Circuit techniques for 1.5-3.6-V battery-operated 64-Mb DRAM

Circuit techniques for battery-operated DRAMs which cover supply voltages from 1.5 to 3.6 V (universal V_cc), as well as their applications to an experimental 64-Mb DRAM, are presented. The universal-V_cc DRAM concept features a low-voltage (1.5 V) DRAM core and an on-chip power supply unit optimized for the operation of the DRAM. A circuit technique for oxide-stress relaxation is proposed to improve high-voltage sustaining characteristics while only scaled MOSFETs are used in the entire chip. This technique increases sustaining voltage by about 1.5 V compared with conventional circuits and allows scaled MOSFETs to be used for the circuits, which can be operated from an external V_cc of up to 4 V. A two-way power supply scheme is proposed to suppress the internal voltage fluctuation within 10% when the DRAM is operated from external power supply voltages ranging from 1.5 to 3.6 V. An experimental 1.5-3.6-V 64-Mb DRAM is designed based on these techniques and fabricated by using 0.3-μm electron-beam lithography. An almost constant access time of 70 ns is obtained. This indicates that battery operation is a promising target for future DRAMs     

A circuit technology for sub-10-ns ECL 4-Mb BiCMOS DRAM's

The feasibility of realizing an emitter-coupled-logic (ECL) interface 4-Mb dynamic RAM (DRAM) with an access time under 10 ns using 0.3-μm technology is explored, and a deep submicrometer BiCMOS VLSI using this technology is proposed. Five aspects of such a DRAM are covered. They are the internal power supply voltage scheme using on-chip voltage limiters, an ECL DRAM address buffer with a reset function and level converter, a current source for address buffers compensated for device parameter fluctuation, an overdrive rewrite amplifier for realizing a fast cycle time, and double-stage current sensing for the main amplifier and output buffer. Using these circuit techniques, an access time of 7.8 ns is expected with a supply current of 198 mA at a 16-ns cycle time     

An experimental 1.5-V 64-Mb DRAM

Low-voltage circuit technologies for higher-density dynamic RAMs (DRAMs) and their application to an experimental 64-Mb DRAM with a 1.5-V internal operating voltage are presented. A complementary current sensing scheme is proposed to reduce data transmission delay. A speed improvement of 20 ns was achieved when utilizing a 1.5-V power supply. An accurate and speed-enhanced half-V_CC voltage generator with a current-mirror amplifier and tri-state buffer is proposed. With it, a response time reduction of about 1.5 decades was realized. A word-line driver with a charge-pump circuit was developed to achieve a high boost ratio. A ratio of about 1.8 was obtained from a power supply voltage as low as 1.0 V. A 1.28 μm² crown-shaped stacked-capacitor (CROWN) cell was also made to ensure a sufficient storage charge and to minimize data-line interference noise. An experimental 1.5 V 64 Mb DRAM was designed and fabricated with these technologies and 0.3 μm electron-beam lithography. A typical access time of 70 ns was obtained, and a further reduction of 50 ns is expected based on simulation results. Thus, a high-speed performance, comparable to that of 16-Mb DRAMs, can be achieved with a typical power dissipation of 44 mW, one tenth that of 16-Mb DRAMs. This indicates that a low-voltage battery operation is a promising target for future DRAMs     

A 29-ns 64-Mb DRAM with hierarchical array architecture

A 29-ns (RAS access time), 64-Mb DRAM with hierarchical array architecture has been developed. For consistent high yields and high speed, a CMOS segment driver circuit is used as a hierarchical word line scheme. To achieve high speed, precharge signal (PC) drivers for equalizing the bit lines pairs, and shared sense amplifier signal (SHR) drivers are distributed in the array. To enhance sense amplifiers speed in low array voltage, an over driven sense amplifier is adopted. A hierarchical I/O scheme with semidirect sensing switch is introduced for high speed data transfer in the I/O paths. By combining these proposed circuit techniques and 0.25-μm CMOS process technologies with phase-shift optical lithography, an experimental 64-Mb DRAM has been designed and fabricated. The memory cell size is 0.71×1.20 μm ², and the chip size is 15.91×9.06 mm². A typical access time under 3.3 V power supply voltage is 29 ns     

A 60-ns 16-Mbit CMOS DRAM with a transposed data-line structure

Low-noise, high-speed circuit techniques for high-density DRAMs (dynamic random-access memories), as well as their application to a single 5-V 16-Mb CMOS DRAM with a 3.3-V internal operating voltage for a memory array, are described. It was found that data-line interference noise becomes unacceptably high (more than 25% of the signal) and causes a serious problem in 16-Mb DRAM memory arrays. A transposed data-line structure is proposed to eliminate the noise. Noise suppression below 5% is confirmed using this transposed data-line structure. A current sense amplifier is also proposed to maintain the data-transmission speed in common I/O lines, in spite of a reduced operating voltage and increased parasitic capacitance loading in the memory array. A speed improvement of 10 ns is achieved. Using these circuit techniques, a 16-Mb CMOS DRAM with a typical RAS access time of 60 ns was realized     

An SOI-DRAM with wide operating voltage range by CMOS/SIMOXtechnology

An SOI-DRAM test device (64-Kb scale) with 100-nm-thick SOI film has been fabricated in 0.5-μm CMOS/SIMOX technology and the basic DRAM function has been successfully observed. A partially depleted transistor was used to solve the floating-body effect, resulting in improved operation. The newly introduced body-synchronized sensing scheme enhances the lower Vcc margin. The p-n junction capacitance between source/drain and a substrate for SOI structure is reduced by 25%. RAS access time tRAC is 70 ns with a 2.7-V power supply, which is as fast as the equivalent bulk-Si device with a 4-V power supply. The active current consumption is 1.1 mA (Vcc=3.0 V, 260-ns cycle) for this SOI-DRAM, which is a reduction of 65%, compared with 3.2 mA for the reference bulk-Si DRAM. The mean value of data retention time for this chip at 80°C is longer than 20 s (Vcc=3.3 V), which is the same value as mass-produced 16-Mb DRAM's. The SOI-DRAM has an operating Vcc range from 2.3 V to 4.0 V. The observed speed enhancement and the wide operating voltage range indicate high performance at the low voltage operation suitable for battery-operated DRAM's     

A 1.0-V 230-MHz column access embedded DRAM for portable MPEGapplications

This paper describes a 32-Mb embedded DRAM macro fabricated using 0.13-μm triple-well 4-level Cu embedded DRAM technology, which is suitable for portable equipment of MPEG applications. This macro can operate 230-MHz random column access even at 1.0-V power supply condition. The peak power consumption is suppressed to 198 mW in burst operation. The power-down standby mode, which suppresses the leakage current consumption of peripheral circuitry, is also prepared for portable equipment. With the collaboration of array circuit design and the fine Cu metallization technology, macro size of 18.9 mm² and cell efficiency of 51.3% are realized even with dual interface and triple test functions implemented     

A 30-ns 256-Mb DRAM with a multidivided array structure

A 256-Mb DRAM with a multidivided array structure has been developed and fabricated with 0.25-μm CMOS technology. It features 30-ns access time, 16-b I/Os, and a 35-mA operating current at a 60-ns cycle time. Three key circuit technologies were used in its design: a partial cell array activation scheme for reducing power-line voltage bounce and operating current, a selective pull-up data-line architecture to increase I/O width and reduce power dissipation, and a time-sharing refresh scheme to maintain the conventional refresh period without reducing operational margin. Memory cell size was 0.72 μm². Use of the trench isolated cell transistor and the HSG cylindrical stacked capacitor cells helped reduce chip size to 333 mm²     

A 55-ns 16-Mb DRAM with built-in self-test function usingmicroprogram ROM

A single 5-V power supply 16-Mb dynamic random-access memory (DRAM) has been developed using high-speed latched sensing and a built-in self-test (BIST) function with a microprogrammed ROM, in which automatic test pattern generation procedures were stored by microcoded programs. The chip was designed using a double-level Al wiring, 0.55-μm CMOS technology. As a result, a 16-Mb CMOS DRAM with 55-ns typical access time and 130-mm² chip area was attained by implementing 4.05-μm² storage cells. The installed ROM was composed of 18 words×10 b, where the marching test and checkerboard scan write/read test procedures were stored, resulting in successful self-test operation. As the BIST circuit occupies 1 mm² and the area overhead is about 1%, it proves to be promising for large-scale DRAMs     

A 3.3-V 12-ns 16-Mb CMOS SRAM

A 16-Mb CMOS SRAM having an access time of 12 ns under a 3.3-V supply has been developed with a 0.4-μm process technology. An address access time of 12 ns has been achieved by an optimized architecture, the use of an automated transistor size optimizer, and a read-bus midlevel preset scheme (RBMIPS). For better yield and efficient testing, an on-chip test circuit with three test modes has been implemented     

Low-power on-chip supply voltage conversion scheme forultrahigh-density DRAMs

In order to achieve 3.3-V 1-Gb DRAM and beyond, a new on-chip supply voltage conversion scheme that converts 3.3-V external supply voltage, V_ext, to lowered 1.5-V internal supply voltage, V_ent, without any power loss within the voltage converter is proposed. This scheme connects two identical DRAM circuits in series between V_ixt and V_ss. By operation of two DRAM circuits with the same clock timing, the voltage between two DRAMs, V_int, is automatically fixed to 1/2V_ext. Therefore, each upper and lower DRAM circuit can operate at lowered 1/2V_ext without use of the conventional voltage converter. This scheme was successfully verified by an experimental system using 4-Mb DRAMs. Utilizing the proposed scheme, power dissipation was reduced by as much as 50% and stable operation was achieved without access speed penalty     

A 23-ns 4-Mb CMOS SRAM with 0.2-μA standby current

A 4-Mb CMOS SRAM having 0.2-μA standby current at a supply voltage of 3 V has been developed. Current-mirror/PMOS cross-coupled cascade sense-amplifier circuits have achieved the fast address access time of 23 ns. A new noise-immune data-latch circuit has attained power-reduction characteristics at a low operating cycle time without access delay. A 0.5-μm CMOS, four-level poly, two-level metal technology with a polysilicon PMOS load memory cell, yielded a small cell area of 17 μm² and the very small standby current. A quadruple-array, word-decoder architecture allowed a small chip area of 122 mm²     

An experimental 1-Mbit BiCMOS DRAM

Three developments are proposed for high-performance DRAMs: a bipolar complementary MOS (BiCMOS) DRAM device structure featuring high soft-error immunity due to a p/SUP +/ buried layer; a high-speed circuit configuration of eight NMOS subarrays combined with BiCMOS peripheral drivers and BiCMOS data output circuitry; and BiCMOS voltage and current limiters lowering power dissipation as well as peak current. A 1.3 /spl mu/m 1-Mb DRAM is designed and fabricated to verify the usefulness of these BiCMOS DRAM technologies. Features of this chip include a typical access time of 32 ns, a typical power dissipation of 450 mW at a 60-ns cycle time, and chip size of 5.0/spl times/14.9 mm/SUP 2/.     

An experimental 1 Mbit DRAM based on high S/N design

The key to achieving 1-Mb is higher signal-to-noise ratio, while maintaining single 5-V operation even for small feature-size MOSTs. To meet this requirement, three developments are proposed: a corrugated capacitor (memory) cell, a multidivided data line structure, and an on-chip voltage limiter. The results include an improvement in signal-to-noise ratio by a factor of about 22 and provision for single 5-V operation. These techniques have been proven to be useful through the design and evaluation of an experimental 21-/spl mu/m/SUP 2/-cell, single-5-V, 1-Mb NMOS DRAM. Its significant features include: an access time of 90 ns, a power dissipation of 295 mW at 260 ns cycle time, and a 46 mm/SUP 2/ chip area.     

A 14-ns 14-Mb CMOS DRAM with 300-mW active power

A 4-Mb high-speed DRAM (HSDRAM) has been developed and fabricated by using 0.7-μm L_eff CMOS technology with PMOS arrays inside n-type wells and p-type substrate plate trench cells. The 13.18-mm×6.38-mm chip, organized as either 512 K word×8 b or 1 M word×4 b, achieves a nominal random-access time of 14 ns and a nominal column-access time of 7 ns, with a 3.6-V V_cc and provision of address multiplexing. The high level of performance is achieved by using a short-signal-path architecture with center bonding pads and a pulsed sensing scheme with a limited bit-line swing. A fast word-line boosting scheme and a two-stage word-line delay monitor provide fast word-line transition and detection. A new data output circuit, which interfaces a 3.6-V V_cc to a 5-V bus with an NMOS-only driver, also contributes to the fast access speed by means of a preconditioning scheme and boosting scheme. Limiting the bit-line voltage swing for bit-line sensing results in a low power dissipation of 300 mW for a 60-ns cycle time     

Novel cell transistor using retractedSi3N4-liner STI for the improvement of dataretention time in gigabit density DRAM and beyond

In this paper, we propose a novel cell transistor using retracted Si₃N₄-liner STI (shallow trench isolation) for the enhanced and reliable operation of 256-Mb dynamic random access memory (DRAM) in 0.15-μm technology. As the technology of DRAM has been developed into the sub-quarter-micron regime, the control of junction leakage current at the storage node is much more important due to the increased channel doping concentration. With the decreased parasitic electric field at the STI corner using the retracted Si₃N₄-liner, the inverse narrow width effect (INWE) was significantly reduced. The channel doping concentration, hence, was lowered without degrading the subthreshold leakage characteristics and the channel doping profile was optimized from the viewpoint of the electric field at local areas in the depletion region. In addition to the optimized channel doping profile resulted in a dramatic increase in data retention time and device yield for 256-Mb DRAM. The proposed cell transistor can be extended to future high-density DRAMs in 0.13-μm technology and beyond     

A circuit technology for high-speed battery-operated 16-Mb CMOSDRAM's

A battery-operated 16-Mb CMOS DRAM with address multiplexing has been developed by using an existing 0.5-μm CMOS technology. It can access data in 36 ns when powered from a 1.8-V battery-source, and 20 ns at 3.3 V. However, this device requires a mere 57 mA of operating current for an 80-ns cycle time and only 5 μA of standby current at 3.3 V. To achieve both high-speed and low-power operation, the following four circuit techniques have been developed: 1) a parallel column access redundancy (PCAR) scheme coupled with a current sensing address comparator (CSAC), 2) an N&PMOS cross-coupled read-bus-amplifier (NPCA), 3) a gate isolated sense amplifier (GISA) with low V_T, and 4) a layout that minimizes the length of the signal path by employing the lead on chip (LOC) assembly technique     

A 2.6-ns wave-pipelined CMOS SRAM with dual-sensing-latch circuits

The dual-sensing-latch circuit proposed here can solve the synchronization problem of the conventional wave-pipelined SRAM and the proposed source-biased self-resetting circuit reduces both the cycle and access time of cache SRAM's. A 16-kb SRAM using these circuit techniques was designed, and was fabricated with 0.25-μm CMOS technology. Simulation results indicate that this SRAM has a typical clock access time of 2.6 ns at 2.5-V supply voltage and a worst minimum cycle time of 2.6 ns     

A 256-Mb SDRAM using a register-controlled digital DLL

This paper describes the key technologies used in a 256-Mb synchronous DRAM with a clock access time of 1 ns. This DRAM is stable against temperature, voltage, and process variation through the use of a register-controlled digital delay-locked loop (RDLL). The total timing error of the RDLL is about 0.4 ns, sufficient for high frequency operation at 150 to 200 MHz. Unlike most conventional high-density DRAMs, the bit lines are placed above the storage capacitors in this DRAM to relax the design rules of the core area. The noise issues were analyzed and resolved to help implement the technology for mass production of 0.28- to 0.24-μm 200-MHz DRAMs     

A 6-ns 4-Mb CMOS SRAM with offset-voltage-insensitive current senseamplifiers

A 4-Mb CMOS SRAM with 3.84 μm² TFT load cells is fabricated using 0.25-μm CMOS technology and achieves an address access time of 6 ns at a supply voltage of 2.7 V. The use of a current sense amplifier that is insensitive to its offset voltage enables the fast access time. A boosted cell array architecture allows low voltage operation of fast SRAM's using TFT load cells