荷能粒子在类金刚石膜形成中的应用

类金刚石膜由于其优异性能和广泛应用已引起越来越多的研究兴趣。尽管各种化学和等离子体辅助ＣＶＤ和ＰＶＤ技术已用来沉积类金刚石膜（ＤＬＣ膜）,但其形成机理仍不清楚。本文通过分析荷能离子的作用,应用热峰效应和离子刻蚀效应来解释ＤＬＣ膜的形成。     

液相沉积类金刚石膜的沉积机理研究

根据电化学的相关理论,提出了钛合金表面液相沉积DLC膜的反应机理,给出了可能电极过程,认为膜是通过甲基阳离子的亲电取代反应而不断生长。讨论了氢原子对金刚石结构的稳定作用,并解释了实验条件对膜结构和性能的影响。     

类金刚石薄膜对Low-E膜系的保护作用分析

采用射频等离子体增强化学气相沉积法(RF-PECVD),在Low-E玻璃表面沉积类金刚石(DLC)薄膜作为保护层,通过耐洗刷试验和耐酸腐蚀试验研究了DLC薄膜对Low-E膜系的保护作用;同时对镀DLC薄膜的Low-E玻璃进行热处理,研究热处理后Low-E玻璃膜层结构、低辐射性能和光学性能的变化;然后通过摩擦磨损实验对镀DLC膜提高Low-E玻璃耐洗刷的原因进行分析。结果表明:DLC膜能够有效提高Low-E玻璃耐洗刷性和耐酸腐蚀性;并且DLC膜可以通过热处理去除,且热处理后的Low-E低辐射性能和光学性能未受到影响;一定厚度DLC膜能够有效降低Low-E玻璃摩擦系数,是提高Low-E玻璃耐磨性的主要原因。     

类金刚石薄膜热稳定性及热磨损机理研究进展

类金刚石(DLC)薄膜作为典型的固体润滑剂,耐热性差一直是制约其高温服役性能以及产业化推进的主要原因之一。高温将直接影响DLC碳基骨架稳定性,进而限制其优异摩擦学性能的发挥。分别从DLC热稳定性影响因素、热稳定性研究方法以及热磨损机理研究进展3个方面展开介绍,分析未来的发展趋势,以期为DLC高温环境下服役性能研究提供技术参考。     

类金刚石膜的性能、制备及其应用

类金刚石膜是无定形碳中含sp3键的亚稳态结构.由于它的组成、光学透过率、硬度、折射率和在化学腐蚀剂中的惰性以及抗摩擦性能十分相似于金刚石,其应用领域不断被拓宽,因此对类金刚石的研究也日益成为热点.本文介绍了类金刚石的性能、制备类金刚石膜的物理气相沉积和化学气相沉积方法,概括了类金刚石膜在机械、电磁学、光学、医学以及其它领域的应用,最后指出了类金刚石膜的研究现状及其发展趋势.     

类金刚石膜的制备及应用

类金刚石膜(DLC)由于其良好的特性被广泛应用于各个领域,文章介绍了类金刚石膜的制备方法及特点,并说明了利用类金刚石膜耐磨损高硬度等特点,将类金刚石薄膜经过特殊的方法形成类金刚石纤维的过程,探讨了其在纤维砂轮中,代替Al2O3纤维作为磨料的应用.     

类普鲁士蓝微纳米粒子的可控合成与表征

利用溶剂的刻蚀作用制备了尺寸大小和表面不同程度刻蚀的类普鲁士蓝立方体微纳米粒子,通过扫描电子显微镜、粉末X射线仪、傅里叶红外分光光度计等对微纳米粒子进行了表征,考察了溶剂对类普鲁士蓝纳米粒子的刻蚀作用。研究表明,随着溶剂体系中蒸馏水的增加,粒子的粒径增大,立方体表面被逐步刻蚀成具有"骰子"外貌的特殊形貌,这种形貌的改变可能会对微纳米粒子的物理化学性能产生较大的影响。     

类金刚石薄膜在橡胶表面改性中的研究进展

介绍了类金刚石薄膜的结构、制备方法及其在橡胶表面改性中的研究进展。     

硬质合金刀具类金刚石涂层的摩擦磨损性能

以等离子体化学气相沉积技术在硬质合金刀具表面制备了类金刚石(DLC)涂层.研究了DLC涂层刀具和无涂层刀具的硬度,不同载荷、不同转速下两种刀具的摩擦磨损性能,以及在水润滑和油润滑条件下DLC涂层刀具的滑动摩擦行为.结果表明,DLC涂层刀具的平均硬度为2 099.9 HV,比无涂层刀具提高了48.3%;DLC涂层刀具的摩擦因数明显低于无涂层刀具,其磨损率随着载荷的增加而增大,随转速的增大而减小;油润滑比水润滑能更有效减缓摩擦作用.     

液相沉积类金刚石膜的结构与性能研究

探讨了液相沉积法制备类金刚石的新工艺,并采用XPS,Raman光谱和SEM等对所得膜的结构进行表征,证实所得的是类金刚石膜。液相沉积得到的类金刚石膜与钛合金基材之间具有较强的结合强度,并具有较低的摩擦系数和一定的耐磨损能力。     

Study of the Formation of Nano-Networks in Colloidal Particles

The authors studied the formation of a wafer-scale network of connected colloidal beads by reactive ion etching. The dimensions of the connections have been studied as a function of etching time for colloidal beads of different sizes, and could be well controlled. The authors have found that the nano-network forms and disappears for the same time of etching independent of the diameter of the polystyrene beads. With recent interest of connected colloidal networks in various optical sensing applications, such as photonic crystals, as surface-enhanced Raman scattering substrates, the studies have potential uses in the development of wafer-scale nanophotonic sensors.     

聚酰亚胺/纳米钛系粒子杂化膜制备与性能

采用原位聚合法和流延成膜法制备了系列纳米钛系粒子含量的聚酰亚胺(PI)/TiO2和PI/BaTiO3杂化膜,以γ-巯丙基三甲氧基硅烷偶联剂(KH590)对纳米钛系粒子进行表面处理以提高有机-无机相之间的界面相容性,通过傅里叶变换红外光谱、广角X射线衍射对杂化膜的结构进行研究,同时分析了TiO2和BaTiO3对杂化膜热性...     

Tribological properties of DLC films with different hydrogen contents in water environment

Diamond-like carbon (DLC) films were deposited on silicon wafers by thermal electron excited chemical vapor deposition (CVD). To change the hydrogen content in film, we used three types of carbon source gas (C₇H₈, CH₄, and a CH₄+H₂) and two substrate bias voltages. The hydrogen content in DLC films was analyzed using elastic recoil detection analysis (ERDA). Tribological tests were conducted using a ball-on-plate reciprocating friction tester. The friction surface morphology of DLC films and mating balls was observed using optical microscopy and laser Raman spectroscopy.Hydrogen content in DLC films ranged from 25 to 45 at.%. In a water environment, the friction coefficient and specific wear rate of DLC films were 0.07 and in the range of 10⁻⁸–10⁻⁹ mm³/Nm, respectively. The friction coefficient and specific wear rate of DLC film in water were hardly affected by hydrogen content. The specific wear rate of DLC film with higher hardness was lower than that of film with low hardness. Mating ball wear was negligible and the friction surface features on the mating ball differed clearly between water and air environments, i.e., the friction surface on mating balls in water was covered with more transferred material than that in air.     

Effects of reactors on the deposition of DLC films using liquid electrochemical technique

Carbon films were deposited on silicon substrates by liquid electrochemical technique at low temperature (60 °C) in ambient atmosphere. Glass reactor, glass reactor with PTFE-coating inside, glass reactor with quartz-coating inside and quartz reactor were used with the same experimental setup to compare the effects of reactors on the deposition of carbon films. The applied potential, the distance between anode and substrate and the deposition time were fixed at 900 V (4.2 kHz, 50%), 6 mm and 5 h, respectively. The morphology and microstructure of the films were analyzed by scanning electron microscopy (SEM) and Raman spectroscopy. Energy Dispersive X-ray Spectrometry (EDX) was used to measure the composition of the films. The SEM observations showed that the films deposited using glass reactor were composed of crystals of several micrometers which contained nearly 10 at.% of Ca. Raman spectroscopy analysis confirmed that DLC films have been deposited, but with an obvious sharp peak at 1085 cm^− 1 which is assigned to calcium carbonate (CaCO₃) crystals. The glass reactor is the possible source of Ca because the electrolyte was composed of analytically pure acetone and deionized water with the proportion of Ca below the determination of AAS (atomic absorption emission spectrophotometer AA-6200). Using glass reactor with PTFE-coating inside could successfully avoid the impurity of Ca from the glass reactor, but new non-metallic impurities coming from the PTFE-coating made the films rough. Continuous and smooth films were deposited by using a glass reactor with quartz-coating inside and quartz reactor, which could avoid both Ca (< 1 at.%) and other impurities. Raman spectroscopy analysis confirmed typical DLC films without CaCO₃. It can be concluded that the materials of the reactors could play an important role not only in the composition, but also the morphology and microstructure of films deposited by liquid electrochemical technique.     

射频感应耦合化学气相沉积类金刚石薄膜的摩擦性能研究

采用射频感应耦合离子源（ICP）在硅基底上沉积了DLC薄膜,通过原子力显微镜（AFM）和拉曼光谱对DLC薄膜的表面形貌及结构进行了分析表征,用UTM-2摩擦磨损试验仪对薄膜的摩擦学性能进行了测试。结果表明,利用该方法沉积制备的DLC薄膜具有良好的减摩抗磨性能。     

铁电薄膜的微图形化研究

铁电薄膜在微电子和光电子技术中有着重要的或潜在的应用,可以制作随机存取存储器,热释电阵列探测器,铁民微电子机械系统等,在这些器件的制作过程中,铁电薄膜的微图形化是非常重要的一环,本文简要介绍了几种重要的铁电薄膜微图形化方法及有关研究结果,并比较了这些方法的优缺点。     

Adhesion assessment of DLC films on PET using a simple tensile tester: Comparison of different theories

The adhesion of Diamond-Like Carbon (DLC) films on Poly(ethyleneterephthalate) (PET) sheet has been characterised by tensile testing, using simple equipment. Three theoretical analyses of the tensile test are described, and their validity has been studied by calculating in three different ways the adhesion of the same samples (DLC on PET). The theoretically predicted adhesion from the longitudinal strain required for coating debonding did not appear to be an appropriate indicator for coatings on polymers. An approach consisting of measuring either the minimum or the maximum crack spacing led to results which were more consistent with the literature. The adhesion of DLC films on PET has been increased by a factor of 1.8 when a 5 min argon plasma treatment is applied prior to deposition. Although quantitative results have to be considered with caution, this method is a simple and quick means of obtaining semi-quantitative results.     

Study of photoconductivity in thin amorphous diamond-like carbon (a:DLC) films prepared by r.f. glow discharge technique

Thin a:DLC films were deposited by r.f. plasma system in which methane (CH₄) was admitted. Photoconductivity measurements were performed on an Al-a:DLC-Cu sandwich structure and an Al-a:DLC-Al planar structure. The photocurrent was measured in a wide interval of temperatures. The photocurrent signal of the sandwich device is about 100 times higher than the dark current measured under He-Ne laser incident light (2.5 mW) at 160 K. A photocurrent response time of τ_o ≈ 8 ms was measured at this temperature. In the planar device, under the same conditions, the photocurrent signal was twice the dark current. The maximum mobility-lifetime product of a:DLC (sandwich device) was about 2 × 10⁻¹⁰ cm²/V.     

Simulation of the Viscous Sintering of Two Particles

The viscous sintering of two initially spherical particles is modeled as creeping flow in response to surface tension. The governing equations are solved using the finite-element method. The condensed results of this simulation, the center-to-center approach velocity, and the rate of change of contact area were presented earlier. Some details of the flow field during sintering and the evolution of the neck geometry in the early stages of sintering are presented here. Important numerical issues are detailed.     

Wear behaviors of TiN/TiCN/DLC composite coatings in different environments

Diamond like carbon (DLC) coatings have high wear resistance and low coefficient of friction and its features are being tried to be further developed. We deposited TiN/TiCN/DLC composite coatings on inconel substrates with closed field unbalanced magnetron sputtering system to improve the features of the conventional DLC coatings. Structural, chemical and bond types of the coating were obtained with the XRD, SEM, EDS and XPS analyses. Wear behaviors of the coatings were determined in atmosphere, distillated water and commercial oil conditions under low (2 N) and high (10 N) constant load values with using pin-on-disc tribo-test system. The wear results demonstrated that using the TiN/TiCN layers with the DLC coatings increased the load carrying capacity, decreased the CoF, and wear rates at the high load values.