Moderne Technik des Plasmaschmelzschneidens

Modern Method of Plasma Cutting. After having explained the Principle of the process the modern technique of plasma cutting with argon-hydrogen-mixtures and stick electrodes is described. Corresponding plants, torches and guiding machines are presented. The relations between plant power, cutting speed, plate thickness and cut quality are demonstrated. A comparison to traditional thermal cutting methods and a view to the application of plasma cutting are finishing the article.     

Moderne Lecksucher mit Vakuumtechnik

Modern leak detectors in vacuum technology In many areas of industrial manufacturing, quantitative leak tightness measurements are required in order to analyze product quality. This article examines three approaches to vacuum leak testing, which utilize different measuring principles and completely different working pressures. The processes are divided into “non-gas selective”, “single gas selective” and “double gas selective”. The pressure rise method does not work gas-selectively. In so-called foil test chambers the pressure rise measurement is used in optimized design and is particularly suitable for leak testing in the food industry. The classic test gas vacuum leak detection is a gas-selective method. The test gas is selectively detected and the chamber is pumped independently of the type of gas. Major innovations in current device solutions are the extension of the measuring range and improved convenience in use. To achieve a detection limit of less than 10⁻¹² mbar·l/s, a double gas selective operation is used, residual gases from the test chamber are selectively pumped, additionally, the test gas detection is selective.     

Moderne Kapazitätsmanometer

Vacuum processes in the semiconductor and coating industries are hardly conceivable without capacitance manometers. In these industries the exact measurement of process pressures is extremely important and other measurement methods don't even come close to the superior accuracy, reproducibility and stability of capacitance manometers. The technical development of these pressure transducers during the last 25 years proceeded parallel to the enormous increase of vacuum processes. Many vacuum processes produc ed special types of capacitance transducers and several of these types enable the high efficiency of many production machines. In the following the historical and technical development of the capacitive measurement of pressures is reviewed from manually clamped sensors to compact, welded all metal sensors.     

Moderne Hochkompressions‐Turbopumpen

Modern high compression turbopumps – Theory and Practice The performance of turbopumps has shown a rapid development since their invention in the middle of the last century. Even though there are limitations due to geometry and general functionality, with the help of clever combinations of standard turbo pumps with Holweck stages, applications nowadays are possible where in the past ion getter pumps were needed. In particular modern high compression turbo pumps are suitable for generating UHV even in combination with small and simple backing pumps.     

Moderne Schmierstoffe in der Vakuumtechnik

Modern lubricants in the vacuum technology Even or especially in the age of dry pumps, lubricants and/or functional fluids are an essential, integral part of every vacuum pump. This article gives an overview of all kinds of modern lubrication in vacuum technology: Fluids, greases, coatings.     

Moderne thermodynamische Modelle und Dortmunder Datenbank

Today the design and optimization of chemical processes is mainly realized with the help of process simulation. The accuracy of the design mainly depends on the quality of the thermophysical properties (pure component properties, mixture data) used. In the last 25 years a comprehensive factual data bank (Dortmund Data Bank) has been built up, in which nearly all published experimental data have been stored in computerized form. With the help of the Dortmund Data Bank different reliable group contribution methods with a large range of applicability have been developed for the prediction of phase equilibria and excess properties. The Dortmund Bank and the thermodynamic models are ideal tools for the development, simulation and optimization of chemical processes. The status of the Dortmund Data Bank and of the group contribution methods will be discussed and possible applications will be shown.     

Moderne Massenspektrometer in Vakuum‐Applikationen

Modern mass spectrometers in vacuum applications The article describes the functionality of quadrupole mass spectrometers and their usage in different applications. Several examples illustrate the importance of careful interpretation of the respective spectra. Some applications allow the direct installation into a vacuum chamber while other applications require an external pump system which is only weakly connected to the vacuum chamber.     

Moderne Aufdampfmaterialien für optische Anwendungen

Physical Vapor Deposition (PVD) has developed from the very beginnings to a widely used coating technique within the last 60 years. The original method, evaporation, is still the preferred method for the original application, namely optics. In the past technical development and an increasing number of applications required a growing assortment of coating materials. In parallel material quality had to keep up with changes in coating technology and with the productivity improvement of coating plants. Although the selection of substances suited for evaporation is relatively small, laboratories concerned in material development do not complain about lack of work. New applications even in non-optic fields and the potential of organic compounds, so far only demonstrated in a few examples, add to the number of research topics. The following paper describes requirements for, development of and trends in evaporation chemicals from the viewpoint of a material supplier.     

Moderne Entwicklungen von Legierungen für den Leichtbau

Modern development of alloys for light weight components Magnesium alloys fulfil the requirements of low density, good formability and machinability and high recycling potential. Nevertheless applications are still well behind those of competing aluminium materials, particularly in the field of composites. The reasons for this are the higher cost of the primary material (exacerbated by the non-existence of a secondary supply), the limited choice of tailor made alloys and composites and partly the insufficient or lost know how in machining and working. There are also knowledge gaps in the user-industries, which prevent a substitution of conventional materials by magnesium alloys. In order to ensure a greater market for magnesium materials in the future by increasing the quality of existing alloys and processes as well as developing new alloys and processes it is necessary to conduct both long term research and development. This paper describes the existing technologies for the production of aluminium and magnesium components and shows some ongoing development of new production techniques.     

Moderne Barrieresysteme für die Kupfermetallisierung höchstintegrierter Halbleiterbauelemente

Performance and reliability of microelectronic devices is significantly determined by the interconnect technology. Particularly manufacturer of microprocessors have worked intensively on copper wiring technology. The stability of the diffusion barrier which has to avoid the diffusion of copper into interlayer dielectrics and into active transistor regions is a crucial factor for the reliability of copper interconnects. Barrier thickness of less than 20nm, as shown in the SIA roadmap for the next technology nodes, are a big challenge to barrier material as well as process technology. Tantalum based diffusion barriers are described, and an outlook to future R&D is given.     

Moderne Möglichkeiten der Verschleißmessung mit radioaktiven Isotopen

Modern use of radioisotopes in wear measurement – Modern methods using low activities and sensitive and reliable measuring equipment allow for an advantageous use of radioisotopes in wear measurements. The modern thin layer activation method using the irradiation of any visible section of an engine part with heavy charged particles originating from an accelerator creates radioisotopes only in a thin zone under the surface. Generally, the activity of engine parts activated by this method is roughly a thousand times lower than that of parts activated by thermal neutrons as usually done before. Use of different types and energies of bombarding particles will produce recognizably different patterns of radioisotopes even in targets consisting of the same material, and thus permits the simultaneous measurement of several components of wear. Handling, transportation, and storage of engine parts trated by the thin layer activation method does not create any danger and, therefore, no additional expenses. This means that wear measurements using radioisotopes can now be carried out anywhere without protective measures.