Enhanced ferroelectric properties of Pb(Zr0.80Ti0.20)O3/PbO thin films prepared by radio frequency magnetron sputtering

The Pb(Zr_0.80Ti_0.20)O₃ (PZT) thin films with and without a PbO buffer layer were deposited on the Pt(1 1 1)/Ti/SiO₂/Si(1 0 0) substrates by radio frequency (rf) magnetron sputtering method. The PbO buffer layer improves the microstructure and electrical properties of the PZT thin films. High phase purity and good microstructure of the PZT thin films with a PbO buffer layer were obtained. The effect of the PbO buffer layer on the ferroelectric properties of the PZT thin films was also investigated. The PZT thin films with a PbO buffer layer possess better ferroelectric properties with higher remnant polarization (P_r = 25.6 μC/cm²), and lower coercive field (E_c = 60.5 kV/cm) than that of the films without a PbO buffer layer (P_r = 9.4 μC/cm², E_c = 101.3 kV/cm). Enhanced ferroelectric properties of the PZT thin films with a PbO buffer layer is attributed to high phase purity and good microstructure.     

Ferroelectric properties of Bi3.4Dy0.6Ti3O12 thin films crystallized in N2

Bi_3.4Dy_0.6Ti₃O₁₂ (BDT) ferroelectric thin films were deposited on Pt/Ti/SiO2/Si substrates by chemical solution deposition (CSD) and annealed in an N₂ environment after pre-annealing in air at 400 °C. The effect of crystallization temperature on the structural and electrical properties of the BDT films was studied. The BDT films annealed in N₂ in the temperature range of 600 °C to 750 °C were crystallized well and the average grain size increased with increasing crystallization temperature, while the remanent polarization of the films is not a monotonic function of the crystallization temperature. The BDT films crystallized at 650 °C have the largest remanent polarization value of 2P_r = 39.4 μC/cm², and a fatigue-free characteristic.     

Nanomechanical characterization of sputtered RuO2 thin film on silicon substrate for solid state electronic devices

This paper presents the study on characterizing the mechanical and interfacial properties of ruthenium dioxide (RuO₂) film on silicon substrate using nanoindentation tests. RuO₂ film is deposited by DC reactive magnetron sputtering; the structure and morphology of the film are characterized using X-ray diffraction and scanning electron microscopy, and elastic modulus and hardness are determined by nanoindentation with a standard Berkovich indenter and found to be 232.74 ± 22.03 GPa and 20.43 ± 2.37 GPa, respectively. In addition, the interfacial adhesion properties of RuO₂ film on Si substrate are studied. Spontaneous interfacial delamination is induced by indentations with wedge (90° and 120°) and conical indenter tips. The relationship between the indentation load-displacement (P-h) curves and the interfacial crack initiation and propagation are analyzed by combining FIB sectioning and SEM imaging. Through this analysis, the interface toughness of as-deposited RuO₂ film is found to be 0.046 ± 0.003 J/m² for 90° wedge indentation, 0.050 ± 0.004 J/m² for 120° wedge indentation, and 0.051 ± 0.003 J/m² for conical indentation.     

Effect of sputtering pressure and post-annealing on hydrophilicity of TiO2 thin films deposited by reactive magnetron sputtering

A series of TiO₂ thin films was deposited onto glass substrates without intentional heating or biasing by magnetron sputtering of a titanium target using Ar/O₂ reactive mixtures over a broad range of total sputtering pressures from 0.12 Pa to 2.24 Pa. Each of the film types was deposited by the threshold poisoned mode at a specific given oxygen flow rate monitored in-situ by optical emission spectroscopy. Both the sputtering pressure and thermal annealing are the key factors for the TiO₂ films to yield fast-response superhydrophilicity with a water contact angle of 5°. The mechanism of superhydrophilicity for the TiO₂ films deposited by high-pressure sputtering will be discussed based on empirical studies of X-ray diffractometry, high-resolution scanning microscopy and atomic force spectroscopy.     

Preparation of LaRuO3 films by microwave plasma-enhanced chemical vapor deposition

LaRuO₃ films were prepared by microwave plasma-enhanced chemical vapor deposition, and the effects of La/Ru supply ratio (R_La/Ru) and microwave power (P_M) on phase and microstructure were investigated. Amorphous films of carbonate or hydroxide of La were formed without microwave irradiation. At R_La/Ru < 1.0, RuO₂ films were obtained independent of P_M. At R_La/Ru = 1.6-3.2 and P_M = 0.6-1.2 kW (deposition temperatures of 973-998 K), LaRuO₃ single phase films were prepared. A product mixture of La₂RuO₅ and β-La₃RuO₇ was obtained at R_La/Ru = 4 and P_M = 1.2 kW, while a mixture of RuO₂ and La_4.87Ru₂O₁₂ was formed at R_La/Ru = 4.6 and P_M = 0.6 kW. LaRuO₃ single phase films showed metallic conduction with a high electrical conductivity of 1.6 × 10⁴ S m^− 1 at room temperature.     

Evaluation of ion conductivity of ZrO2 thin films prepared by reactive sputtering in O2, H2O, and H2O + H2O2 mixed gas

Hydrated ZrO₂ thin films were prepared by reactive sputtering in O₂, H₂O, and H₂O + H₂O₂ mixed gas, and the effect of the sputtering atmosphere on ion conductivity of the films was investigated. The results showed that the films deposited in O₂ gas exhibited poor ion conductivity; however, the ion conductivities of the films deposited in the other two kinds of atmosphere were similar and 300-500 times higher than that of the films deposited in O₂ gas. It was indicated that the higher ion conductivity of the films was caused by lower film density and higher water content.     

Single-step sputtered Cu2SnSe3 films using the targets composed of Cu2Se and SnSe2

Cu₂SnSe₃ thin films were prepared by single-step D.C. sputtering at 100-400 °C for 3 h using targets composed of Cu₂Se and SnSe₂ in three different ratios of 2/1 (target A), 1.8/1 (target B), and 1.6/1 (target C). The advantages of self-synthesized SnSe₂ instead of commercially available SnSe for depositing Cu₂SnSe₃ thin films were demonstrated. Effects of target composition and substrate temperature on the properties of Cu₂SnSe₃ thin films were investigated. Structure, surface morphology, composition, electrical and optical properties at different process conditions were measured. The 400 °C-sputtered films obtained from target B display with direct band gap of 0.76 eV, electrical resistivity of 0.12 Ω cm, absorption coefficient of 10⁴-10⁵ cm^− 1, carrier concentration of ∼ 1.8 × 10¹⁹ cm^− 3, and electrical mobility of 2.9 cm²/V s.     

Investigation of low resistance transparent MoO3/Ag/MoO3 multilayer and application as anode in organic solar cells

Depending on the resistivity and transmittance, transparent conductive oxides (TCO) are widely used in thin film optoelectronic devices. Thus doped In₂O₃ (ITO), ZnO, SnO₂ are commercially developed. However, the deposition process of these films need sputtering and/or heating cycle, which has negative effect on the performances of the organic devices due to the sputtering and heat damages. Therefore a thermally evaporable, low resistance, transparent electrode, deposited onto substrates room temperature, has to be developed to overcome these difficulties. For these reasons combination of dielectric materials and metal multilayer has been proposed to achieve high transparent conductive oxides. In this work the different structures probed were: MoO₃ (45 nm)/Ag (x nm)/MoO₃ (37.5 nm), with x = 5-15 nm. The measure of the electrical conductivity of the structures shows that there is a threshold value of the silver thickness: below 10 nm the films are semiconductor, from 10 nm and above the films are conductor. However, the transmittance of the structures decreases with the silver thickness, therefore the optimum Ag thickness is 10 nm. A structure MoO₃ (45 nm)/Ag (10 nm)/MoO₃ (37.5 nm) resulted with a resistivity of 8 × 10^− 5 Ω cm and a transmittance, at around 600 nm, of 80%. Such multilayer structure can be used as anode in organic solar cells according to the device anode/CuPc/C₆₀/Alq₃/Al. We have already shown that when the anode of the cells is an ITO film the introduction of a thin (3 nm) MoO₃ layer at the interface anode (ITO)/organic electron donor (CuPc) allows reducing the energy barrier due to the difference between the work function of ITO and the highest occupied molecular orbital of CuPc [1]. This property has been used in the present work to achieve a high hole transfer efficiency between the CuPc and the anode. For comparison MoO₃/Ag/MoO₃/CuPc/C₆₀/Alq₃/Al and ITO/MoO₃/CuPc/C₆₀/Alq3/Al solar cells have been deposited in the same run. These devices exhibit efficiency of the same order of magnitude.     

Large electrocaloric effect of highly (100)-oriented 0.68PbMg1/3Nb2/3O3-0.32PbTiO3 thin films with a Pb(Zr0.3Ti0.7)O3/PbOx buffer layer

0.68PbMg_1/3Nb_2/3O₃-0.32PbTiO₃ (PMN-PT) thin films with a lead zirconate titanate Pb(Zr_0.3Ti_0.7)O₃ (PZT)/PbO_x buffer layer were deposited on Pt/TiO₂/SiO₂/Si substrates by radio frequency magnetron sputtering technique, and pure perovskite crystalline phase with highly (100)-preferred orientation was formed in the ferroelectric films. We found that the highly (100)-oriented thin films possess not only excellent dielectric and ferroelectric properties but also a large electrocaloric effect (13.4 K at 15 V, i.e., 0.89 K/V) which is attributed to the large electric field-induced polarization and entropy change during the ferroelectric-paraelectric phase transition. The experimental results indicate that the use of PZT/PbO_x buffer layer can induce the crystal orientation and phase purity of the PMN-PT thin films, and consequently enhance their electrical properties.     

Tl2Ba2CaCu2O8 thin films on 2 in. LaAlO3(0 0 1) substrates

High quality Tl₂Ba₂CaCu₂O₈ (Tl-2212) superconducting thin films are prepared on both sides of 2 in. LaAlO₃(0 0 1) substrates by off-axis magnetron sputtering and post-annealing process. XRD measurements show that these films possess pure Tl-2212 phase with C-axis perpendicular to the substrate surface. The thickness unhomogeneity of the whole film on the 2 in. wafer is less than 5%. The superconducting transition temperatures T_cs of the films are around 105 K. At zero applied magnetic field, the critical current densities J_cs of the films on both sides of the wafer were measured to be above 2 × 10⁶ A/cm² at 77 K. The microwave surface resistance R_s of film was as low as 350 μΩ at 10 GHz and 77 K. In order to test the suitability of Tl-2212 thin films for passive microwave devices, 3-pole bandpass filters have been fabricated from double-sided Tl-2212 films on LaAlO₃ substrates.     

Ion conducting properties of hydrogen-containing Ta2O5 thin films prepared by reactive sputtering

Hydrogen-containing Ta₂O₅ (Ta₂O₅:H) thin films are considered to be a candidate for a proton-conducting solid-oxide electrolyte. In this study, Ta₂O₅:H thin films were prepared by reactively sputtering a Ta metal target in an O₂ + H₂O mixed gas. The effects of sputtering power and post-deposition heat treatment on the ion conducting properties of the Ta₂O₅:H thin films were studied. The ionic conductivity of the films was improved by decreasing the RF power and a maximum conductivity of 2 × 10⁻⁹ S/cm was obtained at an RF power of 20 W. The ionic conductivity decreased by heat-treatment in air, and no ion-conduction was observed after treatment at 300 °C due to the decrease in hydrogen content in the films.     

Scaling behavior and structure transition of ZrO2 films deposited by RF magnetron sputtering

ZrO₂ thin films were deposited onto Si wafers and glass slides by reactive rf magnetron sputtering with varying conditions of substrate temperature (T_s). Structural analysis was carried out using high-resolution transmission electron microscopy (HRTEM) and atomic force microscopy (AFM). The scaling behavior of the AFM topographical profiles was analyzed using one-dimensional power spectral density method (1DPSD). Morphological and structural evolution of ZrO₂ films have been studied in relation to T_s. With substrate temperatures ranging from RT to 550 °C, the structural transition of the films is a-ZrO₂ (below 250 °C) → m-ZrO₂ with a little a-ZrO₂ (450 °C) → m-ZrO₂ with a little t-ZrO₂ (550 °C). The roughness exponent α is 1.53 ± 0.02, 1.04 ± 0.01, 1.06 ± 0.05, 1.20 ± 0.03 for ZrO₂ thin films deposited at RT, 250 °C, 450 °C, and 550 °C, respectively. Quantitative surface characterization by spatially resolved 1DPSD analyses identified three different growth mechanisms of surface morphology for ZrO₂ thin films deposited at RT, 250∼450 °C and 550 °C. The evolution and interactions of surface roughness and microstructure are discussed in terms of surface diffusion, grain growth, and flux shadowing mechanisms.     

Reactive magnetron sputtering from a composite target for large area BaPbO3 thin film electrode

Radio frequency reactive magnetron sputtering from a composite target made of PbO pellets uniformly positioned on a metallic Ba disc has been utilized for BaPbO₃ electrode deposition on 150 mm Si wafers. The reactive sputtering process has been analyzed in relation to sputtering parameters for composite targets with different percentage of PbO coverage. The process optimization method for in situ crystallized BaPbO₃ thin film fabrication has been emphasized. The growth of BaPbO₃ films has been discussed from the viewpoint of the BaO-PbO phase diagram and thermodynamics of Ba_n + 1Pb_nO_3n + 1 (n = 1, 2, ∞) phase formation. The microstructure analysis of the deposited films has been performed with atomic force microscopy and wide-angle X-ray diffraction (XRD) techniques. The grazing angle XRD measurements reveal the formation of a Ba₂PbO₄ phase in the film fabricated at 450 °C. The Ba₂PbO₄ phase content decreases with decreasing substrate temperature. The BaPbO₃ film deposited at a substrate temperature of 430 °C on naturally oxidized (001) Si wafers shows an electrical resistivity of 1.13 mΩ·cm. The BaPbO₃ films deposited on SiO₂ (native oxide)/Si wafer do not exhibit a preferred orientation whereas use of (111) Pt/SiO₂/Si substrate results in highly (111)-oriented films.     

Dielectric properties of DC reactive magnetron sputtered Al2O3 thin films

Alumina (Al₂O₃) thin films were sputter deposited over well-cleaned glass and Si < 100 > substrates by DC reactive magnetron sputtering under various oxygen gas pressures and sputtering powers. The composition of the films was analyzed by X-ray photoelectron spectroscopy and an optimal O/Al atomic ratio of 1.59 was obtained at a reactive gas pressure of 0.03 Pa and sputtering power of 70 W. X-ray diffraction results revealed that the films were amorphous until 550 °C. The surface morphology of the films was studied using scanning electron microscopy and the as-deposited films were found to be smooth. The topography of the as-deposited and annealed films was analyzed by atomic force microscopy and a progressive increase in the rms roughness of the films from 3.2 nm to 4.53 nm was also observed with increase in the annealing temperature. Al-Al₂O₃-Al thin film capacitors were then fabricated on glass substrates to study the effect of temperature and frequency on the dielectric property of the films. Temperature coefficient of capacitance, AC conductivity and activation energy were determined and the results are discussed.     

Optical characterization of Cu2ZnSnSe4 grown by thermal co-evaporation

Cu₂ZnSnSe₄ thin films with different substrate temperature and Cu flux were grown by thermal co-evaporation. Raman scattering, photoluminescence, and contactless electroreflectance (ER) measurements were performed. The Raman spectra of Cu₂ZnSnSe₄ show two main peaks at 170 and 192 cm^− 1. The photoluminescence spectrum shows a peak below 1.0 eV. Franz-Keldysh oscillations (FKOs) were observed in the ER spectra. From the analysis of the FKOs, the bandgap energy of Cu₂ZnSnSe₄ thin films is estimated to be 1.07 eV at 90 K and 0.99 eV at room temperature. We conclude that the bandgap energy of Cu₂ZnSnSe₄ thin films is around 1.0 eV.     

Nanocomposite thin films of Ga5Sb10Ge25Se60 chalcogenide glass for optical limiting applications

We report a low-cost, scalable method to fabricate optical grade composite thin films for nonlinear optical applications. The transmission and reflection spectra of prepared Ga₅Sb₁₀Ge₂₅Se₆₀/PVA composite films were investigated. Optical band gap of the thin films were calculated using Tauc’s extrapolation method. The band gap of the nanocomposite thin films were found to be tunable depending on the grain size of the films. Nonlinear optical characterization of samples were studied by the Z-scan technique using an Nd:YAG laser (532 nm, 7 ns, 10 Hz). Sequential Z-scan traces were made in four regimes of intensity for films with three different grain sizes. The Z-scan spectra reveal a strong nonlinear absorption depending on the grain size of the films suggesting that the new materials are promising candidates for the development of nonlinear optical devices and are extremely perspective as optical limiters of intense short pulse radiation.     

Optical properties and DC electrical conductivity of Ge28−xSe72Sbx thin films

Thin films of Ge_28−xSe₇₂Sb_x (x=0, 8, 16, 24 at%) with thickness of 200 nm are prepared by thermal evaporation onto glass substrates under vacuum of 5.3×10⁻⁵ mbar. Optical reflectance and transmittance of these films are measured at room temperature in the light wavelength region from 200 to 1100 nm. The estimated optical energy gap, E_g, is found to decrease from 2 eV (0 at% Sb) to 1.5 eV (24 at% Sb), whereas the band tail width, E_e, increases from 0.062 to 0.077 eV, respectively. The refractive index, n, and extinction coefficient, κ, are determined as functions of wavelength. The DC electrical conductivity, σ, of films is measured as a function of temperature in the range from 300 to 360 K. The extracted value of activation energy, ΔE, is found to decrease from 0.95 eV (0 at% Sb) to 0.74 eV (24 at% Sb). Optical and electrical behavior of films can be explained in terms of cohesive energy (CE) and Se-Se defect bonds.     

Precursor chemistry for the solution deposition of epitaxial La0.66Sr0.33MnO3 (LSMO) thin films

A new chemical solution deposition method for the epitaxial growth of La_0.66Sr_0.33MnO₃ (LSMO) thin films from metal acetates, acetylacetonates and propionic acid is presented. Using this method, epitaxial LSMO thin films were grown on (001) SrTiO3 (STO) single crystalline substrates in the temperature range from 800 °C to 1100 °C, both in air and in oxygen atmosphere. The LSMO thin films exhibit good structural and electrical properties. The FWHM of the ω-scan for the (002) peak has a mean value of 0.06°. The Curie temperature of the LSMO thin films is about 320 K and 350 K for the annealed in oxygen and air, respectively.     

Correlation between strain and the metal-insulator transition in epitaxial V2O3 thin films grown by Molecular Beam Epitaxy

We report on the deposition of high quality epitaxial V₂O₃ thin films on (0001) oriented Al₂O₃ substrates with Molecular Beam Epitaxy. Growth of smooth V₂O₃ films with root mean square roughness values down to 1 Å exhibiting both bulk-like and non bulk-like electrical properties has already been reported in a previous contribution. In this work, the lattice parameters and strain state of deposited films are extracted from both out-of-plane and grazing incidence in-plane X-ray diffraction measurements. Resistivity measurements are performed as a function of temperature using the four-point probe method. We observe a correlation between the in-plane tensile strain and the electrical properties, in particular the room-temperature resistivity. We also compare the electrical data of our V₂O₃ thin films with the features of the V₂O₃ bulk phase diagram.     

Microstructure and thermoelectric properties of Sn-doped Bi2Te2.7Se0.3 thin films deposited by flash evaporation method

(Bi_1 − xSn_x)₂Te_2.7Se_0.3 thermoelectric thin films with thickness of 800 nm have been deposited on glass substrates by flash evaporation method at 473 K. The structures, morphology of the thin films were analyzed by X-ray diffraction and field emission scanning electron microscopy respectively. Effects of Sn-doping concentration on thermoelectric properties of the annealed thin films were investigated by room-temperature measurement of Seebeck coefficient and electrical resistivity. The thermoelectric power factor was enhanced to 12.8 μW/cmK² (x = 0.003). From x = 0.004 to 0.01 Sn doping concentration, the Seebeck coefficients are positive and show p-type conduction. The Seebeck coefficient and electrical resistivity gradually decrease with increasing Sn doping concentration.