GaAs基共振隧穿二极管的研究

对GaAs基共振隧穿二极管(RTD)进行了研究,首先用分子束外延(MBE)方法进行AlAs/GaAs/InGaAs双势垒单势阱材料结构的生长.接着用常温光致荧光(PL)方法对结构材料进行了测试分析,其结果显示,较好的外延结构材料的PL谱线半峰宽达到62.6 nm.最后通过制成RTD器件对材料进行验证,器件测试结果表现出良好的直流特性.     

InP材料体系RTD的研制

报道了InP衬底AlAs /In0.53Ga0.47As/AlAs结构共振隧穿二极管(RTD)的研制过程.衬底片选用(001)半绝缘InP单晶片,结构材料使用分子束外延(MBE)技术制备,并用PL谱对外延片进行测试,器件采用台面结构.测得RTD器件室温下的峰谷电流比(PVCR)为7.4,峰值电流密度(Jp)为1.06×105A/cm-2,是国内首例成功的InP材料体系RTD.     

(113)B和(100)面InAs/GaAs量子点光致发光光谱特性研究

利用分子束外延技术在(100)和(113)B GaAs衬底上进行了有/无AlAs盖帽层量子点的生长,测量了其在4～100 K温度区间的PL光谱。通过对PL光谱的积分强度、峰值能量和半高宽进行分析进而研究载流子的热传输特性。无AlAs盖帽层的(113)B面量子点的PL光谱的热淬灭现象可以由载流子极易从量子点向浸润层逃逸来解释。然而,有AlAs盖帽层的(113)B量子点的PL热淬灭主要是由于载流子进入了量子点与势垒或者浸润层界面中的非辐射中心引起的。并且其PL的温度依存性与利用Varshni定律计算的体材料InAs的温度依存性吻合很好,表明载流子通过浸润层进行传输受到了抑制,由于AlAs引起的相分离机制(113)B量子点的浸润层已经消失或者减小了。(100)面有AlAs盖帽层的PL半高宽的温度依存性与无AlAs盖帽层的量子点大致相同,表明在相同外延条件下相分离机制在(100)面上不如(113)B面显著。     

Molecular beam epitaxial growth of gaas on gadolinium-gallium garnet

Single-crystal GaAs has been grown by molecular beam epitaxy on Gd₃Ga₅0₁₂ (GGG) using an InAs buffer layer and an InAs/GaAs multilayer structure between the GGG and the GaAs. The x-ray diffraction spectrum shows that both the InAs and GaAs epitaxial layers are oriented in the (111) direction when grown on a (100) GGG substrate. The unintentionally doped InAs layers aren-type and have donor concentrations in the range of 7 × 10¹⁶ to 2 × 10¹⁸ cm^-3 which vary inversely with growth temperature. The corresponding carrier mobilities vary from 3.5 × 10³ to 1 × 10³ cm²/V s. The GaAs was also found to be conducting. The 77-K photoluminescence (PL) spectrum of the GaAs grown on the GGG differs from that of homoepitaxial GaAs in that the heteroepitaxial GaAs PL intensity is approximately 50 times lower, its linewidth is five times broader, and its peak energy is blue shifted by 10 meV.     

共振隧穿二极管的设计、研制和特性分析

用分子束外延技术在半绝缘GaAs衬底上生长制备了不同结构的AlAs/GaAs/InGaAs两垒一阱RTD单管.经过材料生长设计和工艺的改进,测得室温下器件的最高PVCR为2.4,峰值电流密度达到36.8kA/cm2.进行直流参数测试,得到RTD的I-V特性曲线,对量子阱宽度和帽层厚度对I-V特性的影响进行了分析.     

高峰谷电流比的高掺杂发射区In0.53Ga0.47As/AlAs共振隧穿二极管

利用空气桥工艺设计和制作了高掺杂发射区In0.53Ga0.47As/AlAs共振隧穿二极管（RTD）。在室温下,器件的峰谷电流比大于40,峰值电流密度为24kA/cm2。建立了RTD器件等效电路模型,并从直流和微波测试结果中提取出器件参数。高峰谷电流比的RTD器件具有非常小的电容,有利于在微波/太赫兹领域中的应用。     

High peak-to-valley current ratioIn0.22Ga0.78As/AlAs RTDs on GaAs using relaxed InxGa1-x buffers

The authors have grown In_0.22Ga_0.78As/AlAs resonant tunnelling diodes (RTDs) on relaxed In_xGa_1-x As buffers on GaAs substrates, which show the largest peak-to-valley current ratio (PVCR), 13:1, ever reported for GaAs-based RTDs. X-ray diffraction and photoluminescence (PL) studies confirm the composition and relaxation of the buffers. The intrinsic device performance is excellent despite the presence of some dislocations in the active layers. However, it appears that the relaxed buffers do add series resistance to the intrinsic device     

纳米电子器件及其集成

对基于Top-Down加工技术的纳米电子器件如：单电子器件、共振器件、分子电子器件等的研究现状、面临的主要挑战等进行了讨论. 采用CMOS兼容的工艺成功地研制出单电子器件，观察到明显的库仑阻塞效应；在半绝缘GaAs衬底上制作了AlAs/GaAs/In0.1Ga0.9As/GaAs/AlAs双势垒共振隧穿二极管,采用环型集电极和薄势垒结构研制的共振隧穿器件，在室温下测得其峰谷电流比高达13.98，峰电流密度大于89kA/cm2；概述了交叉阵列的分子存储器的研究进展.     

Photoluminescence study of type-II GaAs quantum well wires grown on nano-faced (3 1 1)A surface: Quasi-1D exciton observation?

GaAs/AlAs corrugated superlattices (CSLs) grown on nano-faceted (3 1 1)A GaAs surface were studied using Raman spectroscopy and photoluminescence (PL) techniques. Raman data (splitting of localized transversal optical phonons) have proved structural anisotropy of the CSLs. The structural anisotropy leads to optical anisotropy appeared in strong polarization dependence of PL. Temperature dependence of PL has shown that the CSLs are type-II superlattices. Additional peak in PL spectrum at low (77–100 K) temperatures can be result of quasi-1D exciton appearance in the CSLs.     

室温下高峰谷电流比、高峰电流密度的双势垒共振隧穿二极管

在半绝缘GaAs衬底上制作了AlAs/GaAs/In0.1Ga0.9As/GaAs/AlAs双势垒共振隧穿二极管.在GaAs层中加入In0.1Ga0.9As层用以降低势垒两边的势阱深度,从而提高了器件的峰谷电流比和峰电流密度.为了减小器件的接触电阻和电流的非均匀性,使用了独特形状的集电极,总的电流密度也因此提高.薄栅也有助于提高器件的PVCR和峰电流密度.在室温下测得其峰谷电流比高达13.98,峰电流密度大于89kA/cm2.     

A DBRTD with a High PVCR and a Peak Current Density at Room Temperature

AlAs/GaAs/In0.1Ga0.9As/GaAs/AlAs double-barrier resonant tunneling diodes(DBRTDs) grown on a semi-insulated GaAs substrate with molecular beam epitaxy is demonstrated.By sandwiching the In0.1Ga0.9As layer between GaAs layers,potential wells beside the two sides of barrier are deepened,resulting in an increase of the peak-to-valley current ratio (PVCR) and a peak current density.A special shape of collector is designed in order to reduce contact resistance and non-uniformity of the current;as a result the total current density in the device is increased.The use of thin barriers is also helpful for the improvement of the PVCR and the peak current density in DBRTDs.The devices exhibit a maximum PVCR of 13.98 and a peak current density of 89kA/cm2 at room temperature.     

Well-defined electrical properties of high-strain resonant interband tunneling structure

The GaAs/InAs high-strain resonant interband tunneling diodes (HSRITDs) have been implemented by metal organic chemical vapor deposition (MOCVD). The current-voltage characteristics of variable quantum well and barrier thickness grown on (1 1 1) GaAs substrates are investigated. Experimental results reveal that the quantum barrier and well layer will influence current-voltage properties such as the peak current density, valley current density, and peak-to-valley current ratio (PVCR). Both peak current and valley current density decrease with increasing layers width. This result also exhibits the variation of PVCR with layers width.     

High performance AlAs/GaXIn1-xAs resonant tunneling diodes by metalorganic chemical vapor deposition

We report on AlAs/Ga_xJn_1−xAs (x = 0.47) quantum well heterostructures grown by metalorganic chemical vapor deposition (MOCVD) on InP substrates. Heterostructure quality was evaluated by high resolution x-ray diffraction for various growth conditions. Double barrier quantum well heterostructures were grown and processed into resonant tunneling diodes (RTDs). Room temperature electrical measurements of the RTDs yielded maximum peak to valley current ratios of 7.7 with peak current density of 96 kA/cm² and 11.3 with peak current density of 12 kA/cm², for devices grown by atmospheric and low pressure MOCVD, respectively.     

不对称势垒对共振隧穿二极管I-V特性的影响

利用Airy函数和传输矩阵方法计算了不对称势垒厚度的InP基AlAs/InGaAs/AlAs DBS结构在偏压情况下的共振透射系数,并通过材料生长和器件工艺制作得到了共振隧穿二极管的直流I-V特性。在峰值电流密度为132kA/cm2下,获得了17.84的电流峰谷比。测试结果还表明不对称势垒厚度的RTD在偏压情况下,当电子从较薄势垒向较厚势垒穿透时,更容易获得高的电流峰谷比,反之可获得较大的负微分电阻电压区域。     

一种高性能InP基谐振隧穿二极管的研制

设计并用分子束外延技术生长了InP基InGaAs/AlAs体系RTD材料,采用传统湿法腐蚀、光学接触式光刻、金属剥离、台面隔离和空气桥互连工艺,研制出了具有优良负阻特性和较高阻性截止频率的InP基RTD单管，器件正向PVCR为17.5,反向PVCR为28,峰值电流密度为56kA/cm^2,采用RNC电路模型进行数据拟合后得到阻性截止频率为82.8GHz，实验为今后更高性能RTD单管的研制,以及RTD与其他高速高频三端器件单片集成电路的设计与研制奠定了基础。     

Structural and photoluminescent characteristics of porous GaAs capped with GaAs

In this paper, we present the results of structural and room temperature photoluminescence studies on porous GaAs (π-GaAs) capped with GaAs. The porous structure formation was confirmed by scanning electron microscopy (SEM) and relatively homogeneous pores of diameters as small as 4 nm was grown along <111>B directions. X-ray diffraction (XRD) investigations confirm the high crystal quality of the capping layer and a lattice mismatch of 4% between the two layers was determined. The room temperature photoluminescence (PL) spectrum of porous GaAs recorded during steady-state excitation shows a strong PL covering the red–blue band. Time resolved photoluminescence (PLRT) investigations provide evidence for the existence of PL components with different origins.     

Novel In0.52Al0.48As/In0.53Ga0.47As metamorphic high electron mobility transistors on GaAs substrate with InxGa1−xP graded buffer layers

Compositionally graded In_xGa_1−xP (x=0.48→x=1) metamorphic layers have been grown on GaAs substrate by solid source molecular beam epitaxy using a valved phosphorus cracker cell. Three series of samples were grown to optimize the growth temperature, V/III ratio and grading rate of the buffer layer. X-ray diffraction (XRD) and photoluminescence (PL) were used to characterize the samples. The following results have been obtained: (1) XRD measurement shows that all the samples are nearly fully strain relaxed and the strain relaxation ratio is about 96%; (2) the full-width at half-maximum (FWHM) of the XRD peak shows that the sample grown at 480°C offers better material quality; (3) the grading rate does not influence the FWHM of XRD and PL results; (4) adjustment of the V/III ratio from 10 to 20 improves the FWHM of XRD peak, and the linewidth of PL peak is close to the data obtained for the lattice-matched sample on InP substrate. The optimization of growth conditions will benefit the metamorphic HEMTs grown on GaAs using graded InGaP as buffer layers.     

Optical properties of GaAs/AlAs superlattices grown on (311)A GaAs surfaces

We present a temperature-dependence photoluminescence of (GaAs)₅/(AlAs)₅ superlattice grown on (311)A-oriented semi-insulating substrate by molecular beam epitaxy. The temperature dependence reveals an anomalous decrease of the PL width, which is explained in terms of phonon-assisted thermal activation of localized excitons.     

Photoluminescence study of AlGaAs/GaAs/AlGaAs double quantum wells separated by a thin AlAs layer

Photoluminescence (PL) spectra of Al_0.21Ga_0.79As/GaAs/Al_0.21Ga_0.79As double quantum wells (DQWs) separated by a thin AlAs barrier have been studied in the temperature range 77–300 K. The well width was varied from 65 to 175 Å, and the thickness of the AlAs barrier was 5, 10, or 20 Å. In the case of a sufficiently thin (5, 10 Å) AlAs barrier, the energy spectrum of QW states is considerably modified by coupling between the QWs. This effect shifts the main spectral peak of PL, and specific features associated with the splitting of the ground state into symmetric and asymmetric states are observed in the spectra at higher temperatures. The DQW structure with a 20-Å-thick AlAs barrier is a system of two uncoupled asymmetric Al_0.21Ga_0.79As/GaAs/AlAs QWs. The energy levels in double coupled QWs were calculated as functions of the well width and AlAs barrier thickness, and good correlation with the experimentally observed energies of optical transitions was obtained.     

GaAs/InGaAs应变异质结构临界厚度的Raman散射和PL谱分析

采用室温Raman散射和低温光致发光(PL)谱,对以TMG,固体As和固体In作为分子束源的MOMBE法生长的GaAs/In_xGa_(1-x)As(x=0.3)单层异质结构和多量子阱结构中InGaAs应变层的临界厚度进行了实验研究。由应变引起的Raman散射峰位移,以及PL谱峰位置与应变和无应变状态下一维有限深势阱跃迁能量计算结果的比较可见,在In组分含量x=0.3的情况下,临界厚度H_c≤5nm,小于能量平衡理论的结果,而与力学平衡模型的理论值相近。