The working process of an oil‐free claw vacuum pump

Mathematical model of oil free claw vacuum pump is presented. The model is based on energy balance differential equations of thermodynamic system of variable mass working body. Using the equations of coordinates transformation and contact line of rotors continuity condition, equations for geometry of claw pump working chamber on condition of rotors point connection are obtained. To evaluate the leakage through the rotor mechanism channels, their existence graphs are plotted and geometric parameters of the channels depending on rotors position are determined. As a result of modeling, dependence of pressure and temperature in suction and compression‐discharge chambers on rotation angle at different rotary speeds and on different inlet pressures and relationship between pumping speed and inlet pressure are obtained. The comparison between calculated values and experimental data obtained for one‐stage claw pump with identical rotors is carried out. The maximal difference between the calculated and experimental values does not exceed 15 %. The developed mathematical model is recommended for analysis of influence of rotors geometry on the working process parameters and pumping characteristics of an oil free claw pump.     

Wasserstoff in Hochvakuumsystemen mit Turbomolekularpumpen bei verschiedenen Vorpumpen

The combination of diaphragm pumps with wide‐range turbomolecular pumps constitutes a small but powerful oil‐free high vacuum pumping system. Turbomolecular pumps show gas dependent compression ratios, the lowest for hydrogen. Thus, the high vacuum can be governed by the hydrogen partial pressure. In the present investigation the residual gas composition of a turbomolecular pump and different backing pumps shows no improvement if diaphragm pumps with low ultimate pressure are replaced by rotary vane or Roots pumps. In this case the ultimate pressure in the high vacuum chamber is basically determined by the ratio of outgassing to pumping speed and not by the product of compression ratio and backing pressure. However, the hydrogen partial pressure increased if the ultimate pressure of the diaphragm pump was raised. At a backing pressure of 0.5 mbar the high vacuum reached a stable value not improvable by reduction in backing pressure.     

Modelling vacuum cooling process of cooked meat—part 1: analysis of vacuum cooling system

A mathematical model is developed to analyse the performance of a vacuum cooler. The model is based on the mass conservation of air and vapour in the vacuum chamber. In the chamber, the vapour evaporated from foods under the vacuum and the vapour removed by the vapour-condenser and vacuum pump contribute to the variation in the vapour partial pressure, and the ingress air and the air released by the pump cause the change of air partial pressure. Experiments were carried out on vacuum cooling of water to validate the model. The predicted vacuum pressure and temperature histories are compared with the measured values. The maximum deviation between the predicted and measured vacuum pressure is within 110 Pa (for the chamber pressure between 12,000 and 2200 Pa), while the maximum deviation between the predicted and measured temperature of water is less than 2 °C. The model can, therefore, be used to predict the transient vacuum pressure profiles for analysing the vacuum cooling process of foods such as cooked meat.     

Backstreaming of pump oil vapors in vacuum systems

Backstreaming, or back‐migration, of vacuum pump oils can prevent a vacuum system from reaching its lowest possible pressure and may contaminate vacuum‐enable processes, such as thin film deposition. There are several circumstances which may lead to backstreaming, methods to measure the rate of oils reaching a vacuum chamber, and techniques to reduce or eliminate the problem. This article serves as an introduction to these issues and provides support on causes, measurement and mitigation.     

真空镀铝技术在反光布上的应用

介绍反光布的结构及反光原理,对其中形成反射层的真空镀铝技术做综述探讨。介绍了真空镀铝机的原理,主要包括真空系统和真空室。真空系统工作时,按照滑阀泵、罗茨泵、油增压泵、油扩散泵的顺序依次运行。真空室内卷绕室与镀膜室并联,其中卷绕室容积与镀膜室之比为3：1,工作时卷绕室的压力为镀膜室压力的10倍以上。其次,通过分析铝层结合力、温度湿度来阐述其对真空镀铝性能的影响。一般而言,玻璃微珠型的反光材料的镀铝层厚度控制在150～400A之间。为了保证该结合力,蒸发舟间隙为100～150mm,其与冷却辊的距离控制在160—240mm。当空气湿度大于85％时,考虑到被镀材料的放气,选择油性胶植珠的薄膜,否则真空度达不到要求。     

Experimental Study of Oil‐Free Claw Vacuum Pump Characteristics

Experimental study of pumping characteristics of a pilot model of a claw single‐stage vacuum pump with identical rotors was carried out. The curves of pumping speed vs. pressure at different rotary speed and the ultimate pressure at different rotors speed were determined on a test unit. Indicator pressure diagrams in working chambers of claw vacuum pump were obtained with the help of special sensors. Thus, an experimental data bank concerning the pumping characteristics of claw vacuum pump was created. It may be used for estimation of mathematical model adequacy and further development of the pump design.     

工作气压对TaN/VN纳米多层膜结构与机械性能的影响

本研究选择钽和钒的氮化物作为个体层材料，利用超高真空射频磁控溅射系统制备TaN、VN及一系列的TaN／VN多层薄膜。通过XRD，纳米力学测试系统分析了该体系合成中工作气压对多层膜结构与机械性能的影响。结果表明：多层膜的纳米硬度值都高于两种个体材料混合相的硬度值；当工作气压为0．2Pa时，结晶出现多元化，多层膜体系的硬度、弹性模量、应力均达到最佳效果，最大硬度达到31GPa。多层膜的机械性能改善明显与工作气压的变化有直接的联系。证明了通过选择合适的工作气压条件，合成具有高硬度的纳米多层膜是可以实现的。     

小型锆吸气泵在真空靶室中的应用研究

本文主要介绍了锆吸气泵的原理,以及在真空靶室上应用锆吸气泵所获得的良好结果,为解决靶室静态真空保持问题提供新的思路和技术方法。     

Neue Vorvakuumpumpe: Schnelles Evakuieren dank Membran‐ Stabilisierungssystem. New roughing pump: Fast Evacuation thanks to Diaphragm Stabilization System

Diaphragm pumps are used at turbomolecular pumps to generate rough vacuum. They are characterized by high suction speed, which however deteriorate when the working pressure decreases. This is caused by the difference between the working pressure of the pump and the ambient pressure. The larger the pressure difference, the more the elastic diaphragm bulges, lowering the effective input volume of the pump. This problem is alleviated by a newly developed diaphragm stabilization system. Diaphragm roughing pumps equipped with this system pump down faster than pumps without the system. Due to the enhanced suction speed, they also ensure greater process reliability. The first application of the diaphragm stabilization system (patent applied for) is in a newly developed diaphragm roughing pump. This pump is driven by a compact, brushless DC motor with very great efficiency. The pump is available in 24‐volt DC and 90‐ to 264‐volt, 50/60‐Hz AC versions. OEM and portable versions are available.     

罗茨真空机组预抽阶段的抽气特性比较研究

针对罗茨泵真空机组在启动预抽阶段的三种工作模式——旁通式、直通式和变频式,分别建立了简化计算模型,推导得出罗茨泵进入正常稳态工作之前罗茨机组的有效抽速计算公式,以及被抽容器的抽气时间计算方法.通过一个计算示例,对比得出了三种不同启动预抽方式的压力-时间曲线,结果表明,直通式、旁通式、变频式工作模式下容器的抽气时间依次减...     

Selbsttrocknende Membran‐ Vakuumpumpen für feuchte Gase

Diaphragm vacuum pumps have proved their superiority as dry‐running systems over other types of vacuum pumps in many applications, and in particular in the medical, analysis, and process engineering sectors, as well as in the chemical industry. These pumps deliver the media without any contamination of content, have a high gas tightness, and can be designed as chemically resistant with regard to those parts which come in contact with the media. Although they are in principle relatively insensitive towards condensates which may be formed or conveyed with the media, liquids in the vapor or gas flow may be the cause for the prolongation of a vacuum process, which can be considerable and is certainly undesirable. This applies in particular to applications involving multi‐user vacuum systems in chemical laboratories, which under certain circumstances may contain very substantial volumes of condensates, and to the use of pumps in steam sterilizers (autoclaves) and vacuum drying cabinets. These examples of applications will be considered in greater detail hereinafter. The condensates which occur in the pump head of a diaphragm vacuum pump cause interference in that — due to re‐evaporation during the suction cycle — they incur a substantial reduction in the usable suction capacity of the pump. This problem can be resolved by means of a drying system for diaphragm vac uum pump heads. The drying system makes use in this case of the pressure differential which pertains between the pump chamber and the atmosphere outside the pump. The function of the drying system can be described as follows: A solenoid valve vents the pump head in a cyclic manner, with the result that liquid in the pump head will be blown out, while the process vacuum in the process engineering system will continue to be maintained. Diaphragm vacuum pumps equipped with this drying system have provided excellent results, for example in the chem ical laboratory, both in individual diaphragm vacuum pumps as well as in multi‐user vacuum systems. Extremely good experience has also been gained in the evacuation of sterilizer autoclaves and vacuum drying cabinets with the use of diaphragm vacuum pumps fitted with the drying system. When using the drying system on steam sterilizer autoclaves, another favorable effect is also encountered: The vapor fraction in the pumping medium is cooled in the diaphragm pump head to below the evaporation or boiling temperature, with the result that the vapour condenses. This reduces its volume to a fraction of the initial value, which is the equivalent of an additional suction capacity, in the same manner as with a condenser. The condensate which occurs with this process is blown out of the pump heads by the drying system, and, as a result, can no longer cause interference due to re‐evaporation.     

船用高压组合机械密封装置的设计

水下舰艇武器推进泵的机械密封装置的工作压力波动、使用频率小,并要求可靠性高。根据这些使用要求和技术要求,对高压组合机械密封装置进行研究,分析了关键技术,给出结构设计方法、关键参数的选择以及设计计算方法,并对密封环受力变形问题采用有限元法分析。介绍了专门针对船用高压机械密封进行可靠性试验的试验装置,并对所设计的机械密封装置进行了试验,试验结果表明该密封装置能够很好地满足使用要求。     

干式罗茨真空泵磁流体密封的研究

本文设计了干式罗茨真空泵的磁流体密封 ,对磁流体密封磁场进行了有限元分析 ,针对不同文献中磁流体密封耐压公式的不严密甚至错误 ,作者对磁流体密封耐压公式进行了严密推导 ,在实验台上验证了磁流体真空密封的效果、耐压能力及转速对真空度的影响。本设备近十年的连续运转证明 :在干式罗茨真空泵采用磁流体密封效果良好     

油封机械真空泵噪声机理再探

提出了一个新的观点，在油封机械真空泵中除了油锤现象产生的噪声外，同时存在着程度不同的汽蚀现象所引起的噪声，严重时还会造成汽蚀破坏，它取决于极限压力的高低，泵的大小和转速的高低，此外在滑阀真空泵中还存在着机械撞击噪声，提出了降低上述噪声的相应措施。     

Non‐contact vacuum pumps

Non‐contact oil‐free vacuum pumps are widely used in different technological processes such as nanomaterials industry, pharmaceuticals industry, food industry, medicine, etc., thanks to absence of oil seal, high discharge, long operating life, yet low energy consumption. Scroll pumps are of particular interest as they make it possible to isolate bearing assemblies with grease from the working volume of the pump with the help of bellows. Pumping characteristics of non‐contact vacuum pumps are greatly influenced by backward leakage through slot channels of the rotor mechanism. The conductance is the main value characterizing backward leakage. In this paper an efficient method for prompt conductance calculation of slot channels with any geometry with the minimal clearance at a certain point along gas flow direction is presented. The calculation error of the presented method does not exceed 6%. The presented method was used in mathematical models for the pumping process of scroll pumps, claw pumps and Roots pumps. This method is recommended for pumping characteristics calculation of different non‐contact pumps and gas flow rates in vacuum systems channels.     

Kennfeldanalyse einer Schraubenvakuumpumpe

Operating Performance of Screw Vacuum Pumps This paper presents detailed analyses of the operating performance of a dry‐running screw vacuum pump. The characteristic parameters, suction speed and final attainable pressure ‐ which primarily define the operating performance of screw vacuum pumps ‐ are explored in experimental and theoretical investigations. Experiment and simulation in combination are used to show the correlation between the main physical and technical characteristics and the operating performance of screw vacuum pumps. This basic knowledge is essential for understanding the specific machine physics of positive displacement vacuum pumps, especially for screw vacuum pumps, and is useful in view of further design and optimization processes. The experiment covers measurements of the operating performance of the investigated isochoric screw vacuum pump working against ambient pressure. As operating parameters intake pressure (1000mbar to 10^‐3mbar) and rotor speed are varied over a wide range. The theoretical analysis of the operating performance contains simplifying models as well as simulations of the thermodynamic processing. The impact of external leakages, clearance vacuum flows and further losses on operating performance are described in detail.     

运行参数与轴流泵流体激励力的关系

泵内非定常压力脉动会引发泵体的结构振动,运行工况的变化会改变泵内流场的流动状态,从而对泵的振动特性产生影响。通过流体力学计算软件FLUENT对某台立式轴流泵内流场进行仿真计算,分别改变泵运行速度和流量两项参数,得出转速改变后,叶轮受到的力会偏离了相似理论的计算值;工作在小流量时,泵内压力脉动与叶轮受力均大于大流量工况,且叶轮区域出现流动分离现象,不利于振动噪声的控制。     

Effects of Environmental Oxygen Content and Dissolved Oxygen on the Surface Tension and Viscosity of Liquid Nickel

The NASA Marshall Space Flight Center’s electrostatic levitation (ESL) laboratory has recently added an oxygen partial pressure controller. This system allows the oxygen partial pressure within the vacuum chamber to be measured and controlled in the range from approximately \(10^{-28}\,{\mathrm {to}}\,10^{-9}\) bar, while in a vacuum atmosphere. The oxygen control system installed in the ESL laboratory’s main chamber consists of an oxygen sensor, oxygen pump, and a control unit. The sensor is a potentiometric device that determines the difference in oxygen activity in two gas compartments (inside the chamber and the air outside of the chamber) separated by an electrolyte. The pump utilizes coulometric titration to either add or remove oxygen. The system is controlled by a desktop control unit, which can also be accessed via a computer. The controller performs temperature control for the sensor and pump, has a PID-based current loop and a control algorithm. Oxygen partial pressure has been shown to play a significant role in the surface tension of liquid metals. Oxide films or dissolved oxygen may lead to significant changes in surface tension. The effects on surface tension and viscosity by oxygen partial pressure in the surrounding environment and the melt dissolved oxygen content will be evaluated, and the results will be presented. The surface tension and viscosity will be measured at several different oxygen partial pressures while the sample is undercooled. Surface tension and viscosity will be measured using the oscillating droplet method.     

Uncertainty analysis of the high vacuum part of the orifice-flow-type pressure standard

The orifice-flow-type pressure standard is commonly accepted as primary standard for vacuum gauge calibration in the high vacuum gas pressure range. It consists of two parts—a high vacuum part and a flowmeter. Practical questions arising at design of the standard have to be answered based on the standard uncertainty analysis.The analysis of the uncertainty sources in the high vacuum part except deviations from the Maxwellian distribution is given in the paper. Uncertainty of a precise flowmeter is taken from references for comparison. It follows from the analysis that uncertainties caused by some sources at routinely achievable parameters are negligibly small and further improvement brings no benefit. The crucial quantities influencing the total uncertainty are the temperature of the chamber and the flowmeter, the outgassing rate from the inner surfaces, the ultimate pressure of the pump and the additional (detrimental) pumping speed. The pumping speed of the main pump has to be “sufficiently higher” than the orifice conductance.     

关于真空除气使用的真空泵情况分析与讨论

为使真空泵的抽气能力能最大程度适应除气过程,在选用真空泵时需考虑到搅拌气体数量、设备表面放气和设备的漏气率.随着钢液真空处理技术的发展,能保证高效率、有效地脱除钢液中的气体成为迫切的问题.由于抽出气体有灰尘,维修次数多等综合因素,应采用抽气能力大、运转可靠性强、结构简单的蒸汽喷射泵而非机械泵.但近年来,钢液真空处理真空...