Forty-channel phased array ultrasonic probe using 0.91Pb(Zn(1/3 )Nb(2/3))O(3)-0.09PbTiO(3) single crystal

A 0.91Pb(Zn(1/3)Nb(2/3))O(3)-0.09PbTiO (3) (PZN-PT) single crystal with high electromechanical coupling factor (k(33))>90% has been used to fabricate a 40-channel phased array ultrasonic probe with greater sensitivity and broader bandwidth than conventional probes. This probe has a center frequency of 3.5 MHz and an aperture of about 6.0x7.5 mm. The standard probe fabrication process was modified for PZN-PT. The dispersion of echo signals was within +/-20% of the mean value. After recovery poling, the echo amplitude of the PZN-PT single-crystal probe is 8 and 5 dB higher than that of one- and two-matching-layer PZT probes, respectively. Moreover, the fractional bandwidth of the single-matching-layer PZN-PT probe is broader than that of the two-matching-layer PZT probes. The PZN-PT single crystals provide great improvements in the sensitivity and bandwidth of phased array probes.     

A 20 MHz single-element ultrasonic probe using 0.91Pb(Zn(1/3 )Nb(2/3))O(3)-0.09PbTiO(3) single crystal

A 20 MHz single-element ultrasonic probe using 0.91Pb(Zn(1/3 )Nb(2/3))O(3)-0.09PbTiO(3) (PZN-PT 91/9) single crystal has been fabricated. The single crystal of PZN-PT 91/9 orientated to the (001) plane has longitudinal coupling factor of k(33)>90%, which is much larger than the k(33)=70 to 80% of conventional Pb(Zr(1-x),Ti(x))O(3) (PZT) based ceramics. A single crystal of PZN-PT 91/9 without inclusion or crack has been grown with dimensions of about 25x15x5 mm by the self-flux method. Because mechanical strength in the fabrication of disk transducers orientated to the (001) plane was sufficiently strong, under the same conditions as are applied to conventional PZT ceramics, a piston single-element probe with a diameter of 2.0 mm and a frequency of 20 MHz was successfully fabricated. The bandwidth of the PZN-PT 91/9 probe was 13-26 MHz, which was 4 MHz broader than that of the conventional PZT probe.     

Design and fabrication of PZN-7%PT single crystal high frequency angled needle ultrasound transducers

A high-frequency angled needle ultrasound transducer with an aperture size of 0.4 x 0.56 mm2 was fabricated using a lead zinc niobate-lead titanate (PZN- 7%PT) single crystal as the active piezoelectric material. The single crystal was bonded to a conductive silver particle matching layer and a conductive epoxy backing material through direct contact curing. A parylene outer matching layer was formed by vapor deposition. Angled needle probe configuration was achieved by dicing at 45 degrees to the single crystal poling direction to satisfy a clinical request for blood flow measurement in the posterior portion of the eye. The electrical impedance magnitude and phase of the transducer were 42 Omega and -63 degrees , respectively. The measured center frequency and the fractional bandwidth at -6 dB were 43 MHz and 45%, respectively. The two-way insertion loss was approximately 17 dB. Wire phantom imaging using fabricated PZN-7%PT single crystal transducers was obtained and spatial resolutions were assessed.     

Multi-layered PZT/polymer composites to increase signal-to-noise ratio and resolution for medical ultrasound transducers

Increasing transducer bandwidth and signal-to-noise ratio (SNR) is fundamental to improving the quality of medical ultrasound images. In previous work, the authors have proposed the use of multi-layer 1-3 PZT/epoxy composites to increase both but have encountered significant fabrication challenges. These difficulties include making the bond thickness between the layers extremely small relative to the ultrasound wavelength and aligning the posts of the composite to increase the coupling coefficient. The authors have routinely achieved a bond thickness of less than 5 mum but aligning the posts is more complicated. Finite element (PZFlex; Weidlinger, Assoc., New York, NY and Los Altos, CA) simulations show that the pulse-echo SNR and bandwidth degrade significantly with misalignment of the posts. Alignment of greater than 90% of the post pitch (i.e., tolerance of 10 to 20 mum) is required to obtain significant increases in SNR and bandwidth relative to conventional transducer arrays. This will be a difficult tolerance for large-scale production. Thus, the authors have developed a multi-layer composite hybrid array that will not require post alignment. This structure consists of a layer of 5 MHz 1-3 composite material on top of conventional 5 MHz PZT, which will provide greater SNR relative to conventional composites and increased bandwidth over multi-layer PZT. PZFlex simulations show that for a 2 MHz linear array element, the 2 layer hybrid structure increases the pulse-echo SNR by 7.5 dB over that from a single layer PZT element. Even without a matching layer, an increase in the -6 dB pulse-echo fractional bandwidth from 22% for the PZT element to 35% for the hybrid element was also predicted. Experimentally, in a 32 element array, the authors achieved an increase of 5.2 dB in SNR and an increased -6 dB bandwidth from 23 to 30%. In vitro and in vivo images showed corresponding improvements.     

Micro-machined high-frequency (80 MHz) PZT thick film linear arrays

This paper presents the development of a micromachined high-frequency linear array using PZT piezoelectric thick films. The linear array has 32 elements with an element width of 24 μm and an element length of 4 mm. Array elements were fabricated by deep reactive ion etching of PZT thick films, which were prepared from spin-coating of PZT sol-gel composite. Detailed fabrication processes, especially PZT thick film etching conditions and a novel transferring-and-etching method, are presented and discussed. Array designs were evaluated by simulation. Experimental measurements show that the array had a center frequency of 80 MHz and a fractional bandwidth (-6 dB) of 60%. An insertion loss of -41 dB and adjacent element crosstalk of -21 dB were found at the center frequency.     

Linear electro-optic properties of orthorhombic PZN-8%PT single crystal

The optical transmittance spectra of relaxor ferroelectric 0.92Pb(Zn(1/3)Nb(2/3))O(3)-0.08PbTiO(3) (PZN-8%PT) single crystals poled along different directions have been systematically studied at room temperature. After being poled along the [011] direction, the transmittance of induced orthorhombic PZN-8%PT single crystal is more than 50% from 0.5 to 5.7 μm, which is much higher than that poled along the [001] and [111] directions. The refractive indices and linear electro-optic properties of the orthorhombic PZN-8%PT single crystal were characterized at a wavelength of 632.8 nm. Large electro-optic responses were observed, (γ33) = 220 pm/V, (γ13) = 62 pm/V, and (γ23) = 23 pm/V. Thus, orthorhombic PZN-8%PT single crystal is a promising material for high-performance electro-optic devices.     

Elastic, piezoelectric, and dielectric properties of 0.955Pb(Zn(1/3)Nb(2/3))O(3)-0.45PbTiO(3 ) single crystal with designed multidomains

The elastic, piezoelectric, and dielectric properties of a 0.955Pb(Zn(1/3)Nb(2/3))O(3)-0.045PbTiO(3 ) (PZN-4.5%PT) multi-domain single crystal, poled along [001] of the original cubic direction, have been determined experimentally using combined resonance and ultrasonic methods. At room temperature, the PZN-4.5%PT single crystal has rhombohedral symmetry. After being poled along [001], four degenerate states still remain. Statistically, such a domain-engineered crystal may be treated as having an average tetragonal symmetry, and its material constants were determined based on 4 mm symmetry. It was confirmed that the electromechanical coupling coefficient k(33) for the domain-engineered samples is >90%, and the piezoelectric constant d(33) is >2000 pC/N. A soft shear mode with a velocity of 700 m/s was found in the [110] direction. From the measured experimental data, the orientational dependence of phase velocities and electromechanical coupling coefficients was calculated. The results showed that the transverse and longitudinal coupling coefficients, k(31) and k(33), reach their maximum along [110] and [001], respectively.     

Characterization of lead zirconate titanate ceramics for use in miniature high-frequency (20-80 MHz) transducers

The material properties of lead zirconate titanate (PZT) ceramics for operation in the thickness mode at frequencies as high as 80 MHz are reported. Each of the ceramics tested showed a reduction in k (t) with increasing frequency. In a fine-grained PZT, values of k(t) as high as 0.44 were measured at 80 MHz. The effects of grain size were also evident in the measurement of frequency dependent mechanical losses. Experimental and theoretical analysis of a 1 mmx1 mm, 45 MHz PZT transducer verified the validity of the measurements of the properties and demonstrated excellent insertion loss and bandwidth characteristics. The minimum insertion loss of -17.5 dB is in good agreement with theory and is a marked improvement over the performance of polymer devices. Details on the fabrication and testing of high frequency ceramic transducers are described.     

3-D ultrasound imaging using a forward-looking CMUT ring array for intravascular/intracardiac applications

Forward-viewing ring arrays can enable new applications in intravascular and intracardiac ultrasound. This work presents compelling, full-synthetic, phased-array volumetric images from a forward-viewing capacitive micromachined ultrasonic transducer (CMUT) ring array wire bonded to a custom integrated circuit front end. The CMUT ring array has a diameter of 2 mm and 64 elements each 100 microm x 100 microm in size. In conventional mode, echo signals received from a plane reflector at 5 mm had 70% fractional bandwidth around a center frequency of 8.3 MHz. In collapse mode, 69% fractional bandwidth is measured around 19 MHz. Measured signal-to-noise ratio (SNR) of the echo averaged 16 times was 29 dB for conventional operation and 35 dB for collapse mode. B-scans were generated of a target consisting of steel wires 0.3 mm in diameter to determine resolution performance. The 6 dB axial and lateral resolutions for the B-scan of the wire target are 189 microm and 0.112 radians for 8 MHz, and 78 microm and 0.051 radians for 19 MHz. A reduced firing set suitable for real-time, intravascular applications was generated and shown to produce acceptable images. Rendered three-dimensional (3-D) images of a Palmaz-Schatz stent also are shown, demonstrating that the imaging quality is sufficient for practical applications.     

Single crystal PZN/PT-polymer composites for ultrasound transducer applications

Single crystal relaxor ferroelectrics of PZN-8%PT were investigated for potential application in ultrasound transducers. The full set of electromechanical properties was determined using combined resonance and laser interferometry techniques. Ultra-high length extensional coupling (k(33)) of 0.94 was observed, a 25% increase over Navy Type VI PZT ceramics. The thickness extensional coupling (k(t)) of 0.48 was comparable to PZT compositions, and the compliance S(33)(E) was a factor of six greater. To maximize height extensional coupling (k'(33)), while minimizing length extensional coupling k(31) in array elements, it was necessary to align the elements along the 100 crystallographic direction in the x-y plane. Mode coupling plots and test samples for array elements determined that width-to-height ratios of less than 0.5 were desired, similar to the requirement for polycrystalline PZT ceramics. Modeling of 1-3 composites and experimental results demonstrated that thickness coupling greater than 0.80 could be achieved with a 40% to 70% volume fraction of PZN-PT. Although this is a substantial increase over PZT 1-3 composites, with a thickness coupling coefficient of 0.66, it represents a smaller fraction of the length extensional coupling k(33). This reduction may be a consequence of the increased compliance of PZN-PT, which results in significant clamping by the polymer matrix. Ultrasonic transducers fabricated using PZN-8%PT 1-3 composites achieved experimental bandwidths as high as 141%. The pulse-echo responses displayed good agreement with modeled results using the Redwood equivalent circuit.     

Samarium and manganese-doped lead titanate ceramic fiber/epoxy 1-3 composite for high-frequency transducer application

Samarium- (Sm) and manganese- (Mn) doped lead titanate ceramic fibers with a diameter of 35 /spl mu/m were prepared using a sol-gel method. The X-ray diffraction pattern shows that the fibers have a pure perovskite structure. The 1-3 composite disks with a thickness of 31-41 /spl mu/m and with ceramic volume fraction of /spl sim/0.68 have been prepared using the samarium and manganese doped lead titanate (PSmT) fibers. The resonance characteristics of the poled composite disks were measured. A focused transducer was fabricated using a concave 1-3 composite disk with nonuniform thickness in order to enhance its bandwidth. The insertion loss (IL), pulse-echo response and frequency spectrum of the composite transducer were measured. The center frequency of the transducer was /spl sim/31 MHz with a -3 dB bandwidth of /spl sim/123% and a low IL of 29.3 dB.     

A dual frequency ultrasonic probe for medical applications

A dual frequency probe using a multilayer ceramic is proposed for simultaneously obtaining a high resolution B mode and a high sensitivity Doppler mode image. This ceramic consists of two layers in which the poling directions are opposite and the individual thicknesses are different. It is possible to control the values of relative electromechanical coupling factors in the fundamental and the second harmonic by changing the thickness ratio. A thickness ratio of 1:0.7 was decided from computer simulation based on the Mason's model. A sufficient resolution has been shown from the fact that the intima of the carotid artery could be distinguished by an actually fabricated probe with dual frequencies of 3.75 and 7.5 MHz. Also, the sensitivity of this probe in the Doppler mode at 5 cm depth from the surface has been improved as much as 5 dB over that of a conventional one     

25 MHz ultrasonic transducers with lead- free piezoceramic, 1-3 PZT fiber-epoxy composite, and PVDF polymer active elements

This paper presents the fabrication and characterization of single-element ultrasonic transducers whose active elements are made of lead-free piezoceramic, 1-3 PZT/polymer composite and PVDF film. The lead free piezoelectric KNNLT- LS(K_0.44Na_0.52Li_0.04)(Nb_0.84Ta_0.10S_0.06b)O₃ powders and ceramics were prepared under controlled humidity and oxygen flow rate during sintering. Due to its moderate longitudinal piezoelectric charge coefficient (175 pC/N) and k_t of 0.50, the KNN-LT-LS composition may be a good candidate for highfrequency transducer applications. PZT fibers with 25 μm diameter formed by the viscose suspension spinning process were incorporated into epoxy to fabricate 1-3 composites with the averaged k_t = 0.64 and d₃₃ = 400 pC/N. Using KNN-LS-LT ceramic, 1-3 PZT fiber composite, and PVDF film, 3 different unfocused single element transducers with center frequencies of 25 MHz were fabricated. The acoustic characterization of the transducers demonstrated that wideband and low insertion loss could be obtained employing KNN-LS-LT ceramic. The ?6 dB bandwidth and insertion loss were 70% and ?21 dB, respectively. In comparison, the insertion loss of the ceramic transducer was much smaller than those made with 1-3 composite and PVDF film. This was attributed to closer electrical impedance match to 50 Ω and higher thickness coupling coefficient of the ceramic transducer.     

Fabrication and characterization of annular thickness mode piezoelectric micro ultrasonic transducers

Micromachining techniques, in combination with low temperature ceramic composite sol-gel processing, have been used to fabricate annular array thickness-mode piezoelectric micro ultrasonic transducers (Tm-pMUTs). The processing techniques of low temperature (710 degrees C) composite sol-gel ceramic (sol + ceramic powder) deposition and wet etching were used to deposit and structure 27-microm thick lead zirconate titanate (PZT) films on silicon substrates to produce annular array Tm-pMUTs. Using these techniques, high quality PZT materials with near bulk permittivity have been obtained. The Tm-pMUT devices were shown to resonate at approximately 60 MHz in air and 50 MHz in water. From resonance measurements k(t) values ranging between 0.2 and 0.47 have been calculated and shown to depend on the level of porosity within the film. Lower values of kt were observed for films with higher levels of porosity, which was attributed to the relative decrease in the effective piezoelectric coefficient epsilon(33) with respect to stiffness and permittivity as a function of increasing porosity. This paper presents the successful micro-fabrication of a Tm-pMUT device and discusses the optimization of the poling conditions and effect of PZT microstructure on the coupling coefficient k(t). Pulse echo measurements in water, showing a -6 dB center frequency of 53 MHz and 47% -6 dB bandwidth, using a target 15 mm away from the transducer, have been included to demonstrate successful operation of the device. Full analysis of these results will be conducted in later publications.     

Multi-layered PZT/polymer composites to increase signal-to-noise ratio and resolution for medical ultrasound transducers part II: thick film technology

For pt.I, see ibid., vol.46, no.4, p.961-71 (1999). Increasing transducer bandwidth and signal-to-noise ratio (SNR) is fundamental to improving the quality of medical ultrasound images. In previous work, we have proposed the use of multi-layer 1-3 PZT/polymer composites to increase both, but have encountered significant fabrication challenges. Thus, we have developed a multi-layer composite hybrid array that will not require post alignment. Starting from a 2-MHz, three-layer PZT-5H, thick film transducer designed for 1.5-D arrays, cuts are made only through the top layer and back-filled with epoxy, forming a composite layer on top of two ceramic layers. Finite element (PZFlex) simulations show that for a 2-MHz phased-array element with a single matching layer, the three-layer hybrid structure increases the pulse echo SNR by 11 dB versus a single layer PZT element and improves -6 dB pulse echo fractional bandwidth by a factor of 1.4. Composite hybrid arrays fabricated in our laboratory showed an improvement in SNR of 6 to 11 dB over a PZT control and an increase in -6 dB bandwidth by a factor of 1.1. Images from a phased-array scanner confirmed these improvements     

Full tensorial elastic, piezoelectric, and dielectric properties characterization of [011]-poled PZN-9%PT single crystal

Transverse piezoelectric property of 0.91Pb(Zn(1/3)Nb(2/3))O(3)-0.09PbTiO(3) (PZN-9%PT) single crystal poled along [011] direction under different fields have been investigated, the poling field giving the best property was between 350 and 650 V/mm at room temperature. Full tensorial elastic, dielectric, and piezoelectric properties of PZN-9%PT single crystal poled along the [011] direction under 500 V/mm have been determined by resonance and ultrasonic methods. It was found that the electromechanical coupling coefficients k(32) and k(33) can reach 0.90 and 0.89 and the piezoelectric coefficients d(32) and d(15) are -1705 and 2012 pC/N, respectively. This complete set of physical properties can provide convenience for piezoelectric device fabrication and domain engineering studies.     

Bandwidth and resolution enhancement through pulse compression

A novel pulse compression technique is developed that improves the axial resolution of an ultrasonic imaging system and provides a boost in the echo signal-to-noise ratio (eSNR). The new technique, called the resolution enhancement compression (REC) technique, was validated with simulations and experimental measurements. Image quality was examined in terms of three metrics: the eSNR, the bandwidth, and the axial resolution through the modulation transfer function (MTF). Simulations were conducted with a weakly-focused, single-element ultrasound source with a center frequency of 2.25 MHz. Experimental measurements were carried out with a single-element transducer (f/3) with a center frequency of 2.25 MHz from a planar reflector and wire targets. In simulations, axial resolution of the ultrasonic imaging system was almost doubled using the REC technique (0.29 mm) versus conventional pulsing techniques (0.60 mm). The -3 dB pulse/echo bandwidth was more than doubled from 48% to 97%, and maximum range sidelobes were -40 dB. Experimental measurements revealed an improvement in axial resolution using the REC technique (0.31 mm) versus conventional pulsing (0.44 mm). The -3 dB pulse/echo bandwidth was doubled from 56% to 113%, and maximum range sidelobes were observed at -45 dB. In addition, a significant gain in eSNR (9 to 16.2 dB) was achieved.     

A single-element transducer with nonuniform thickness for high-frequency broadband applications

The design, fabrication, and evaluation of a high-frequency single-element transducer are described. The transducer has an annular geometry, with the thickness of the piezoelectric material increasing from the center to the outside. This single-element annular transducer (SEAT) can provide a broader frequency range than a conventional single-element transducer with a uniform thickness (single-element uniform transducer, or SEUT). We compared the characteristics of a SEAT and a SEUT. Both transducers used 36deg-rotated, Y-cut lithium niobate (LiNbO₃) material. The SEAT had a diameter of 6 mm and comprised 6 subelements of equal area (electrically connected by a single electrode on each side) whose thickness ranged from 60 mum (center) to 110 mum (outside), which resulted in the center frequency of the subelements varying from 59.8 MHz to 25 MHz. The overall center frequency was 42.4 MHz. The annular pattern was constructed using an ultrasonic sculpturing machine that reduced the root-mean-square value of the surface roughness to 454.47 nm. The bandwidth of the SEAT was 19% larger than that of the SEUT. However, compared with the SEUT, the 2-way insertion loss of the SEAT was increased by 3.1 dB. The acoustic beam pattern of the SEAT was also evaluated numerically by finite-element simulations and experimentally by an ultrasound beam analyzer. At the focus (10.5 mm from the transducer surface), the -6 dB beam width was 108 mum. There was reasonable agreement between the data from simulations and experiments. The SEAT can be used for imaging applications that require a wider transducer bandwidth, such as harmonic imaging, and can be manufactured using the same techniques used to produce transducers with multiple frequency bands.     

A miniaturized catheter 2-D array for real-time, 3-D intracardiac echocardiography

The design, fabrication, and characterization of a 112 channel, 5 MHz, two-dimensional (2-D) array transducer constructed on a six layer flexible polyimide interconnect circuit is described. The transducer was mounted in a 7 Fr (2.33 mm outside diameter) catheter for use in real-time intracardiac volumetric imaging. Two transducers were constructed: one with a single silver epoxy matching layer and the other without a matching layer. The center frequency and -6 dB fractional bandwidth of the transducer with a matching layer were 4.9 MHz and 31%, respectively. The 50 omega pitch-catch insertion loss was 80 dB, and the typical interelement crosstalk was -30 dB. The final element yield was greater than 97% for both transducers. The transducers were used to acquire real-time, 3-D images in an in vivo sheep model. We present in vivo images of cardiac anatomy obtained from within the coronary sinus, including the left and right atria, aorta, coronary arteries, and pulmonary veins. We also present images showing the manipulation of a separate electrophysiological catheter into the coronary sinus.     

Characterization of dual-electrode CMUTs: demonstration of improved receive performance and pulse echo operation with dynamic membrane shaping

A 1-D dual-electrode CMUT array for intracardiac echocardiography (ICE) with a center frequency of 8 MHz has been designed, fabricated, and used to demonstrate the potential of dual-electrode CMUTs. Using a dual-electrode CMUT, 9 dB higher receive signal level is obtained over the 6 dB fractional bandwidth as compared with a conventional CMUT with an identical center electrode biased close to its collapse voltage. Because the same device shows a 7.4 dB increase in maximum pressure output, 16.4 dB overall improvement in transduction performance has been achieved as compared with conventional CMUT. A net peak output pressure of 1.6 MPa on the dual-electrode CMUT membrane with tone burst excitation at 12 MHz is also reported. The frequency response of the dual-electrode CMUT is similar to that of a conventional CMUT with the same membrane geometry with about 15% increase in the center frequency. Monostatic operation of dual-electrode CMUTs shows that the high performance of the transducer is applicable in typical pulse-echo imaging mode of operation. With dynamic shaping of the CMUT membrane to optimize the transmit-and-receive modes of operation separately during each pulse-echo cycle, dual-electrode CMUT is a highly competitive alternative to its piezoelectric counterparts.