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荷能粒子在类金刚石膜形成中的应用 总被引:1,自引:0,他引:1
类金刚石膜由于其优异性能和广泛应用已引起越来越多的研究兴趣。尽管各种化学和等离子体辅助CVD和PVD技术已用来沉积类金刚石膜(DLC膜),但其形成机理仍不清楚。本文通过分析荷能离子的作用,应用热峰效应和离子刻蚀效应来解释DLC膜的形成。 相似文献
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液相沉积类金刚石膜的沉积机理研究 总被引:2,自引:0,他引:2
根据电化学的相关理论,提出了钛合金表面液相沉积DLC膜的反应机理,给出了可能电极过程,认为膜是通过甲基阳离子的亲电取代反应而不断生长。讨论了氢原子对金刚石结构的稳定作用,并解释了实验条件对膜结构和性能的影响。 相似文献
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采用射频等离子体增强化学气相沉积法(RF-PECVD),在Low-E玻璃表面沉积类金刚石(DLC)薄膜作为保护层,通过耐洗刷试验和耐酸腐蚀试验研究了DLC薄膜对Low-E膜系的保护作用;同时对镀DLC薄膜的Low-E玻璃进行热处理,研究热处理后Low-E玻璃膜层结构、低辐射性能和光学性能的变化;然后通过摩擦磨损实验对镀DLC膜提高Low-E玻璃耐洗刷的原因进行分析。结果表明:DLC膜能够有效提高Low-E玻璃耐洗刷性和耐酸腐蚀性;并且DLC膜可以通过热处理去除,且热处理后的Low-E低辐射性能和光学性能未受到影响;一定厚度DLC膜能够有效降低Low-E玻璃摩擦系数,是提高Low-E玻璃耐磨性的主要原因。 相似文献
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以等离子体化学气相沉积技术在硬质合金刀具表面制备了类金刚石(DLC)涂层.研究了DLC涂层刀具和无涂层刀具的硬度,不同载荷、不同转速下两种刀具的摩擦磨损性能,以及在水润滑和油润滑条件下DLC涂层刀具的滑动摩擦行为.结果表明,DLC涂层刀具的平均硬度为2 099.9 HV,比无涂层刀具提高了48.3%;DLC涂层刀具的摩擦因数明显低于无涂层刀具,其磨损率随着载荷的增加而增大,随转速的增大而减小;油润滑比水润滑能更有效减缓摩擦作用. 相似文献
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探讨了液相沉积法制备类金刚石的新工艺,并采用XPS,Raman光谱和SEM等对所得膜的结构进行表征,证实所得的是类金刚石膜。液相沉积得到的类金刚石膜与钛合金基材之间具有较强的结合强度,并具有较低的摩擦系数和一定的耐磨损能力。 相似文献
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《国际聚合物材料杂志》2012,61(9):499-501
The authors studied the formation of a wafer-scale network of connected colloidal beads by reactive ion etching. The dimensions of the connections have been studied as a function of etching time for colloidal beads of different sizes, and could be well controlled. The authors have found that the nano-network forms and disappears for the same time of etching independent of the diameter of the polystyrene beads. With recent interest of connected colloidal networks in various optical sensing applications, such as photonic crystals, as surface-enhanced Raman scattering substrates, the studies have potential uses in the development of wafer-scale nanophotonic sensors. 相似文献
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Tribological properties of DLC films with different hydrogen contents in water environment 总被引:2,自引:0,他引:2
Diamond-like carbon (DLC) films were deposited on silicon wafers by thermal electron excited chemical vapor deposition (CVD). To change the hydrogen content in film, we used three types of carbon source gas (C7H8, CH4, and a CH4+H2) and two substrate bias voltages. The hydrogen content in DLC films was analyzed using elastic recoil detection analysis (ERDA). Tribological tests were conducted using a ball-on-plate reciprocating friction tester. The friction surface morphology of DLC films and mating balls was observed using optical microscopy and laser Raman spectroscopy.Hydrogen content in DLC films ranged from 25 to 45 at.%. In a water environment, the friction coefficient and specific wear rate of DLC films were 0.07 and in the range of 10−8–10−9 mm3/Nm, respectively. The friction coefficient and specific wear rate of DLC film in water were hardly affected by hydrogen content. The specific wear rate of DLC film with higher hardness was lower than that of film with low hardness. Mating ball wear was negligible and the friction surface features on the mating ball differed clearly between water and air environments, i.e., the friction surface on mating balls in water was covered with more transferred material than that in air. 相似文献
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Carbon films were deposited on silicon substrates by liquid electrochemical technique at low temperature (60 °C) in ambient atmosphere. Glass reactor, glass reactor with PTFE-coating inside, glass reactor with quartz-coating inside and quartz reactor were used with the same experimental setup to compare the effects of reactors on the deposition of carbon films. The applied potential, the distance between anode and substrate and the deposition time were fixed at 900 V (4.2 kHz, 50%), 6 mm and 5 h, respectively. The morphology and microstructure of the films were analyzed by scanning electron microscopy (SEM) and Raman spectroscopy. Energy Dispersive X-ray Spectrometry (EDX) was used to measure the composition of the films. The SEM observations showed that the films deposited using glass reactor were composed of crystals of several micrometers which contained nearly 10 at.% of Ca. Raman spectroscopy analysis confirmed that DLC films have been deposited, but with an obvious sharp peak at 1085 cm− 1 which is assigned to calcium carbonate (CaCO3) crystals. The glass reactor is the possible source of Ca because the electrolyte was composed of analytically pure acetone and deionized water with the proportion of Ca below the determination of AAS (atomic absorption emission spectrophotometer AA-6200). Using glass reactor with PTFE-coating inside could successfully avoid the impurity of Ca from the glass reactor, but new non-metallic impurities coming from the PTFE-coating made the films rough. Continuous and smooth films were deposited by using a glass reactor with quartz-coating inside and quartz reactor, which could avoid both Ca (< 1 at.%) and other impurities. Raman spectroscopy analysis confirmed typical DLC films without CaCO3. It can be concluded that the materials of the reactors could play an important role not only in the composition, but also the morphology and microstructure of films deposited by liquid electrochemical technique. 相似文献
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采用射频感应耦合离子源(ICP)在硅基底上沉积了DLC薄膜,通过原子力显微镜(AFM)和拉曼光谱对DLC薄膜的表面形貌及结构进行了分析表征,用UTM-2摩擦磨损试验仪对薄膜的摩擦学性能进行了测试。结果表明,利用该方法沉积制备的DLC薄膜具有良好的减摩抗磨性能。 相似文献
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铁电薄膜的微图形化研究 总被引:9,自引:0,他引:9
铁电薄膜在微电子和光电子技术中有着重要的或潜在的应用,可以制作随机存取存储器,热释电阵列探测器,铁民微电子机械系统等,在这些器件的制作过程中,铁电薄膜的微图形化是非常重要的一环,本文简要介绍了几种重要的铁电薄膜微图形化方法及有关研究结果,并比较了这些方法的优缺点。 相似文献
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《Journal of Adhesion Science and Technology》2013,27(6):769-784
The adhesion of Diamond-Like Carbon (DLC) films on Poly(ethyleneterephthalate) (PET) sheet has been characterised by tensile testing, using simple equipment. Three theoretical analyses of the tensile test are described, and their validity has been studied by calculating in three different ways the adhesion of the same samples (DLC on PET). The theoretically predicted adhesion from the longitudinal strain required for coating debonding did not appear to be an appropriate indicator for coatings on polymers. An approach consisting of measuring either the minimum or the maximum crack spacing led to results which were more consistent with the literature. The adhesion of DLC films on PET has been increased by a factor of 1.8 when a 5 min argon plasma treatment is applied prior to deposition. Although quantitative results have to be considered with caution, this method is a simple and quick means of obtaining semi-quantitative results. 相似文献
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L. Klibanov M. Allon-Alaluf N. Croitoru A. Seidman 《Diamond and Related Materials》1996,5(12):1414-1417
Thin a:DLC films were deposited by r.f. plasma system in which methane (CH4) was admitted. Photoconductivity measurements were performed on an Al-a:DLC-Cu sandwich structure and an Al-a:DLC-Al planar structure. The photocurrent was measured in a wide interval of temperatures. The photocurrent signal of the sandwich device is about 100 times higher than the dark current measured under He-Ne laser incident light (2.5 mW) at 160 K. A photocurrent response time of τo ≈ 8 ms was measured at this temperature. In the planar device, under the same conditions, the photocurrent signal was twice the dark current. The maximum mobility-lifetime product of a:DLC (sandwich device) was about 2 × 10−10 cm2/V. 相似文献
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The viscous sintering of two initially spherical particles is modeled as creeping flow in response to surface tension. The governing equations are solved using the finite-element method. The condensed results of this simulation, the center-to-center approach velocity, and the rate of change of contact area were presented earlier. Some details of the flow field during sintering and the evolution of the neck geometry in the early stages of sintering are presented here. Important numerical issues are detailed. 相似文献
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Hikmet Cicek 《Ceramics International》2018,44(5):4853-4858
Diamond like carbon (DLC) coatings have high wear resistance and low coefficient of friction and its features are being tried to be further developed. We deposited TiN/TiCN/DLC composite coatings on inconel substrates with closed field unbalanced magnetron sputtering system to improve the features of the conventional DLC coatings. Structural, chemical and bond types of the coating were obtained with the XRD, SEM, EDS and XPS analyses. Wear behaviors of the coatings were determined in atmosphere, distillated water and commercial oil conditions under low (2 N) and high (10 N) constant load values with using pin-on-disc tribo-test system. The wear results demonstrated that using the TiN/TiCN layers with the DLC coatings increased the load carrying capacity, decreased the CoF, and wear rates at the high load values. 相似文献