不同处理方法下铁氧体出气性能的研究

为减少加速器束流快引出元件铁氧体材料真空出气量,对铁氧体材料进行真空除气、镀膜以及烘烤工艺处理。采用旁路切换法(SPP)测量不同处理条件下的出气率。结果表明,铁氧体材料经真空除气后镀TiN膜,在测试罩中经烘烤,冷却后充氮气测得的出气率最低。     

(Ti,Al)N薄膜的升温出气特性研究

介绍了采用多弧离子镀方法在不锈钢表面镀覆(Ti,Al)N薄膜,并对膜的结构、表面成分和形貌进行了简单分析,用热出气方法研究其出气特性,并与不锈钢的热出气性能进行比较,发现在不锈钢表面镀覆一层(Ti,Al)N膜可以有效地阻挡不锈钢体内氢扩散和碳偏析,因此(Ti,Al)N是比较理想的真空材料。     

TiN和TiCrN膜层对氢燃料电池双极板材料316L不锈钢性能的影响

以氢燃料电池的重要部件316L不锈钢双极板作为研究对象,采用真空溅射镀膜方法在其表面制备了TiN和TiCrN膜层,然后对其组织结构、耐腐蚀性以及接触电阻进行了分析,并与316L不锈钢基板进行了对比。结果表明:两种膜层都很致密无明显缺陷;相比316L不锈钢基板,两种膜层双极板的耐腐蚀性有较大提高,接触电阻则有很大的降低。     

不锈钢SUS410上Ta2O5的镀膜及耐蚀性研究

用高频溅射法在不锈钢ＳＵＳ４１０上镀Ｔａ２Ｏ５薄膜，并对膜的组成等进行了分析。用交流阻抗法和钝化曲线法等电化学方法，研究了薄膜的耐蚀性与ｐＨｐｘ的关系。     

镀制方式对高衰减镍铬合金膜中性度的影响

对比了用不同镀制工艺方式镀制的Ni80Cr20膜中性密度滤光片的中性度特性,溅射工艺镀制的密度片中性度值3.7%,远好于电子枪蒸发和电阻蒸发镀制结果(15%)。采用相平衡理论,模拟计算了的热蒸发镀制的镍铬合金膜的蒸发速率,铬相比镍含量偏高2.8倍,导致了膜层中合金含量相对膜料出现较大差异,导致中性密度滤光片光谱中性度的下降。使用蔡司SUPRA35扫描电镜和牛津EDS能谱仪分别测试了溅射工艺和热蒸发工艺镀制的密度滤光片的镍铬含量,测试结果与模拟分析结论基本一致。     

气离溅射离子镀制氮化钛

本文详细介绍了气体离子源增强磁控溅射(气离溅射)反应离子镀膜技术和系统配置.特别是首次提出空分气离溅射的新概念,实现了磁控溅射金属镀膜过程和气体离子轰击化学反应过程在真空室内空间上的分离,从而保证空分气离溅射反应离子镀膜过程的长时间稳定性、重复性和一致性.当磁控溅射源采用中频电源驱动、最新开发的气体离子源采用脉冲直流电源后,实现了最佳的设备组合,可镀制出高品质的TiN膜层.     

各种实用真空工程材料的出气率测试

本文简要叙述小孔流量法测量材料出气率实验原理和实验装置。给出了无氧铜、不锈钢和低碳钢等十多种材料的常温出气率实验结果,探讨了各种加工工艺和清洗工艺对材料出气率的影响。     

TiN／Ag多层膜的生物相容性研究

使用离子束辅助沉积（IBAD）的方法，在医用不锈钢317L的基底上制备TiN／Ag多层膜．在TiN／Ag多层膜具有良好的抗茵性和抗腐蚀性的研究基础上，通过细胞毒性试验和溶血试验评价了TiN／Ag多层膜的生物相容性．试验结果表明：TiN／Ag多层膜样品的细胞毒性等级在0～1之间；溶血率〈5％，符合生物医学材料的标准．这些说明TIN／Ag多层膜不仅具有抗菌性和抗腐蚀性，而且具有良好的生物相容性．     

提高溅射离子泵抽速的研究

按抽气过程推出了溅射离子泵的抽速公式。实验研究了阳极结构、阴极材料对提高抽速的作用。通过离子泵抽氩清洗后抽速提高现象的分析研究.证实了阴极材料表层成分对离子泵抽速有几倍的影响;钛阴极的泵在抽氮气达到稳定值后,阴极表层即盖满 TiN,而泵的正常抽速是离子溅射 TiN 生成的钛原子在阳极表面抽气提供的。研究表明,理想的离子泵阴极材料不仅应当溅射率高,溅射膜有高的吸气性能,而且应对入射的被抽气体原子有足够高的扩散能力。     

过渡层对含氢非晶碳膜生长的影响

本文利用射频等离子体增强化学气相沉积（RFPECVD）工艺在不锈钢基底上制备了含氢非晶碳膜（a-C：H膜）。在沉积碳膜之前，首先在基底表面预先沉积了Ti／TiC、Ti／TiN和Ti／TiN／TiC等过渡层以提高膜基结合力。利用激光Raman光谱分析了过渡层对a-C：H膜生长过程及膜中sp^3含量的影响。实验结果表明，采用Ti／TiN／TiC过渡层时所制备的a-C：H膜中sp^3含量最多，同时膜基结合力最大。     

Thermal outgassing properties of mechanically polished and of sand- and bead-blasted Inconel 600 surfaces up to 500°C

In the present work, two different types of Inconel 600 samples have been investigated. The first one was mechanically polished and chemically cleaned in several steps and had a total hemispherical emissivity at 75°C of ?₁ = 0.146 and a surface roughness of CLA₁ = 0.08 μm, while the second sample was sand- and bead-blasted with ?₂ = 0.382 and CLA₂ = 1.2 μm. The experimental studies were composed of the determination of desorption spectra from 20°C up to 550°C at different heating rates, the investigation of the decrease of thermal out gassing rates during a longer heating interval at about 500°C and the measurement of equilibrium outgassing rates at higher temperatures of samples which have been heated several days at about 500°C. The total outgassing rates and the partial outgassing rates of the main components H₂, H₂O, CO and CO₂ have been determined in these studies. Activation energies of desorption, rate constants and equilibrium surface coverages have been calculated from the experimental data using the theory of Redhead.     

绝热材料放气速率测试台研制

高真空条件下,绝热材料的放气速率会影响低温容器的真空性能,从而影响其绝热性能。根据GB/T31480-2015,搭建了绝热材料放气速率测试平台。通过本底放气速率的测定,验证了该测试平台的可靠性;利用静态法测试了某型号多层绝热材料的放气速率,给出了试验数据。本试验台将为绝热材料的应用及低温容器的设计提供数据支撑。     

11. Thermal outgassing behaviour of Inconel 600 after different methods of surface preparation

Total and partial outgassing rates after different methods of mechanical and thermal pre-treatments and after different gas exposures of the surface of Inconel 600 specimens have been determined during heating cycles from 20°C up to 520°C. Minimum outgassing rates have been observed from aquablasted surfaces after baking at 700°C for several hours and after gas exposure to N₂. The results of these measurements are important for the treatment of the surface of the first wall of fusion devices using Inconel 600 as a first wall material before the first starting up and during repairs.     

Ausgasungsmessungen von Metallen,Plasten und Kohlenstoff

A device for gas-selective outgassing measurements is demonstrated and the necessary handling of the data was described. In this way measured partial and total outgassing rates of some metals, plastics and graphite after different pretreatments are shown. The outgassing rates were discussed qualitatively and quantitatively. A throuput correction was made for every gas. For metals the influence of outgassing reducing coatings and effect of cleaning procedures were investigated. In the case of plastics the part of hydrocarbons of the total outgassing rate was studied. For graphite samples the amount of hydrogen outgassing was dicussed.     

Outgassing of vacuum materials-II

Part II of this two part account examines the methods available for the measurement of outgassing rate. It recounts the results obtained for some selected materials and in particular examines methods for reducing the outgassing rates of materials for use in ultrahigh vacuum. Finally it presents outgassing rates for various materials in tabulated form.     

真空绝热板内部真空度的影响因素分析及改善措施

本文介绍了真空绝热板的绝热性能与板内真空度的关系,具体分析了影响真空度的因素,论述了气体渗透和内部芯材放气的机理及对板内真空度的影响情况,探讨了减少气体渗透和放气的途径和要求,指出了提高板内真空度的方法。     

材料在真空环境下放气的测试技术研究

往真空材料放气率测试装置上对金属材料的放气特性进行了实验研究,实验采用的方法为静态升压法、固定流导法、双通道气路转换法。实验结果表明,测试装置的极限真空度为9．2×10^-9Pa,铜、铝合金2A12、304不锈钢三种材料半小时后的放气率分别为2．34×10^-8a·m^3·s^-1·cm^-2、1．83×10^-9Pa·m^3·s^-1·cm^-2、8．48×10^-11Pa·m^3·s^-1·cm^-2。利用四极质谱计测得装置的本底气体成分主要有H2、N2／CO、H2O和CO2,材料放出的气体成分主要有N2／CO、H2O。三种方法测试得到的铜金属材料的放气率随着温度的升高而小断增大。     

基于双通道方法对不锈钢高温出气性能的研究

采用双通道(SPP)方法对不锈钢材料在高温条件下真空出气性能进行研究。该方法能将传统动态法中真空测量元件对被测量材料出气速率的影响消除,提高测量精度;并通过SPP结构,在数据处理过程中只采用一只规管的真空度读数,避免规管的个体差异带来的计算误差。利用此方法测量了不锈钢材料的高温出气速率,并对比经过真空烘烤后充空气和充干燥氮气的出气性能差异。     

Zuverlässige Prozesse durch Vakuumkomponenten mit definierten Ausgasraten

Reliable processes by use of vacuum components with specified outgassing rates Contamination of vacuum components cannot be avoided in the manufacturing process. In order to significantly reduce particulate and organic impurities, a multi-stage cleaning process and proof of cleanliness are essential. In order to guarantee a reproducible quality of the cleanliness of vacuum components, uniform standards for defined outgassing rates are necessary. The development of Vacom Purity Classes serves the generally accessible specification of components and characterises their vacuum and cleanroom suitability. Vacom Vacuum Classes guarantee the suitability of vacuum components for use in UHV/XHV. In this article, the importance of cleaning of vacuum chambers and components is examined as well as the need to establish a uniform method for the quantitative measurement of the outgassing rate is highlighted. The systematic division into Vacom Purity and Vacuum Classes provides the basis for a cross-industry standard for the defined quality of vacuum processes.     

Effects of vacuum thermal cycling on mechanical and physical properties of high performance carbon/bismaleimide composite

The aim of this article was to investigate the effects of vacuum thermal cycling on mechanical and physical properties of high performance carbon/bismaleimide (BMI) composites used in aerospace. The changes in dynamic mechanical properties and thermal stability were characterized by dynamic mechanical analysis (DMA) and thermogravimetric analysis (TGA), respectively. The changes in linear coefficient of thermal expansion (CTE) were measured in directions perpendicular and parallel to the fiber direction, respectively. The outgassing behavior of the composites were examined. The evolution of surface morphology and surface roughness were observed by atomic force microscopy (AFM). Changes in mechanical properties including transverse tensile strength, flexural strength and interlaminar shear strength (ILSS) were measured. The results indicated that the vacuum thermal cycling could improve the crosslinking degree and the thermal stability of resin matrix to a certain extent, and induce matrix outgassing and thermal stress, thereby leading to the mass loss and the interfacial debonding of the composite. The degradation in transverse tensile strength was caused by joint effects of the matrix outgassing and the interfacial debonding, while the changes in flexural strength and ILSS were affected by a competing effect between the crosslinking degree of resin matrix and the fiber-matrix debonding.