Wear analysis of electrolytically dressed wheels for finishing substrate materials

Finishing of silicon wafers is a billion dollar global business. The present process chain consists of several processes, which lead to long production times and increase the cost of the finished materials. In the recent years, several processes have been experimented as an alternate process for finishing substrate wafers with stringent specifications. However, there are no successful alternate processes, which have been adopted by the wafer processing industries. The electrolytic in-process dressing (ELID) grinding is one of the processes that has already been experimented on silicon wafers for producing mirror surface finish. However, the flatness achieved from the ELID grinding is not reported. The main influence on the flatness of the wafers during ELID grinding may be due to the wear of the grinding wheels. The wear mechanism of electrolytically dressed wheels has not been fully understood and reported. The main objective of this study is to report the wear behaviors of the wheels during thinning and fine finishing of substrate wafers. The experimental results provide the conditions for utilization of the non-linear behavior of the electrolytically dressed grinding wheels for thinning and fine finishing processes.     

光学玻璃的精密加工技术

光学玻璃作为一种典型的脆硬材料,采用普通的加工方法难以进行高效精密加工。本文介绍了光学玻璃的高效精密特种加工技术,对ELID法、激光加工、超声磨削以及精密铣削的最新研究进展进行了综述。采用ELID技术,通过控制加工工艺参数,使砂轮单个磨粒的最大切削深度小于脆性材料的临界切削厚度,实现了脆性材料的塑性加工,并得到精密光滑的表面;在加工非球曲面时,可使零件的精加工抛光量降到最低。最新激光加工技术通过增加预热激光束,极大降低已加工表面的热应力及拉伸应力,使得加工质量有了大幅提高。超声波磨削加工不仅改善了表面完整性,而且提高了加工效率,通过选用适当的刀具和工艺参数,使被加工工件表面粗糙度值比普通磨削降低了30%～40%。光学玻璃精密铣削技术通过优化刀具、加工方式及工艺参数,可提高加工质量和效率、降低加工成本。     

ELID镜面磨削技术——应用

应用ELID磨削技术，分别在平面、内圆和外圆磨床上对多种典型硬脆材料实现了精神镜面磨削。结果表明，该技术精度高、成本低、工艺简单可靠，具有广阔的应用前景。     

Development of surface reconstruction algorithms for optical interferometric measurement

Optical interferometry is a powerful tool for measuring and characterizing areal surface topography in precision manufacturing. A variety of instruments based on optical interferometry have been developed to meet the measurement needs in various applications, but the existing techniques are simply not enough to meet the ever-increasing requirements in terms of accuracy, speed, robustness, and dynamic range, especially in on-line or on-machine conditions. This paper provides an in-depth perspective of surface topography reconstruction for optical interferometric measurements. Principles, configurations, and applications of typical optical interferometers with different capabilities and limitations are presented. Theoretical background and recent advances of fringe analysis algorithms, including coherence peak sensing and phase-shifting algorithm, are summarized. The new developments in measurement accuracy and repeatability, noise resistance, self-calibration ability, and computational efficiency are discussed. This paper also presents the new challenges that optical interferometry techniques are facing in surface topography measurement. To address these challenges, advanced techniques in image stitching, on-machine measurement, intelligent sampling, parallel computing, and deep learning are explored to improve the functional performance of optical interferometry in future manufacturing metrology.     

ELID镜面磨削硬质合金的工艺参数实验研究

随着国防尖端技术的迅速发展,许多具有独特性能的新材料得到了日益广泛的应用,如光学玻璃、硬质合金。但采用传统磨削工艺加工这些材料很难得到良好的表面质量。在线电解砂轮修整(ELID)磨削技术是一项新的、高效的磨削方法,它有效地实现了许多难加工材料的超精密加工和高效加工。针对硬质合金的特性,用ELID磨削方法应用于硬质合金的精密加工,通过实验研究ELID磨削中工艺参数对加工表面的影响规律,找到了在一定条件下优化的工艺参数。     

玻璃精密模压成形的研究进展

玻璃精密模压成形是一种高效率、绿色环保的先进光学元件制造技术,近年来得到了飞速发展。本文首先介绍了光学元件的需求与种类,提出玻璃精密模压成形技术存在的问题。综述了国内外近年来精密模压成形光学透镜的重要研究进展,其中包括光学玻璃材料、模具材料与涂层、模具加工、模压过程仿真以及各种参数对透镜质量的影响。阐述了光学模压成形元件的坯料、镀膜技术和冷加工技术、成形元件的残余应力分布以及折射率、模具与玻璃间摩擦效应、模具的补偿技术、成形透镜质量的预测、模压技术的其他应用等。最后,对未来光学玻璃精密模压成形趋势进行了预测。     

结合ELID磨削与MAF工艺对复杂曲面的加工控制

在线电解修锐（electrolytic in-process dressing,ELID）磨削可以高效率地光整加工,而磁力研磨（magnetic abrasive finishing,MAF）具有柔性加工的特点。以三轴立式加工中心为平台,研发了一种结合ELID磨削与MAF的新型组合工艺。设计了ELID磨削工具和MAF工具头,提出了利用该组合工艺对复杂曲面进行加工的控制方法。分析了由于刀具磨损产生的工件形状误差,提出了误差补偿的措施,同时也讨论了避免加工干涉的方法。最后,开发出能同时适用于ELID磨削与MAF的复杂曲面光整加工控制与补偿软件。
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ELID磨削工艺参数对磨削力的影响

小口径非球面玻璃透镜因具有极高的成像质量和成像分辨率而被广泛应用于中高档镜头中。在线电解修整(Electrolytic In-Process Dressing,ELID)磨削作为高效的镜面磨削方法被广泛应用于硬、脆等加工材料的镜面磨削。在精密平面磨床上安装喷嘴电解ELID磨削系统对硬质合金材料进行了喷嘴电解方式ELID磨削试验研究。实验分析了磨削力随着砂轮转速、工作台进给速度、磨削深度三个磨削工艺参数变化的规律。同时,相同的磨削参数下,比较喷嘴电解方式ELID磨削和普通磨削的磨削力研究。试验结果表明,喷嘴电解方式ELID磨削能明显降低磨削力,与普通磨削相比较,能更好的实现硬质合金材料的超精密磨削加工。     

A study on an object transport system using ultrasonic wave excitation

The development of information and telecommunication industries leads to the development of semiconductor and optical industries. In recent years, the demand of optical components is growing due to the demand of faster network. On the other hand, conventional transport systems are not adequate for transporting precision optical components and semiconductors. Because the conveyor belt can damage precision optical components with contact force and a magnetic system would destroy the inner structure of semiconductor with magnetic field, a new system for transporting optical components and semiconductors is required. One of the alternatives to the existing systems is a transport system using ultrasonic wave excitation since it can transport precision components such as semiconductors and optical components without damage. In this paper, a transport system using 2-mode ultrasonic wave excitation was developed for transporting optical components and semiconductor, and its performance was evaluated. The relationship between transporting characteristics and flexural beam shapes were evaluated.     

Developments in integration of advanced monitoring systems

Monitoring is an important part of manufacturing process control and management. It plays a crucial role in ensuring agility in a manufacturing system, process robustness, responsiveness to client demands, and achievement of a sustainable production environment. Recent developments in information systems and computer technology allows for the implementation of new philosophies that integrate various monitoring applications into one complex system connected through company-wide IT systems and with systems operating throughout the whole supply chain. This paper reviews developments in the area of advanced monitoring and integration. Research on new approaches, standards, developed solutions, and company applications are presented. New directions of research and development in all areas of advanced monitoring and implementation of recent IT solutions are discussed.     

在线电解修整磨削与化学机械抛光相结合的蓝宝石基片组合加工技术

通过分析ELID磨削和CMP抛光两种加工技术的原理和特点,充分结合两种技术的优点,对蓝宝石基片进行超光滑纳米级精度的组合加工。从理论上分析和计算了蓝宝石的临界切削深度,以及在不同粒度砂轮下的脆性和延性磨削方式;采用不同粒度的砂轮对蓝宝石基片进行超精密ELID磨削实验,快速地获得高质量的加工表面,同时采用磁流变斑点法对加工面的亚表面损伤进行测量;利用CMP抛光技术对磨削加工后的表面进行光整,以减少磨削时产生的加工缺陷,使工件的表面质量得到进一步改善与提高,最终获得亚纳米级的表面粗糙度。     

微波铁氧体基片高效磨削技术研究

针对微波铁氧体基片的功能要求、材料特性和磨削工艺特点,通过大量实验分析了铁氧体基片ELID磨削与普通磨削的磨削力对比结果和形成原因,以及磨削力随工艺参数的变化规律,在此基础上,对ELID磨削效率、表面质量及磨削中出现的问题和解决途径进行了深入研究。实验结果表明,ELID磨削方法适用于微波铁氧体基片的高效磨削,保证了表面加工质量,将ELID磨削技术与平行研抛工艺结合起来,能够形成微波铁氧体基片精密高效的批量生产能力。     

The Effect of Optimum In-Process Electrolytic Dressing in the Ultraprecision Grinding of Die Steel by a Superabrasive Wheel

In recent years, grinding techniques for precision machining of brittle materials used in dies, moulds and optical parts have been improved by using superabrasive wheels and precision grinding machines. Optimum dressing using a superabrasive wheel makes possible the effective ultraprecision grinding of die steel (STD-11). In this study, a new system and the grinding mechanism for optimum in-process electrolytic dressing are proposed. This method can carry out optimum in-process electrolytic dressing of a superabrasive wheel. Optimum in-process electrolytic dressing is a good method for obtaining efficiency and ultraprecision grinding of STD-11.     

Development of a new lapping method for high precision ball screw (2nd report): Design and experimental study of an automatic lapping machine with in-process torque monitoring system

This paper presents a new approach in lapping process in making appropriate condition to improve the manufacturing operations for ball screw. After grinding, high precision ball screw is lapped by highly skilled operators. These operators have the ability to control and maintain the lapping conditions by sensing the lapping torque manually. Prior to lapping process, the effective diameter must be measured to find out the effective threaded profile along the screw shaft. The section which has a large effective diameter will be primarily lapped wherein the lapping torque is high. The aim of this study is to establish a control scheme on the automatic lapping machine for high precision ball screw in both measuring and finishing process. A prototyped horizontal lapping machine with in-process torque monitoring system has been designed, built, and tested. This is to determine the relationship among lapping torque, effective diameter, and error on travel to establish the measurement system to control the finishing operations efficiently and eventually improve and eliminate the various sorts of error components in a ball screw. The experimental results showed that the new lapping method could adequately predict the effective diameter and error on travel by observing the lapping torque.     

ELID镜面磨削技术——综述

在线电解修整砂轮（ELID）精密镜面磨削是近10来年发展起来的一项磨削新技术，在日本等国已经较广泛地应用于生产中。我国哈尔滨工业大学袁哲俊教授的ELID课题组从1993年起就开始了这方面的研究，现已成熟。本刊从这期起连续刊登5篇ELID镜面磨削技术文章，希望有助于这项技术在生产中推广使用。     

A review of the techniques for the mold manufacturing of micro/nanostructures for precision glass molding

Micro/nanostructured components play an important role in micro-optics and optical engineering, tribology and surface engineering, and biological and biomedical engineering, among other fields. Precision glass molding technology is the most efficient method of manufacturing micro/nanostructured glass components, the premise of which is meld manufacturing with complementary micro/nanostructures. Numerous mold manufacturing methods have been developed to fabricate extremely small and high-quality micro/nanostructures to satisfy the demands of functional micro/nanostructured glass components for various applications. Moreover, the service performance of the mold should also be carefully considered. This paper reviews a variety of technologies for manufacturing micro/nanostructured molds. The authors begin with an introduction of the extreme requirements of mold materials. The following section provides a detailed survey of the existing micro/nanostructured mold manufacturing techniques and their corresponding mold materials, including nonmechanical and mechanical methods. This paper concludes with a detailed discussion of the authors recent research on nickel-phosphorus (Ni-P) mold manufacturing and its service performance.     

陶瓷刀具材料的精密镜面磨削

在线电妥修整技术成功地解决了铸铁超微细金刚石／ＣＢＮ砂轮的修锐，使砂轮在磨削中始终能免保持锐利的磨削能力，使超细超硬磨料充分地发挥其高效率。笔者开发了ＥＬＩＤ磨削系统，对陶瓷刀具材料进行了精密镜面磨削试验，取得了良好效果。     

Developing a big data analytics platform for manufacturing systems: architecture,method, and implementation

Manufacturing industries have recently promoted smart manufacturing (SM) for achieving intelligence, connectedness, and responsiveness of manufacturing objects consisting of man, machine, and material. Traditional manufacturing platforms, which identify generic frameworks where common functionalities are shareable and diverse applications are workable, mainly focused on remote collaboration, distributed control, and data integration; however, they are limited to incorporating those characteristic achievements. The present work introduces an SM-toward manufacturing platform. The proposed platform incorporates the capabilities of (1) virtualization of manufacturing objects for their autonomy and cooperation, (2) processing of real and various manufacturing data for mediating physical and virtual objects, and (3) data-driven decision-making for predictive planning on those objects. For such capabilities, the proposed platform advances the framework of Holonic Manufacturing Systems with the use of agent technology. It integrates a distributed data warehouse to encompass data specification, storage, processing, and retrieval. It applies a data analytics approach to create empirical decision-making models based on real and historical data. Furthermore, it uses open and standardized data interfaces to embody interoperable data exchange across shop floors and manufacturing applications. We present the architecture and technical methods for implementing the proposed platform. We also present a prototype implementation to demonstrate the feasibility and effectiveness of the platform in energy-efficient machining.     

超声振动在非金属硬脆材料加工中的应用

非金属硬脆材料具有独特的性质,使其在诸多行业的应用日益广泛。本文从材料的去除机理入手,提出了非金属硬脆材料加工难的问题,由此引出超声振动加工。结合近年来相关的文献资料,对国内外非金属材料加工中超声振动的应用进行了系统综述。     

ELID镜面磨削技术：—金属结合剂砂轮的研制

采用铜粉、不铁粉、铸铁粉并辅助以改善铁粉和铸铁粉末冶金的金属添加剂作配方，烧制出适合现有生产条件的ELID磨削用砂轮磨块，性能检验表明该配方满足了ELID磨削要求。