共查询到18条相似文献,搜索用时 203 毫秒
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硅及硅基半导体材料中杂质缺陷和表面的研究 总被引:3,自引:0,他引:3
随着超大规模集成电路设计线宽向深亚微米级(<0.5μm)和亚四分之一微米级(<0.25μm)发展,对半导体硅片及其它硅基材料的质量要求越来越高,研究上述材料中各种杂质的行为,控制缺陷类型及数量,提高晶体完整性,降低表面污染和采用缺陷工程的方法改善材料质量显得尤为重要。文章阐述了深亚微米级和亚四分之一微米级集成电路用大直径硅材料中铁、铜金属和氧、氢、氮非金属杂质元素的行为,点缺陷及其衍生缺陷的本质与控制方法,硅片表面形貌、表面污染与检测方法的研究热点。同时还介绍了外延硅、锗硅及绝缘体上硅(SOI)等硅基材料的特性、制备及工艺技术发展趋势,展望了跨世纪期间硅及硅基材料产业发展的技术经济前景。 相似文献
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噪声法是目前国际计量界采用的测量热力学温度的3种方法中的一种,目前只有少数几个国家计量实验室建有计量级的噪声温度计.介绍了中国计量科学研究院开展的噪声法测温新研究,及测量镓熔化点热力学温度的工作.新噪声温度计采用了相关法结构,参考点为水三相点.电子测量系统与当前国外计量级噪声温度计的基本一致,但对前置放大器的性能和开关的结构做了改善.采用新研制的噪声温度计测量了镓熔化点的热力学温度,测量积分时间210 h,测量得到的镓熔化点热力学温度302.9176 K,标准合成不确定度8.9 mK.通过分析测量结果值可知,新噪声温度计测量积分时间达到1750 h,可以将标准合成不确定度减小到3 mK. 相似文献
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<正>基于硅基微纳波导的硅基光子学由于可以实现超小体积、低能耗、CMOS兼容的单片高密度光电集成,已被各国公认为突破计算机和通信超大容量、超高速信息传输和处理瓶颈的最理想技术之一。 相似文献
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针对线上耦合结构的高品质因数一维光子晶体微腔具有极低透射率的缺陷,提出研制一种具有高分辨率、高信噪比、高动态范围的侧边耦合一维光子晶体温度计。通过调制光子晶体单元结构的反射系数以及微腔和耦合波导之间的模场重叠,光子晶体器件的品质因数和透射率得到提高。制备得到的器件品质因数值、灵敏度、消光比和基模与二阶模之间的模式间隔分别为2.7×104、65.6 pm/℃、0.45和18.5 nm。采用扫频测量技术,该光子温度计具有mK量级分辨率和超过280℃的温度感应范围。 相似文献
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描述中国计量科学院在直线振动幅值和相位测量的理论研究和技术实现方面取得的最新进展。简要介绍了国家高、中、低频振动基(副基)准幅相特性测量装置的系统构建、测量原理和技术实现,以及装置达到的主要技术指标。提出振动基(副基)准优化提升中关键的技术创新点,如自主提出了改进的外差正弦逼近法和基于波峰波谷的外差时间间隔法,在压电高频(2kHz~50kHz)振动台上,首次在国内外实现了(1nm~500nm)振幅范围内的纳米级振动传感器灵敏度幅值和相移的测量。中国计量科学研究院(NIM)与德国物理技术研究院(PTB)在10Hz~10kHz范围内开展的标准加速度计灵敏度幅相特性国际双边比对验证了国家基准的测量不确定度。 相似文献
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Feng Liu Xiaoyuan Lu Weiqiang Wang Leiran Wang Guoxi Wang 《Journal of Modern Optics》2013,60(12):1158-1165
AbstractA photonic crystal – surface plasmon-polaritons hybrid transverse magnetic mode waveguide based on a one-dimensional optical microcavity is designed to work in the communication band. A Gaussian field distribution in a stepping heterojunction taper is designed by band engineering, and a silica layer compresses the mode field to the subwavelength scale. The designed microcavity possesses a resonant mode with a quality factor of 1609 and a modal volume of 0.01 cubic wavelength. The constant period and the large structure tolerance make it realizable by current processing techniques. 相似文献
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J. V. Pearce F. Edler C. J. Elliott L. Rosso G. Sutton A. Andreu G. Machin 《International Journal of Thermophysics》2017,38(8):118
A new European project called EMPRESS, funded by the EURAMET program ‘European Metrology Program for Innovation and Research,’ is described. The 3 year project, which started in the summer of 2015, is intended to substantially augment the efficiency of high-value manufacturing processes by improving temperature measurement techniques at the point of use. The project consortium has 18 partners and 5 external collaborators, from the metrology sector, high-value manufacturing, sensor manufacturing, and academia. Accurate control of temperature is key to ensuring process efficiency and product consistency and is often not achieved to the level required for modern processes. Enhanced efficiency of processes may take several forms including reduced product rejection/waste; improved energy efficiency; increased intervals between sensor recalibration/maintenance; and increased sensor reliability, i.e., reduced amount of operator intervention. Traceability of temperature measurements to the International Temperature Scale of 1990 (ITS-90) is a critical factor in establishing low measurement uncertainty and reproducible, consistent process control. Introducing such traceability in situ (i.e., within the industrial process) is a theme running through this project. 相似文献
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A. V. Medvedev A. A. Dukin A. B. Pevtsov C. Sibilia N. A. Feoktistov V. G. Golubev 《Technical Physics Letters》2007,33(11):976-979
We report a strong increase in the intensity of spontaneous emission from erbium ions embedded into an active layer of amorphous silicon oxide (a-SiO x ) in a planar microcavity based on a-Si:H/a-SiO x layers. Using eigenmodes of this microcavity both for excitation (pumping) and for the extraction of photoluminescence, it is possible to increase the spontaneous emission intensity from erbium ions by a factor of about 500 as compared to the photoluminescence from a single doped a-SiO x (Er) film. 相似文献
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《低温学》2017
Investigations of two different types of cryogenic level sensors (capacitance and High Temperature Superconductor (HTS) for level measurement of liquid nitrogen (LN2) and liquid oxygen (LOX) are presented here. They were tested for an active length of 400 mm in LOX and LN2. A discrete diode array level sensor was used as a primary standard for calibrating these sensors. Comparative studies on linearity, sensitivity and other parameters at the operating temperatures are presented. 相似文献
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NMIA has recently moved from an ITS-90 realization based on single cells of each fixed point to one based on ensembles of
up to five cells of each fixed point from argon to silver. It has been suggested that relying on Raoult’s law to estimate
the concentration of impurities in fixed-point cells, and to thereby estimate the likely shift introduced to the temperature
of the melting or freezing phase transition, is inadequate. Measurements of NMIA’s present set of 36 cells confirm that using
Raoult’s law alone is inadequate, and underestimates the temperature depression of some cells. Material purity assays are
usually available for the metals (or gases); however, this will not include contamination introduced during the cell construction
process or in-use impurity migration into the sample. At NMIA, we have (1) established ensembles of up to five cells of each
fixed point and (2) established techniques and uncertainties for comparisons of cells at the 0.2 mK level. It is concluded
that, at the sub-mK accuracy level, fixed-point cells should be considered as artifacts requiring calibration or validation
to confirm their suitability as intrinsic reference standards. 相似文献
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Optical dimensional measurements have to be corrected for the refractive index of air. The refractive index is conventionally calculated from parameters of ambient air using either Edlén or Ciddor equations or their modified versions. However, these equations require an accurate knowledge of ambient conditions and especially the temperature of air. For example, to reach an uncertainty of 10?7 in dimensions, the air temperature has to be known at ~100 mK level. This does not necessarily cause problems in a stable laboratory environment. However, if measurements are done outdoors or in an industrial environment, variations in temperature can be very rapid and local temperature gradients can cause significant error if not taken into account. Moreover, if the required distance is long, the temperature over the whole measurement path can be impractical or impossible to determine at sufficient temporal or spatial resolution by conventional temperature measurement techniques. The developed method based on molecular spectroscopy of oxygen allows both lateral spatial and temporal overlap of the temperature measurement with the actual distance measurement. Temperature measurement using spectroscopy is based on a line intensity ratio measurement of two oxygen absorption lines, previously applied for measurements of high temperatures in flames. The oxygen absorption band at 762 nm is a convenient choice for two-line thermometry since the line strengths are practical for short- and long-distance measurements and suitable distributed feedback lasers are commercially available. Measurements done on a 67 m path at ambient conditions demonstrate that the RMS noise of 22mK, or 7.5 × 10?5, near 293 K using 60 s measurement time can be achieved, which is to our knowledge the best reported resolution. 相似文献
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B. Kołodziej A. Kowal L. Lipiński H. Manuszkiewicz A. Szmyrka-Grzebyk 《International Journal of Thermophysics》2017,38(6):94
The argon triple point (\(T_{90} = 83.8058\,\hbox {K}\)) is a fixed point of the International Temperature Scale of Preston-Thomas (Metrologia 27:3, 1990). Cells for realization of the fixed point have been manufactured by several European metrology institutes (Pavese in Metrologia 14:93, 1978; Pavese et al. in Temperature, part 1, American Institute of Physics, College Park, 2003; Hermier et al. in Temperature, part 1, American Institute of Physics, College Park, 2003; Pavese and Beciet in Modern gas-based temperature and pressure measurement, Springer, New York, 2013). The Institute of Low Temperature and Structure Research has in its disposal a few argon cells of various constructions used for calibration of capsule-type standard platinum resistance thermometers (CSPRT) that were produced within 40 years. These cells differ in terms of mechanical design and thermal properties, as well as source of gas filling the cell. This paper presents data on differences between temperature values obtained during the realization of the triple point of argon in these cells. For determination of the temperature, a heat-pulse method was applied (Pavese and Beciet in Modern gas-based temperature and pressure measurement, Springer, New York, 2013). The comparisons were performed using three CSPRTs. The temperatures difference was determined in relation to a reference function \(W(T)=R(T_{90})/R(271.16\hbox {K})\) in order to avoid an impact of CSPRT resistance drift between measurements in the argon cells. Melting curves and uncertainty budgets of the measurements are given in the paper. A construction of measuring apparatus is also presented in this paper. 相似文献