. Haptic displays require two essential subsystems: a haptic device, which typically has a handle connected to sensors and actuators, and a computational system that interfaces with the device.  相似文献   

2.
A new type of sensor to directly detect angular acceleration is essential for inertial and control technology. The above interest motivates us to propose a novel micro electromechanical system (MEMS) pendulum angular accelerometer with electrostatic actuator feedback. It adopts a proof pendulum with optimized moment of inertia, suspended to dual anchors by a pair of torsion spring beams, as sensing component. A pair of electrodes are designed as differential capacitors to detect the torsional angular of pendulum, then measure input angular acceleration in sensing axis. Another pair of electrodes are designed as electrostatic actuators for feedback control loop. The structure and operating principle of the MEMS angular accelerometer are introduced. Then, the structure kinetics analysis and signal detecting scheme based on differential capacitors are provided in detail, and the sensitivity and resolution of sensor are derived. Compared with the other MEMS angular accelerometers, the proof pendulum with optimized moment of inertia improves sensitivity and resolution of sensor. The electrostatic actuators feedback loop optimizes the dynamic capability and nonlinearity characteristic. The sensor is fabricated by MEMS fabrication technology. The ANSYS simulation and test results prove the validity of the theoretical analyses. The MEMS angular accelerometer can be used in industrial robots and aircraft by further implementing the signal processing electrocircuit.  相似文献   

3.
The monolithic integration of bulk-Si MEMS sensors and actuators using the Au–Au bonding technology is presented in this work. With this technology, the substrate isolation and electrical interconnection between the CMOS circuits and bulk-Si CMOS MEMS sensors are achieved perfectly. In order to demonstrate this technology, a pressure sensor and an electrothermal actuator have been monolithically designed and fabricated. In addition, by sputtering aluminium on the bulk silicon electrothermal actuator, the electrothermal actuator is modified and the sensitivity of the actuator is obviously improved. The measurement results show that the sensitivity of the pressure sensor is 0.29fF/hPa. And the sensitivities of the modified and non-modified electrothermal actuators are 20.23 μm/V and 3.34 μm/V, respectively. Compared with the non-modified electrothermal actuators, the sensitivity of the modified electrothermal actuators is improved by 6 times.  相似文献   

4.
This paper presents a handheld surgical tool adapting a tactile feedback system. The tool consists of a 3-degree-of-freedom (DOF) force sensor and three tactile displays. The sensor is easily embedded in the tool by adopting the capacitive transduction principle. The sensor measures the direction and magnitude of the 3-DOF force applied to the tool tip. The fingertip grasping the tool is stimulated by the tactile display to transmit the contact force information measured by the sensor. The tactile display is actuated by employing a soft actuator technology based on a dielectric elastomer actuator such as a type of electroactive polymer actuator. In this work, a prototype of the tool is designed and fabricated. Its performance is experimentally validated.  相似文献   

5.
A thick layer selective polysilicon growth technique has been developed for micro-electro-mechanical systems (MEMS) fabrication. It allows fast MEMS fabrication without using silicon on insulator wafers or deep ICPRIE etching. The fabrication technique is based on two main steps: a first seed layer of polysilicon is deposited and patterned; the second step consists in the selective growth of this layer in an epitaxial reactor. The first part of this work is devoted to the optimisation of growth parameters. Afterwards, this technique is applied for fabrication of different kinds of actuators, involving films several microns thick with good mechanical properties such as a low mechanical stress and a low roughness of the polysilicon film surface. Furthermore, thermal actuator prototypes were fabricated by using this technique;showing good mechanical properties and high reliability.  相似文献   

6.
采用厚度为2μm的Au制作成共平面波导(CPW)、聚酰亚胺作为牺牲层、PECVD法淀积Si3N4薄膜作为悬臂梁,制作成悬臂梁接触式RF MEMS开关。着重对开关的关键工艺-CPV的Au剥离工艺和悬臂梁制作工艺进行研究,讨论了工艺中存在的问题及其解决方法。通过实验获得较佳的工艺参数,并制作出驱动电压为12-20V的悬臂梁接触式RF MEMS开关。  相似文献   

7.
De Sagazan  O.  Denoual  M.  Guil  P.  Gaudin  D.  Bonnaud  O. 《Microsystem Technologies》2006,12(10):953-958

A thick layer selective polysilicon growth technique has been developed for micro-electro-mechanical systems (MEMS) fabrication. It allows fast MEMS fabrication without using silicon on insulator wafers or deep ICPRIE etching. The fabrication technique is based on two main steps: a first seed layer of polysilicon is deposited and patterned; the second step consists in the selective growth of this layer in an epitaxial reactor. The first part of this work is devoted to the optimisation of growth parameters. Afterwards, this technique is applied for fabrication of different kinds of actuators, involving films several microns thick with good mechanical properties such as a low mechanical stress and a low roughness of the polysilicon film surface. Furthermore, thermal actuator prototypes were fabricated by using this technique;showing good mechanical properties and high reliability.

  相似文献   

8.
目的 触摸触觉设备感知物体时,需要实现视觉-力触觉同步反馈,其中图像-力触觉反馈难点在于再现更真实的纹理触感的触觉渲染过程。本文提出了一种基于图像局部纹理特征的静电力触觉渲染模型,实现了更加清晰、触感真实的图像纹理的静电力触觉反馈。方法 首先,采用局部傅里叶变换方法强化局部纹理特征,提取傅里叶变换系数分离出表征形状和局部纹理、边缘的频域分量。其次,对局部纹理特征进行力触觉渲染,建立局部纹理特征与驱动信号的映射模型,采用比例模型将局部纹理特征值转化为同等级的静电力表达。最后,根据静电力与驱动信号的心理学模型,由局部纹理特征控制不同驱动信号的输出产生静电力触觉。结果 进行纹理触觉对比感知实验验证算法有效性,62.5%的实验参与者偏爱基于图像局部纹理的触觉渲染算法反馈的纹理触感,本文算法可以模拟多种图像的纹理、边缘的触感。结论 算法在频域分离图像局部纹理、边缘和形状特征,建立纹理-力触觉渲染模型,针对大多数图片可以有效地增强纹理触感,提升触觉再现交互技术的沉浸感。  相似文献   

9.
Microscale materials testing using MEMS actuators   总被引:4,自引:0,他引:4  
Small size scale and high resolutions in force and displacement measurements make MEMS actuators appropriate for micromechanical testing. In this paper, for the first time, we present methodologies for uniaxial tensile and cantilever bending testing of both micrometer- and submicrometer-scale freestanding specimens using MEMS actuators. We also introduce dry fabrication processes for the specimens. The methodologies allow freestanding single or multilayered thin-film specimens to be fabricated separately from the MEMS actuators. For the uniaxial tension test, tensile forces are applied by lateral comb drive actuators capable of generating a total load of 383 μN at 40 V with resolutions on the order of 3 nN. A similar actuator is used in the bending test, with load resolution of 58 nN and spring constant of 0.78 N/m. The tensile testing methodology is demonstrated with the testing of a 110-nm-thick freestanding aluminum specimen. The cantilever bending experiment is performed on a 100-nm-thick aluminum specimen. The experimental setups can be mounted in a SEM (and also in a TEM after modifications for tensile testing) for in situ observation of materials behavior under different environmental conditions. Remarkable strengthening is observed in all the specimens tested compared to their bulk counterparts in both tensile and bending experiments. Experimental results highlight the potential of MEMS actuators as a new tool for materials research  相似文献   

10.
Fabricating electrostatic micro actuator, such as comb-drive actuator, is one of the demanding areas of the MEMS technology because of the promising applications in modern engineering, such as, micro-switches, attenuators, filters, micro-lenses, optical waveguide couplers, modulation, interferometer, dynamic focus mirror, and chopper. For the fabrication, most of the cases silicon monocrystalline wafers are used through complex process. To etch the silicon substrates, researchers often use deep reactive-ion etching or anisotropic wet etching procedure which are time consuming and unsuitable for batch fabrication process. Again, resent research shows that comb-drive actuators need comparatively high voltage for actuation. In solving these problems, the study presents a copper based electrostatic micro actuator with low actuation voltage. Using wire electrical discharge machine (WEDM), the actuator is fabricated where a light weight flexible spring model is introduced. Capacitor design model is applied to present a voltage controlling electronic circuit using Arduino micro controller unit. The experimental result shows that the actuator is able to produce 1.38 mN force for 15 V DC. The experiment also proves that coper based actuator design using WEDM technology is much easier for batch processing and could provide the advantages in rapid prototyping.  相似文献   

11.
《Advanced Robotics》2013,27(1-2):219-232
Although some compensation method is required when using a piezoelectric actuator because of hysteresis, a sensor feedback method is not suitable for an actuator array. In this study, we design a controller using a neural network to apply it to a tactile display composed of two-axial miniature actuators. This paper describes the two-axial miniature actuator, which is composed of two bimorph piezoelectric elements and two small links connected by three joints. A control system for the two-axial miniature actuator is designed based on a multi-layered artificial neural network to compensate for the hysteresis of piezoelectric elements. The output neuron emits the time derivative of voltage, a two-bit signal expressing increment or decrement condition is generated by two input neurons, and two input neurons calculate current values of voltage and displacement, respectively. The neural network is outfitted with a feedback loop including an integral element to reduce the number of neurons. In the experiment, if the result of the left piezoelectric element is compared to that of the right element, the displacement amplitudes and the inclinations coincide on the right and left piezoelectric elements. Although precise hysteresis characteristics such as loop width are considerably different, the present neural system can follow the difference.  相似文献   

12.
The ability for a device to locomote freely on a surface requires the ability to deliver power in a way that does not restrain the device's motion. This paper presents a MEMS actuator that operates free of any physically restraining tethers. We show how a capacitive coupling can be used to deliver power to untethered MEMS devices, independently of the position and orientation of those devices. Then, we provide a simple mechanical release process for detaching these MEMS devices from the fabrication substrate once chemical processing is complete. To produce these untethered microactuators in a batch-compatible manner while leveraging existing MEMS infrastructure, we have devised a novel postprocessing sequence for a standard MEMS multiproject wafer process. Through the use of this sequence, we show how to add, post hoc , a layer of dielectric between two previously deposited polysilicon films. We have demonstrated the effectiveness of these techniques through the successful fabrication and operation of untethered scratch drive actuators. Locomotion of these actuators is controlled by frequency modulation, and the devices achieve maximum speeds of over 1.5 mm/s.  相似文献   

13.
Polymer-metal microcantilever actuators have been fabricated using an innovative approach based on focused ion beam micromachining technology. The fabrication involves depositing a thin metal film onto the surface of the polymer and machining using the ion beam. The microcantilever created is then extracted and transferred to a desirable support using a micromanipulator. This approach demonstrates the potential for maskless and resistless prototyping of cantilevers that can be evaluated for use as MEMS/NEMS actuators. Nanometer-scale displacement of the resulting polystyrene-platinum bimorph microactuator with respect to temperature change is demonstrated via visual monitoring in a scanning electron microscope with a heating stage. The performance of the bimorph cantilever microactuators is verified using both analytical and finite element modeling.  相似文献   

14.
This paper presents the modeling, design, fabrication and testing of monolithic electrostatic curved-electrode zipping actuators fabricated by deep reactive ion etching (DRIE). In contrast to traditional curved-electrode zipping actuators, the design of the actuators presented here utilizes a compliant starting cantilever to significantly reduce the initial pull-in voltage by closing the gap (kerf) generated by DRIE. Thus, the actuators achieve high actuation force at a relatively low voltage. For example, two actuators each with dimensions of 4.5 mm*100 /spl mu/m*300 /spl mu/m are used to drive a bistable MEMS relay. Together, the two actuators provide up to 10 mN of force over their 80 /spl mu/m stroke at 140 V. Measurements of the force-displacement relation of these actuators confirm theoretical expectations based both on numerical and analytical methods. Finite element analysis is employed to predict the behavior of the complete bistable relay system. [1231].  相似文献   

15.
Various kinds of touch panel displays are becoming readily available for implementing futuristic human computer interaction (HCI) methods and are proven to be a useful infrastructure for inventing intuitive HCI environments. In spite of their popularity, there are some drawbacks. The most serious one is their hardness to operate especially for the weak in information technology such as elderly and blind users. A tactile feedback function has a potential ability for enabling them to make full use of the devices. We propose an approach for effectively designing user-friendly HCI environments based on the tactile feedback. We exemplify our approach through the design and development of a practical application, a haptic web browsing system. It allows even the weak users to intuitively explore various web pages without heavily depending on the visual information. While the system targets at supporting the weak, the touch interactions are quite useful means for general users to improve the stability and the degree of satisfaction in web browsing operations. The proposed system uses a touch panel haptic display for helping the users to operate with intuitive touch sensations.  相似文献   

16.
《Advanced Robotics》2013,27(12):1359-1374
A wirelessly controlled tactile display has been designed, fabricated and tested for use as a navigation aid. The display comprises a 4 × 4 array of vibrating motors that is mounted on a waist band and stimulates the skin across the lower back. Three types of electromechanical actuators were evaluated for use in the display; based on their mechanical performance and power requirements, two of these motors were then used to fabricate tactile displays. The performance of the displays and the wireless tactile control units was assessed experimentally by having subjects identify which of eight possible vibrotactile patterns was presented to the lower back. The results indicated that subjects could recognize the vibrotactile patterns with almost perfect accuracy and that there was no difference between the two types of motor used for the displays. Moreover, the ability to recognize the pattern of vibrotactile stimulation was superior on the back as compared to the forearm. A further experiment confirmed that the tactile display can be used as a navigation aid outdoors and that the vibrotactile patterns presented can be interpreted as directional or instructional cues with almost perfect accuracy.  相似文献   

17.
Arrays of hollow out-of-plane microneedles for drug delivery   总被引:1,自引:0,他引:1  
Drug delivery based on MEMS technology requires an invasive interface such as microneedles, which connects the microsystem with the biological environment. Two-dimensional arrays of rigid hollow microneedles have been fabricated from single-crystal silicon using a combination of deep reactive ion etching and isotropic etching techniques. The fabricated needles are typically 200 /spl mu/m long with a wide base and a channel diameter of 40 /spl mu/m. The fabrication process allows creating either blunt needles or needles with sharp tips. Their shape and size make these needles extremely suitable for minimally invasive painless epidermal drug delivery. MEMS technology allows for batch fabrication and integration with complex microsystems. Fluid has been successfully injected 100 /spl mu/m deep into sample tissue through arrays of microneedles. Needle breakage did not occur during this procedure. Experiments have shown that the modified Bernoulli equation is a good model for liquid flowing through the narrow microneedle lumen.  相似文献   

18.
为了提高MEMS执行器件对面内运动位移(或力学信号)检测的灵敏度并改善侧壁检测电阻制作工艺与其他工艺及其不同器件结构之间的兼容性问题,提出一种基于离子注入工艺和深度反应离子刻蚀(DRIE)工艺相结合制作检测梁侧壁压阻的方法。在此基础上,详细分析了影响位移检测灵敏度和分辨率的各种因素,并对侧壁压阻的结构尺寸及其工艺参数进行优化。最后,给出了侧壁表面压阻在几种不同类型典型MEMS执行器件中的应用,取得了很好的应用效果。  相似文献   

19.
The large majority of microelectromechanical systems (MEMS) are fabricated on silicon, glass or Pyrex substrates by manufacturing techniques, which originated from the semiconductors industry. However, their final application often requires removal of the fabrication substrate or at least a partial release of some section of the device. This paper describes a technique based on anodic dissolution of sacrificial metal layers for the complete or partial detachment of microstructures. As an example, a thin-film of sacrificial aluminum is selectively removed in a neutral sodium chloride solution by applying a small positive potential to the aluminum. The method is evaluated theoretically and experimentally in a defined geometry and compared to diffusion-limited, chemical etching. It is shown experimentally that the process is significantly faster than conventional wet chemical etching and the method has been used to release planar and nonplanar thin-film devices made from polymers and metals. The method is applicable for a wide range of metals as sacrificial materials and is very versatile with respect to electrolyte composition and applied voltages. Ease of sacrificial material deposition (sputtering or evaporation) and structuring and the possibility of high process temperature and the nondestructive chemical environment (also environmentally friendly) during detachment make the process technology an interesting alternative to conventional chemical etching.  相似文献   

20.
We present an all-aluminum MEMS process (Al-MEMS) for the fabrication of large-gap electrostatic actuators with process steps that are compatible with the future use of underlying, pre-fabricated CMOS control circuitry. The process is purely additive above the substrate as opposed to processes that depend on etching pits into the silicon, and thereby permits a high degree of design freedom. Multilayer aluminum metallization is used with organic sacrificial layers to build up the actuator structures. Oxygen-based dry etching is used to remove the sacrificial layers. While this approach has been previously used by other investigators to fabricate optical modulators and displays, the specific process presented herein has been optimized for driving mechanical actuators with relatively large travels. The process is also intended to provide flexibility for design and future enhancements. For example, the gap height between the actuator and the underlying electrode(s) can be set using an adjustable polyimide sacrificial layer and aluminum “post” deposition step. Several Al-MEMS electrostatic structures designed for use as mechanical actuators are presented as well as some measured actuation characteristics  相似文献   

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