Photoelectric Properties of GaN Layers Grown by Plasma-Assisted Molecular-Beam Epitaxy on Si(111) Substrates and SiC/Si(111) Epitaxial Layers

Semiconductors - The photoelectric properties of GaN/SiC/Si(111) and GaN/Si(111) heterostructures grown by plasma-assisted molecular-beam epitaxy under the same growth conditions on identical...     

Si(111)表面电子结构

本文利用自洽LMTO-ASA方法研究了晶体Si及Si(111)表面的几种模型的电子结构,给出了在slab模型各不同结构下的态密度和分波态密度,以及各不等价原子态密度和分波态密度,该结果与其它理论计算和实验结果相吻合     

氧化物缓冲层制备Si(111)基GaN纳米线

采用氧化物缓冲层,通过射频磁控溅射系统依次在n型Si(111)衬底上沉积Ga2O3/ZnO(Ga2O3/MgO)薄膜,然后将薄膜于950℃氨化合成GaN纳米结构,氨化时间为15min。采用X射线衍射(XRD)、傅里叶红外吸收谱(FTIR)和高分辨透射电镜(HRTEM)对样品的结构进行了分析,结果显示两种缓冲层下制备的样品均为六方纤锌矿单晶GaN纳米结构,且缓冲层的取向对纳米线的生长方向有很大影响;采用扫描电镜(SEM)对样品的形貌进行了测试,发现纳米线表面光滑,长度可达几十微米,表明采用氧化物缓冲层制备了高质量的GaN线。同时对GaN纳米线的生长机理进行了简单讨论。     

Growth of GaN Layers on Si(111) Substrates by Plasma-Assisted Molecular Beam Epitaxy

Semiconductors - The studies of the growth kinetics of GaN layers grown on nitridated Si(111) substrates by plasmaassisted molecular beam epitaxy are presented. The nucleation and overgrowth of the...     

Si衬底上无坑洞3C-SiC的外延生长研究

在冷壁式不锈钢超高真空系统上 ,利用低压化学气相淀积 (LPCVD)方法在直径为 5 0 mm的单晶 Si(1 0 0 )和 Si(1 1 1 )晶向衬底上生长出了高取向无坑洞的晶态立方相碳化硅 (3 C-Si C)外延材料 ,利用反射高能电子衍射 (RHEED)和扫描电镜 (SEM)技术详细研究了 Si衬底的碳化过程、碳化层的表面形貌及缺陷结构 ,获得了界面平整光滑、没有空洞形成的 3 C-Si C外延材料 ,并采用 X-射线衍射 (XRD)、双晶 X-射线衍射 (DXRD)和霍尔(Hall)测试等技术研究了外延材料的结构和电学特性     

Si(100)和Si(111)衬底上的同质分子束外延

用超高真空电子束蒸发系统进行了硅的同质分子束外延.发现采用适当的表面化学处理方法,然后在超高真空中加热,可以在较低温度下(800—814℃)获得清洁和平整的有序表面.Si(100)和Si(111)的外延分别在520℃和714℃进行,外延膜的结构和电学特性良好.     

Electron-Microscopy Studies of the Structure of Thin Epitaxial Ge2Sb2Te5 Layers Grown on Si(111) Substrates

Semiconductors - For the creation of memory cells of new generation, structurally perfect epitaxial Ge2Sb2Te5 (GST) layers and multilayered crystalline structures based on GeTe/Sb2Te3 superlattices...     

CaF_2/Si(111)界面的电子结构和化学键(英文)

CaF_2/Si(111) interfaces formed at 700℃ as well as at room temperature have been studied with XPS, UPS and LEED. The experimental results show that the substrate temperature has a significant influence on the interface in respect of ifs electronic structure and chemical bond. When the substrate temperature was at 700℃, the interface is found to be consisted of predominate Si-Ca bonds which correspond to an interface state located at 1.2eV below Fermi level. There is depletion of fluorine atoms due to the dissociation of the CaF2 molecule at the interface. When the substrate was at room temperature, there are no chemical bonds between substrate and adatoms nor depletion of fluorine atoms at the interface. Annealing of this interface at 700℃ results in preferential evaporation of F, and the surface undergoes a number of reconstructions until a 3×1 reconstruction is obtained. The bonding at this interface is similar to that of CaF2/Si(111) interface when the substrate temperature was at 700℃.     

AIN/Si(111)复合衬底上4H-SiC薄膜的异质外延

利用化学气相淀积(CVD)的方法在AlN/Si(111)复合衬底上成功实现了4H-SiC薄膜的异质外延生长,用X射线衍射(XRD)、扫描电子显微镜(SEM)、阴极荧光(CL)等方法对所得样品的结构特征、表面形貌和光学性质进行了表征测量.XRD测量结果显示得到的SiC薄膜的晶体取向单一;室温CL结果表明所得SiC薄膜为4H-SiC,且随着生长温度的升高,SiC薄膜的CL发光效率提高.生长温度、反应气源中C/si比等工艺参数对SiC薄膜的外延生长及其性质影响的研究表明在AIN/Si(111)复合衬底上外延4H-SiC的最佳衬底温度为1230～1270℃,比通常4H-SiC同质外延所需的温度低200～300℃;较为合适的C/Si比值为1.3.     

ZnO纳米棒与Si(111)和Si(100)衬底的外延关系(英文)

运用热蒸发技术在Si(111)和Si(100)基片上制备了ZnO纳米棒。SEM表征显示,ZnO纳米棒的直径约100nm,长度均匀,大约3μm;XRD表征发现ZnO纳米棒沿[0001]晶向择优生长。通过实验结果与理论分析得出:对于Si(111)基片上的样品,大部分ZnO纳米棒沿6个对称方向生长,而且与基片之间的夹角为54.7°,ZnO与Si(111)的外延关系为[0001]ZnO‖[114]Si,[0001]ZnO‖[4]Si,[0001]ZnO‖[141]Si,[0001]ZnO‖[4]Si,[0001]ZnO‖[411]Si,或[0001]ZnO‖[4]Si。对于Si(100)基片上的样品,大部分ZnO纳米棒沿4个对称方向生长,与基片之间的夹角为70.5°,其外延关系为[0001]ZnO‖[114]Si,[0001]ZnO‖[4]Si,[0001]ZnO‖[14]Si,或[0001]ZnO‖[14]Si。通过比较分析得出Si基片可以控制ZnO纳米棒的生长方向。     

MBE growth and Structural Properties of InAs and InGaAs Nanowires with Different Mole Fraction of In on Si and Strongly Mismatched SiC/Si(111) Substrates

The possibility of InAs nanowires MBE growth on silicon (111) substrates with a nanometer buffer layer of silicon carbide has been demonstrated for the first time. The NWs diameter turned out to be smaller than on the silicon substrate—the minimum of NWs diameter was less than 10 nm. In addition, dependence of structural properties of InGaAs nanowires on composition was studied.

     

Optical Properties of GaN/SiC/por-Si/Si(111) Hybrid Heterostructures

Semiconductors - Using a complex of structural and spectroscopic methods of diagnostics, the influence of a nanoporous-silicon (por-Si) transition layer on the optical properties of GaN layers...     

Si(111)衬底上GaN外延材料的应力分析

对Si(111)衬底上GaN外延材料的应力随着低温AlN插入层数的变化进行了分析研究。通过喇曼散射谱在高频E2(TO)模式下的测试分析发现,随着低温AlN插入层数的增加,GaN材料的E2(TO)峰位逐渐接近体GaN材料的E2(TO)峰位(无应力体GaN材料的E2(TO)峰位为568cm-1),计算得出GaN材料的应力从1.09GPa减小到0.42GPa。同时,使用室温光荧光谱进行了分析验证。结果表明,Si衬底上GaN外延材料受到的是张应力,通过低温AlN插入层技术可以有效降低GaN材料的应力,并且最终实现了表面光亮的厚层无裂纹GaN材料。     

Magnetron Sputter Epitaxy and Characterization of Wurtzite AlInN on Si(111) Substrates

AlInN films were grown on Si(111) substrates by the direct-current reactive sputtering method at temperatures from 150°C to 350°C. Growth of the AlInN films was found to be c-axis oriented, and the surfaces of the films were smooth. The bandgap structures and electron mobility of the AlInN films were studied using optical reflectance spectra and the Hall-effect method, respectively. The effects of an AlN buffer layer on the microstructure and optical and electrical properties of the AlInN films were investigated. It was found that the AlN buffer layer had a large influence on the crystalline quality and carrier concentration profiles of the AlInN films. This work suggests that reactive magnetron sputtering is a promising method for growing AlInN films at low temperatures.     

MOCVD Growth of InN on Si(111) with Various Buffer Layers

We report the growth of InN by metalorganic chemical vapor deposition on Si(111) substrates. It was found that the sharpest InN(002) x-ray diffraction peak could be achieved from the sample prepared on a complex buffer layer that consists of a low-temperature AlN, a graded Al _x Ga_1−x N (x = 1 → 0), and a high-temperature GaN. The resultant mobility of 275 cm²/V s thus obtained was 75% larger than that of the InN prepared on a single LT-AlN buffer layer only.     

Terahertz Emission from GaAs Films on Si(100) and Si(111) Substrates Grown by Molecular Beam Epitaxy

We report on the terahertz emission from femtosecond-laser-irradiated GaAs layers grown on Si(100) and Si(111) substrates. The results show that the terahertz emission from GaAs on Si is stronger than that of a semi-insulating bulk GaAs crystal. This increase is attributed to the strain field at the GaAs/Si interface. In the GaAs of the Si(100) sample, the stronger terahertz emission is observed compared with GaAs on Si(111). Moreover, the effect of changing the doping type of the Si substrate from n-type to semi-insulating was also studied and it was found that the terahertz emission intensity of GaAs on semi-insulating Si(100) is stronger than that of GaAs on n-type Si(100). Finally, strong terahertz emission from GaAs on semi-insulating Si(100) was observed not only in the reflection geometry but also in the transmission geometry. These results hold promise for new applications of terahertz optoelectronics.     

Optical Properties of GaN Nanowires Grown by MBE on SiC/Si(111) Hybrid Substrate

The aim of this work is to demonstrate the fundamental possibility of Si-doped GaN nanowires growth on the buffer layer of silicon carbide on silicon substrate and to investigate the optical characteristics of this structures.     

(111)A InP衬底上MOCVD外延InGaAsP的表面形貌和光学特性

为了研究(111)衬底的特性以及实现等边三角形微腔激光器,利用金属有机化学气相淀积(MOCVD)研究了(111)A InP衬底上InGaAsP外延层的表面形貌和光学特性。考虑到(111)A InP衬底的悬挂键密度比较低,在生长过程中有意提高了V／Ш比。通过扫描电子显微镜(SEM)和光荧光(PL)谱分别研究了外延层的表面形貌和光学特性。实验发现,表面形貌和光学特性随V／Ш比和温度的变化非常大。最佳V／Ш比和温度分别为400和625℃。     

Formation of Semipolar Group-III-Nitride Layers on Textured Si(100) Substrates with Self-Forming Nanomask

Semiconductors - The epitaxial growth of AlN and GaN layers is investigated using metalorganic vapor-phase epitaxy on a Si(100) substrate, on the surface of which a V-shaped nanostructure with...