Low threshold current 1.3-/spl mu/m GaInNAs VCSELs grown by MOVPE

The structure of the conventional contact 1.3-/spl mu/m GaInNAs-GaAs vertical-cavity surface-emitting lasers (VCSELs) was optimized and low threshold current 1.3-/spl mu/m GaInNAs VCSELs grown by metal-organic vapor-phase epitaxy were reported. The idea is to optimize the active region, the doping profiles, and the pairs of p-distributed Bragg reflectors, and the detuning between the emission wavelength and the photoluminescence gain peak wavelength. The continuous-wave 1.0-mA threshold current was achieved for the single-mode VCSEL. For the multiple-mode VCSELs, the below 2-mA threshold currents at 5/spl deg/C-85/spl deg/C , the 1.13-mA threshold current at 55/spl deg/C, and 1.52-mA threshold current at 85/spl deg/C are the best results for 1.3-/spl mu/m GaInNAs VCSELs.     

Single-mode monolithic quantum-dot VCSEL in 1.3 /spl mu/m with sidemode suppression ratio over 30 dB

We present monolithic quantum-dot vertical-cavity surface-emitting lasers (QD VCSELs) operating in the 1.3-/spl mu/m optical communication wavelength. The QD VCSELs have adapted fully doped structure on GaAs substrate. The output power is /spl sim/330 /spl mu/W with slope efficiency of 0.18 W/A at room temperature. Single-mode operation was obtained with a sidemode suppression ratio of >30 dB. The modulation bandwidth and eye diagram in 2.5 Gb/s was also presented.     

Thermo-optical modulation at /spl lambda/=1.5 /spl mu/m in an /spl alpha/-SiC-/spl alpha/-Si-/spl alpha/-SiC planar guided-wave structure

A planar waveguide based on an amorphous silicon-amorphous silicon carbide heterostructure is proposed for the realization of passive and active optical components at the wavelengths /spl lambda/=1.3-1.5 /spl mu/m. The waveguide has been realized by low temperature plasma enhanced chemical vapor deposition and is compatible with the standard microelectronic technologies. Thermo-optical induced modulation at /spl lambda/=1.5 /spl mu/m is demonstrated in this waveguide. Numerical simulations predict that operation frequencies of about 3 MHz are possible. The measurements have also allowed the determination of the previously unknown thermo-optical coefficient of undoped amorphous silicon at this wavelength.     

1.5-/spl mu/m InGaAsP-InP slab-coupled optical waveguide lasers

We report the demonstration of high-power semiconductor slab-coupled optical waveguide lasers (SCOWLs) operating at a wavelength of 1.5 /spl mu/m. The lasers operate with large (4/spl times/8 /spl mu/m diameter) fundamental mode and produce output power in excess of 800 mW. These structures have very low loss (/spl sim/0.5 cm/sup -1/) enabling centimeter-long devices for efficient heat removal. The large fundamental mode allows 55% butt-coupling efficiency to standard optical fiber (SMF-28). Comparisons are made between SCOWL structures having nominal 4- and 5-/spl mu/m-thick waveguides.     

Low-threshold continuous-wave 1.5-/spl mu/m GaInNAsSb lasers grown on GaAs

We present the first continuous-wave (CW) edge-emitting lasers at 1.5 /spl mu/m grown on GaAs by molecular beam epitaxy (MBE). These single quantum well (QW) devices show dramatic improvement in all areas of device performance as compared to previous reports. CW output powers as high as 140 mW (both facets) were obtained from 20 /spl mu/m /spl times/ 2450 /spl mu/m ridge-waveguide lasers possessing a threshold current density of 1.06 kA/cm/sup 2/, external quantum efficiency of 31%, and characteristic temperature T/sub 0/ of 139 K from 10/spl deg/C-60/spl deg/C. The lasing wavelength shifted 0.58 nm/K, resulting in CW laser action at 1.52 /spl mu/m at 70/spl deg/C. This is the first report of CW GaAs-based laser operation beyond 1.5 /spl mu/m. Evidence of Auger recombination and intervalence band absorption was found over the range of operation and prevented CW operation above 70/spl deg/C. Maximum CW output power was limited by insufficient thermal heatsinking; however, devices with a highly reflective (HR) coating applied to one facet produced 707 mW of pulsed output power limited by the laser driver. Similar CW output powers are expected with more sophisticated packaging and further optimization of the gain region. It is expected that such lasers will find application in next-generation optical networks as pump lasers for Raman amplifiers or doped fiber amplifiers, and could displace InP-based lasers for applications from 1.2 to 1.6 /spl mu/m.     

1.27 /spl mu/m metamorphic InGaAs quantum well lasers on GaAs substrates

Pulsed operation at a wavelength of 1.27 /spl mu/m from metamorphic ridge-waveguide (RWG) InGaAs quantum well lasers on GaAs substrates using an alloy graded buffer, grown by molecular beam epitaxy, is demonstrated. Laser performance is anisotropic along the two orthogonal <1/spl plusmn/10> directions with lower threshold currents along the <1-10> direction. Post-growth rapid thermal annealing further reduces threshold currents. For 4 /spl mu/m-wide RWG lasers, minimum threshold current densities are 1-2.5 kA/cm/sup 2/ for cavity lengths 0.6-1.5 mm.     

1.3-/spl mu/m InAs quantum-dot laser with high dot density and high uniformity

We realized a triple-stacked 1.3-/spl mu/m InAs quantum dot (QD) with a high density of 2.4/spl times/10/sup 11/ cm/sup -2/ and a high uniformity of below 24 meV that employs an As/sub 2/ source and a gradient composition (GC) strain-reducing layer (SRL) grown on a GaAs substrate. We demonstrated the 1.3-/spl mu/m wavelength emission of this triple-stacked QD laser with a 0.92-mm cavity length and a cleaved facet at room temperature. In addition, we realized the highest maximum modal gain yet reported of 8.1 cm/sup -1/ per QD layer at beyond 1.28 /spl mu/m by using our high-density and high-uniformity QD.     

Study on high-temperature performances of 1.3-/spl mu/m InGaAsP-InP strained multiquantum-well buried-heterostructure lasers

Stripe-width and cavity length dependencies of high-temperature performances of 1.3-/spl mu/m InGaAsP-InP well-designed buried-heterostructure strained multiquantum-well (MQW) lasers were investigated. The threshold currents as low as 4.5/10.5 mA and slope efficiencies as high as 0.48/0.42 mW/mA at 25/spl deg/C/85/spl deg/C were obtained in the MQW lasers with 1.5-/spl mu/m width, 250-/spl mu/m length, and 0.3/0.85 facet reflectivity. With temperature increasing from 25/spl deg/C to 85/spl deg/C, the MQW lasers exhibited lower output power degradation, the minimum value was 1.78 dB at an operation current of 45 mA. The MQW lasers were suitable for application in optical access networks.     

High-performance 1.5 /spl mu/m GaInNAsSb lasers grown on GaAs

Substantially reduced threshold current density and improved efficiency in long-wavelength (>1.4 /spl mu/m) GaAs-based lasers are reported. A 20/spl times/1220 /spl mu/m as-cleaved device showed a room temperature continuous-wave threshold current density of 580 A/cm/sup 2/, external efficiency of 53%, and 200 mW peak output power at 1.5 /spl mu/m. The pulsed threshold current density was 450 A/cm/sup 2/ with 1145 mW peak output power.     

Efficient Modulation of InP-based 1.3-/spl mu/m VCSELs with AsSb-based DBRs

We demonstrate efficient error-free 3.125-Gb/s modulation of InP-based 1.3-/spl mu/m vertical-cavity surface-emitting lasers with AsSb-based distributed Bragg reflectors up to 60/spl deg/C. These devices demonstrated high differential efficiencies [>60% at room temperature (RT)], which resulted in a required bias current for modulation of only 5.9 mA. The measured extinction ratios were greater than 8 dB up to 60/spl deg/C with a peak-to-peak drive voltage of only 800 mV. The 3-dB-down RT small-signal bandwidth was 4.4 GHz at a bias of 5.9 mA.     

A monolithic GaInAsN vertical-cavity surface-emitting laser for the 1.3-/spl mu/m regime

An all-epitaxial GaInAsN vertical-cavity surface-emitting laser for room-temperature (RT) emission at 1.3 /spl mu/m was developed by solid-source molecular beam epitaxy using a plasma source for nitrogen activation. RT photopumped operation is demonstrated at a wavelength of 1283 nm. Stimulated emission was observed up to a record high temperature of 143/spl deg/C, resulting in an emission wavelength of 1294 nm.     

High-power highly reliable 1.02-1.06-/spl mu/m InGaAs strained-quantum-well laser diodes

By growing the InGaAs active layer at temperatures lower than in conventional growth, we extended the lasing wavelength and presented the high reliability in InGaAs strained-quantum-well laser diodes. Equivalent I-L characteristics were obtained for 1.02-, 1.05-, and 1.06-/spl mu/m laser diodes with a cavity length of 1200 /spl mu/m. Maximum output power as high as 800 mW and fundamental transverse mode operation at up to 400 mW were obtained at 1.06 /spl mu/m and an 1800-/spl mu/m cavity. Stable operation was observed for over 14 000 h under auto-power-control of 225 mW at 50/spl deg/C for the 1.02-, 1.05-, and 1.06-/spl mu/m lasers with a 900-/spl mu/m cavity.     

Continuous-wave operation of all-epitaxial InP-based 1.3 /spl mu/m VCSELs with 57% differential quantum efficiency

All-epitaxial InP-based 1.3 /spl mu/m VCSELs with a record-high continuous-wave differential quantum efficiency (57%) for single active region long-wavelength devices are demonstrated. Low-loss optical mode confinement is achieved through a selectively etched undercut tunnel-junction aperture. Singlemode continuous-wave lasing was observed up to 87/spl deg/C and the room-temperature output power was 1.1 mW at a current of 4.1 mA and a wavelength of 1.305 /spl mu/m.     

1.4-/spl mu/m InGaAsP-InP strained multiple-quantum-well laser for broad-wavelength tunability

InGaAsP-InP strained multiple-quantum-well (MQW) lasers for extended wavelength tunability in external cavity operation were designed, fabricated, and tested. The active layer was a strain compensated structure consisting of three 3.2/spl plusmn/0.3 nm and three 6.4/spl plusmn/0.3 nm 1.0% compressive strained wells and five 10.3/spl plusmn/0.3 nm 0.45% tensile strained barrier layers. A 2-/spl mu/m-wide ridge waveguide laser of length 250 /spl mu/m, when used in a grating external cavity and with no coatings to alter the reflectivity of the facets, was observed to operate over a range >110 nm. The lasers were designed for applications in trace gas and liquid detection with the goal to maximize the tunable range when operated in external cavities and with no facet coatings.     

Laser link cutting for memory chip repair

Link processing with individual laser pulses has become an industry standard process in IC memory chip manufacturing. It is gaining wide acceptance in analog chip reprogramming and tuning as well. Traditional laser processing, using the standard output of Nd:YAG at 1.064-/spl mu/m and Nd:YLF at 1.047-/spl mu/m laser wavelengths, works well for polysilicon links but is not satisfactory for metal links. This paper describes the physics modeling and computer simulation of the laser link process and a new technique of using 1.3-/spl mu/m laser wavelength for the process. While light absorption of link materials at 1.064-, 1.047-, and 1.3-/spl mu/m wavelengths are relatively the same, the absorption of a Si substrate at 1.3 /spl mu/m is considerably less. The improved absorption contrast between the link material and silicon substrate at 1.3-/spl mu/m delivers a much wider laser process window. Both simulation and experimental results are given and discussed. A brief introduction of another new technique, which uses UV laser pulses for link processing, is given. This UV laser process delivers a laser beam spot size much smaller than 1.5 /spl mu/m.     

A 12 /spl times/ 12 In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As avalanche photodiode array

We report a 12 /spl times/ 12 In/sub 0.53/Ga/sub 0.47/As-In/sub 0.52/Al/sub 0.48/As avalanche photodiode (APD) array. The mean breakdown voltage of the APD was 57.9 V and the standard deviation was less than 0.1 V. The mean dark current was /spl sim/2 and /spl sim/300 nA, and the standard deviation was /spl sim/0.19 and /spl sim/60 nA at unity gain (V/sub bias/ = 13.5 V) and at 90% of the breakdown voltage, respectively. External quantum efficiency was above 40% in the wavelength range from 1.0 to 1.6 /spl mu/m. It was /spl sim/57% and /spl sim/45% at 1.3 and 1.55 /spl mu/m, respectively. A bandwidth of 13 GHz was achieved at low gain.     

Spectroscopic analysis and diode-pumped laser results of Nd:BaY/sub 2/F/sub 8/

Single crystals of monoclinic BaY/sub 2/F/sub 8/, doped with different Nd/sup 3+/ concentrations, were successfully grown by means of the Czochralski method. Here, we present a polarized infrared (IR) spectroscopic investigation and diode-pumped continuous-wave laser results in the 1 /spl mu/m wavelength region. Moreover for the first time 1.3 /spl mu/m laser emission has been characterized. Q-switching results in the 1-/spl mu/m region are also presented.     

Short wavelength (/spl lambda//spl sim/4.3 /spl mu/m) high-performance continuous-wave quantum-cascade lasers

We report continuous-wave (CW) operation of a 4.3-/spl mu/m quantum-cascade laser from 80 K to 313 K. For a high-reflectivity-coated 11-/spl mu/m-wide and 4-mm-long laser, CW output powers of 1.34 W at 80 K and 26 mW at 313 K are achieved. At 298 K, the CW threshold current density of 1.5 kA/cm/sup 2/ is observed with a CW output power of 166 mW and maximum wall-plug efficiency of 1.47%. The CW emission wavelength varies from 4.15 /spl mu/m at 80 K to 4.34 /spl mu/m at 298 K, corresponding to a temperature-tuning rate of 0.87 nm/K. The beam full-width at half-maximum values for the parallel and the perpendicular far-field patterns are 26/spl deg/ and 49/spl deg/ in CW mode, respectively.     

Interdigitated Ge p-i-n photodetectors fabricated on a Si substrate using graded SiGe buffer layers

We report an interdigitated p-i-n photodetector fabricated on a 1-/spl mu/m-thick Ge epitaxial layer grown on a Si substrate using a 10-/spl mu/m-thick graded SiGe buffer layer. A growth rate of 45 /spl Aring//s/spl sim/60 /spl Aring//s was achieved using low-energy plasma enhanced chemical vapor deposition. The Ge epitaxial layer had a threading dislocation density of 10/sup 5/ cm/sup -2/ and a rms surface roughness of 3.28 nm. The 3-dB bandwidth and the external quantum efficiency were measured on a photodetector having 1-/spl mu/m finger width and 2-/spl mu/m spacing with a 25/spl times/28 /spl mu/m/sup 2/ active area. At a wavelength of 1.3 /spl mu/m, the bandwidth was 2.2, 3.5, and 3.8 GHz at bias voltages of -1, -3, and -5 V, respectively. The dark current was 3.2 and 5.0 /spl mu/A at -3 and -5 V, respectively. This photodetector exhibited an external quantum efficiency of 49% at a wavelength of 1.3 /spl mu/m.     

High-performance 1.06-/spl mu/m selectively oxidized vertical-cavity surface-emitting lasers with InGaAs-GaAsP strain-compensated quantum wells

We present the first room-temperature continuous-wave operation of high-performance 1.06-/spl mu/m selectively oxidized vertical-cavity surface-emitting lasers (VCSEL's). The lasers contain strain-compensated InGaAs-GaAsP quantum wells (QW's) in the active region grown by metalorganic vapor phase epitaxy. The threshold current is 190 /spl mu/A for a 2.5/spl times/2.5 /spl mu/m/sup 2/ device, and the threshold voltage is as low as 1.255 V for a 6/spl times/6 /spl mu/m/sup 2/ device. Lasing at a wavelength as long as 1.1 /spl mu/m was also achieved. We discuss the wavelength limit for lasers using the strain-compensated QW's on GaAs substrates.